• Title/Summary/Keyword: 3D micro structure

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Fabrication of Three-Dimensional Curved Microstructures by Two-Photon Polymerization Employing Multi-Exposure Voxel Matrix Scanning Method (다중조사 복셀 매트릭스 스캐닝법을 이용한 이광자 중합에 의한 마이크로 3차원 곡면형상 제작)

  • Lim, Tae-Woo;Park, Sang-Hu;Yang, Dong-Yol;Kong, Hong-Jin;Lee, Kwang-Sup
    • Polymer(Korea)
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    • v.29 no.4
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    • pp.418-421
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    • 2005
  • Three-dimensional (3D) microfabrication process using two-photon polymerization (TPP) is developed to fabricate the curved microstructures in a layer, which can be applied potentially to optical MEMS, nano/micro-devices, etc. A 3D curved structure can be expressed using the same height-contours that are defined by symbolic colors which consist of 14 colors. Then, the designed bitmap figure is transformed into a multi-exposure voxel matrix (MVM). In this work a multi-exposure voxel matrix scanning method is used to generate various heights of voxels according to each laser exposure time that is assigned to the symbolic colors. An objective lens with a numerical aperture of 1.25 is employed to enlarge the variation of a voxel height in the range of 1.2 to 6.4 um which can be controlled easily using the various exposure time. Though this work some 3D curved micro-shapes are fabricated directly to demonstrate the usefulness of the process without a laminating process that is generally required in a micro-stereolithography process.

Design for Micro-stereolithography using Axiomatic Approach (공리적 설계를 이용한 마이크로 광 조형 장치의 설계)

  • 이승재;이인환;조동우
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.8
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    • pp.106-111
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    • 2004
  • Micro-stereolithography technology has made it possible to fabricate any form of three-dimensional microstructures. It makes a 3D structure by dividing the shape into many slices of relevant thickness along horizontal surface, hardening each layer of slice with a laser, and stacking them up to a desired shape. Until now, however, the micro-stereolithography device was not designed systematically because the key factors governing the device were not considered. In this paper, we designed micro-stereolithography device using axiomatic approach. This paper contains an overview and an analysis of a new proposed system for development of micro-stereolithegraphy device, and detailed descriptions of the activities in this system. The newly designed system offers reduced machine size by minimizing of optical components and decoupled design matrix.

Alignment Algorithm for Nano-scale Three-dimensional Printing System (나노스케일 3 차원 프린팅 시스템을 위한 정렬 알고리즘)

  • Jang, Ki-Hwan;Lee, Hyun-Taek;Kim, Chung-Soo;Chu, Won-Shik;Ahn, Sung-Hoon
    • Journal of the Korean Society for Precision Engineering
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    • v.31 no.12
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    • pp.1101-1106
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    • 2014
  • Hybrid manufacturing technology has been advanced to overcome limitations due to traditional fabrication methods. To fabricate a micro/nano-scale structure, various manufacturing technologies such as lithography and etching were attempted. Since these manufacturing processes are limited by their materials, temperature and features, it is necessary to develop a new three-dimensional (3D) printing method. A novel nano-scale 3D printing system was developed consisting of the Nano-Particle Deposition System (NPDS) and the Focused Ion Beam (FIB) to overcome these limitations. By repeating deposition and machining processes, it was possible to fabricate micro/nano-scale 3D structures with various metals and ceramics. Since each process works in different chambers, a transfer process is required. In this research, nanoscale 3D printing system was briefly explained and an alignment algorithm for nano-scale 3D printing system was developed. Implementing the algorithm leads to an accepted error margin of 0.5% by compensating error in rotational, horizontal, and vertical axes.

Application of OMA on the bench-scale earthquake simulator using micro tremor data

  • Kasimzade, Azer A.;Tuhta, Sertac
    • Structural Engineering and Mechanics
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    • v.61 no.2
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    • pp.267-274
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    • 2017
  • In this study was investigated of possibility using the recorded micro tremor data on ground level as ambient vibration input excitation data for investigation and application Operational Modal Analysis (OMA) on the bench-scale earthquake simulator (The Quanser Shake Table) for model steel structures. As known OMA methods (such as EFDD, SSI and so on) are supposed to deal with the ambient responses. For this purpose, analytical and experimental modal analysis of a model steel structure for dynamic characteristics was evaluated. 3D Finite element model of the building was evaluated for the model steel structure based on the design drawing. Ambient excitation was provided by shake table from the recorded micro tremor ambient vibration data on ground level. Enhanced Frequency Domain Decomposition is used for the output only modal identification. From this study, best correlation is found between mode shapes. Natural frequencies and analytical frequencies in average (only) 2.8% are differences.

Analysis of 3D Geometry and Compressive Behavior of Aluminum Open Cell Foam Using X-ray Micro CT (마이크로 X-ray CT를 활용한 알루미늄 개방형 폼의 형상 및 압축 거동 분석)

  • Kim, Y.I.;Kim, J.H.;Lee, J.K.;Kim, D.
    • Transactions of Materials Processing
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    • v.20 no.7
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    • pp.518-523
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    • 2011
  • The three dimensional geometries of an aluminum open cell foam before and after uniaxial compressive loading were investigated using the X-ray micro CT(computed tomography). Aluminum 6101-T6 open cell foams of 10, 20, 40 ppi (pore per inch) were considered in this work. After the serial sectioning CT images of aluminum foams were obtained from non-destructive X-ray images, the exact 3D structure were reproduced and visualized with commercial image processing program. The relative density ratio was around the 7.0 to 9.0 range, the unit cells showed anisotropic shapes having the different dimensional ratios of 1.1 to 1.3 between the rise and the transverse directions. The yield stress increased with the relative density ratio and the volumetric strain increased proportionally with compressive strain. The plateau stress in the compressive stress-strain curve was caused by the buckling of ligaments.

Design of piezoelectric micro-machined ultrasonic transducer for wideband ultasonic radiation in air (공기 중 광대역 초음파 방사용 압전 박막 기반 초소형 초음파 트랜스듀서의 설계)

  • Ahn, Hongmin;Jin, JaeHyeok;Moon, Wonkyu
    • The Journal of the Acoustical Society of Korea
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    • v.39 no.2
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    • pp.87-97
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    • 2020
  • In this paper, the design of piezoelectric Micro-machined Ultrasonic Transducer (pMUT) for wideband ultrasonic radiation in air was investigated. One of the methods to achieve wide frequency bandwidth in single device is modeling the transducer to multi-resonance system. The new pMUT was designed as a multi-resonance system with the addition of a suitable acoustic structure to the front and back of a thin film structure. A new pMUT consisting of thin film parts, radiation parts, and packaging parts is designed with a Lumped Parameter Model (L.P.M). Finally, it was validated as a Finite Element Method (FEM) simulation. The final designed pMUT achieved a frequency band of 102 kHz ~ 132 kHz (-3 dB).

A Study on the Crystallization of Low Density Polyethylene Microparticles in $n$-Dodecanol Solution ($n$-Dodecanol 용액에서 저밀도폴리에틸렌 마이크로 입자 결정화에 관한 연구)

  • Park, Keun-Ho;Jang, Young-Min
    • Journal of the Korean Applied Science and Technology
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    • v.28 no.3
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    • pp.306-312
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    • 2011
  • In this study, we are crystallized to the low density polyethylene (LDPE) micro-particles in $n$-dodecanol solution by thermally induced phase separation(TIPS) method. The Low density polyethylene micro-particles is used in a wide variety of polymer coatings and industrial application. The utility of that for a particular application depends on a number of factors such as the particle size and distribution, and chemical composition of the materials. However, there are still needs for new methods of preparation which will provide the structure with unique sizes. The widely used processes for micro-size particles are crystallization method and thermally induced phase separation. TIPS process based on the phase separation mechanism was performed for the LDPE system which undergoes liquid-solid phase separation. Effects of various operating parameters were examined on the structure variation of the particles. Professionality, take-up speed and crystallization rate depended on temperature and concentration of polymer in solution.

Micro End-Mill Machining Characters and its Applications (마이크로 앤드밀의 가공특성분석 및 응용가공 연구)

  • Jae, Tae-Jin;Lee, Eung-Sook;Choi, Doo-Sun;Hong, Sung-Min;Lee, Jong-Chan;Choi, Hwan
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.589-592
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    • 2003
  • In the machining process of micros shape by using high-precision machining system and micro end-mill, it is important for machining characters of tools to be grasped in order to stably use tools of micro end-mill. In this study. we carried out an analytical experiment of basic machining features by using end-mill tools for the purpose of damage prevention and manufacture of high quality when the tools of micro end-mill are used. This experiment used a micro machining system with high precision and a variety of end-mill tools commercialized from tens to hundreds microns in diameter. To establish an optimal machining condition without tool damage, cutting force was analyzed according to the changes of tool diameter and cutting conditions such as cutting speed. feed rate, depth of cut. And an examination was performed for the shape and surface illumination of machining surface according to the changes of machining conditions. Based on these micro machining conditions, micro square pillar, cylinder shaft. thin wall with high aspect ratio, and micro 3-D structures such as micro gear and fan were manufactured.

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A Study on the Usefulness of 3D Imaging in Micro-CT for Observing the Microstructure of Mice (흰쥐 미세구조 관찰을 위한 Micro-CT 3D 영상의 유용성에 관한 연구)

  • Lee, Sang-Ho;Lee, Jong-Seok;Lim, Cheong-Hwan;Jung, Hong-Ryang;Chai, Kyu-Yun;Han, Beom-Hee;Han, Sang-Hyun;Hong, Dong-Hee;Han, Tae-Jong;Park, Sung-Hoon;Mo, Eun-Hee;Jun, Hong-Young
    • Journal of Digital Convergence
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    • v.12 no.3
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    • pp.367-375
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    • 2014
  • In this thesis we observe microvascular structure in mice by using micro-computed tomography (CT), which is high-resolution X-ray imaging equipment that can acquire Real-time dynamic image, and it aims to investigate the usefulness of micro-CT developed by Institute for Radiological Imaging Science Wonkwang University School of Medicine. After acquiring the systemic images of rats, contrast-enhanced 3D images of vascular structures could be acquired by using Maximum Intensity Projection (MIP) and Volume Rending Technique (VRT), This was divided into each vascular system of head, abdomen and heart and systemic vascular system.

The Analysis of Chemical Vapor Deposition Characteristics using Focused Ion Beam (FIB-CVD의 가공 공정 특성 분석)

  • Kang E.G.;Choi H.Z.;Choi B.Y.;Hong W.P.;Lee S.W.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.10a
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    • pp.593-597
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    • 2005
  • FIB equipment can perform sputtering and chemical vapor deposition simultaneously. It is very advantageously used to fabricate a micro structure part having 3D shape because the minimum beam size of ${\phi}$ 10nm and smaller is available. Currently FIB is not being applied in the fabrication of this micro part because of some problems to redeposition and charging effect of the substrate causing reduction of accuracy with regards to shape and productivity. Furthermore, the prediction of the material removal rate information should be required but it has been insufficient for micro part fabrication. The paper have the targets that are FIB-CVD characteristic analysis and minimum line pattern resolution achievement fur 3D micro fabrication. We make conclusions with the analysis of the results of the experiment according to beam current, pattern size and scanning parameters. CVD of 8 pico ampere shows superior CVD yield but CVD of 1318 pico ampere shows the pattern sputtered. And dwell time is dominant parameter relating to CVD yield.

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