• Title/Summary/Keyword: 3D deviation

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Analysis of Contact Pressure for a 300mm Wafer Polishing Table with Air-Bag Head (Air-Bag Head 가압식 300mm 웨이퍼 폴리싱 테이블의 가압 분포 해석)

  • Ro, Seung-Kook
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.22 no.2
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    • pp.310-317
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    • 2013
  • In this paper, the contact pressure of the wafer and polishing pad for final polishing process for 300 mm-wafer were investigated through numerical analysis using FEM tool, ANSYS. The distribution of the contact pressure is one of main parameters which affects on the flatness and surface roughness of polished wafers. Two types of polishing head, a hard type head with ceramic disk and a soft type head with air bag were considered. The effects of the deformation and initial shape of table on the contact pressure were also examined. Both heads and tables were modeled as 3D finite element model from solid model, and the material properties of polishing pads and rubber plate for the air-bag head were obtained from tensile tests. The contact pressure deviation on wafer surface was smaller with air bag head than hard type head even when the table had form errors such as convex or concave. From this 3D analysis, it could be concluded that the air-bag head has better uniformity of the contact pressure on wafer. Also, the effects of inner diameter of air bag and radial clearance between wafer and retainer were investigated as view point of contact pressure concentration on the edge of wafer.

A Study on the Adaptive Equalizer for Performance Enhancement in $Q^2PSK$ Modulation System ($Q^2PSK$ 변조 시스템에서 수신 성능 향상을 위한 적응 등화기에 관한 연구)

  • Keum, Hong-Sik;Kim, Yong-Ro;Ryu, Heung-Gyoon
    • The Journal of the Acoustical Society of Korea
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    • v.13 no.1
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    • pp.63-70
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    • 1994
  • In this paper, we Investigate the $Q^2PSK$ modulation and demodulation system and analyze the BER performance of the receiver system under 2-way Rayleigh fading and Gaussian noisy channel environment. The TDL equalizer with the adaptive LMS algorithm is used to improve the receiver performance since the received signal is distorted through that channel and the recovered carrier from the noncoherent demodulation has much phase deviation error. From the results of computer simulation, It is shown that at 12dB SNR, the reception performance is improved by $83.7\%$ in the fading case, $89.3\%$ in the carrier phase error case and $60.4\%$ in the case of the fading and carrier phase error.

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An Approach to Estimate Dielectric Constant of Low-Loss Materials Using Dielectric Slab Loaded Cylindrical Cavity Resonators (유전체 슬랩이 삽입된 원통형 공진기를 이용한 저손실 물질의 유전 상수 측정)

  • Lee, Won-Hui
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.19 no.10
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    • pp.1115-1121
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    • 2008
  • In this paper, dielectric slab loaded cylindrical cavity resonator measurement technique is presented to determine the dielectric constant of a dielectric material. The dielectric constant is measured by the resonant frequency deviation of empty and dielectric slab loaded cavity. Characteristic equations are derived by th exact field analysis. The measurement configurations are formed using HP8719A vector network analyzer and an experimental cylindrical metallic cavity with circular cross-section. The validity of the theory is confirmed by experiments and CST MWS 4.0(3D simulator). The results were in the whole satisfactory. The measured dielectric constant of teflon and bakelite are 2.03 and 4.44, respectively.

Development of Underwater Motion Measurement System for Model Test of Ocean System (해양시스템 모형실험을 위한 수중운동계측시스템 개발 연구)

  • CHOI JONG-SU;HONG SUP
    • Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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    • 2004.11a
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    • pp.166-172
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    • 2004
  • An underwater motion measurement system was constructed for applications to the model basin. A commercial motion capture system, FALCON of Motion Analysis Corp., which corrects automatically the distortion caused by refraction of the light passing through water and air, was adopted for underwater motion measurement. The modifications of FALCON system were performed: waterproofing camera housings, markers, connectors, and a new blue ring lighter. the accuracy of the motion measurement was obtained within the calibration error of 0.87mm in average and 0.89mm in standard deviation for the distance of 500mm between two markers on the calibration device. the volume of $2100mm(length)\times2100mm(breadth)\times2300mm(Height)$ was covered with 4 cameras of the underwater motion measurement system. For the performance verification, motion measurement test of a vertical mooring chain model excited at the top end was carried out. The 3D motions of mooring model were measured with variable amplitude and period of the forced excitation. Higher order motions of the mooring model were observed as the excitation period decreases. the performance of the system was verified by successfully measuring 3D motion of mooring model.

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Carbon Monoxide Sensor Based on a B2HDDT-doped PEDOT:PSS Layer

  • Memarzadeh, R.;Noh, Hui-Bog;Javadpour, S.;Panahi, F.;Feizpour, A.;Shim, Yoon-Bo
    • Bulletin of the Korean Chemical Society
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    • v.34 no.8
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    • pp.2291-2296
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    • 2013
  • An efficient carbon monoxide (CO) sensor was developed based on poly(3,4-ethylenedioxy)thiophenepoly(styrenesulfonate) (PEDOT:PSS) modified with a new pyrimidine-fused heterocyclic compound, bis(2-hydroxyphenyl)dihydropyrido[2,3-d:6,5-d]dipyrimidine-tetraone (B2HDDT). B2HDDT remains stable in the polymer matrix through interactions with functional groups of the polymer. It created prominent sites that captured CO gas, and the experimental parameters, including the amount of doped B2HDDT in the PEDOT:PSS film, were optimized. The sensor probe was also examined to verify its reliability for detecting CO in the presence of atmospheric gases in a discriminating manner. NMR, AFM, and FT-IR spectra were obtained to evaluate the structure and morphology of the B2HDDT-doped PEDOT:PSS (PEDOT:PSS/B2HDDT) film. The content of 35 vol % B2HDDT (7.0 mM) in PEDOT:PSS provided the largest response factor (${\Delta}R/R_o$) for the CO gas. The sensor response was reproducible, with a relative standard deviation < 5% (n = 5). The detection limit was determined to be $0.44{\pm}0.05$ vol %.

Beam pattern analysis for beam homogenization of conformal array sonar (곡면 배열 소나의 빔 균일화를 위한 빔 패턴 분석)

  • Jeong-Ung, Choi;Wooyoung, Hong;Jun-Seok, Lim;Keunhwa, Lee
    • The Journal of the Acoustical Society of Korea
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    • v.41 no.6
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    • pp.637-646
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    • 2022
  • Sub-arrays of arbitrary conformal array have different geometric shape through steering direction, thus the beam patterns of sub-arrays are always non-uniform. In this paper, we apply the beam pattern synthesis method using convex optimization into the conformal array, and shows the improvement of uniformity of beam performance. The simulation is performed with the conformal array of cut-sphere shape. As a result, the standard deviation of 3 dB beamwidth in elevation is greatly reduced but the directivity index is also reduced. To alleviate this trade-off, we propose a convex optimization using a shading function.

Development of capsule fabrication process that can control selective fracture location based on PDMS mold (PDMS 몰드 기반의 선택적 파단 위치 제어가 가능한 캡슐 제작 공정 개발)

  • Lim, Tae-Uk;Cheng, Hao;Wang, Shu-Le;Hu, Jie;Jung, Won-Suk
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2022.04a
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    • pp.245-246
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    • 2022
  • Recently, research on the self-healing of concrete using bacteria has been actively conducted. The self-healing method using bacteria has a low self-healing rate and the surrounding environment of the fracture site is very important. A previous study to solve this problem involves the manufacture of capsules using 3D printing. Fracture position control was an important topic in 3D printing-based capsules. In this study, to compensate for the shortcomings of existing studies, a capsule capable of selective destruction location control was produced using PDMS-based molds that are not restricted by the environment. Resin capsules were prepared for each part using several molds and a bonding surface was arranged. In order to verify this on the bonding surface, fracture strength and wave unit values were analyzed through a three-way compression experiment. It can be seen that as the curing time increases, the deviation between samples decreases. In addition, through experiments, it was confirmed that the junction surface and wave unit values coincide in all three directions. It can be used for self-healing research using various solutions.

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The multi-frequency characteristics of anchovy schools in the east of South Sea of South Korea (남해 동부 멸치어군의 다중주파수 특성)

  • Park, Yeongguel;Seo, Young-Il;Oh, Taeg-Yun;Park, Junseong;Jang, Choong-Sik;Kang, Myounghee
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.51 no.2
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    • pp.235-244
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    • 2015
  • The multi-frequency characteristics of anchovy schools were investigated using six acoustic lines collected at 38 and 120 kHz while a primary trawl survey was conducted from 14 April and 18 April of 2014 in off the coast of Tongyeong and Geo-je. Here, the frequency characteristics mean ${\Delta}MVBS$ that is the difference of Mean Volume Backscattering Strength at two frequencies. To use the characteristics effectively, the optimal cell size ($10{\times}2m$) was determined by examining several different cell sizes in consideration with the shapes of fish schools and the ${\Delta}MVBS$ pattern. By examining 6 histograms of ${\Delta}MVBS$, afternoon groups were occupied more in the ${\Delta}MVBS$ range of -6~-4 dB than that of -4~-2 dB, comparing to morning groups. The ${\Delta}MVBS$ range of the morning groups was between -16.9 dB and 11.6 dB, and that of the afternoon groups -16.7 dB and 13.0 dB. The average and standard deviation were $-3.9{\pm}3.6$ dB in the morning and $-4.1{\pm}3.4$ dB in the afternoon, suggesting that morning groups were 2 dB higher than afternoon groups. The ${\Delta}MVBS$ range of all anchovy schools regardless of morning and afternoon was between -16.9 dB and 13.0 dB, their average ${\Delta}MVBS$ was $-4.1{\pm}3.5$ dB. The characteristics can support to identify anchovy species in the waters where multiple fish species are distributed. It is hoped that this study presents the availability and benefit of acoustic data from a primary trawl survey.

A Study on the Estimating Solar Radiation for Arbitrary Areas (임의의 지점에 대한 일사예측에 관한 연구)

  • Jo, D.K.;Lee, T.K.;Cho, S.H.;Chea, Y.H.;Auh, P.C.
    • Solar Energy
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    • v.9 no.3
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    • pp.25-36
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    • 1989
  • It is necessary to estimate the regression coefficients in order to predict the monthly mean daily global radiation on a horizontal surface. Therefore many different equations have proposed to evaluate them for certain areas. In this work a new correlation has been made to predict the solar radiation for any area over Korea by estimating the regression coefficients taking into account latitude, percentage of possible sunshine, and cloud cover. Particularly, the single linear equation proposed by Page & Garg shows reliable results for estimating the global radiation with average deviation of -1 to 3% from the measured values.

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Compression and Dewatering of Chinese Cabbage (배추의 압축탈수특성에 관한 연구)

  • Kim, Y.J.;Lee, D.H.;Lee, Y.B.
    • Journal of Biosystems Engineering
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    • v.19 no.1
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    • pp.3-8
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    • 1994
  • An experiment on the expression and dewatering of chinese cabbage was conducted in order to investigate its dewatering behavior. Chopped cabbage was packed into cylinder and pressed by piston upto the predetermined pressure on Instron-1000. The rates of dewatering were affected domintantly by the applied pressure, but not significantly by the packed amount of cabbage in the cylinder. The pressure effect was increased very abruptly at first, but the increase rate was very low at high pressure greater than 20 MPa, showing great deviation from linear dependence of flow rate on pressure in Darcy's Law. Therefore, water expression from cabbage was not Newtonian flow of water through cell wall. In fact, the squeezed water contained a lot of solid particles, about 3% of solid cabbage particles, showing destruction of cell wall. It appeared that compression and dewatering of vegetable wastes in the low pressure. under 20 MPa, is more desirable for later treatment of the dewater. More researches are needed in order to develop a treatment method for the solid particles in the expressed water before an expeller treatment system can be applied to vegetable wastes.

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