• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.585-588
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• 2003

As the advance in technology requires micro mechanical systems, the production methods for micro parts are of a great interest of many researchers. Although MEMS is one of the most popular methods. it can only produce 2D microstructures. The micro manufacturing with micro-mill and micro-lathe has a great potential for producing arbitrary 3D shapes and are being researched. In this paper, a PC based 5-axis milling machine with high precision was developed. To evaluate the machine performance, micro ribs and micro columns were machined. The machining experiments of micro impeller and micro turbine blade confirmed the possibility of micro system manufacturing by using the developed milling machine.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.2
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• pp.60-69
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• 1998

Polysilicon surface mdoification tecnique is developed to reduce the sticking of microstructures fabricated by micromachining. Modified anti-sticking grain holes are simply formed by two-step dry eth without additional photolithography nor deposition of thin films. Both process-induced sticking and in-use sticking are successfully reduced more than two times by adopting grain holed polysilicon substrate. A sticking model for cantilever beam is derived. This model includes bending moment stems from stress gradient along the thickness directionof structural polysilicon. Because the surface tension of rinse liquid and the surface energy of the solids to be stuk tend to decrease in recently developed anti-sticking techniques, the effect of stress gradient will play an important role to analyze the sticking phenomena. Effect of the temperature during post-release rinse and dry is modelled and verified experimentally. Based on developed anti-sticking polysilicon structure and the sticking model, sticking of microstructure, fabricated by simple wet process including sacrificial layer etch and rinse with deionized water without special equimpment for post-release rinse and dry was alleviated more than 3.5 times.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.26 no.3
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• pp.109-114
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• 2016

Monodispersed $ZnGa_2O_4$ microspheres were synthesized by a facile two-step process consisting of a solvothermal method and calcination process. The prepared monodispersed $ZnGa_2O_4$ microspheres were aggregated into 3D microstructures by self-assembly with a large number of small $ZnGa_2O_4$ particles generated in nucleation. This nucleation and self-assembly making hierarchical microstructures were depended on the concentration of PEG (polyethylene glycol) due to CAC (critical aggregation concentration) theory. And also we controlled the amount of zinc acetate to make pure $ZnGa_2O_4$ phase. Additionally, to fix the optimized calcination condition, sample was characterized by TG-DTA to prove the thermal property in the calcination process and by FT-IR to identify the changes of functional group bonding between each element of the $ZnGa_2O_4$ precursor and oxide calcined at $900^{\circ}C$ for 1 h.

• Journal of Powder Materials
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• v.28 no.2
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• pp.134-142
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• 2021

In this study, AlSi10Mg powders with average diameters of 44 ㎛ are additively manufactured into bulk samples using a selective laser melting (SLM) process. Post-heat treatment to reduce residual stress in the as-synthesized sample is performed at different temperatures. From the results of a tensile test, as the heat-treatment temperature increases from 270 to 320℃, strength decreases while elongation significantly increases up to 13% at 320℃. The microstructures and tensile properties of the two heat-treated samples at 290 and 320℃, respectively, are characterized and compared to those of the as-synthesized samples. Interestingly, the Si-rich phases that network in the as-synthesized state are discontinuously separated, and the size of the particle-shaped Si phases becomes large and spherical as the heat-treatment temperature increases. Due to these morphological changes of Si-rich phases, the reduction in tensile strengths and increase in elongations, respectively, can be obtained by the post-heat treatment process. These results provide fundamental information for the practical applications of AlSi10Mg parts fabricated by SLM.

• Journal of the Korean Society for Heat Treatment
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• v.17 no.5
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• pp.299-304
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• 2004

Influence of Ca addition on microstructure and room temperature mechanical properties has been studied for AZ31(Mg-3%Al-1%Zn-0.2%Mn)-(0~0.5)%Ca wrought alloys, based on experimental results from metallography, X-ray diffractometry and mechanical tests. Yield strength, ultimate tensile strength and hardness of the alloys increased remarkably with increasing Ca content, whereas elongation was deteriorated continuously. Microstructural examination revealed that Ca addition efficiently refined grains of ${\alpha}$(Mg) phase and that some of the Ca dissolved in ${\beta}(Mg_{17}Al_{12})$ precipitates. The former and the latter facts are thought to be responsible for improved strength and loss of ductility of the AZ31+Ca wrought alloys, respectively.

• Electrical & Electronic Materials
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• v.7 no.5
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• pp.417-424
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• 1994

PbNb$_{2}$O$_{6}$ piezoelectric ceramics have good properties, but the applications of them have been limited due to the problems of microstructures. In the present study, effects of additives on the phase stability, microstructure, and electrical proper-ties of ferroetectric phase were investigated. La$_{2}$O$_{3}$, Nd$_{2}$O$_{3}$ and Sm$_{2}$O$_{3}$ were added with the amounts of 1, 3, 5 mol% respectively. The results showed that single orthorhombic(ferroelectric phase) phase compared with the mixed phase of pure PbNb2O6 was obtained. In the case of 5 mol% Nd$_{2}$O$_{3}$ addition, relative density of >95% and dense microstructure with -2.mu.m grain size were obtained.d.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.6 s.183
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• pp.174-179
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• 2006

The curing characteristics of a photocurable resin are critical factors that often decide the ultimate resolution and structural sharpness of a final product fabricated by microstereolithography$(\mu-STL)$. In this study, we investigated the curing characteristics of the FA1260T photopolymer under a visible laser light of 42nm wavelength. Modification of the curing property of the FA1260T is attempted to reduce the cure depth $(D_c)$ by adding a radical quencher to the resin. Also, an organic solvent was used to reduce the resin viscosity for an improvement of the flatness of the liquid surface during layer-by-layer curing. As a result, the minimum $D_c$ has been reduced over a factor of 3 with no abrupt increase. Samples of three dimensional microstructures fabricated using the modified FA1260T are presented.

• Journal of the Korean Ceramic Society
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• v.30 no.6
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• pp.457-468
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• 1993

In oxide matrix-SiC(W) composites, instability and glassy phase formation due to oxidation at the high temperature and the diffusion of Si, respectively, cause brittle fracture and low reliability for ceramic materials. The mode of contribution in each mechanisms induced by matrix-whisker debonding, varies with the morphology of matrix-whisker interfaces. This work has described the dispersion behaviours and stabilization mechanisms in slip systems, and multiple toughening mechanisms by dint of two second phase different from each other when spherical ZrO2 and chemically stable Al2O3(W) is respectively added in Al2O3 matrix. To obtain complexshaped components, slip casted bodies were sintered at 1$600^{\circ}C$, 2hrs up to 98~99% R.D.. Multiple toughening mechanisms in comparison with theories reported until now will be discussed as a result of the phase analysis of ZrO2 by athermal behaviours and microstructural characterizations as well as measured mechanical properties.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.10
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• pp.2187-2193
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• 2002

We present a novel method for 3D microfabrication with LIGA process that utilizes a deep X-ray mask in which a micro-actuator is integrated. The integrated micro-actuator oscillates the X-ray absorber, which is formed on the shuttle mass of the micro-actuator, during X-ray exposures to modify the absorbed dose profile in X-ray resist, typically PMMA. 3D PMMA microstructures according to the modulated dose contour are revealed after GG development. An X-ray mask with integrated comb drive actuator is fabricated using deep reactive ion etching, absorber electroplating, and bulk micromachining with silicon-on-insulator (SOI) wafer. 1mm $\times$ 1 mm, 20 $\mu$m thick silicon shuttle mass as a mask blank is supported by four 1 mm long suspension beams and is driven by the comb electrodes. A 10 $\mu$m thick, 50 $\mu$m line and spaced gold absorber pattern is electroplated on the shuttle mass before the release step. The fundamental frequency and amplitude are around 3.6 kHz and 20 $\mu$m, respectively, for a do bias of 100 V and an ac bias of 20 $V_{p-p}$ (peak-peak). Fabricated PMMA microstructure shows 15.4 $\mu$m deep, S-shaped cross section in the case of 1.6 kJ $cm^{-3}$ surface dose and GG development at 35$^{\circ}C$ for 40 minutes.

• Computers and Concrete
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• v.16 no.1
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• pp.125-140
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• 2015

This paper describes the numerical calculation of elastic properties of a simulated microstructure of cement paste from very early age, when most previous models fail to give accurate results. The development of elastic properties of tricalcium silicate pastes was calculated by discretising a numerical resolution-free 3D vector microstructure to a regular cubic mesh. Due to the connections formed in the microstructure as an artefact of the meshing procedure, the simulated elastic moduli were found to be higher than expected. Furthermore, the percolation of the solids was found to occur even before hydration started. A procedure to remove these artefacts, on the basis of the information available in the vector microstructures was developed. After this correction, a better agreement of the experimental results with calculations was obtained between 20% and 40% hydration. However, percolation threshold was found to be delayed significantly. More realistic estimates of percolation threshold were obtained if either flocculation or a densification of calcium silicate hydrate with hydration was assumed.