• Journal of the Korean Society for Precision Engineering
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• v.29 no.8
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• pp.863-872
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• 2012

The squareness measurement of driving axes of a machine tool is very important to evaluate the performance of the machine. Laser interferometer measurement system is one of the most reliable equipment to measure the squareness. However, squareness measurement using laser system with an optical square result in restriction of straightness optics setup and Abbe's offset. This offset combines with angular errors during the motion of an axis to cause Abbe's error. In addition, the difficulty in optical square setup causes restriction of other optics and limitation of measurable range. In this paper, mathematical approaches are presented to eliminate the Abbe's error and to estimate squareness for full range by using the best fit of straightness data measured without an optical square. Experiments for squareness measurement of 3 axis machine tool were conducted and the proposed techniques were used for squareness evaluation with elimination of Abbe's error and squareness estimation for the full travel range.

• Journal of the Korean Society for Precision Engineering
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• v.34 no.1
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• pp.53-58
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• 2017

A fine stage is developed for the 3-DOF error compensation of a linear axis in order to improve the positioning accuracy. This stage is designed as a planar parallel mechanism, and the joints are based on a flexure hinge to achieve ultra-precise positioning. Also, the effect of Abbe's offsets between the measuring and driving coordinate systems is minimized to ensure an exact error compensation. The mode shapes of the designed stage are analyzed to verify the desired 3-DOF motions, and the workspace and displacement of a piezoelectric actuator (PZT) for compensation are analyzed using forward and inverse kinematics. The 3-DOF error of a linear axis is measured and compensated by using the developed fine stage. A marked improvement is observed compared to the results obtained without error compensation. The peak-to-valley (PV) values of the positional and rotational errors are reduced by 92.6% and 91.3%, respectively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.849-850
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.175-178
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• 2000

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into positioning characteristics. A one-dimensional aemstatic ceramic stage with ballscrew driven and laser scale feedback system is manufactured. aiming at investigating positioning characteristic of aerostatic stage, especially position error and repeatability, we analyze positioning behavior with other factors such as angular error, temperature. Experimemal results show that the aerostatic stage has a l0nm micro step response. Comparing experimental results and calculated abbe's error, we confirm that mean of position error is owing to angular error. And, also we confirm the temperature is dominant factor of repeatability in ten nm order.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.853-854
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• 2011

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.165-165
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• 2004

정밀한 3차원 좌표측정을 위한 삼차원좌표측정기(Coordinate Measuring Machine)는 광학 스케일이나 헤테로다인 레이저 간섭계를 이용해서 x, y, z 축의 좌표를 측정한다. 이 경우 측정 정밀도에 가장 큰 영향을 주는 요인은 아베 오차(Abbe's error)이다. 인공위성용 광학계를 비롯해서 첨단 산업부품에 이르기까지 현재의 3차원 좌표측정은, 높은 정밀도와 대영역 측정을 동시에 요구하는 추세이다. 대영역으로 갈수록 _아베 오차의 영향은 더 커지므로 보다 근본적인 해결책이 필요하다.(중략)

• Journal of the Korean Society for Precision Engineering
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• v.33 no.4
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• pp.295-301
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• 2016

The out-of-squareness is one of the error sources that affect the positioning accuracy of machine tools and coordinate measuring machines. Laser interferometer is widely used to measure the position and angular errors, and can measure the squareness using an optical square. However, the squareness measurement using the laser interferometer is difficult, as compared to other errors due to complicated optics setup and Abbe's error occurrence. The effect of out-of-squareness mainly appears at the face-diagonal of the movable plane. The diagonal displacements are also affected by the position dependent geometric errors. In this study, the squareness estimation techniques via diagonal displacement measurement using the laser interferometer without an optical square were proposed. For accurate estimation and measurement time reduction, the errors selected from proposed discriminant were measured. Discrepancy between the proposed technique with the laser interferometer (with an optical square) result was $0.6{\mu}rad$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.264-267
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• 2003

Pitch measurements of 150 nm pitch one-dimensional grating standards were carried out using an contact mode atomic force microscopy(C-AFM) with a high resolution three-axis laser interferometer. It was called as 'Nano-metrological AFM' In Nano-metrological AFM, Three laser interferometers were aligned well to the end of AFM tip. Laser sources of the three-axis laser interferometer in the nano-metrological AFM were calibrated with an I$_2$-stablilzed He-Ne laser at a wavelength of 633 nm. So, the Abbe error was minimized and the result of the pitch measurement using the nano-metrological AFM has a traceability to the length standard directly. The uncertainty in the pitch measurement was estimated in accordance with the Guide to the Expression of Uncertainty in Measurement(GUM). The Primary source of uncertainty in the pitch-measurements was derived from repeatability of pitch-measurement, and its value was approx 0.186 nm. Expanded uncertainty(k=2) of less than 5.23 nm was obtained. It is suggested that the metrological AFM is a useful tool for the nano-metrological standard calibration.