• Title/Summary/Keyword: AFM(Atomic force microscope

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AFM based Surface Verifications of Pulse Electrochemical Polishing for Various Frequency Conditions (주파수 변화에 따른 AFM 기반의 펄스 전기화학 폴리싱 표면특성 분석)

  • Kim, Young-Bin;Kim, Jong-Tye;Ahn, Dong-Gyu;Park, Jong-Rak;Jeong, Sang-Hwa;Park, Jeong-Woo
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.21 no.2
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    • pp.246-251
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    • 2012

  • Pulse electrochemical polishing process has been used to improve mechanical properties such as surface roughness and corrosion resistance on conductive metallic materials. In addition, pulse electrochemical polishing process with various frequency may produce a lustrous, smoother, deburred and cleaned surface on workpiece. The aim of this paper is to study surface characteristics of pulse electrochemical polishing for various frequency conditions using AFM to verify localized surface variation in nanometer scale.

  • https://doi.org/10.7735/ksmte.2012.21.2.246 인용 PDF KSCI

Nano Visual Servoing Loop Using SEM Image (전자현미경 영상을 이용한 나노 비주얼 서보잉)

  • Choi, Jin-Ho;Ahn, Sang-Jung;Park, Byong-Chon;Lyou, Joon
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.57 no.10
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    • pp.1876-1882
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    • 2008

  • Nano manipulator is used to manufacture Carbon NanoTube(CNT) tips. Using nano manipulator, operator attaches a CNT at the apex of Atomic Force Microscope(AFM) tip, which requires a mastery of mechanics and long manufacture time. Nano manipulator is installed inside a Scanning Electron Microscope(SEM) chamber to observe the operation. This paper presents a control scheme for horizontal axes of nano manipulator via processing SEM image. Edges of AFM tip and CNT are first detected, and the position information so obtained is fed to control horizontal axes of nano manipulator. That is, a visual servoing loop is realized to control the axes more precisely in nano scale.

  • PDF KSCI