• 조명전기설비학회논문지
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• 제27권6호
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• pp.95-99
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• 2013

Furnace is currently the most important doping process using POCl3 in solar cell. However furnace need an expensive equipment cost and it has to purge a poisonous gas. Moreover, furnace typically difficult appling for selective emitters. In this study, we developed a new atmospheric pressure plasma source, in this procedure, we research the atmospheric pressure plasma doping that dopant is phosphoric acid($H_3PO_4$). Metal tube injected Ar gas was inputted 5 kV of a low frequency(scores of kHz) induced inverter, so plasma discharged at metal tube. We used the P type silicon wafer of solar cell. We regulated phosphoric acid($H_3PO_4$) concentration on 10% and plasma treatment time is 90 s, 150 s, we experiment that plasma current is 70 mA. We check the doping depth that 287 nm at 90 s and 621 nm at 150 s. We analysis and measurement the doping profile by using SIMS(Secondary Ion Mass Spectroscopy). We calculate and grasp the sheet resistance using conventional sheet resistance formula, so there are 240 Ohm/sq at 90 s and 212 Ohm/sq at 150 s. We analysis oxygen and nitrogen profile of concentration compared with furnace to check the doped defect of atmosphere.

• 한국응용과학기술학회지
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• 제40권1호
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• pp.71-80
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• 2023

실버 페이스트는 상대적으로 낮은 열처리로 공정이 가능하기 때문에 전자 소자 응용분야에서 유용한 전극 재료이다. 본 연구에서는 은 페이스트 전극에 대기압 플라즈마 제트를 이용하여 전극 표면을 처리 했다. 이 플라즈마 제트는 11.5 kHz 작동 주파수에서 5.5 ~ 6.5 kV의 고전압을 사용하여 아르곤 분위기에서 생성되었다. 플라즈마 제트는 대기압에서 수행함으로써 인쇄 공정에 더 유용할 수 있다. 플라즈마 처리시간, 인가된 전압, 가스유량에 따라 전극의 표면은 빠르게 친수성화 되었으며 접촉각의 변화가 관찰되었다. 또한, 대면적 샘플에서 플라즈마 처리 후 접촉각의 편차가 없었는데, 이는 기판의 크기에 관계없이 균일한 결과를 얻을 수 있었다는 것을 의미한다. 본 연구의 결과는 대면적 전자소자의 제조 및 향후 응용 분야에서 적층 구조를 형성하는데 매우 유용할 것으로 기대된다.

• 한국진공학회지
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• 제21권6호
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• pp.301-311
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• 2012

결정질 태양전지 등의 도핑 공정에 적용하기 위한 플라즈마 제트 장치의 기초 방전 특성을 조사한다. 대기압에서의 아르곤 플라즈마 제트와 대기 압력변화에 대한 대기 플라즈마 제트, 그리고 아르곤 분위기 압력 변화에 대한 플라즈마 제트의 전류-전압은 전형적인 정상 글로우 방전의 특성을 갖는다. 대기압 플라즈마 제트의 방전 전압은 약 2.5 kV의 높은 전압이 요구되며, 대기 및 아르곤 플라즈마 제트는 200 Torr 이하의 낮은 압력에 대한 방전 전압은 약 1 kV가 된다. 도핑용 실리콘 웨이퍼에 조사되는 단일 채널 플라즈마 제트의 전류는 인가전압의 조정에 의하여 수 10~50 mA의 고 전류를 용이하게 얻는다. 플라즈마 제트를 웨이퍼에 조사하는 경우에 웨이퍼의 온도 상승은 정상상태에서 약 $200^{\circ}C$가 된다. 실리콘 웨이퍼에 도핑 용재인 액상의 인산을 도포하여 플라즈마를 조사한 결과 얻어진 인 원자의 도핑 분포는 플라즈마 제트 도핑의 가능성을 보여준다.

• 농업과학연구
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• 제45권3호
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• pp.475-484
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• 2018

Nitrite is an essential additive for the manufacture of cured meat products. This study was conducted to investigate the curing effect of the plasma treated juice of red Perilla in meat batter. The nitrite content in the juice of red Perilla was increased by the indirect treatment of atmospheric pressure plasma, and the lyophilized powder of red Perilla juice contained 9,133 ppm of nitrite. A meat batter without a nitrite source was prepared as a negative control (NC), and the meat batters cured with sodium nitrite (PC), celery powder (CP), and the lyophilized powder of red Perilla juice treated with atmospheric pressure plasma (PTP) at 70 ppm level of nitrite were prepared. The PTP showed the highest pH and the lowest cooking loss among the treatments. There were no significant differences in the nitrosyl-hemochrome content in the cooked meat batters of the PC, CP and PTC. However, the PTP had a lower CIE $a^*$-value compared to the PC and CP. The malondialdehyde content in the cooked meat batters was significantly lower in the CP and PTP than in the NC while there was no significant difference between the NC and PC. Based on the results of this study, the plasma treated juice of red Perilla can be used as a new natural nitrite source for cured meat products.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1869-1873
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• 2008

In this work, to make it possible to generate glow discharge in atmospheric pressure condition with relatively high and wide electric field, micro channel reactor is proposed. Si DRIE and Cr deposition by Ebeam evaporation is used to make channel and bottom electrode layer. Upper electrode is made from ITO glass to visualize discharge within micro channel. Fabricated reactor is verified by generating uniform glow plasma with N2 / He gases each as working fluid. The range of gas electric field to generate glow plasma is from about 200 V/cm and upper limit is not observed in tested condition of up to 150 kV/cm. This data shows that micro channel plasma reactor is more versatile. Indirect estimation of electron temperature in this reactor can be inferred that the electron temperature within glow discharge in micro reactor lies $0{\sim}2eV$. This research demonstrates that the reactor is appropriate in application that needs to maintain low temperature condition during chemical process.

• Journal of Microbiology and Biotechnology
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• 제14권1호
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• pp.188-192
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• 2004

The main aim of this study was to investigate the sterilization effects of microwave-induced argon plasma at atmospheric pressure on paper materials contaminated with fungi. Plasma-treated filter papers showed no evidence to an unaided eye of burning or paper discoloration due to the plasma treatment. All fungi were perfectly sterilized in less than 1 sec, regardless of strains. These results indicate that this sterilization method for paper materials is easy to use, requires significantly less time than other traditional methods and different plasma sterilization methods, and is also nontoxic.

• Korean Chemical Engineering Research
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• 제49권6호
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• pp.835-839
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• 2011

토치형 상압 플라즈마 반응기를 통한 방전 및 플라즈마 flame에 대한 분석과 발생된 플라즈마 현상을 이용하여 E. coli에 대한 살균효과를 측정하였다. 상압 플라즈마 반응기를 통해 나오는 플라즈마 flame의 길이는 입력전압, 반응기의 유량 그리고 아르곤/산소 혼합기체에서의 산소비율에 영향을 크게 받았다. 플라즈마 flame에 의한 가열효과는 10분 조사 후에도 $43^{\circ}C$ 미만으로 저온처리가 가능했다. E. coli에 대한 살균처리에서 입력전압의 증가, 아르곤/산소 혼합기체에서의 산소비율 증가 그리고 플라즈마 flame에 대한 노출시간의 증가에 따라 전체적인 살균효과를 향상되었다. 플라즈마 처리 시에 오존농도가 높은 공정조건에서 플라즈마 flame의 직접적인 접촉시간을 증가시키면 살균효과를 극대화할 수 있다.

• Transactions on Electrical and Electronic Materials
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• 제9권2호
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• pp.79-83
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• 2008

The dampness by treating the surface with polyethylene terephthalate (PET) film was measured to grasp the plasma parameters and was observed the surface condition with an atomic force microscope (AFM) to find the causes of the dampness. Also, the vibrational and rotational temperatures in the plasma were calculated after identifying the radicals within the plasma by analyzing the emission spectral with an emission spectrum. The hydrophilic properties were enhanced, by treating the surface of the PET film with non-equilibrium atmospheric discharge plasma. When the rotational temperature was 0.22 to 0.31 eV within the plasma, surface modification control could be easily carried out to surface treatment of PET film on non-equilibrium atmospheric pressure plasma.

• 한국표면공학회지
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• 제42권5호
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• pp.208-215
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• 2009

We employed atmospheric plasma to reactively remove the lubricant sprayed onto such industrial electronic parts as LCD chassis during sheet-metal forming processes and investigated basically the effect of plasma parameters on cleansing the surfaces of zinc-electroplated steel plates (EGI). Specimen prepared with some controlled amount of lubricant sprayed on their surfaces beforehand were subjected to two different kinds of atmospheric plasma, one being generated by using air and the other generated by using nitrogen (99.9% purity). Locating the plasma beams at the height range between 3.5 and 13.5 mm from the surface of each specimen and radiating for 5 to 30 seconds resulted out that the cases with a position of 3.5 mm and a duration of 5 seconds or longer showed the surfaces completely cleansed without a trace of lubricant. Furthermore we found out that the plasma generated by using simple air depicted higher cleansing ability than the other one generated by using expensive nitrogen, interestingly useful very much for industrial purposes. On another aspect, we confirmed that the drilled or cut surfaces of Zn-plated steel substrate would not be oxidized even under the influence of plasma during its cleansing process. Therefore, we could probably conclude from this fore-survey that a dry process adopting atmospheric plasma for cleansing industrial parts might be determined to become successful in terms of commercialization, cautiously.

• KSBB Journal
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• 제19권5호
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• pp.399-405
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• 2004

A reticulated PU-g-PAAc foam was modified through the surface treatment of PU foam by one atmospheric pressure plasma. The synthesized PU-g-PAAc foam was prepared for the purpose of immobilizing microbial organisms. We also attempted different plasma treatment methods including simple plasma treatment, plasma induced grafting and plasma induced grafting followed by plasma re-treatment. The effect of grafting on equilibrium water content (EWC) of PU forms was examined by swelling measurements. Adhesion test was performed to investigate the effect of different plasma treatment methods on the improvement of microbial immobilization. Two foams modified by plasma induced grafting and plasma re-treatment after grafting showed 2.7 and 3.0 fold higher microbial immobilization than unmodified one, respectively. Meanwhile, simple plasma treatment showed a little enhancement. FT-IR analysis of each sample verified the contribution of surface functional groups on the enhancement of microbial immobilization. SEM observation confirmed microbial adherence.