• Korean Journal of Materials Research
• /
• v.28 no.12
• /
• pp.709-713
• /
• 2018

To improve the etch rate of $Si_3N_4$ thin film, $H_2SiF_6$ is added to increase etching rate by more than two times. $SiO_3H_2$ is gradually added to obtain a selectivity of 170: 1 at 600 ppm. Moreover, when $SiO_3H_2$ is added, the etching rate of the $SiO_2$ thin film increases in proportion to the radius of the wafer. In $Si_3N_4$ thin film, there is no difference in the etching rate according to the position. However, in the $SiO_2$ thin film, the etching rate increases in proportion to the radius. At the center of the wafer, the re-growth phenomenon is confirmed at a specific concentration or above. The difference in etch rates of $SiO_2$ thin films and the reason for regrowth at these positions are interpreted as the result of the flow rate of the chemical solution replaced with fresh solution.

• Korean Journal of Metals and Materials
• /
• v.48 no.11
• /
• pp.1028-1034
• /
• 2010

In the development of 3D package, through silicon via (TSV) formation technology by using deep reactive ion etching (DRIE) is one of the key processes. We performed the Bosch process, which consists of sequentially alternating the etch and passivation steps using $SF_6$ with $O_2$ and $C_4F_8$ plasma, respectively. We investigated the effect of changing variables on vias: the gas flow time, the ratio of $O_2$ gas, source and bias power, and process time. Each parameter plays a critical role in obtaining a specified via profile. Analysis of via profiles shows that the gas flow time is the most critical process parameter. A high source power accelerated more etchant species fluorine ions toward the silicon wafer and improved their directionality. With $O_2$ gas addition, there is an optimized condition to form the desired vertical interconnection. Overall, the etching rate decreased when the process time was longer.

• Applied Chemistry for Engineering
• /
• v.8 no.1
• /
• pp.99-107
• /
• 1997

This study Provides the treatment methods of liquid wastes from the dissolution/purification process of nuclear fuel raw material and the fabrication process of nuclear fuel powder. One of the treatment methods is to process liquid waste from uranium raw material dissolution/purification process. This waste, of the strong acid, can be reused to dissolve the fine ADU particles in filtrate which is ADU waste of pH 8.0 converted from AUC waste after recovery of uranium. To dissolve the fine ADU particles, ADU filtrate was pretreated to pH 4.0 with the dissolution/purification waste, and then mixed with the lime to pH 9.2 and aged for 30 minutes. From this processing, uranium content of the filtrate was decreased to below 3ppm. The waste from fuel powder fabrication is emulsified solution dispersed with fine oil droplets. This emulsion was destroyed effectively by adding and mixing the nitric acid with rapid heating at the same time. After this processing, $Na_2U_2O_7$ compound is produced by addition of NaOH. Optimum condition of this processing was shown at pH 11.5, and uranium content of the filtrate was analyzed to 5ppm. To remove the trace of uranium in the filtrate, lime should be added. Otherwise, 4N nitric acid was used to destroy the emulsion directly, and then lime was added to this waste. Uranium content of the treated filtrate was below 1 ppm. In addition to these wastes, the trace of uranium in filtrate after recovery of uranium from the AUC waste which is produced during PWR power preparation, is treated with NaOH to takeup fluorine(F) in the waste because fluorine is valuable and toxic material. In the finally treated waste, uranium was not detected.

• Food Science of Animal Resources
• /
• v.22 no.1
• /
• pp.59-65
• /
• 2002

This study was carried out to evaluate the effect of whey protein concentrate-80%(WPC-80) and whey protein isolate(WPI) on the growth of B. bifidum Bb-11. Whey proteins($\alpha$-lactalbumin, $\beta$-lactoglobulin) were digested with trypsin, then their hydrolyzates were separated into three fractions (>10,000Da, 3,000∼10,000Da, <3,000Da) by two-step ultrafiltration process with Centriprep 10 and Centricon-30. These three fractions by molecular weight were evaluate growth-promoting effects for the B. bifidum Bb-11. The results obtained were summarized as follows; The growth rate of B. bifidum Bb-11 tended to increase by supplementation of WPC-80 to basal medium, but decreased by supplementation of WPI. Two whey proteins were hydrolyzed by trypsin at 40$\^{C}$ for 6 hrs, and three fractions were collected by UF treatment and concentrated by Centricon-30. Collected concentrations of protein of F-I and F-II and F-III from $\alpha$-lactalbumin were 11.53mg, 7.79mg, and 5.21 mg and those of protein from $\beta$-lactoglobulin were 4.13mg, 5.30mg, and 9.351mg, respectively. Three fractions of $\alpha$-lactalbumin hydrolyzates promoted the growth rate of B. dbifidum Bb-11. Growth promoting activities of hydrolyzates(F-I and F-II) with molecular weight below 10,000Da were stronger than that of hydrolyzate(F-III) above 10,000Da. However, there was no significant difference between the hydrolyzate F-I and F-II. Three fractions of $\beta$-lactoglobulin hydrolyzates improves the growth rate of B.bifidum Bb-ll. The growth of B.bifidum Bb-ll was decreased after 24 hr incubation by supplementation of either F-II or F-III fraction compared to basal Whey medium, but maintained the enhancement by supplementation of F-I.

• Fashion & Textile Research Journal
• /
• v.14 no.4
• /
• pp.597-606
• /
• 2012

To increase the productivity and product quality of customized baseball jerseys, this study developed a multi-variable system for a production process that efficiently controls diverse production management factors. The working time was measured through the establishment of a standard process where skilled workers and Chinese factory workers manufactured 5 sets of the same basic design jerseys. Based on the measured working time (1,136 seconds/per unit), the multi-variable process control system was developed, where hourly production management is possible according to the involved workers and equipment types. Each process was assigned accoding to the production management factors for a total of 28 standard processes. The processes were developed based on consideration of work characteristics according to the order of needlework of open-type set baseball jerseys with sleeves(the basic design of baseball jerseys)to result in a customized production system structure that could be set up with multi-variables. As a result, a total 12 types of systems were developed in consideration of the personnel involved and the number of equipments. The optimal production management system (with the highest efficiency compared to the number of workers)was A-2, B-1, C-1. D-2, E-2, F-1, and G-1. This system had extremely high efficiency and showed 99% assignment efficiency for the 7-person team. Though not optimal, possible process assignment for each working personnel is proposed as a reserve process in case work modification is inevitable due to malfunctions and the absence of equipments.

• Journal of The Korean Astronomical Society
• /
• v.30 no.1
• /
• pp.83-94
• /
• 1997

We have identified the candidates for the primordial galaxies in the process of formation in the Hubble Deep Field (hereafter HDF). In order to select these objects we have removed objects brighter than 29-th magnitude in the HDF images and smoothed the maps with the Gaussian filters with the FWHM of 0.8' and 4' to obtain the difference maps. This has enabled us to find. very faint diffuse structures close to the sky level. Peaks are identified in the difference map for each of three HDF chips with three filters (F450W, F606W, and F814W). They have the apparent AB magnitudes typically between 29 and 31. The objects identified in different wavelengths filters have a strong cross-correlations. The correlation lengths are about 0.8'. This means that an object found in one filter can be also found as a peak within 0.8' separation in another filter, thus telling the reality of the identified objects. This angular scale is also the size of the primordial galaxies which have strong color fluctuations on their surfaces. Their large-scale distribution quite resembles that of nearby galaxies, supporting the idea that these objects are ancestors of the present bright galaxies forming at statistically high density regions. Inspections on individual objects show that these primordial galaxy candidates have tiny multiple glares embedded in diffuse backgrounds. Their radial light distributions are quite different from that of nearby bright galaxies. We may be now looking at the epoch of galaxy formation.

• Journal of Biomedical Engineering Research
• /
• v.29 no.4
• /
• pp.272-277
• /
• 2008

Functional MRI technique was used in this study for examining the language switching mechanisms between the first language (L1) and the second language (L2). Language switching mechanism is regarded as a complex task that involves an interaction between L1 and L2. The aim of study is to find out the brain activation patterns during the phonological process of reading real English words and English words written in Korean characters in a bilingual person. Korean-English bilingual subjects were examined while they covertly read four types of words native Korean words, Korean words of a foreign origin, English words written in Korean characters, and English words. The fMRI results reveal that the left hemispheric language-related regions at the brain, such as the left inferior frontal, superior temporal, and parietal cortices, have a greater response to the presentation of English words written in Korean characters than for the other types of words, in addition, a slight difference was observed in the occipital-temporal lobe. These results suggest that a change in the brain circuitry underlying the relational processes of language switching is mainly associated with general executive processing system in the left prefrontal cortex rather than with a similarity-based processing system in the occipital-temporal lobes.

• Korean Journal of Materials Research
• /
• v.9 no.4
• /
• pp.414-418
• /
• 1999

Typical metal oxide thin films having optical and electrical properties are widely used as inorganic functional materials. Liquid phase deposition(LPD) method, a new low temperature process, has been developed for the several advantages of no vacuum system, low cost, high throughput, and low processing temperature(<$50^{\circ}C$). Silica powder was added to 40wt% hydrofluoro-silicic acid($H_2$SiF\ulcorner) to obtain an immersing solution of silica-saturated hydrofluorosilicic acid solution. Boric acid solution was continuously added in the range from 0 to 0.05M to prepare supersaturated hydrofluorosilicic acid solution. LPD $SiL_2$film was formed with the variation of added amount of $H_2$O. The SiO$_2$thin film could be prepared from hydrofluorosilicic acid by LPD method. The thickness of LPD $_SiO2$film was influenced by the boric acid concentration and added amount of $H_2$O. Silicon in thin film existed as SiF\ulcorner by Raman spectrum.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2002.08a
• /
• pp.526-529
• /
• 2002

Various fluoride films on a glass substrate were prepared and characterized in order to determine the best seed layer for a microcrystalline silicon (${\mu}c$-Si) film growth. Among the various group-IIA-fluoride systems, the $CaF_2$films on glass substrates illustrated (220) preferential orientation and a lattice mismatch of less than 0.7% with Si. $CaF_2$ films exhibited a dielectric constant between $4.1{\sim}5.2$ and an interface trap density ($D_{it}$ as low as $1.8{\times}10^{11}\;cm^{-2}eV^1$. Using the $CaF_2$/glass structure, we were able to achieve an improved ${\mu}c$-Si film at a process temperature of 300 $^{\circ}C$. We have achieved the ${\mu}c$-Si films with a crystalline volume fraction of 65%, a grain size of 700 ${\AA}$, and an activation energy of 0.49 eV.

• Publications of The Korean Astronomical Society
• /
• v.11 no.1
• /
• pp.163-175
• /
• 1996

We propose the development and test result of new optical axis alignment system for the interchangeable F/8 secondary mirror of the BOAO 1.8m telescope system. Since the original system was not equipped with a suitable optical alignment facility, the whole alignment process was performed by hand. It was necessary at least three persons working more than 2 nights and the altitude of the telescope could not exceed 10 degrees, in such altitude the alignment quality was not so good by atmospheric effect. The new system adopts position readable motorized system and remote control operation by the computer installed in observation room, which reduces the number of workers to only one and eliminates the altitude restriction. The defocused CCD image pair obtained at higher altitude makes the aberration estimates more accurately and the number of required alignment loops is reduced from 10 to 4. The system has been installed on September 1, and performed alignment three times. The test results show that the system is stable and accurate, gives better optical performance of the telescope under F/8 focus. We hope to emphasize the fact that the new system will increase observation time of the telescope by about 20 nights per year assuming one alignment in every month.