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Laser-induced chemical vapor deposition of tungsten micro patterns for TFT-LCD circuit repair (레이저 국소증착을 이용한 TFT-LCD회로 수정5 미세 텅스텐 패턴 제조)

  • Park Jong-Bok;Kim Chang-Jae;Park Sang-Hyuck;Shin Pyung-Eun;Kang Hyoung-Shik;Jeong Sung-Ho
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.8 s.173
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    • pp.165-173
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    • 2005
  • This paper presents the results for deposition of micrometer-scale metal lines on glass for the development of TFT-LCD circuit repair-system. Although there had been a few studies in the late 1980's for the deposition of metallic interconnects by laser-induced chemical vapor deposition, those studies mostly used continuous wave lasers. In this work, a third harmonic Nd:YLF laser (351nm) of high repetition rates, up to 10 KHz, was used as the illumination source and W(CO)s was selected as the precursor. General characteristics of the metal deposit (tungsten) such as height, width, morphology as well as electrical properties were examined for various process conditions. Height of the deposited tungsten lines ranged from 35 to 500 m depending on laser power and scan speed while the width was controlled between 50um using a slit placed in the beam path. The resistivity of the deposited tungsten lines was measured to be below $1{\Omega}{\cdotu}um$, which is an acceptable value according to the manufacturing standard. The tungsten lines produced at high scan speed had good surface morphology with little particles around the patterns. Experimental results demonstrated that it is likely that the deposit forms through a hybrid process, namely through the combination of photolytic and pyrolytic mechanisms.

Raman Spectroscopy of Irradiated Normoxic Polymethacrylic Acid Gel Dosimeter

  • Bong, Ji-Hye;Choi, Kyu-Seok;Yu, Soo-Chang;Kwon, Soo-Il;Cho, Yu-Ra;Park, Chae-Hee;Park, Hyung-Wook
    • Bulletin of the Korean Chemical Society
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    • v.32 no.2
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    • pp.625-629
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    • 2011
  • A quantitative analysis of the decreasing rate of the monomer and increasing rate of the polymerization was made by monitoring radiation level increments using Raman spectroscopy within the therapeutic radiation range for a normoxic polymethacrylic acid gel dosimeter. The gel dosimeter was synthesized by stirring materials such as gelatin, distilled water, methacrylic acid, hydroquinone and tetrakis phosphonium chloride at $50^{\circ}C$, and the synthesized gel was contained in a 10- mm diameter and 32-mm high vial to conduct measurement. 24 hours after gel synthesis, it was irradiated from 0 Gy to 20 Gy by 2 Gy using a Co-60 radiotherapy unit. With use of the Cryo FE-SEM, structural changes in the 0 Gy and 10 Gy gel dosimeters were investigated. The Raman spectra were acquired using 532-nm laser as the excitation source. In accordance with fitting the changes in C-COOH stretching (801 $cm^{-1}$), C=C stretching (1639 $cm^{-1}$) and vinyl $CH_2$ stretching (3114 $cm^{-1}$) vibrational modes for monomer and $CH_2$ bending vibrational mode (1451 $cm^{-1}$) for polymer, sensitive parameter S for each mode was calculated. The values of S for monomer bands and polymer band were ranged in $6.0{\pm}2.6$ Gy and $7.2{\pm}2.3$ Gy, respectively, which shows a relatively good conformity of the decreasing rate of monomer and the increasing rate of polymerization within the range of error.

Enhanced 2-Chorophenol Photodecomposition using Nano-Sized Mn-incorporated TiO2 Powders Prepared by a Solvothermal Method

  • Kim, Dongjin;Im, Younghwan;Jeong, Kyung Mi;Park, Sun-Min;Um, Myeong-Heon;Kang, Misook
    • Bulletin of the Korean Chemical Society
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    • v.35 no.8
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    • pp.2295-2298
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    • 2014
  • To effectively destruct 2-chlorophenol, a representative sterile preservative, nanometer-sized Mn (0.5, 1.0, 3.0 mol %)-incorporated $TiO_2$ powders were synthesized by a solvothermal method. XRD result demonstrated that the Mn ingredients were perfectly inserted into $TiO_2$ framework. The Mn-$TiO_2$ particles exhibited an anatase structure with a particle size of below 20 nm. The absorbance was shifted to the higher wavelength on Mn-$TiO_2$ compared to that of $TiO_2$. Otherwise, the PL intensities which has a close relationship for recombination between holes and electrons significantly decreased on Mn-$TiO_2$. The photodecomposition for 2-chlorophenol in a liquid system was enhanced over Mn-doped $TiO_2$ compared with pure $TiO_2$: 2-chlorophenol of 50 ppm was completely decomposed after 12 h when 1.0 mol % Mn-$TiO_2$ was used. Consequently, the core of this paper is as follows. introducing Mn into $TiO_2$ framework reduced the band-gap, moreover, it played as an electron capture resulted to lower recombination between electrons and holes during photocatalytic reaction for removal of 2-cholophenol.

Surface Imaging of Barley Aleurone Cell by Atomic Force Microscopy

  • Kim, Tae-Wan;Huh, Kwang-Woon;Kim, Seung-Hwan;Ku, Hyun-Hwoi;Lee, Byung-Moo;Kim, Jae-Yoon;Seo, Yong-Won
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.49 no.1
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    • pp.36-40
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    • 2004
  • To observe and analysis ultra-microscopically barley aleurone cell surface, atomic force microscope (AFM) was used. Seed coat of early maturing germplasm, eam9, was dehulled and scanned by non-contact mode. We have obtained the high resolution topographic 3-dimensional image of barley aleurone layer with high resolution. These images showed the membrane proteins in barley aleurone cell. One channel protein and numerous peripheral or integral proteins were detected in a area of 100 $\mu\textrm{m}^2$. Furthermore, we found that their widths were ranged from 50 to 750nm and lengths from 0 to 66 $\mu\textrm{m}$. The thickness of aleurone layer was measured by scanning electron microscope. The thickness at early developmental stage was about 16 and then the aleurone cell enlarged upto 57 $\mu\textrm{m}$${\mu}{\textrm}{m}$ at least until 42 days after anthesis. In this study, we firstly reported on the ultrastructural AFM analysis of living aleurone cell as a biological specimen. It was clearly suggested that AFM will become an powerful tool for probing both the structural properties of biological samples.

Evaluation of the functional phenolic compounds as to various ripening phases of the reddish rice cultivar(Oryza sativa, Superhongmi)

  • Ham, Tae-Ho;Kwon, Soon Wook;Kwon, Young In;Ryu, Su-Noh
    • Proceedings of the Korean Society of Crop Science Conference
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    • 2017.06a
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    • pp.272-272
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    • 2017
  • Recently, consumer's demands are increasing for new natural functional and healthful food. These demands have encouraged a better understanding of the biochemical, chemical and nutritional composition of plant products. Superhongmi rice variety was derived from a cross between CG2-3-5-2-6-2 (Heugjinju/Suwon 425) having reddish brown color and Daeribbyeo 1 having a large grain size. Superhongmi rice headed on Sep. 5th and has 94.7 cm culm length. Taxifolin, a phenolic compound in superhongmi rice extract had high ${\alpha}-glucosidase$ inhibitory activity. The ${\alpha}-glucosidase$ inhibitory activity of the superhongmi rice extracts correlated to the taxifolin content and antioxidant activity of the extracts. A new method for quantitative determination of taxifolin in superhongmi rice variety by high performance liquid chromatography was established. A reversed-phase system with Tosoh TSK-gel $C_{18}$ column using 60% methanol in water(pH 2.4) as a mobile phase was developed. Taxifolin was detected at 280 nm and the analysis was successfully carried out within 40 min. In ripening phase, the amount of taxifolin showed a mild decreasing slope. The highest contents was 59.27mg in 100g seed on the 30 days after heading(DAH). The optimum harvesting time, considering taxifolin content, maturity rate and thousand seed weight(TSW) was DAH 50. These results suggest that superhongmi rice which has high taxifolin content has the potential to contribute as a dietary supplement for controlling hyperglycemia and oxidative stress-linked diabetes complications.

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Antimicrobial activities of various extracts of Coriolus versicolor against oral bacteria (구강세균에 대한 구름버섯 추출물의 항균효과)

  • Kim, Byeol-Lee;Lim, Kun-Ok;Han, So-Ra;Kim, Ki-Hwa;Oh, Tae-Jin
    • Journal of Korean society of Dental Hygiene
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    • v.17 no.1
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    • pp.111-122
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    • 2017
  • Objectives: Coriolus versicolor is an edible mushroom with physiological activities that has been used in traditional medicine. The aim of this study was to investigate the antimicrobial activity of extracts obtained from Coriolus versicolor against oral pathogens. Methods: The antimicrobial activities of various extracts of Coriolus versicolor were examined by disc diffusion assay, and minimum inhibitory concentration (MIC) of these extracts were also was determined by broth dilution method. The growth inhibition effect of extracts was measured at 600 nm for 12 hrs against Streptococcus ratti, Streptococcus criceti, Aggregati--bacter actinomycetemcomitans, Actinomyces viscosus, and Actinomyces israelii. Results: Coriolus versicolor extracts showed antimicrobial activities against all nine oral pathogens through disc diffusion assay. The ethanol extract and ethyl acetate extract differed significantly compared with acetone extract against Streptococcus ratti, Streptococcus criceti, Actinomyces viscosus, Actinomyces israelii and Aggregatibacter actinomycetemcomitans (p<0.05). These extracts exhibited MIC ranges of 2.63 to >10.50 mg/ml against the tested bacteria. The ethanol extract from Coriolus versicolor showed lower MIC values of 2.63 to 5.25 mg/ml. According to the obtained growth curve, the extracts of Coriolus versicolor were more effective against Actinomyces viscosus. Conclusions: The acetone, ethanol, and ethyl acetate extracts from Coriolus versicolor showed antimicrobial activities against Streptococcus mutans, Staphylococcus aureus, Streptococcus sanguinis, Streptococcus sobrinus, Streptococcus ratti, Streptococcus criceti, Aggregatibacter actinomycetemcomitans, Actinomyces viscosus, and Actinomyces israeli.i Therefore, they could be considered as natural oral antimicrobial agents against oral pathogens.

Characteristics of aspheric lens processing using ultra-precision moulds processing system (초정밀 금형가공기를 이용한 비구면 렌즈 가공특성 연구)

  • Baek, Seung-Yub;Lee, Ha-Sung;Kang, Dong-Myeong
    • Design & Manufacturing
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    • v.1 no.1
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    • pp.7-11
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    • 2007
  • The fabrication of precision optical components by deterministic CNC grinding is an area of great current interest. Replacement of the traditional, craftsman driven, optical fabrication process is essential to reduce costs and increase process flexibility and reliability. Moreover, CNC grinding is well suited to the fabrication of complex shapes such as aspheres, making it possible to design optical systems with fewer components and reduced weight. Current technology is capable of producing surfaces with less than 2 microns peak to valley error, 50 nm rms surface roughness, and less than 1 micron subsurface damage. Bound abrasive tools, in which the abrasive particles are fixed in a second (matrix) material, play an important part in achieving this performance. In this paper, the factors affecting the ultra-fine surface roughness and profile accuracy of machined surfaces of aspheric parts has been analyzed experimentally and theoretically and on ultra-precision aspheric grinding system and precise adjusting mechanism have been designed and manufactured. In the paper we report the results of experiments and modeling performed to examine the effects of machinability, occurring during grinding of optical surfaces, on the tool surface profile. Profiles of machined surface were measured by using SEM. In order to optimize grinding conditions of aspheric lens processing, we performed experiments by design of experiments.

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Ultrastructural Changes in Enterocyte infected with Porcine Epidemic Diarrhea Virus (돼지 유행성 설사증 (Porcine Epidemic Diarrhea) 감염 소장상피세포의 전자현미경 관찰)

  • Park, Nam-Yong;Koo, Kyoung-bon;Kim, Seung-Jae;Chung, Chi-Young;Park, Young-Seok;Cho, Kyoung-Oh;Kim, Yong-Hwan;Im, Hyung-Ho
    • Korean Journal of Veterinary Pathology
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    • v.3 no.1
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    • pp.35-44
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    • 1999
  • The morphologic changes of small intestinal epithelium in pigs diagnosed as porcine epidemic diarrhea(PED} by virus isolation and immunohistochemistry were studied through light microscope and transmissible electron microscope. On semi-thin section, the histologic findings showed severe villous atrophy and fusion with hyperplasia of cuboidal epithelium in the villi, inflammatory cell infiltration in lamina propria, and increased mitotic figures in the crypt. The structural changes were mostly restricted to the cytoplasm of affected absorptive epithelium of villi. 3 types of epithelial changes were found; degenerated virus-affected cells, undifferentiated cuboidal cells, and normal columnar cells. On electron microscopy, round to spherical viral particles of 50∼l00nm in diameter were found within the dilated vesicles and endoplasmic reticulums of degenerated cells, which had decreased their cytoplasmic electron density due to dilated and missing organelles(e.g. mitochondria, ERs, etc.). Microvilli were shortened and sparse, leaving denuded terminal web of the villous epithelial cells. Fat globules were often found within slightly degenerated enterocytes. On the tip of villi, severely damaged cells were exfoliated and replaced by undifferentiated cuboidal cells We found distinct ultrastructural changes in the jejunal epithelium confirming PED virus infection is involved in malabsorptive diarrhea.

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Dynamic LEED를 이용한 Ni/Pt(001)의 구조분석

  • 김상현;박종윤;민항기;변대현;서지근;김재성
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.174-174
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    • 1999
  • Pt(001)의 깨끗한 표면은 재배열된 (5x20) 또는 (nxn) 구조를 갖는다. 이러한 재배열된 구조는 소?의 가스를 흡착에 대해서도 (1x1)구조로 다시 재배열되는 재배열인 쉽게 풀리는 준안정적 재배열 구조를 갖는 표면이다. Pt(100) 표면 위에 Ni과 같은 금속을 흡착시키는 경우도 동일하게 표면의 장력을 해소시켜 (1x1) 표면을 만든다. Pt와 Ni과 같은 덩어리 상태에서 Pt와 Ni가 질서있게 교차되어 배열되는 합금이 쉽게 이루어지는 물질들로 잘 알려져 있고, 이 합금은 Pt나 Ni와 동일한 규칙적인 fcc 구조를 갖는다. 따라서 Pt(100) 표면 위에 Ni를 흡착시키는 것은 Nm/Cu(100)과 같은 표면합금이나 Mn/Ag(1000에서 보이는 2층으로 된 표면 합금과 같은 표면 근방에 국한된 질서있는 표면 합금의 가능성이 있다. 또한 Ni/Pt(100)은 Ni과 Pt가 3대 1의 비로 조합될 때 나타나는 Ni3Pt의 층별구조인 표면에 Ni가 채워져 있고, 다음 층에 Ni와 Pt가 50%씩 질서 있게 섞여 있는 형태의 구조 즉 표면 밑 합금이 나타날 수 있는 가능성이 있는 물질계라는 점에서 관심을 갖게 한다. 본 연구는 LEED를 이용하여 Ni/Pt(100) 박막의 층별구조를 확인하고자 한다. PtNi 합금은 ATA(average t-matirx approximation)을 이용한 LEED 분석이 잘 적용되는 물질계로 알려져 있고, 본 연구는 ATA를 적용한 LEED I/V 분석을 통하여 Ni가 성장된 Pt(100) 표면의층별 농도비와 층별 구조를 구하고자 한다. 실험은 기본 압력이 3x10-11torr인 챔버에서 이루어졌으며, 증착시 압력은 5x10 torr이고, 증착은 열증발 방법을 이용하였다. Ni가 증착됨에 따라 (nxn) 재배열 표면에 기인한 extra spot들의 세기는 점차 감소하고 특정 증착량 이상에서부터 이 (nxn)의 spot들이 사라지고 깨끗한 (1x1) 패턴이 나타난다. 계속되는 증착량의 증가에 대해서도 이 (1x1) 형태는 유지되며, 표면의 질서에 따르는 c(2x20 패턴은 보이지 않았다. (1x1) LEED spot를 보임에도 불구하고 덩어리 절단 형태의 구조를 기반으로 한 LEED I/V 분석으로는 잘 맞출수 없었다. 이것은 Ni가 일정 이상 흡착된 경우 그 구조가 덩어리 절단 형태의 fcc(100) 구조와 벗어난 구조를 가지는 것으로 보인다.

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Preparation of ZnO Thin Film by Electrophoretic Deposition(EPD)

  • Jun, Byung-Sei
    • Journal of the Korean Ceramic Society
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    • v.49 no.1
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    • pp.78-83
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    • 2012
  • The electrophoretic deposition(EPD) of ZnO nano-sized colloids is investigated by changing the colloid number concentration, applied force, and deposition time. The change of the colloid size in a suspension was examined by the different colloid number concentrations (N = $3.98{\times}10^{15}$, N = $3.98{\times}10^{14}$, and N = $3.98{\times}10^{13}$) with an increase of the deposition time and applied forces. Deposition behavior was investigated by changing the applied fields (from DC 5 V to 50 V) and the deposition time (5 min to 25 min). The surface microstructures of the as-deposited films were investigated by SEM. The dried films were sintered from $850^{\circ}C$ to $1,050^{\circ}C$ for 2 h and then the microstructures were also explored by SEM. The agglomeration rate was enhanced by increasing the colloid number concentration of colloids. Colloid number concentration in a suspension must be rapidly decreased at higher values of the electric field. ZnO nano-sized colloids had the highest zeta potential value of over -28 mV in methanol. A homogeneous microstructure was obtained at colloid number concentration of N = $3.98{\times}10^{13}$, applied DC field of 5 V/cm and 15 min of deposition time at an electrode distance of 1.5 cm. Under these conditions, the deposited films were sintered at $850^{\circ}C$ and $1,050^{\circ}C$ for 2 h. The results show a typical pore-free surface morphology of a uniform thickness of 400 nm under these experimental conditions.