• Title/Summary/Keyword: 450 mm

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Study of coating process for mass production of non-hydrogen Diamond like carbon films using filtered vacuum arc method (자장 여과 진공 아크법으로 증착되는 수소 없는 DLC 막의 양산을 위한 코팅 공정 연구)

  • Kim, Jong-Guk;Kim, Gi-Taek;Kim, Dong-Sik;Gang, Yong-Jin;Lee, Seong-Hun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2015.05a
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    • pp.72-72
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    • 2015
  • 최근 비철소재 가공용 공구의 이형성 향상 코팅 및 자동차 부품의 고온 환경에서 사용할 수 있는 코팅으로 유망한 수소가 없는 비정질 다이아몬드 카본 막 (Non-Hydrogen Diamond Like Carbon films : ta-C)을 양산할 수 있는 코팅 시스템에 대한 연구 결과를 발표하고자 한다. 본 시스템은 Diamet-600이라고 하며 ta-C의 처리폭은 350 mm, 직경 450 mm 8축 공자전 치구에서 400nm/h의 증착률을 가지며, 막의 경도는 최대 65GPa을 달성하였다.

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Mechanisms of ASR surface cracking in a massive concrete cylinder

  • Kagimoto, Hiroyuki;Yasuda, Yukihiro;Kawamura, Mitsunori
    • Advances in concrete construction
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    • v.3 no.1
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    • pp.39-54
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    • 2015
  • Relative humidity and strains within a massive concrete cylinder (${\varphi}450mm{\times}900mm$) in the drying and the re-saturating process were measured for elucidating the process of ASR surface cracking in concrete. The expansion behavior of mortars in dry atmospheres with various R.H. values and the resaturating process was revealed. Non- or less-expansive layers were formed in near-surface regions in the concrete cylinder in the drying process, but ASR expansions actively progressed in inner portions. After resaturating, R.H. values of near-surface regions rapidly increased with time, but expansions in the regions were found to be very small. However, in the middle portions, of which R.H. values were kept 80% ~ 90% R.H. in the drying process, expansion actively progressed, resulting in further development of surface cracks in the re-saturating process.

Measuring sub-mm emission from local AGN host galaxies by JCMT SCUBA-2

  • Kim, Changseok;Woo, Jong-Hak;Chung, Aeree;Baek, Junhyun;Jadhav, Yashashree
    • The Bulletin of The Korean Astronomical Society
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    • v.46 no.1
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    • pp.54.1-54.1
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    • 2021
  • Observing sub-mm continuum emission from cold dust can play an important role in measuring star formation rates of galaxies, especially in the case of AGN host ones, since AGNs contaminate FIR fluxes by dust heating. To measure star formation rates, we observed total 49 local AGN host galaxies(z<0.2) by SCUBA-2 camera at James Clerk Maxwell Telescope(JCMT) at 450㎛ and 850㎛. We performed several tests with the observed images to determine whether each source is detected, and adopted 3s as the flux upper limit in non-detection cases. Using these measurements and FIR archival data, we modeled spectral energy distributions of the galaxies to estimate star formation rates. The effect of AGN activity on host galaxy star formation will be discussed.

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Wavelength tunability of XeCl laser pumped double-resonator dye laser for DIAL (DIAL용 XeCl 레이저펌핑 쌍공진기색소레이저의 파장가변특성)

  • 이용우;이주희
    • Korean Journal of Optics and Photonics
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    • v.7 no.3
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    • pp.238-243
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    • 1996
  • We have developed XeCl laser pumped double-resonator Dye laser and two-stage amplifier system, and generated simultaneously of alternatively two wavelengths suitable in DIAL system. The developed double-resonator is composed of 1st and 2nd diffraction orders on light incidence angle in grazing-incidence grating method with 1200 g/mm. We have obtained spectral linewidth below 10 pm and the total efficiency dependent on pump energy over 6%. The tuning ranges dependent on 1st and 2nd diffraction orders are 434~470 nm and 436~468 nm, respectively. The amplification gain and rine-450 dye laser by using the double-resonator laser system and measured the distribution of $NO_2$ concentration over Suwon as the result of transmission of laser output of 6 mJ in this DIAL system. Consequently, we have confirmed that the developed dye laser system is very useful as the tunable source for DIAL.

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Anodic bonding Characteristics of MLCA to Si-wafer Using Evaporated Pyrex #7740 Glass Thin-Films for MEMS Applications (파이렉스 #7740 유리박막을 이용한 MEMS용 MLCA와 Si기판의 양극접합 특성)

  • Chung, Gwiy-Sang;Kim, Jae-Min;Yoon, Suk-Jin
    • Journal of Sensor Science and Technology
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    • v.12 no.6
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    • pp.265-272
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    • 2003
  • This paper describes anodic bonding characteristics of MLCA (Multi Layer Ceramic Actuator) to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with same properties were deposited on MLCA under optimum RF magneto conditions(Ar 100%, input power $1\;W/cm^2$). After annealing in $450^{\circ}C$ for 1 hr, the anodic bonding of MLCA and Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in - 760 mmHg. Then, the MLCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity is 0.05-0.08 %FS. Moreover, any damages or separation of MLCA/Si bonded interfaces do not occur during actuation test. Therefore, it is expected that anodic bonding technology of MLCA/Si wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

이중 주파수(Dual Frequency)를 이용한 유도결합 플라즈마 소스의 방전 특성에 관한 연구

  • Kim, Tae-Hyeong;Kim, Gyeong-Nam;Mishra, Anurag;Jeong, Ho-Beom;Bae, Jeong-Un;Yeom, Geun-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.175-175
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    • 2012
  • 플라즈마를 이용하는 공정은 평판 디스플레이와 박막 트렌지스터, LCD 같은 반도체 산업에 널리 사용되고 있다. 최근 이와 같은 산업을 위한 공정은 마이크로 단위 이하에서 진행되고 있으며, 그 크기가 작아질수록 공정을 위한 비용은 증가하게 되었다. 따라서 제품의 대량생산 및 원가절감을 위해 웨이퍼의 대구경화가 진행되었고, 그런 대구경의 웨이퍼을 생산하기 위한 대면적 플라즈마 소스 개발 역시도 필요하게 되었다. 그리고 2014년에는 450 mm 크기의 웨이퍼가 사용될 것으로 예상되고 있다. 450 mm 대구경 웨이퍼용 유도결합플라자마 장치를 이용하여 플라즈마의 특성을 Langmuir probe를 사용하여 측정하였다. 플라즈마를 방전시키는 안테나의 형태는 spiral 형태의 안테나를 사용하였고, 이중주파수를 사용하기 위해 spiral 형태의 안테나를 두개로 나누어 안쪽의 안테나에는 2 Mhz를 바깥쪽의 안테나에는 13.56 Mhz를 인가하였다. 공정 압력은 10 mTorr로 유지하고 안쪽의 2 Mhz 안테나에는 100~800 W까지 변화시키고 바깥쪽의 13.56 Mhz 안테나에는 100~1,000 W까지 변화시켜 그 때의 플라즈마의 특성을 분석해 보았다. Langmuir probe를 이용하여 방전된 플라즈마를 관찰한 결과, 기판 위에서의 플라즈마 균일도가 4~23%가 되는 것을 확인 할 수 있었다. 13.56 Mhz의 인가되는 파워를 고정 시키고 2 Mhz만을 변화시켰을 경우 2 Mhz의 파워를 400 W까지 증가시켰을 때는 플라즈마의 밀도가 서서히 증가하였으나 400 W 이상에서는 밀도가 크게 증가하는 것을 볼 수 있었다. 하지만 플라즈마의 온도와 potential의 경우 밀도와는 반대로 2 Mhz에 인가되는 파워가 증가 될수록 감소하는 경향을 보였다. 위의 실험을 통해 우리는 전자에너지분포함수(EEDFs)를 얻을 수 있었고, 그 안에서 낮은 주파수(2 Mhz)를 이용하여 낮은 에너지를 가진 전자의 밀도를 조절할 수 있다는 것과 높은 주파수(13.56 Mhz)에 인가된 파워가 증가함에 따라 높은 에너지를 얻을 수 있다는 결과를 확인 할 수 있었다.

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Desulfurization characteristics of low sulfur coal by mild pyrolysis (저온 열분해에 의한 저유황 석탄의 탈황 특성)

  • Park, KyeSung;Yun, ChaeKyung;Nam, YoungWoo
    • Clean Technology
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    • v.8 no.1
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    • pp.1-9
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    • 2002
  • Mild pyrolysis of four different coals (two bituminous coals and two Korean antracite) was investigated. Desulfurization characteristics, weight loss and variation of heating values were studied. As operating variables of experiment, pyrolysis temperature($350{\sim}550^{\circ}C$), pyrolysis time(5~20 min.) and particle size(0~3.55mm) were examined. The maximum sulfur removal rate of bituminous coal and anthracite were 38% and 28%, respectively. The optimum mild pyrolysis conditions were 10~15 min for pyrolysis time and $450{\sim}550^{\circ}C$ for pyrolysis temperature. The mild pyrolysis was effective to reduce organic sulfur content. Heating values of char per mass after pyrolysis increased about 5% compared to raw coal. The effect of coal particle size on the desulfurization was not observed.

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Characteristics of Immobilized Rhodopseudomonas sp. for Wastewater Treatment (폐수처리를 위한 고정화 Rhodopseudomonas sp.균의 특성)

  • 이범규;김상희;김중균
    • Journal of Life Science
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    • v.9 no.3
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    • pp.268-275
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    • 1999
  • Rhodopseudomonas sp. was immobilized in three supports(agar, k-carrageenan, and PVA) in order to remove nitrate in wastewater coming from fish farm. Among them 3% agar was the most suitable support when denitrification rate and bead durability were tested. Optimum bead size was 4mm-diameter when the substrate transfer into the bead and shear stress for bead were considered, and optimum cell loading was 25mg dry $cells/cm^2$gel gel. Ethanol was the best as a carbon source, and optimum C:N ratio, temperature and pH were 1.5:1, $31^{\circ}C$,, and 6, respectively. Under these conditions the maximum denitrification rate in synthetic wastewater was $$345{\MU}{\ell};N_2/Cm^3 gel{\cdot}hr;and that in modified MYC medium was 450{\MU}{\ell}};N_2/Cm^3 gel{\cdot}hr $$.

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A Development and Performance Experiment on In-rack Sprinkler Head for Rack Type Warehouse (적층식 대형창고 스프링클러헤드 개발 및 성능실험)

  • Kim, Woon-Hyung;Lee, Jun;Hong, Seong-Ho;Kim, Jong-Hoon;Yang, So-Jin
    • Journal of the Society of Disaster Information
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    • v.15 no.2
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    • pp.214-222
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    • 2019
  • Purpose: The purpose of this study is to develop a sprinkler head that can be controlled and initial suppressed by installing it in a rack-type warehouse. Method: Considering the spray radius and spray pattern, various deflectors were designed, and the spray angle, discharge characteristics and protection performance test was conducted, and these results were compared and analyzed. Results: An optimal sprinkler head was developed to protect full load, front side of a commodity with minimum water volume 115L/min. Conclusion: The developed head of K-115 and 1Bar pressure was tested with one tier storage confirming that the fire control is carried out without burning all the loadings. In addition, the vertical distance from the top of the load to the deflector shall be separated by 450mm and installed to allow sufficient discharge to the outer part of the commodity.

Fracture toughness of high performance concrete subjected to elevated temperatures Part 1 The effects of heating temperatures and testing conditions (hot and cold)

  • Zhang, Binsheng;Cullen, Martin;Kilpatrick, Tony
    • Advances in concrete construction
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    • v.2 no.2
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    • pp.145-162
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    • 2014
  • In this study, the fracture toughness $K_{IC}$ of high performance concrete (HPC) was determined by conducting three-point bending tests on eighty notched HPC beams of $500mm{\times}100mm{\times}100mm$ at high temperatures up to $450^{\circ}C$ (hot) and in cooled-down states (cold). When the concrete beams exposed to high temperatures for 16 hours, both thermal and hygric equilibriums were generally achieved. $K_{IC}$ for the hot concrete sustained a monotonic decrease tendency with the increasing temperature, with a sudden drop at $105^{\circ}C$. For the cold concrete, $K_{IC}$ sustained a two-stage decrease trend, dropping slowly with the heating temperature up to $150^{\circ}C$ and rapidly thereafter. The fracture energy-based fracture toughness $K_{IC}$' was found to follow similar decrease trends with the heating temperature. The weight loss, the fracture energy and the modulus of rapture were also evaluated.