• Journal of the Korean Society of Manufacturing Process Engineers
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• v.10 no.4
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• pp.102-108
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• 2011

LQG/LTR control scheme is applied to the two axes stage using piezoelectric actuator for tracking reference input and suppressing hysteresis effect in this paper. The plant is combined with an integrator to improve the tracking ability. LQG/LTR controller is designed by making desirable target filter loop remove all poles except for an integrator included in new design plant model and loop transfer recovery. Decoupler in the shape of FIR filter is added to remove the coupling effect between the two axes motion and so feedback control loop is designed independently for the each axis motion.