• Title/Summary/Keyword: 50nm

Search Result 2,603, Processing Time 0.03 seconds

Electrical properties of Ultra-Shallow Junction formed by using Epitaxial $CoSi_{2}$ Thin Film as Diffusion Source ($CoSi_{2}$ 에피박막을 확산원으로 이용하여 형성한 매우 얇은 접합의 전기적 특성)

  • Koo, Bon-Cheol;Shim, Hyun-Sang;Jung, Yun-Sil;Bae, Kyoo-Sik
    • Korean Journal of Materials Research
    • /
    • v.8 no.5
    • /
    • pp.470-473
    • /
    • 1998
  • $As^+$ was ion-implanted onto $CoSi_{2}$ thin films formed by rapidly thermal-annealed Co/Ti bilayers. Then the specimens were drive-in annealed at 500~100$0^{\circ}C$ to form ultra-shallow $n^+$p junction diodes and to measure their 1- V characteristics. When drive-in annealed at 50$0^{\circ}C$ for 280 sec., 50 nm thick ultra-shallow junctions were formed and di¬odes showed the best 1- V characteristics with low leakage current. In particular. the leakage current was 2 orders lower than that of diodes formed by using Co monolayer. It was attributed to uniform $CoSi_{2}$/Si interfaces.

  • PDF

Preparation of Poly(vinylpyrrolidone) Coated Iron Oxide Nanoparticles for Contrast Agent (조영제로 활용하기 위한 폴리(비닐피롤리돈)이 코팅된 산화철 나노 입자의 제조)

  • Lee Ha Young;Lim Nak Hyun;Seo Jin A;Khang Gilson;Kim Jungahn;Lee Hai Bang;Cho Sun Hang
    • Polymer(Korea)
    • /
    • v.29 no.3
    • /
    • pp.266-270
    • /
    • 2005
  • Iron oxide nanoparticles were prepared by the thermal decomposition of iron pentacarbonyl (Fe(CO)$_5$) Poly(vinylpyrrolidone) (PVP) was used as surface-modifying agent to control the size of the iron oxide nanoparticles. The crystalline structure of PVP coated iron oxide nanoparticles was determined by XRD. The size of PVP coated iron oxide nanoparticles was determined by TEM and ELS. The particle sizes of PVP coated iron oxide nanoparticles were controlled by adjusting the molar ratio of PVP/Fe (CO)$_5$, solvent and molecular weight of PVP Particle sizes increased with increasing PVP content. Spherical $50\~100$ nm sized iron oxide nanoclusters were produced when dimethylformamide was used as a solvent. And well-defined 10 nm iron oxide nanoparticles were produced in Carbitol. The prepared PVP coated iron oxide nanoparticles exhibited a well-dispersed property in water. The results obtained in this study confirmed the feasibility of the PVP-coated iron oxide nanoparticles as a biomaterial for MRI contrast agent.

Effects of Annealing on Properties of Tin Oxide films prepared by r.f. magnetron sputtering (R.F. magnetron sputter를 이용한 SnO_2$ film 특성에 대한 Annealing효과)

  • 박용주;박진성
    • Proceedings of the Materials Research Society of Korea Conference
    • /
    • 2003.11a
    • /
    • pp.208-208
    • /
    • 2003
  • RF 마그네트론 스퍼터링법을 이용하여 Ar과 $O_2$의 유량을 25sccm씩 흘리면서 $SiO_2$/Si기판 위에 Sn $O_2$ 박막을 증착하였다. 증착된 박막은 columnar 구조로 성장하였으며 많은 입자들이 뭉쳐서 형성된 양배추꽃(cauliflower) 형태의 뭉친 입자(agglomerates)를 가지는 표면형상이 관찰되었다. 분위기에 따른 어닐링 효과를 확인하기 위하여 50$0^{\circ}C$에서 공기와 질소 분위기하에서 열처리하였다. 열처리한 후 표면거칠기가 개선되었으며, 표면형상의 변화가 발생하였다. 특히 50$0^{\circ}C$, 질소분위기에서 어닐링한 경우는 양배추꽃 형태의 표면형상이 소수의 작은 입자가 뭉친 형태로 분리되면서 입도분포가 개선되었다. 이러한 결과는 어닐링 과정에서 발생되는 응력을 완화시키기 위하여 표면형상의 변화가 발생하는 것으로 판단된다. XPS 측정 결과, 질소 분위기에서 어닐링한 후에 OIs와 Sn5/3d 피크가 낮은 결합에너지에 위치하고 있어 산소공공의 농도가 어닐링 전에 비하여 증가하였음을 확인할 수 있다. 어닐링 전후에 Sn $O_2$ 박막의 면저항 측정 값은 XPS 결과와는 달리 질소 분위기 어닐링한 후에 오히려 면저항값이 크게 증가하였다. 이러한 결과는 질소 분위기 어닐링한 후 표면형상의 변화에 기인하여 입자간의 연결성이 저하되어 면저항값이 증가한 것으로 추정된다. 산소분위기에서 어닐링한 후에 전체적으로 전기적 특성의 재현성이 개선되었으며 Sensitivity( $R_{air}$/ $R_{gas}$)가 향상되었음을 확인하였다.하였다.석을 통하여 La의 분포를 확인하였으며, HRTEM 분석을 통하여 미세구조분석을 실시하였다.2463eV였다. 10K에서 광발광 봉우리의 919.8nm (1.3479eV)는 free exciton(Ex), 954.5nm (1.2989eV)는 donor-bound exciton 인 I2(DO,X)와 959.5nm (1.2921eV)는 acceptor-bound exciton 인 I1(AO,X) 이고, 964.6nm(1.2853eV)는 donor-acceptor pair(DAP) 발광, 1341.9nm (0.9239eV)는 self activated(SA)에 기인하는 광발광 봉우리로 고찰되었다.가 높을수록 방출전류가 시간에 따라 급격히 감소하였다. 각 duty비에서 방출전류의 양이 1/2로 감소하는 시점을 에미터의 수명으로 볼 때 duty비 대 에미터 수명관계를 구해 높은 duty비에서 전계방출을 시킴으로써 실제의 구동조건인 낮은 duty비에서의 수명을 단시간에 예측할 수 있었다. 단속적으로 일어난 것으로 생각된다.리 폐 관류는 정맥주입 방법에 비해 고농도의 cisplatin 투여로 인한 다른 장기에서의 농도 증가 없이 폐 조직에 약 50배 정도의 고농도 cisplatin을 투여할 수 있었으며, 또한 분리 폐 관류 시 cisplatin에 의한 직접적 폐 독성은 발견되지 않았다이 낮았으나 통계학적 의의는 없었다[10.0%(4/40) : 8.2%(20/244), p>0.05]. 결론: 비디오흉강경술에서 재발을 낮추기 위해 수술시 폐야 전체를 관찰하여 존재하는 폐기포를 놓치지 않는 것이 중요하며, 폐기포를 확인하지 못한 경우와 이차성 자연기흉에 대해서는 흉막유착술에 더 세심한 주의가 필요하다는 것을 확인하였다. 비디오흉강경수술은 통증이 적고, 입원기간이 짧고,

  • PDF

The Effect of Passivation Film with Inorganic/Epoxy Layers on Life Time Characteristics of OLED Device (OLED 내구성에 미치는 무기/에폭시층 보호막의 영향)

  • Lim, Jung-A;Ju, Sung-Hoo;Yang, Jae-Woong
    • Journal of the Korean institute of surface engineering
    • /
    • v.42 no.6
    • /
    • pp.287-293
    • /
    • 2009
  • The passivation films with epoxy layer on LiF, $SiN_x$ and LiF/$SiN_x$ inorganic layer were fabricated on OLED to protect device from the direct damage of $O_2$ and $H_2O$ and to apply for a buffer layer between OLED device and passivation multi-layer with organic/inorganic hybrid structure as to diminish the thermal stress and expansion. Red OLED doped with 1 vol.% Rubrene in $Alq_3$ was used as a basic device. The device structure was multi-layer of ITO(150 nm) / ELM200_HIL(50 nm) / ELM002_HTL(30 nm) / $Alq_3$: 1 vol.% Rubrene(30 nm) / $Alq_3$(30 nm) / LiF(0.7 nm) / Al(100 nm). LiF/epoxy applied as a protective layer didn't contribute to the improvement of life time. While in case of $SiN_x$/epoxy, damage was done in the passivation process because of difference in heat expansion between films which could occur during the formation of epoxy film. Using LiF/$SiN_x$/epoxy improved lifetime significantly without suffering damage in the process of forming films, therefore, the best structure of passivation film with inorganic/epoxy layers was LiF/$SiN_x$/E1.

Seasonal Variation and Measurement Uncertainty of UV Aerosol Optical Depth Measured at Gwangju, Korea (자외선 영역의 에어로졸 광학 깊이의 계절 분포 및 불확실도의 계산)

  • Kim, Jeong-Eun;Kim, Young-Joon
    • Journal of Korean Society for Atmospheric Environment
    • /
    • v.21 no.6
    • /
    • pp.631-637
    • /
    • 2005
  • A UV-MFRSR instrument was used to measure the global and diffuse irradiances in 7 narrowband channels in the UV range 299.4, 304.4, 310.9, 317.3. 324.5, 331.3 and 367.4 nm at Gwangju ($35^{circ}\;13'N\;126^{circ}\;50'E$), Korea. Spectral UV-AOD was retrieved using the Langley plot method for data collected from April 2002 to July 2004. Temporal variation of AOD at 367.4 nm ($AOD_{367nm}$) showed a maximum in June ($0.95\pm0.43$) and a minimum in February ($0.31\pm0.14$). Clear seasonal variation of $AOD_{367nm}$ was observed with average values of $0.68\pm0.29,\;0.82\pm0.41,\;0.48\pm0.22\;and\;0.42\pm0.21$ in spring, summer, fall and winter, respectively, Average Angstrom exponent for the entire monitoring period was $2.03\pm0.75$ in the UV-A ($324.5\∼367.4$ nm) range. Seasonal variation of the Angstrom exponent showed a maximum in spring and a minimum in summer. The lowest Angstrom exponent in summer might be due to hygroscopic growth of particles under conditions of high relative humidity. UV-AOD changes under different atmospheric conditions were also analyzed. Uncertainty in retrieving spectral UV-AOD was also estimated to range between $\pm0.218\;at\;304.4\;nm\;and\;\pm0.135\;at\;367.4\;nm$. Major causes of uncertainty were total column ozone retrieval and extraterrestrial irradiance retrieval at shorter and longer wavelengths, respectively.

Electrical and Optical Properties of Al-doped ZnO Films Deposited by Atomic Layer Deposition (Atomic Layer Deposition법에 의한 Al-doped ZnO Films의 전기적 및 광학적 특성)

  • An, Ha-Rim;Baek, Seong-Ho;Park, Il-Kyu;Ahn, Hyo-Jin
    • Korean Journal of Materials Research
    • /
    • v.23 no.8
    • /
    • pp.469-475
    • /
    • 2013
  • Al-doped ZnO(AZO) thin films were synthesized using atomid layer deposition(ALD), which acurately controlled the uniform film thickness of the AZO thin films. To investigate the electrical and optical properites of the AZO thin films, AZO films using ALD was controlled to be three different thicknesses (50 nm, 100 nm, and 150 nm). The structural, chemical, electrical, and optical properties of the AZO thin films were analyzed by X-ray diffraction, X-ray photoelectron spectroscopy, field-emssion scanning electron microscopy, atomic force microscopy, Hall measurement system, and UV-Vis spectrophotometry. As the thickness of the AZO thin films increased, the crystallinity of the AZO thin films gradually increased, and the surface morphology of the AZO thin films were transformed from a porous structure to a dense structure. The average surface roughnesses of the samples using atomic force microscopy were ~3.01 nm, ~2.89 nm, and ~2.44 nm, respectively. As the thickness of the AZO filmsincreased, the surface roughness decreased gradually. These results affect the electrical and optical properties of AZO thin films. Therefore, the thickest AZO thin films with 150 nm exhibited excellent resistivity (${\sim}7.00{\times}10^{-4}{\Omega}{\cdot}cm$), high transmittance (~83.2 %), and the best FOM ($5.71{\times}10^{-3}{\Omega}^{-1}$). AZO thin films fabricated using ALD may be used as a promising cadidate of TCO materials for optoelectronic applications.

Interfacial Reactions of Sn Solder with Variations of Under-Bump-Metallurgy and Reflow Time (Under Bump Metallurgy의 종류와 리플로우 시간에 따른 Sn 솔더 계면반응)

  • Park, Sun-Hee;Oh, Tae-Sung;Englemann, G.
    • Journal of the Microelectronics and Packaging Society
    • /
    • v.14 no.3
    • /
    • pp.43-49
    • /
    • 2007
  • Thickness of intermetallic compounds and consumption rates of under bump metallurgies (UBMs) were investigated in wafer-level solder bumping with variations of UBM materials and reflow times. In the case of Cu UBM, $0.6\;{\mu}m-thick$ intermetallic compound layer was formed before reflow of Sn solder, and the average thickness of the intermetallic compound layer increased to $4\;{\mu}m$ by reflowing at $250^{\circ}C$ for 450 sec. On the contrary, the intermetallic layer had a thickness of $0.2\;{\mu}m$ on Ni UBM before reflow and it grew to $1.7\;{\mu}m$ thickness with reflowing for 450 sec. While the consumption rates of Cu UBM were 100nm/sec fur 15-sec reflow and 4.50-sec for 450-sec reflow, those of Ni UBM decreased to 28.7 nm/sec for 15-sec reflow and 1.82 nm/sec for 450-sec reflow.

  • PDF

Efficient Organic White Light-Emitting Device Utilizing SAlq, A Novel Blue Light-Emitting Material

  • Lim, Jong-Tae;Ahn, Young-Joo;Kang, Gi-Wook;Lee, Nam-Heon;Lee, Mun-Jae;Kang, Hee-Young;Lee, Chang-Hee;Ko, Young-Wook;Lee, Jin-Ho
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 2002.08a
    • /
    • pp.773-776
    • /
    • 2002
  • Efficient organic white light-emitting diodes are fabricated by doping [bis(2-methyl-8-quinolinolato) (tripheny-siloxy)aluminium (III)] (SAlq), a blue-emitting layer, with a red fluorescent dye of 4-dicyanomethylene-2-methyl-6-{2-(2,3,6,7-tetrahydro-1H,5H-benzo[i,j]quinolizin-8-yl)vinyl}-4H-pyran (DCM2). The incomplete energy transfer from blue-emitting SAlq to red-emitting DCM2 enables to obtain a balanced white light-emission. A device with the structure of ITO/TPD (50 nm)/SAlq:DCM2 (30 nm, 0.5 %)/$Alq_3$ (20 nm)/LiF (0.5 nm)/AI shows emission peaks at 456 nm and 482 nm from SAlq and at 570 nm from DCM2. The white light-emitting device shows an external quantum efficiency of about 2.3 %, a luminous efficiency of about 2.4 lm/W, and the CIE chromaticity coordinates of (0.32, 0.37) at 100 cd/m^2. A maximum luminance of about 23,800 cd/m^2. is obtained at 15 V and the current density of 782 mA/cm^2.

  • PDF

The Effect of Multilayer Passivation Film on Life Time Characteristics of OLED Device (OLED소자의 수명에 미치는 다층 보호막의 영향)

  • Ju, Sung-Hoo;Yang, Jae-Woong
    • Journal of the Korean institute of surface engineering
    • /
    • v.45 no.1
    • /
    • pp.20-24
    • /
    • 2012
  • Multilayer passivation film on OLED with organic/inorganic hybrid structure as to diminish the thermal stress and expansion was researched to protect device from the direct damage of $O_2$ and $H_2O$ and improve life time characteristics. Red OLED doped with 1 vol.% Rubrene in $Alq_3$ was used as a basic device. The films consist of ITO(150 nm)/ELM200_HIL(50 nm)/ELM002_HTL(30 nm)/$Alq_3$: 1 vol.% Rubrene(30 nm)/$Alq_3$(30 nm) and LiF(0.7 nm)/Al(100 nm) which were formed in that order. Using LiF/$SiN_x$ as a buffer layer was determined because it significantly improved life time characteristics without suffering damage in the process of forming passivation film. Multilayer passivation film on buffer layer didn't produce much change in current efficiency, while the half life time at 1,000 $cd/m^2$ of OLED/LiF/$SiN_x$/E1/$SiN_x$ was 710 hours which showed about 1.5 times longer than OLED/LiF/$SiN_x$/E1 with 498 hours. futhermore, OLED/LiF/$SiN_x$/E1/$SiN_x$/E1/$SiN_x$ with 1301 hours showed about twice than OLED/LiF/$SiN_x$/E1/$SiN_x$ which demonstrated that superior characteristics of life time was obtained in multilayer passivation film. Through the above result, it was suggested using LiF/$SiN_x$ as a buffer layer could reduce the damage from the difference of thermal expansion coefficient in OLED with protective films, and epoxy layer in multilayer passivation film could function like a buffer between $SiN_x$ inorganic layers with relatively large thermal stress.

Behavioral Monitoring System for Mud Shrimp Upogebia major and the Photoresponse to Illumination with Different Wavelength LEDs (쏙(Upogebia major)의 광반응 분석시스템 구축과 발광다이오드(Light-Emitting Diode) 파장별 행동분석)

  • Jang, Jun-Chul;Chung, Jong-Kyun;Hur, Youn-Seong;Song, Jae-Hee;Kim, Jong-Myoung
    • Korean Journal of Fisheries and Aquatic Sciences
    • /
    • v.50 no.4
    • /
    • pp.413-420
    • /
    • 2017
  • The increase in the number of mud shrimps Upogebia major is a concern because of their negative effects on shellfish aquaculture, including Manila clam Venerupis philippinatum along the west coast of Korea. This study developed a behavioral analysis system for aquatic animals using a set of monochromatic light-emitting diode (LED) modules covering the visible light range at similar intervals. Movements of mud shrimp were monitored using a tracking system under illumination with infra-red light and an LED of 660 nm wavelength without provoking stimulation. The minimum light intensity needed to induce a photoresponse by the mud shrimp was $10{\mu}mole/m^2/s$ under the conditions tested. Of the six kinds of LED illuminations tested, the most sensitive response was obtained with illumination with the 505 nm LED, followed in order by LEDs with peak wavelengths of $525nm{\fallingdotseq}465nm$ > $405nm{\fallingdotseq}590nm$ > 660 nm. These findings should help to identify LED sources that efficiently induce movement of the mud shrimp and also for monitoring movement without stimulating.