• Journal of the Microelectronics and Packaging Society
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• v.10 no.3
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• pp.67-71
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• 2003

Sawing silicon ingot with abrasive slurry generates sludge that includes abrasive powders, cutting oil, and silicon powders. The abrasive powders and cutting oil are being separated and reused. Mixing the remained stodged silicon powders with carbon powders and subsequent heat-treatment are conducted to produce silicon carbide. The size of SiC whiskers and powders was smaller than the conventionally grown silicon carbide whiskers that were synthesized by adding micron-size metal impurities. Impurity related mechanism is attributed to the formation of the silicon carbide whiskers, as metal impurities are contained in the stodged silicon powders.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09b
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• pp.1091-1092
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• 2006

Silicon nitride - silicon carbide composite was developed by using an abrasive SiC powders as a raw material. The composites were prepared by mixing abrasive SiC powder with silicon, pressing and sintering at $1400^{\circ}C$ under nitrogen atmosphere in atmosphere controlled vacuum furnace. The proportion of silicon in the initial mixtures varied from 20 to 50 wt%. After sintering, crystalline phases and microstructure were characterized. All composites consisted of ${\alpha}-Si_3N_4$ and ${\beta}-Si_3N_4$ as the bonding phases in SiC matrix. Their physical and mechanical properties were also determined. It was found that the density of the obtained composites increased with an increase in the $Si_3N_4$ content formed in the reaction.

• Journal of the Speleological Society of Korea
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• no.79
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• pp.77-81
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• 2007

In this paper deals with behavior of the magnetic abrasive using Sr-Ferrite on polishing charateristiccs in a internal finishing of staninless steel pipe a tying magnetic abrasive polishing. The magnetic polishing is the useful method to finish some machinery fabrications by using magnetic power. This method is one of the precision techniques and has in aim for clean technology in the transportation of the pure gas in the clean pipes. The magnetic abrasive polishing method is not so common in the field of machine that it is not known to widely. There are rarely researcher in this field because of non-effectiveness of magnetic abrasive. Therefore, in this paper we deals with the development of the magnetic abrasive with the use of Sr-Ferrite. In this development, abrasive grain SiC has been made by using the resin bond fabricated at low temperature. And magnetic abrasive powder was fabricated from the Sr-Ferrite which was crushed into 200 mesh. The XRD analysis result shows that only SiC abrasive and Sr-Ferrite crystal peaks were detected, explaining that resin bond was not any more to contribute chemical reaction. From MACRO analysis, we found that SiC abrasive and Sr-Ferrite were strongly bonding with each other.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.361-362
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• 2008

• Journal of the Korean Ceramic Society
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• v.40 no.2
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• pp.167-171
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• 2003

CMP(Chemical Mechanical Planarization) slurry for STI process is made by mechanically synthesized$CeO_2$as abrasive. The abrasive can be stabilized by electrostatic or steric stabilization in aqueous slurry and steric stabilization is more effective for long-term stability. Blanket-type$SiO_2$and $Si_3N_4$ wafers are polished with CMP slurry containing$CeO_2$synthesized in 50$0^{\circ}C$ or $700^{\circ}C$. Removal rate and surface uniformity of$SiO_2$and$Si_3N_4$wafer and selectivity are influenced by synthetic condition of abrasive, suspension stability and pH of slurries.

• Tribology and Lubricants
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• v.39 no.2
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• pp.72-75
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• 2023

Silicon carbide (SiC) is used as a substrate material for power semiconductors; however, SiC chemical mechanical polishing (CMP) requires considerable time owing to its chemical stability and high hardness. Therefore, researchers are attempting to increase the material removal rate (MRR) of SiC CMP using various methods. Mixed-abrasive CMP (MAS CMP) is one method of increasing the material removal efficiency of CMP by mixing two or more particles. The aim of this research is to study the mathematical modeling of the MRR of MAS CMP of SiC with SiO₂ and TiO₂ particles. With a total particle concentration of 32 wt, using 80-nm SiO₂ particles and 25-nm TiO₂ particles maximizes the MRR at 8 wt of the TiO₂ particle concentration. In the case of 5 nm TiO₂ particles, the MRR tends to increase with an increase in TiO₂ concentration. In the case of particle size 10-25 nm TiO₂, as the particle concentration increases, the MRR increases to a certain level and then decreases again. TiO₂ particles of 25 nm or more continuously decreased MRR as the particle concentration increased. In the model proposed in this study, the MRR of MAS CMP of SiC increases linearly with changes in pressure and relative speed, which shows the same result as the Preston's equation. These results can contribute to the future design of MAS; however, the model needs to be verified and improved in future experiments.

• Journal of Ocean Engineering and Technology
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• v.22 no.6
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• pp.35-40
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• 2008

The effect of counterpart roughness on abrasive wear characteristics of side plate materials of FRP ship, which were composed of glass fiber and unsaturated polyester resin composites, were investigated at ambient temperature by pin-an-disc friction test. The friction coefficient, wear rate and cumulative wear volume of these materials against SiC abrasive paper were determined experimentally. The wear rate of these materials decreased rapidly with sliding distance and then maintained a constant value. It was increased as counterpart roughness was rougher in a wear test. The cumulative wear volume tended to increase nonlinearly with sliding distance and depended on applied load and sliding speed for these composites. It could be verified by SEM photograph of fracture surface that major failure mechanisms were overlapping layers, microcutting, deformation of resin, delamination, and cracking.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.148-153
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• 2007

The effect of silicon carbide (SiC) and graphite fillers incorporation on the abrasive wear behaviour of glass-vinyl ester (G-V) composites have been investigated. The three-body abrasive wear behaviour was assessed by rubber wheel abrasion tests (RWAT). The worn surfaces were examined using scanning electron microscopy (SEM). The addition of SiC and graphite fillers in G-V composite improves the abrasion resistance under different loads/abrading distances. The SEM studies indicate the reasons for failure of composites and influencing parameters.

• Proceedings of the Materials Research Society of Korea Conference
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• 2001.11a
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• pp.133-133
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• 2001

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.10
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• pp.2498-2508
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• 1993

$Al/SiC/Al_{2}O_{3}$ hybrid composites are fabricated by squeeze infiltration method. From the misconstructive of $Al/SiC/Al_{2}O_{3}$ hybrid composites fabricated by squeeze infiltration method, uniform distribution of reinforcements and good bondings are found. Hardness value of $Al/SiC/Al_{2}O_{3}$ hybrid composites increases linearly with the volume fraction of reinforcement because SiC whisker and $Al_{2}$O$_{3}$ fiber have an outstanding hardness. Optimal aging conditions are obtained by examining the hardness of $Al/SiC/Al_{2}O_{3}$ hybrid composites with different aging time. Tensile properties such as Young's modulus and ultimate tensile strength are improved up to 30% and 40% by the addition of reinforcements, respectively. Failure mode of $Al/SiC/Al_{2}O_{3}$ hybrid composites is ductile on microstructural level. Through the abrasive wear test and wear surface analysis, wear behaviour and mechanism of 6061 aluminum and $Al/SiC/Al_{2}O_{3}$ hybrid composites are characterized under various testing conditions. The addition of SiC whisker to $Al/SiC/Al_{2}O_{3}$ composites gives rise to improvement of the wear resistance. The wear resistance of $Al/SiC/Al_{2}O_{3}$ hybrid composites is superior to that of Al/SiC composites. The wear mechanism of aluminum alloy is mainly abrasive wear at low speed range and adhesive and melt wear at high speed range. In contrast, that of $Al/SiC/Al_{2}O_{3}$ hybrid composites is abrasive wear at all speed range, but severe wear when counter material is stainless steel. As the testing temperature increases, wear loss of aluminum alloy decreases because the matrix is getting more ductile, but that of $Al/SiC/Al_{2}O_{3}$ hybrid composites is hardly varied. Oil lubricant is more effective to reduce the wear loss of aluminum alloy and $Al/SiC/Al_{2}O_{3}$ hybrid composites at high speed range.