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Electrical Properties of Molybdenum Metal Deposited by Plasma Enhanced - Atomic Layer Deposition of Variation Condition (다양한 조건의 플라즈마 원자층 증착법으로 증착된 Mo 금속의 전기적 특성)

  • Lim, Taewaen;Chang, Hyo Sik
    • Korean Journal of Materials Research
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    • v.29 no.11
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    • pp.715-719
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    • 2019
  • Molybdenum is a low-resistivity transition metal that can be applied to silicon devices using Si-metal electrode structures and thin film solar cell electrodes. We investigate the deposition of metal Mo thin film by plasma-enhanced atomic layer deposition (PE-ALD). $Mo(CO)_6$ and $H_2$ plasma are used as precursor. $H_2$ plasma is induced between ALD cycles for reduction of $Mo(CO)_6$ and Mo film is deposited on Si substrate at $300^{\circ}C$. Through variation of PE-ALD conditions such as precursor pulse time, plasma pulse time and plasma power, we find that these conditions result in low resistivity. The resistivity is affected by Mo pulse time. We can find the reason through analyzing XPS data according to Mo pulse time. The thickness uniformity is affected by plasma power. The lowest resistivity is $176{\mu}{\Omega}{\cdot}cm$ at $Mo(CO)_6$ pulse time 3s. The thickness uniformity of metal Mo thin film deposited by PE-ALD shows a value of less than 3% below the plasma power of 200 W.

Pulse forming's switching control adopted a Transcranial Magnetic Stimulation Biomedical engineering, Dongju College University (펄스포밍의 스위칭 제어기술을 적용한 경두개 자기자극장치)

  • Kim, Whi-Young
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.14 no.3
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    • pp.729-736
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    • 2010
  • In this study, a magnetic stimulation (MS) device with controllable pulse forming technology and pulse shape (MS) is described. The MS device uses an IGBT with appropriate snubbers to switch coil currents up to 6 kA, enabling pulse forming technology control from 5 s to over 100 s. The induced electric field pulses use 2% - 34% less energy and generate 57% - 67% less coil heating compared to matched conventional cosine pulses. MS is used to stimulate rhesus monkey motor cortex in vivo with pulse forming technology of 20 to 100 s, demonstrating the expected decrease of threshold pulse amplitude with increasing pulse forming technology. The technological solutions used in the MS prototype can expand functionality, and reduce power consumption and coil heating in MS, enhancing its research and therapeutic applications.

Analysis and Performance Improvement of Integrated E1 Pulse Generator for EMP Protection Performance Test (EMP 방호성능 시험용 통합형 E1 펄스 발생장치 분석 및 성능 개선)

  • Kim, Young-Jin;Kang, Ho-jae;Jeong, Young-Kyung;Youn, Dong-Gi;Park, Yong Bae
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.29 no.6
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    • pp.415-423
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    • 2018
  • We herein investigate the E1 pulse for evaluating the conducted performance of transmission lines connected to the electromagnetic pulse protection facilities against a conducted high-altitude electromagnetic pulse threat exposed to an external electromagnetic environment. The existing E1 pulse generator uses the Marx generator high-voltage step-up method; however, in this research, we used the Tesla transformer method to easily change the broadband output voltage(30 to 350 kV). We also analyzed the controller, power supply, high-voltage booster, and pulse-shaping device. The E1 pulse performance using the Tesla transformer was predicted through simulations and validated by measurements.

Design, Test and Evaluation on the PSD with Thermal Barrier Type for Subscale Dual Pulse Rocket Motor (격막형 PSD를 적용한 소형 추진기관 설계 및 시험평가)

  • Kim, Jinyong;Kwon, Taeha;Lee, Wonbok;Cho, Wonman;Lee, Bangeop;Yun, Namgyun;Rhee, Youngwoo
    • Journal of the Korean Society of Propulsion Engineers
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    • v.18 no.6
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    • pp.82-87
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    • 2014
  • Dual pulse rocket motor has a rocket motor with different pulse grains divided by a pulse separation device such as a fragile bulkhead or a thermal barrier type. It distributes thrust energy very effectively via pulse separation device to improve range and terminal velocity of a missile. This paper contains the thermal barrier design and experimental analysis through ground firing tests of small dual pulse motors. The results will be applied to the design, test and evaluation of the scale up dual pulse rocket motor.

Digital Low-Power High-Band UWB Pulse Generator in 130 nm CMOS Process (130 nm CMOS 공정을 이용한 UWB High-Band용 저전력 디지털 펄스 발생기)

  • Jung, Chang-Uk;Yoo, Hyun-Jin;Eo, Yun-Seong
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.23 no.7
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    • pp.784-790
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    • 2012
  • In this paper, an all-digital CMOS ultra-wideband(UWB) pulse generator for high band(6~10 GHz) frequency range is presented. The pulse generator is designed and implemented with extremely low power and low complexity. It is designed to meet the FCC spectral mask requirement by using Gaussian pulse shaping circuit and control the center frequency by using CMOS delay line with shunt capacitor. Measurement results show that the center frequency can be controlled from 4.5 GHz to 7.5 GHz and pulse width is 1.5 ns and pulse amplitude is 310 mV peak to peak at 10 MHz pulse repetition frequency(PRF). The circuit is implemented in 0.13 um CMOS process with a core area of only $182{\times}65um^2$ and dissipates the average power of 11.4 mW at an output buffer with 1.5-V supply voltage. However, the core consumes only 0.26 mW except for output buffer.

Development of 3.6 MW, 4 ${\mu}s$, 200 pps Pulse Modulator for a High power magnetron (고출력 마그네트론 구동용 3.6 MW, 4 ${\mu}s$, 200 pps 펄스모듈레이터 개발)

  • Son, Y.G.;Jang, S.D.;Oh, J.S.;Cho, M.H.;NamKang, W.;Lee, H.K.;Bae, Y.S.;Lee, K.T.;Son, B.H.
    • Proceedings of the KIEE Conference
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    • 2004.07c
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    • pp.1778-1780
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    • 2004
  • Microwave heating system of KSTAR consists of ECH and LHCD. ECH and LHCD offer the reliability of operation in the beginning of plasma formation and non-inductive current drive for long time steady state operation with maintaining MHD stability, respectively. LHCD demands 5 GHz of frequency and consists of c-band waveguide, 4-port circuitor, dry dummy load, dual directional coupler, E-bend, arc detector. Our system is a lineup type pulse modulator that has 45 kV of output pulse voltage, 90 A of pulse current, 4 us of pulse width. 1:4 step-up pulse transformer, 7 stages of PFN and thyratron tube (E2V, CX1191D) are used in this modulator. The purpose of this paper is to show the modulator design and experimental result.

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Investigation on correlation between pulse velocity and compressive strength of concrete using ANNs

  • Tang, Chao-Wei;Lin, Yiching;Kuo, Shih-Fang
    • Computers and Concrete
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    • v.4 no.6
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    • pp.477-497
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    • 2007
  • The ultrasonic pulse velocity method has been widely used to evaluate the quality of concrete and assess the structural integrity of concrete structures. But its use for predicting strength is still limited since there are many variables affecting the relationship between strength and pulse velocity of concrete. This study is focused on establishing a complicated correlation between known input data, such as pulse velocity and mixture proportions of concrete, and a certain output (compressive strength of concrete) using artificial neural networks (ANN). In addition, the results predicted by the developed multilayer perceptrons (MLP) networks are compared with those by conventional regression analysis. The result shows that the correlation between pulse velocity and compressive strength of concrete at various ages can be well established by using ANN and the accuracy of the estimates depends on the quality of the information used to train the network. Moreover, compared with the conventional approach, the proposed method gives a better prediction, both in terms of coefficients of determination and root-mean-square error.

Wave shape analysis of seismic records at borehole of TTRH02 and IWTH25 (KiK-net)

  • Kamagata, Shuichi
    • Earthquakes and Structures
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    • v.18 no.3
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    • pp.297-312
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    • 2020
  • The KiK-net by NIED is a vertical array measurement system. In the database of KiK-net, singular pulse waves were observed in the seismic record at the borehole of TTRH02 during the mainshock (the magnitude of Japan Meteorological Agency (MJ) 7.3, MW 6.8) and aftershock (Mj 4.2) of Tottori-ken Seibu earthquake in 2000. Singular pulse waves were also detected in the seismic records at the borehole of IWTH25 during the Iwate-Miyagi Nairiku earthquake in 2008 (MJ 7.2, MW 6.9). These pulse waves are investigated by using the wave shape analysis methods, e.g., the non-stationary Fourier spectra and the double integrated displacement profiles. Two types of vibration modes are discriminated as the occurrence mechanism of the singular pulse waves. One corresponds to the reversal points in the displacement profile with the amplitude from 10-4 m to 10-1 m, which is mainly related to the fault activity and the amplification pass including the mechanical amplification (collision) of the seismograph in the casing pipe. The other is the cyclic pulse waves in the interval of reversal points, which is estimated as the backlash of the seismograph itself with the amplitude from 10-5 m to 10-4 m.

Development of Evaluation Method of External Tendon Force by Using the Deriving Ultrasonic Pulse (유도초음파를 이용한 외부 강선의 긴장력 평가기법 개발)

  • Park, Seung-Bum;Hong, Sung-Su;Yoo, Sung-Won
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.11 no.6
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    • pp.181-192
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    • 2007
  • In domestic case, there are no results of corresponding researches for measuring external tendon force. The purpose of the present paper is therefore to measure external tendon force by using deriving ultrasonic method. For this purpose, we designed and manufactured wedges and test system, and measured ultrasonic pulse velocity and pulse amplitude. By using measured data, we tried to analyze the characteristics of tendon force, and to derive the relationship between tendon force and ultrasonic pulse velocity, finally to develop the technic of measuring system using ultrasonic pulse velocity. So tendon force-velocity relationship was proposed by equations, and those equations of which errors were 3.92~8.77% will be possible to adapt in-site.

A study on the pulse wave factor according to BMI and period of sterility on female (난임 여성의 체질량지수(BMI), 불임기간에 따른 맥파 연구)

  • Kim, Gyeong-Cheol;Kim, Yi-Soon
    • Korean Journal of Oriental Medicine
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    • v.18 no.2
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    • pp.139-149
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    • 2012
  • Objectives : This is the study to understand of the pulse wave factor according to BMI and period of sterility on female, and to confirm the relationship of pulse wave factor among left and right inch, bar and cubit. Methods : The Questions and measurement of the pulse wave were operated with subjects(76 sterile females using on public health center). The measurement of the pulse wave was operated in 6 part of left and right inch, bar and cubit. The pulse wave was prior measured in part of left bar (i.e. interior pulsation part of radial process styloides in left hand), and next was measured in part of left inch and bar. And the pulse wave was operated samely in part of right inch, bar and cubit. Results : The results were as follows. The pulse energy of 6 part of left and right inch, bar and cubit was showed statistical significance and decreased in order of left inch, right inch, left cubit, right cubit, left inch, right bar. The left and right inch and cubit were showed numerical value of normal range, but left and right bar were showed lower pulse eneregy than normal range. Also left and right cubit were showed lower than left and right inch, and higher than left and right bar. In BMI, The pulse energy of left and right inch, cubit and the average of right hand was not showed statistical significance in the range of low-weight, normal, over-weight and obesity. But in the left and right bar and the average of left hand, the pulse energy of over-weight and obesity group were showed significantly higher than low-weight group. And the pulse wave factor was divided the pattern of h1 showing high numerical value in inch (Ap, As, Aw) and the pattern of Wm showing high numerical value in bar and cubit (RAI, Ad) Conclusions : The low pulse energy of bar was significant observation on the setting of oriental medical diagnostic index on sterilitas. Also, in the numerical value pattern of diverse pulse wave factor, it was divided the pattern of high numerical value in inch and the pattern of high numerical value in bar and cubit. On this, we think that the studies need in the future.