• 마이크로전자및패키징학회지
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• 제10권3호
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• pp.67-71
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• 2003

실리콘 주괴(ingot)에서 실리콘 웨이퍼를 제조할 때 사용되는 슬러리는 SiC 연마재와 절삭유를 포함한다. 실리콘 웨이퍼 제조 시 생긴 폐슬러지에서 SiC 연마재와 절삭유는 분리되어 재활용된다. 본 연구는 폐슬러지 Si 분말에 C분말을 혼합하여 SiC를 합성하는 것에 관한 것이다. 다양한 크기의 SiC 분말과 휘스커가 제조되었으며 기존의 휘스커의 크기보다 작은 나노미터 크기의 휘스커도 발생하였다. 일반적으로 휘스커는 금속 불순물을 첨가하여 제조되는데, 본 연구에서 나노미터 크기의 휘스커 발생은 폐슬러지에 첨가되어있는 미세한 크기의 금속불순물의 영향으로 판단된다.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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• pp.1091-1092
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• 2006

Silicon nitride - silicon carbide composite was developed by using an abrasive SiC powders as a raw material. The composites were prepared by mixing abrasive SiC powder with silicon, pressing and sintering at $1400^{\circ}C$ under nitrogen atmosphere in atmosphere controlled vacuum furnace. The proportion of silicon in the initial mixtures varied from 20 to 50 wt%. After sintering, crystalline phases and microstructure were characterized. All composites consisted of ${\alpha}-Si_3N_4$ and ${\beta}-Si_3N_4$ as the bonding phases in SiC matrix. Their physical and mechanical properties were also determined. It was found that the density of the obtained composites increased with an increase in the $Si_3N_4$ content formed in the reaction.

• 동굴
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• 제79호
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• pp.77-81
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• 2007

In this paper deals with behavior of the magnetic abrasive using Sr-Ferrite on polishing charateristiccs in a internal finishing of staninless steel pipe a tying magnetic abrasive polishing. The magnetic polishing is the useful method to finish some machinery fabrications by using magnetic power. This method is one of the precision techniques and has in aim for clean technology in the transportation of the pure gas in the clean pipes. The magnetic abrasive polishing method is not so common in the field of machine that it is not known to widely. There are rarely researcher in this field because of non-effectiveness of magnetic abrasive. Therefore, in this paper we deals with the development of the magnetic abrasive with the use of Sr-Ferrite. In this development, abrasive grain SiC has been made by using the resin bond fabricated at low temperature. And magnetic abrasive powder was fabricated from the Sr-Ferrite which was crushed into 200 mesh. The XRD analysis result shows that only SiC abrasive and Sr-Ferrite crystal peaks were detected, explaining that resin bond was not any more to contribute chemical reaction. From MACRO analysis, we found that SiC abrasive and Sr-Ferrite were strongly bonding with each other.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.361-362
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• 2008

• 한국세라믹학회지
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• 제40권2호
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• pp.167-171
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• 2003

기계적 방법으로 합성된 CeO$_2$분말을 연마입자로 하여 STI용 CMP 슬러리를 제조하였다. 연마입자는 정전기적 방법과 입체적 방법으로 수계에서 안정화시킬 수 있었으며, 장기 안정성을 위해서는 입체적 방법에 의한 안정화가 유효하였다. 50$0^{\circ}C$와 $700^{\circ}C$에서 합성된 CeO$_2$를 이용하여 CMP 슬러리를 제조하고, SiO$_2$와 Si$_3$N$_4$가 블랭킷 형태로 증착된 웨이퍼를 연마한 결과 연마능률과 선택비는 연마입자의 합성조건과 분산 안정성, 슬러리의 pH 등에 의해 영향을 받았다.

• Tribology and Lubricants
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• 제39권2호
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• pp.72-75
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• 2023

Silicon carbide (SiC) is used as a substrate material for power semiconductors; however, SiC chemical mechanical polishing (CMP) requires considerable time owing to its chemical stability and high hardness. Therefore, researchers are attempting to increase the material removal rate (MRR) of SiC CMP using various methods. Mixed-abrasive CMP (MAS CMP) is one method of increasing the material removal efficiency of CMP by mixing two or more particles. The aim of this research is to study the mathematical modeling of the MRR of MAS CMP of SiC with SiO₂ and TiO₂ particles. With a total particle concentration of 32 wt, using 80-nm SiO₂ particles and 25-nm TiO₂ particles maximizes the MRR at 8 wt of the TiO₂ particle concentration. In the case of 5 nm TiO₂ particles, the MRR tends to increase with an increase in TiO₂ concentration. In the case of particle size 10-25 nm TiO₂, as the particle concentration increases, the MRR increases to a certain level and then decreases again. TiO₂ particles of 25 nm or more continuously decreased MRR as the particle concentration increased. In the model proposed in this study, the MRR of MAS CMP of SiC increases linearly with changes in pressure and relative speed, which shows the same result as the Preston's equation. These results can contribute to the future design of MAS; however, the model needs to be verified and improved in future experiments.

• 한국해양공학회지
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• 제22권6호
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• pp.35-40
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• 2008

The effect of counterpart roughness on abrasive wear characteristics of side plate materials of FRP ship, which were composed of glass fiber and unsaturated polyester resin composites, were investigated at ambient temperature by pin-an-disc friction test. The friction coefficient, wear rate and cumulative wear volume of these materials against SiC abrasive paper were determined experimentally. The wear rate of these materials decreased rapidly with sliding distance and then maintained a constant value. It was increased as counterpart roughness was rougher in a wear test. The cumulative wear volume tended to increase nonlinearly with sliding distance and depended on applied load and sliding speed for these composites. It could be verified by SEM photograph of fracture surface that major failure mechanisms were overlapping layers, microcutting, deformation of resin, delamination, and cracking.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.148-153
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• 2007

The effect of silicon carbide (SiC) and graphite fillers incorporation on the abrasive wear behaviour of glass-vinyl ester (G-V) composites have been investigated. The three-body abrasive wear behaviour was assessed by rubber wheel abrasion tests (RWAT). The worn surfaces were examined using scanning electron microscopy (SEM). The addition of SiC and graphite fillers in G-V composite improves the abrasion resistance under different loads/abrading distances. The SEM studies indicate the reasons for failure of composites and influencing parameters.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2001년도 추계 학술발표강연 및 논문개요집
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• pp.133-133
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• 2001

• 대한기계학회논문집
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• 제17권10호
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• pp.2498-2508
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• 1993

$Al/SiC/Al_{2}O_{3}$ hybrid composites are fabricated by squeeze infiltration method. From the misconstructive of $Al/SiC/Al_{2}O_{3}$ hybrid composites fabricated by squeeze infiltration method, uniform distribution of reinforcements and good bondings are found. Hardness value of $Al/SiC/Al_{2}O_{3}$ hybrid composites increases linearly with the volume fraction of reinforcement because SiC whisker and $Al_{2}$O$_{3}$ fiber have an outstanding hardness. Optimal aging conditions are obtained by examining the hardness of $Al/SiC/Al_{2}O_{3}$ hybrid composites with different aging time. Tensile properties such as Young's modulus and ultimate tensile strength are improved up to 30% and 40% by the addition of reinforcements, respectively. Failure mode of $Al/SiC/Al_{2}O_{3}$ hybrid composites is ductile on microstructural level. Through the abrasive wear test and wear surface analysis, wear behaviour and mechanism of 6061 aluminum and $Al/SiC/Al_{2}O_{3}$ hybrid composites are characterized under various testing conditions. The addition of SiC whisker to $Al/SiC/Al_{2}O_{3}$ composites gives rise to improvement of the wear resistance. The wear resistance of $Al/SiC/Al_{2}O_{3}$ hybrid composites is superior to that of Al/SiC composites. The wear mechanism of aluminum alloy is mainly abrasive wear at low speed range and adhesive and melt wear at high speed range. In contrast, that of $Al/SiC/Al_{2}O_{3}$ hybrid composites is abrasive wear at all speed range, but severe wear when counter material is stainless steel. As the testing temperature increases, wear loss of aluminum alloy decreases because the matrix is getting more ductile, but that of $Al/SiC/Al_{2}O_{3}$ hybrid composites is hardly varied. Oil lubricant is more effective to reduce the wear loss of aluminum alloy and $Al/SiC/Al_{2}O_{3}$ hybrid composites at high speed range.