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Study of Post-silicidation Annealing Effect on SOI Substrate (SOI 기판에서 Silicide의 후속 공정 열처리 영향에 대한 연구)

  • Lee, Won-Jae;Oh, Soon-Young;Kim, Yong-Jin;Zhang, Ying-Ying;Zhong, Zhun;Lee, Shi-Guang;Jung, Soon-Yen;Kim, Yeong-Cheol;Wang, Jin-Suk;Lee, Hi-Deok
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.3-4
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    • 2006
  • In this paper, a nickel silicide technology with post-silicidation annealing effect for thin film SOI devices is investigated in detail. Although lower resistivity Ni silicide can be easily obtained at low forming temperature, poor thermal stability and changing of characteristic are serious problems during the post silicidation annealing like ILD (Inter Layer Dielectric) deposition or metallization. So these effects are observed as deposited Ni thickness differently on As doped SOI (Si film 30nm). Especially, the sheet resistance of Ni thickness deposited 20nm was lower than 30nm before the post silicidation annealing. But after the post silicidation annealing, the sheet resistance was changed. Therefore, in thin film SOI MOSFETs or Ni-FUSI technology that the Si film is less than 50nm, it is important to decide the thickness of deposited Ni in order to avoid forming high resistivity silicide.

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Optical Properties Analysis of SiNx Double Layer Anti Reflection Coating by PECVD

  • Gong, Dae-Yeong;Park, Seung-Man;Yi, Jun-Sin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.149-149
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    • 2010
  • The double-layer antireflection (DLAR) coatings have significant advantages over single-layer antireflection (SLAR) coatings. This is because they will be able to cover a broad range of the solar spectrum which would enhance the overall performance of solar cells. Moreover films deposited at high frequency are expected to show excellent and UV-stable passivation in the refractive index that we adopted. In this work, we present a novel DLAR coating using SiNx:H thin films with refractive indices 1.9 and 2.3 as the top and bottom layers. This approach is cost effective when compared to earlier DLAR coatings with two different materials. SiNx:H films were deposited by Plasma enhanced chemical vapor deposition (PECVD) technique using $SiH_4$, $NH_3$ and $N_2$ gases with flow rates 20~80sccm, 200sccm and 85 sccm respectively. The RF power, plasma frequency and substrate temperature for the deposition were 300W, 13.56 MHz and $450^{\circ}C$, respectively. The optimum thickness and refractive indices values for DLAR coatings were estimated theoretically using Macleod simulation software as 82.24 nm for 1.9 and 68.58 nm for 2.3 respectively. Solar cells were fabricated with SLAR and DLAR coatings of SiNx:H films and compared the cell efficacy. SiNx:H> films deposited at a substrate temperature of $450^{\circ}C$ and that at 300 W power showed best effective minority carrier lifetime around $50.8\;{\mu}s$. Average reflectance values of SLAR coatings with refractive indices 1.9, 2.05 and 2.3 were 10.1%, 9.66% and 9.33% respectively. In contrast, optimized DLAR coating showed a reflectance value as low as 8.98% in the wavelength range 300nm - 1100nm.

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한국산 파파리반딧불이 (Hotaria papariensis Doi)의 생태학적 연구

  • 심하식
    • Proceedings of the Speleological Society Conference
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    • 2001.06a
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    • pp.3-29
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    • 2001
  • 파파리반딧불이(H papariensis)의 생태학적 특성을 규명하고자 서식처 환경, 개체군, 고도별 출현양상과 지역별 분포양상, 발광양상, 교미행동을 조사하였다. 춘천시 서면 지암리에서 H. papariensis 성충의 개체군 밀도를 1998년 5월부터 7월에 걸쳐 조사하였으며, 전체 채집 개체수는 703개체였다. 이중 수컷은 680개체, 암컷은 23개체를 채집하였다. 지암리에서 전체 출현기간은 50여 일로 추정되었다. 처음 출현한 날로부터 2주에서 3주 사이에 최대 정점을 나타내었으며, 이후 점진적으로 감소하는 출현양상을 나타내었다. 수컷 680개체중 47개체는 재 포획되었으며, 이로서 추정된 최대수명은 6일 이상, 평균수명은 3.26일로 나타났으며, 수컷과 암컷의 상대적인 성비는 27.5/l로 나타났다. 한국산 Hotaria속 반딧불이 2종의 고도별 출현 및 지역별 분포양상에 대하여 1999년 5월부터 7월까지 18개 지역을 선정하여 조사하였다. 전체 채집개체수는 1096개체였으며 이중 H. papariensis는 584개체, H unmunsana는 512개체였다 두 종은 제주도를 제외한 전 조사지역에서 공서 하고 있었으며 H. papariensis는 북쪽지역에 우세하게 분포하였고 H. unmunsana는 남쪽지역에 우세하게 분포하는 양상을 나타내었다. 성충 반딧불이의 최고 출현성기는 고도가 높아질수록 늦어지는 경향을 나타내었다. 고도별로 200m 이하 지역에서는 6월 초순에서 중순, 200-400m 지역에서는 6월 중순에서 말경, 400-600m 지역에서는 6월말 경부터 7월 초순, 600-800m 지역에서는 7월 초순부터 중순에 각각 최고 성기를 나타내었다. H. papariensis의 암컷과 수컷의 발광양상을 분석하고자 정지발광과 구애 발광을 구분하여 조사하였고 각각의 발광지속시간과 발광주기를 구분하여 측정하였다. 수컷의 발광지속시간은 정지발광(0.12초)보다 구애발광(0.17초)에서 1.4배 증가하였으며 암컷의 발광지속시간은 정지발광(0.15초)보다 구애발광(0.19초)에서 1.5배 증가하였다. 발광주기는 수컷에서 정지발광(1.26초)보다 구애발광(1.12초)에서 0.88배 감소하였고, 암컷에서 정지발광(2.99초)보다 구애발광(1.06초)에서 0.35배 감소하였다. 발광양상에서 발광주파수는 수짓의 정지발광에서 0.8 Hz, 수컷 구애발광에서 0.9 Hz, 암컷의 정지발광에서 0.3 Hz, 암컷의 구애발광에서 0.9 Hz로 각각 나타났다. H. papariensis의 발광파장영역은 400 nm에서 700 nm에 이르는 모든 영역에서 확인되었으며 가장 높은 첨두치는 600 nm에 있고 500에서 600 nm 사이의 파장대가 가장 두드러지게 나타났다. 발광양상과 어우러진 교미행동은 Hp system과 같은 결과를 얻었다.

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Hysteresis Loops, Critical Fields and Energy Products for Exchange-spring Hard/soft/hard Trilayers

  • Chen, B.Z.;Yan, S.;Ju, Y.Z.;Zhao, G.P.;Zhang, X.C.;Yue, M.;Xia, J.
    • Journal of Magnetics
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    • v.20 no.1
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    • pp.31-39
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    • 2015
  • Macroscopic hysteresis loops and microscopic magnetic moment distributions have been determined by a three-dimensional (3D) model for exchange-coupled Sm-Co/${\alpha}-Fe$/Sm-Co trilayers with in-plane collinear easy axes. These results are carefully compared with the popular one-dimensional (1D) micromagnetic models and recent experimental data. It is found that the results obtained from the two methods match very well, especially for the remanence and coercivity, justifying the calculations. Both nucleation and coercive fields decrease monotonically as the soft layer thickness $L^s$ increases while the largest maximum energy product (roughly 50 MGOe) occurs when the thicknesses of hard and soft layers are 5 nm and 15 nm, respectively. Moreover, the calculated angular distributions in the thickness direction for the magnetic moments are similar. Nevertheless, the calculated nucleation and pinning fields as well as the energy products by 3D OOMMF are systematically smaller than those given by the 1D model, due mainly to the stray fields at the corners of the films. These demagnetization fields help the magnetic moments at the corners to deviate from the previous saturation state and facilitate the nucleation. Such an effect enhances as $L^s$ increases. When the thicknesses of hard and soft layers are 10 nm and 20 nm, respectively, the pinning field difference is as large as 30%, while the nucleation fields have opposite signs.

Effect of Electron Beam Irradiation on the Opto-Electrical and Transparent Heater Property of ZnO/Cu/ZnO Thin Films for the Electric Vehicle Application (전자빔 조사에 따른 ZnO/Cu/ZnO 박막의 전기광학적 특성 및 전기자동차용 투명 발열체 특성)

  • Yeon-Hak Lee;Min-Sung Park;Daeil Kim
    • Korean Journal of Materials Research
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    • v.33 no.11
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    • pp.497-501
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    • 2023
  • ZnO/Cu/ZnO (ZCZ) thin films were deposited at room temperature on a glass substrate using direct current (DC) and radio frequency (RF, 13.56 MHz) magnetron sputtering and then the effect of post-deposition electron irradiation on the structural, optical, electrical and transparent heater properties of the films were considered. ZCZ films that were electron beam irradiated at 500 eV showed an increase in the grain sizes of their ZnO(102) and (201) planes to 15.17 nm and 11.51 nm, respectively, from grain sizes of 13.50 nm and 10.60 nm observed in the as deposited films. In addition, the film's optical and electrical properties also depended on the electron irradiation energies. The highest opto-electrical performance was observed in films electron irradiated at 500 eV. In a heat radiation test, when a bias voltage of 18 V was applied to the film that had been electron irradiated at 500 eV, its steady state temperature was about 90.5 ℃. In a repetition test, it reached the steady state temperature within 60 s at all bias voltages.

Cytotoxicity of Ethanol Extract of Raphanuse Sativus on a Human Lung Cancer Cell Line (인체 폐암 세포주에 대한 무의 에탄올 추출물의 세포독성)

  • 임효빈;이건순;채희정
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.33 no.2
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    • pp.287-290
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    • 2004
  • This study was desinged to investigate the cytotoxic effect of ethanonl extract of radish, Raphanuse sativus on human lung cancer cell lines (A-549) using MTT(3-〔4,5-dimethylthiazol-2-yl〕-2-yl)-2,5-diphenyltetrazolium bromide) assay. Radish trunk and radish root were extracted by a mixed solvent of water and ethanol (5 : 5, v/v) after drying, The extracts were used for anticancer activity assay. $IC_{50}$/ (50% inhibitory concentration) of radish trunk and radish root were 0.015% and 0.03%, respectively. Radish trunk extract showed higher anticancer activity than radish root extract at the same concentration of 0.01%.

Studies on the Bacteriophages of Brevibacterium lactofermentum (L-글루타민산 생산균 Brevibacterium lactofermentum의 Bacteriophag에 관한 연구)

  • 이태우
    • Korean Journal of Microbiology
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    • v.17 no.3
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    • pp.97-130
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    • 1979
  • Many industrial processes those employ bacteria are subjected to phage infestations. In L-glutamic acid fermentions using acetic acid, the phage infestations of the organisms have been recently recognized. In efforts to elucidate the sources of phage contamination involved in the abnormal fermentation, a series of study was conducted to isolate the phages both from the contents of abnormally fermented tanks and the soil or sewage samples from the surroundings of a fermentation factory, to define major charateristics of the phage isolates, and finally to determine the correlation between the phage isolates and temperate phages originating from the miscellaneous bacterial species isolated from the soil or sewage samples. The results are summarized as follows; 1) All phages were isolated from the irregular fermentation tanks and soil or sewage samples, and they were designated as phage PR-1, PR-2, PR-3, PR-4, PR-5, PR-6, and PR-7, in the order of isolation. These PR-series phages were proved to be highly specific for the variant strains of Br. lactofermentum only, namely, phage PR-1 and PR-2 for Br. lactofermentum No. 468-5 and phage PR-3~PR-7 for Br. lactofemrentum No. 2256. By cross-neutralization test, the 7 phagescould be subdivided into 3 groups, i. e., phage PR-I and PR-2 the first, phage PR-3, PR-4, PR-5, PR-6 the second, and the phage PR-7 the third. 2) The 7 phages were virulent under the experimental conditions. They produced plaques with clear and relatively sharp margins without distinct halo. The mean sizes of plaques were 1.5mm in diameter for phage PR-1 and PR-2, and 1. Omm for phages PR-3~PR-7. Double layer technique modified by Hongo and described by Adams, was applied to assay of the PR-series phages. The factors influencing the plaques were as follows;young age cells of host bacteria cultured for 3-6 hours represented the largest number and size, optimum was pH 7.0, incubation temperature was $30^{\circ}C$, and agar concentration and amount of overlayer medium were 0.6% and 0.2ml, respectively. 3) PR-series phages were stable in 0.05M tris buffer and 0.1M ammonium acetate buffer solution. The addition of $5{\times}10^{-3}M$ magnesium ion effectively increased the stability. Thermostability experiments indicated that PR-series phages were stable at the teinperture between $50^{\circ}{\sim}55^{\circ}C$ in nutrient medium, $45^{\circ}{\sim}50^{\circ}C$ in buffer solution. However, the phages mere completely inactivated at 603C and 65$^{\circ}$C within 10 minutes. The phages were stable at the range of pH6~9 in nutrient medium and of pH 8-9 in buffer solution, respectively. Exposure of the phages to UV for 25, 60 and 100 seconds resulted in the complete loss of infectivily, respectively. 4) Electron microscopy showed that PR-series phage particles exhibited rather similar morphology, differing in the size All of PR-series phages had a multilateral head and had a simple long tiil about three to five times long as compared with head. By the size, phage PR-1 and PR-2, PR-3, PR-4, PR-5, and PR-6 and PR-7 were classified into same groups, respectively. The head and tail size of phage PR-1, PR-5, PR-5(T) and PR-7 were 85nm, 74nm and 235nm and 350mm, and 72nm and 210nm, respectively. 5) Nucleic acids of PR-series phages were double stranded DNA. The G+C contents of phage PR-1, PR-5 and PR-7 were 56.1, 52.9 and 53.7, respectively. The values of G+C contents derived from the $T_m$ were in agreement with the chemically determined values. 6) PR-series phages effectively adsorbed on their host bacteria at the rate of more than 90% during 5 min. K value for phage PR-1, PR-5 and PR-7 were calculated to be $6{\times}10^9 ml$ per minute, respectiveky. The pH of the medium did effect adsorption rate, but both temperature and age of host cells did not. Generally, optimum adsorption condition of phages seemed to be almost same as optimum growth conditions of host bacteria. 7) In one-step growth experiments, the latent periods at $30^{\circ}C$ for PR-1, and PR-7 were about 70, 50 and 55 min, respectively. The corresponding average burst size was 200, 70 and 90, respectively. Lpsis period according to the multiplicity of infection and a phage series. In case of m. o. i. 100, strain No. 2256 (PR-5) and No. 468-5(PR-1) failed to grow and turbidity decreased after 50 and 70min, respectively. 8) In the lysate of a plaque purified phage PR-5 infected bacteria, there observed 2 types ofphage particles, i. e., phage PR-5 and PR-5 (T) of similar morphology but differing at the length of phage tail, and phage tail like particles. The phage taillike particles could be divided into 4 types by the length. Induction experiments of Br. lactofermentum with UV irradiation, mitomycin C or bacitracin treatment produced neither phage PR-5 (T) or phage tail-like particles. 9) No lysis occured when the growth of 7 strains of miscellaneous bacteria, isolated from soil and sewage samples, were inoculated with either phage PR-5 (T) or phage tail-like particles the inoculation of phage PR-5 pellet resulted in the growth inhibition of the orgainsms in the spot test. The lysates obtained from 3 miscellaneous soil derived bacteria following mitomycin C treatment the growth of Br. lactofermentum, but did not lyze the bacterium.

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Response of the Growth Characteristics and Phytochemical Contents of Pepper (Capsicum annuum L.) Seedlings with Supplemental LED Light in Glass House (LED 보광처리가 고추(Capsicum annuum) 묘의 생장과 Phytochemical 함량에 미치는 영향)

  • Azad, Md. Obyedul Kalam;Chun, Ik-Jo;Jeong, Jeong-Hak;Kwon, Soon-Tae;Hwang, Jae-Moon
    • Journal of Bio-Environment Control
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    • v.20 no.3
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    • pp.182-188
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    • 2011
  • This research was conducted to evaluate the effect of supplemental light-emitting diode (LED) light on growth characteristics and phytochemical content of pepper (Capsicum annuum L.) seedling using LED blue (470 nm, B), red (660 nm, R), blue + red (BR), far red (740 nm, FR) and UV-B (300 nm) light treatment, and without artificial light. Photon flux of LED light was 49, 16, 40, 5.0 and $0.82{\mu}mol\;m^{-2}s^{-1}$ for B, R, BR, FR, and UV-B light, respectively, during experiment. Supplemental LED light duration was $16hr\;day^{-1}$ and UV-B light duration was 10 min. per day after sunset up to 15 days (12 days after germination) of plants age. In our research, growth characteristics and phytochemical content of pepper seedlings were greatly influenced by supplemental LED light compare to control treatment. Red light increased the number of leaves, number of nodes, leaf width and plant fresh weight by 34%, 27%, 50% and 40%, respectively. Blue light increased the leaf length by 13%, and stem length and length of inter node were increased by 17% and 34%, respectively under grown far red light. After 15 days of light treatments phytochemical concentrations of pepper plants were significantly changed. Blue light enhanced the total anthocyanin and chlorophyll concentration by 6 times and 2 times, respectively. Red light increased the total phenolic compound at least two folds meanwhile far red light reduced the ascorbic acid and antioxidant activity 31% and 66%, respectively compared to control treatment.

Norm-referenced criteria for strength of the elbow joint for the korean high school baseball players using the isokinetic equipment: (Focusing on seoul and gyeonggi-do) (등속성 장비를 이용하여 한국고교야구선수 주관절 근력 평가기준치 설정: (서울 및 경기도 중심으로))

  • Kim, Su-Hyun;Lee, Jin-Wook
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.10
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    • pp.442-447
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    • 2017
  • The purpose of this study was to establish norm-referenced criteria for the isokinetic strength of the elbow joint in Korean high school baseball players. Two hundred and one high school baseball players participated in this study, none of whom had any medical problem with their upper limbs. The elbow flexion/extension test was conducted four times at a speed of $60^{\circ}/sec$. The HUMAC NORM (CSMI, USA) system was used to obtain the values of the peak torque and peak torque per body weight. The results were presented as norm-referenced criterion valuesusing the 5-point scale of Cajori which consists of five stages (6.06%, 24.17%, 38.30%, 24.17%, and 6.06%). In the results of this study, the peak torques of the elbow (flexor and extensor?) at an angular velocity of $60^{\circ}/sec$ were $37.88{\pm}8.14Nm$ and $44.59{\pm}11.79Nm$, and the peak torque per body weight of the elbow (flexor and extensor?) were $50.06{\pm}8.66Nm$ and $58.28{\pm}12.84Nm$, respectively. The reference values of the peak torque and peak torque per body weight of the elbow flexor and extensor were setat an angular velocity of $60^{\circ}/sec$. On the basis of the results analyzed in this study, the following conclusions were drawn. There is a lack of proper studies on the elbow joint strength, even though the most common injury in baseball players occurs in the elbow joint. Therefore, we need to establish a standard muscle strength in order to prevent elbow joint injuries and improve their performance. The criteria for the peak torque and peak torque per body weight established here in will provide useful information for high school baseball players, baseball coaches, athletic trainers and sports injury rehabilitation specialists in injury recovery and return to rehabilitation, which can beutilized as objective clinical assessment data.

Optimization of HPLC Method and Clean-up Process for Simultaneous and Systematic Analysis of Synthetic Color Additives in Foods (식품 중 타르색소의 동시분석 및 계통분석을 위한 HPLC 분석조건 및 정제과정 확립)

  • Park, Sung-Kwan;Hong, Yeun;Jung, Yong-Hyun;Lee, Chang-Hee;Yoon, Hae-Jung;Kim, So-Hee;Lee, Jong-Ok
    • Korean Journal of Food Science and Technology
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    • v.33 no.1
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    • pp.33-39
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    • 2001
  • To develop a method for separation process using Sep-pak $C_18$, simultaneous and systematic analysis of 8 permitted and 11 non-permitted synthetic food colors in Korea, optimization of analysis conditions for reverse phase ion-pair high performance liquid chromatography was carried out. For the best result of Sep-pak $C_18$ separation the pH of color standard mixture solution was $5{\sim}6$ and 0.1% HCl-methanol solution were set as eluent. The colors eluated from Sep-pak $C_18$ cartridge were determined and confirmed by high performance liquid chromatography with a photodiode array detector at 420 nm for yellow colors type, at 520 nm for red colors type, at 600 nm for blue and green colors type and at 254 nm for mixed colors. Conditions for HPLC analysis were as follows: column, Symmetry $C_18$ (5 m, 3.9 mm $i.d.{\times}150\;mm$); mobile phase, 0.025 M ammonium acetate (containing 0.01 M tetrabutylammonium bromide) : acetonitrile : methanol (65 : 25 : 10) and 0.025 M ammonium acetate(containing 0.01 M tetrabutylammonium bromide) : acetonitrile : methanol (40 : 50 : 10); flow rate, 1 mL/min. It takes 35 minutes for simultaneaus analysis and 18 minutes for systematic analysis. The detection limits range of each colors were $0.01{\sim}0.05\;{\mu}g/g$.

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