• Title/Summary/Keyword: 5 다층박막

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Enhanced Efficiency of Organic Electroluminescence Diode Using PEDOT-PSS/NPD-$C_{60}$ Hole Injection/Transport Layers (PEDOT-PSS/NPD-$C_{60}$ 정공 주입/수송 층이 도입된 유기발광소자의 성능 향상 연구)

  • Park, Kyeong-Nam;Kang, Hak-Su;Senthilkumar, Natarajan;Park, Dae-Won;Choe, Young-Son
    • Polymer(Korea)
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    • v.33 no.5
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    • pp.407-412
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    • 2009
  • Vacuum deposited N,N-di-1-naphthyl-N,N-diphenyl-1,1'-biphenyl-4,4'-diamine (NPD) as a hole transporting (HTL) materials in OLEDs was placed on PEDOT-PSS, a hole injection layer (HIL). PEDOT-PSS was spin-coated on to the ITO glass. $C_{60}$-doped NPD-$C_{60}$(10 wt%) film was formed via co-evaporation process and the morphology of NPD-$C_{60}$ films was investigated using XRD and AFM. The J - V, L - V and current efficiency of multi -layered devices were characterized. According to XRD results, the deposited $C_{60}$ thin film was partially crystalline, but NPD-$C_{60}$ film was observed not to be crystalline, which indicates that $C_{60}$ molecules are uniformly dispersed in the NPD film. By using $C_{60}$-doped NPD-$C_{60}$ film as a HTL, the current density and luminance of multi-layered ITO/PEDOT-PSS/NPD-$C_{60}/Alq_3$/LiF/Al device were significantly increased by about 80% and its efficiency was improved by about 25% in this study.

The Effect of Top-electrode Perimeter on the Tunability of Tunable Varactors Based on a BZN/BST/BZN Thin Film (BZN/BST/BZN 박막에 기초한 가변 바렉터의 상부전극 가장자리 길이에 대한 가변성 영향)

  • Lee, Young Chul;Lee, Baek Ju;Ko, Kyung Hyun
    • Journal of Advanced Navigation Technology
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    • v.17 no.6
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    • pp.720-725
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    • 2013
  • This paper has presented that fringing-electric fields enhanced by a finger-type electrode can improve the tunability of the tunable capacitor. Its top electrodes with different area and line width are designed in types of the finger for a long conducting perimeter. The tunable varactors were fabricated on a quartz substrate employing a multi-layer dielectric of a para/ferro/para-electric thin film. Compared to the conventional capacitor, finger-type capacitors are analyzed in terms of effective capacitance and tunablility. Their effective capacitance and tunability of the varactors with the long perimeter increase 24~40 % and 7~12 %, respectively, due to enhanced fringing electric fields from 1 to 2.5 GHz.

Structural properties of $Zn:LiNbO_3/Mg:LiNbO_3$ single crystal thin films grown by LPE method (LPE법으로 성장시킨 $Zn:LiNbO_3/Mg:LiNbO_3$ 단결정 박막의 구조적 특성)

  • Lee, H.J.;Shin, T.I.;Lee, J.H.;Yoon, D.H.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.15 no.3
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    • pp.120-123
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    • 2005
  • The 5 mol% ZnO doped $LiNbO_3$ film and the 2 mol% MgO doped $LiNbO_3$ film were grown on the $LiNbO_3$ (001) substrate by liquid phase epitaxy (LPE) method with $Li_2CO_3-V_2O_5$ flux system. The crytsallinity and the lattice mismatch between $Zn:LiNbO_3$, film and $Mg:LiNbO_3$, film were analyzed by x-ray rocking curve (XRC). In addition, the ZnO and MgO distribution in the cross-section of the multilayer thin films was observed using electron probe micro analyzer (EPMA).

Development of low-k dielectric PECVD system for next generation and characterization of its films (차세대용 저유전막 PECVD 장비 개발과 박막 특성 평가)

  • Kim, Dae-Hee;Kim, Dae-Hyun;Park, So-Yeon;Lee, Do-Hyoung;Seo, Hwa-Il;Kim, Yeong-Cheol
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.148-148
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    • 2009
  • 반도체 소자의 크기가 45 nm 이하로 감소함에 따라 최소 선폭에 따른 다층 배선 연결 구조가 요구되고 있다. 그러나 고집적화 구조는 기생 저항과 정전 용량에 의한 신호지연증가 및 혼선 전력 소모의 문제가 발생한다. 이런 문제를 해결하기 위한 방법 중의 하나는 저저항 배선연결물질과 층간 절연막으로 저유전 상수를 갖는 물질을 사용하는 것이다. 본 연구는 DEMS $(H-Si(CH_3)(OC_2H_5)_2)$ 전구체를 이용하여 저유전막을 증착할 때 사용되는 PECVD (plasma enhanced chemical vapor deposition) 장비를 국내 기술로 개발하고 개발된 장비로 저유전박막을 평가한 것에 관한 것이다. 본 연구에서 평가 및 박막 종확 시 사용한 장비는 MAHA hp 1 type ((주)아토)로서 양산용 PECVD 장비이다. 변수는 C-He의 유랑, 300 mm Si 웨이퍼와 shower head 사이의 거리, 증착 압력, 구동 전력이고, 증착된 저유전막의 두께, 두께의 균일성, 굴절률, 굴절률의 균일성를 평가하였다. 구동 전력이 500W 일 때, C-He의 유량과 진공의 크기를 감소시키면 박막의 두께가 감소하고 박막의 균일성은 증가하였다. C-He의 유량을 증가시키고 shower head 와 Si 웨이퍼 사이의 거리 및 구동 압력을 감소시키면 굴절률과 굴절률의 균일성이 모두 저하되었다. 구동 전력이 700W 일 때, 박막 두께의 경우, 구동 전력이 500W 일 때의 결과와 유사하지만, 박막의 균일성, 굴절률, 굴절률의 균일성은 모든 조건에서 저하되었다.

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Giant Magnetoresistance in Low Dimensional Structures: Highlights and Applications of CIP- and CPP-GMR (저차원 나노구조체의 거대자기저항 현상에 대한 연구: CIP-와 CPP-구조에 대한 자기저항 현상의 주요 연구 및 응용)

  • Jang, Eun-Young;Kim, Tae-Hee
    • Journal of the Korean Magnetics Society
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    • v.17 no.5
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    • pp.210-214
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    • 2007
  • Recent years have seen a rapid development of spintronics. One of the major achievements of this field is the understanding of spin dependent process in various physical systems, for example, metallic multilayers showing the giant magnetoresistance (GMR). Today devices based on the GMR are revolutionizing electronic data storage. In this paper, we review recent developments in the research on GMR of low dimensional structures. We describe the magnetoresistance properties of magnetic multilayers, multilayered nanowires and nonopillars, etc.

The Optical Properties of Sb2O3/Na3AlF6/Sb2O3/Cr Multi Layered Thin Films by EMP Simulation (EMP시뮬레이션을 활용한 Sb2O3/Na3AlF6/Sb2O3/Cr 다층박막의 광 특성)

  • Kim, Jun-Sik;Jang, Gun-Eik
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.4
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    • pp.376-380
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    • 2008
  • The optical properties of multi layered thin films with $Sb_2O_3/Na_3AlF_6/Sb_2O_3/Cr$ were simulated by using EMP(Essential Macleod Program). EMP is a comprehensive software package to design and analyse the optical characteristics of multi-layered thin film. $Sb_2O_3$ and $Na_3AlF_6$ were selected as a high refractive index and low refractive index material respectively. Additionally Cr was chosen as mid reflective material. Optical properties including color effect were systematically studied in terms of different optical thickness of low refractive index material. The optical thickness of $Na_3AlF_6$ was changed as 0.25, 0.5, 0.75 and $1.0\lambda$. The film with 0.25, 0.5, 0.75 and $1.0\lambda$ of optical thickness showed mixed color range between purple and red range, yellowish green and bluish green, purple and mixed color range of green and purple respectively.

Optical bistability in the Fabry-Perot etalon which contains $As_2S_3$ space layer (비정질 $As_2S_3$를 중간층으로 Fabry-Perot 에탈론에서의 광쌍안정에 관한 연구)

  • 김강호;김석원;한성홍
    • Korean Journal of Optics and Photonics
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    • v.8 no.6
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    • pp.466-470
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    • 1997
  • We fabricated the asymmetric Fabry-Perot etalon which contains amorphous $As_2S_3$ as a spacer layer by using the method of optical multilayer coating and observed the optical bistability with the polarization. Optical thickness of the spacer layer is 2$\lambda$ at $Ar^+$ ($\lambda $=514.5 nm) laser wavelength. Optical bistability was observed at the intensities between 80~100 mW and the experiment shows us that the trends of bistable loop of the reflected and the transmitted lights are quite different depending on the state of polarization. This phenomena can be explained as the phase differences of each polarizations are different in the nonlinear Fabry-Perot etalon.

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Color Adjustment Study by Micro-Pattern Embedding in Optical Multilayer Thin Film (다층광학필름에서 마이크로패턴 삽입을 통한 색 조정 연구)

  • Kim, Min;Woo, Ju Yeon;Yoon, Junho;Hwangbo, Chang Kwon;Han, Chang-Soo
    • Journal of the Korean Society for Precision Engineering
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    • v.33 no.5
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    • pp.409-417
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    • 2016
  • It is well known that Morpho butterflies show distinctive, brilliant and iridescent colors and have micro-nano scale structures, instead of dyes and pigments, on their wings. This structural coloration is regarded as a novel technique to express color with a long lifetime, ease and precise tenability. Here, we studied optical multilayer thin films with thickness of several tens of nm ($TiO_2$ and $SiO_2$) and lens-shape micro-patterns. Fabrication and characterization of the multilayer stacking structure and the micro-pattern structure were performed and the films were analyzed via several optical measuring techniques. Finally, we discussed how the micro-pattern structure could enhance independence with color changes according to the viewing angle.

Study on depositing oxide films on Ni substrate for superconducting tape (초전도 테이프 제작을 위한 니켈기판상의 산화물 박막증착에 대한 연구)

  • Kim, Ho-Sup;Shi, Dongqui;Chung, Jun-Ki;Ha, Hong-Soo;Ko, Rock-Kil;Choi, Soo-Jeong;Park, Yu-Mi;Song, Kyu-Jeong;Yeom, Do-Jun;Park, Chan
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07a
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    • pp.531-534
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    • 2004
  • 초전도 coated conductor는 보호층/초전도층/완충층/금속기판의 구조를 가지며 완충층은 다층산화물 박막으로 이루어져 있다. 본 연구에서는 니켈 기판의 원자가 초전도층으로 확산 침투하는 것을 방지하는 YSZ(Yttria Stabilized Zirconia) 박막의 증착방법 및 최적조건에 대하여 소개하고자 한다. 금속타겟을 사용하며 산화반응가스로서 수증기를 사용하는 것을 특징으로 하는 DC reactive sputtering을 이용하여 YSZ를 증착하였으며 기판 온도는 $850^{\circ}C$ 이며 증착시 수증기 분압은 1mTorr이었다. YSZ의 최적두께를 알아보기 위하여 $CeO_2(12.2nm)/Ni$ 상부에 130nm, 260nm, 390nm, 650nm로 두께를 달리하여 YSZ층을 증착하고 SEM으로 박막 표면상태를 관찰한 결과 columnar grain growth를 하며 두께가 두꺼워 질수록 표면조도가 증가함을 알 수 있었다. 4개의 각 시료위에 thermal evaporation 증착법을 이용하여 $CeO_2$를 18.3nm의 두께로 증착한 후 PLD를 이용하여 YBCO 초전도 박막을 300nm 두께로 증착하였고 77K, 0T에서 임계전류가 각각 0, 6A, 7.5A, 5A로 측정되었다. 이는 YSZ층의 두께가 두꺼워질수록 기판 구성원자의 확산방지역할을 충실히 하는 반면에 표면조도는 증가함을 알 수 있었다.

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Anisotropy Effect of Exchange Bias Coupling by Unidirectional Deposition Field of NiFe/FeMn Bilayer (NiFe/FeMn 이중박막의 증착시 자기장에 의한 교환결합력 이방성 효과)

  • Park, Young-Seok;Hwang, Do-Guwn;Lee, Sang-Suk
    • Journal of the Korean Magnetics Society
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    • v.18 no.5
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    • pp.180-184
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    • 2008
  • The relation of ferromagnet anisotropic magnetization and the antiferromagnet atomic spin configuration has been investigated for variously angles of unidirectional deposition magnetic field of FeMn layer in Corning glas/Ta(5 nm)/NiFe(7 nm)/FeMn(25 nm)/ Ta(5 nm) multilayer prepared by ion beam deposition. Three unidirectional deposition angles of FeMn layer are $0^{\circ},\;45^{\circ}$, and $90^{\circ}$, respectively. The exchange bias field ($H_{ex}$) obtained from the measuring easy axis MR loop was decreased to 40 Oe in deposition angle of $45^{\circ}$, and to 0 Oe in the angle of $90^{\circ}$. One other side hand, $H_{ex}$ obtained from the measuring hard axis MR loop was increased to 35 Oe in deposition angle of $45^{\circ}$, and to 79 Oe in the angle of $90^{\circ}$. Although the difference of uniderectional axis between ferromagnet NiFe and antiferromagnet FeMn was 90o, the strong antiferromagnetic dipole moment of FeMn caused to rotate the weak ferromagnetic dipole moment of NiFe in the interface. This result implies that one of origins for exchange coupling mechanism depends on the effect of magnetic field angle during deposition of antiferromgnet FeMn layer.