• Title/Summary/Keyword: 3D Micro pattern

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New Fabrication Method of the Electron Beam Microcolumn and Its Performance Evaluation (초소형 전자칼럼의 제작 및 특성 연구)

  • Ahn S;Kim D. W;Kim Y. C;Ahn S. J;Kim Y. J;Kim H. S
    • Korean Journal of Materials Research
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    • v.14 no.3
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    • pp.186-190
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    • 2004
  • An electron beam microcolumn composed of an electron emitter, micro lenses, scan deflector, and focus lenses have been fabricated and tested in the STEM mode. In this paper, we report a technique of precisely aligning the electron lenses by the laser diffraction patterns instead of the conventional alignment method based on aligner and STM. STEM images of a standard Cu-grid were observed using a fabricated microcolumn under both the retarding and accelerating modes.

Quantitative Observation on the Behavior of the Smoky Brown Cockroach, Periplaneta fuliginosa(Seville): Presence at Important Micro-havitats of Rearing Cages in the Laboratory (먹바퀴, Periplaneta fuliginosa(Seville), 습성의 계량적 관찰: 실험실내 사육상의 중요 미소서식처에서의 출현)

  • 전태수;박영석
    • Korean journal of applied entomology
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    • v.32 no.3
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    • pp.354-371
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    • 1993
  • Behavior of adult females of the smoky brown cockroach was observed for 10-15 days continuously by using computer and the automatic sensoring system. Under the light condition of l2L~ 12D, individual variations were generally higher and the periodicity appeared less in terms of the presence time at the micro-habitats and the locomotory activity. The smoky brown cockroach appeared 20.42, 11.50, 6.31 and 2.66 % in a day in averages respectively at the shelter and the places for other individuals, feeding and drinking. It stayed 20.29 % in a day at the shelter when food, water, and other individuals were not supplied. Visiting rates were higher at the feeding and dnnking places than at. the ot.her micro-habitats. The degree of t.he locomotory activity was relatively lower when food, water, and other individuals were not supplied t.han when they were supplied. The Pnncipal Component Analysis (PCA) on the presence at the micro-habitats showed that. t.he presence pattern for each mdividual appeared differently (Q mode) while the differem time zones were grouped to the photophase and scotophase (R mode). When food, water, and other individuals were supplied the degree of grouping was higher at the shelter than at the places for feeding and drinking. When the act.ivityand the presence time at the different micro-habitats were jointly analyzed by PCA, the achvity of the female smoky brown cockroach appeared in relation with the presence time ( %) at the places for feeding and other individuals.

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Farbrication of Repeated 3D Shapes using Magnetorheological Fluid Polishing (자기유변유체 연마공정을 응용한 미세부품의 형상가공)

  • Kim Y.J.;Min B.K.;Lee S.J.;Seok J.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1265-1268
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    • 2005
  • Due to the increase of the need for reliable high density information storage devices, the demand for precise machining of the slider in HDD is rapidly growing. The present fabrication process of slider bears some serious problems such as low yield ratio in mass production, which is mainly caused by inefficient machining processes in shaping camber and crown on the slider. In order to increase slider yield ratio in HDD, a new systematic machining process is proposed and developed in this work. This new machining process includes the use of magnetorheological (MR) fluid, a smart polishing material generally used for ultra-fine surface finishing of micro structures. It is shown that the process proposed in this work enables to make camber and crown pattern in the scale of few tens of nanometers. Experiment results shows that the MR polishing can be also used for shaping process of micro structures.

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A study on the optimal control of Long Stroke Fast Tool Servo Systems (장거리 구동용 FTS 의 최적 제어에 관한 연구)

  • 이상호;이찬홍;김갑순
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.10a
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    • pp.818-821
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    • 2004
  • With a rapid development in the area of micro and ultra precision technology, the micro surface machining of small size parts are explosively increased. Especially, to improve efficiency of various beams in lens and reflector, non-rotational symmetric form and several mm level heights changeable surface can be machined at a time. These geometric complex 3D surface cannot be machined by general short stroke FTS. The long stroke FTS if firmly needed to move directly several mm and have nm level positioning accuracy for the complex surface form. The long stroke FTS used linear motors to drive moving unit long and fine, aero static bearings to decrease friction and moving errors in guide way, optical linear scale with nm level resolution to measure position of FTS. Furthermore, to increase the performance of acceleration of FTS, the light material, such as AL is used for the structure and the high stiffness box type structure is selected. In this paper, the genetic algorithm approach is described to determine a set of design parameters for auto tuning. The authors have attempted to model the design problem with the objective of minimizing the error, such as variable pattern change. This method can give the better alternative than existing other method.

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Fabrication of Microstructure Array using the Projection Microstereolithography System (전사방식 마이크로광조형을 이용한 배열 형태 미세 구조물 가공)

  • Choi, Jae-Won;Ha, Young-Myoung;Lee, Seok-Hee
    • Journal of the Korean Society for Precision Engineering
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    • v.24 no.8 s.197
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    • pp.138-143
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    • 2007
  • Microstereolithography technology is similar to the conventional stereolithography process and enables to fabricate a complex 3D microstructure. This is divided into scanning and projection type according to aiming at precision and fabrication speed. The scanning MSL fabricates each layer using position control of laser spot on the resin surface, whereas the projection MSL fabricates one layer with one exposure using a mask. In the projection MSL, DMD used to generate dynamic pattern consists of $1024{\times}768$ micromirrors which have $13.68{\mu}m$ per side. The fabrication range and resolution are determined by the field of view of the DMD and the magnification of the projection lens. If using the projection lens with high power, very fine microstructures can be fabricated. In this paper, the projection MSL system adapted to a large surface for array-type fabrication is presented. This system covers the meso range, which is defined as the intermediate range between micro and macro, with a resolution of a few ${\mu}m$. The fabrication of array-type microstructures has been demonstrated to verify the performance of implemented system.

Laser Head Design and Heat Transfer Analysis for 3D Patterning (3차원 패터닝을 위한 레이저 헤드설계 및 열해석)

  • Ye, Kang-Hyun;Choi, Hae-Woon
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.15 no.4
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    • pp.46-50
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    • 2016
  • A laser head was designed for micro-scale patterning and joining applications. The target feature size of the pattern was $100{\mu}m$, and optics were designed to perform the target. Two singlet lenses were combined to minimize the chromatic aberration, and the geometry of the lenses was calculated by using the raytracing method with a commercial software program. As a restriction of lens design, the focal length was set at 100mm, and the maximum diameter of the lens or beam size was limited to 10mm for the assembly in the limited cage size. The maximum temperatures were calculated to be $1367^{\circ}C$, $1508^{\circ}C$, and $1905^{\circ}C$ for 10, 12, and 15 Watts of power, respectively. A specially designed laser head was used to compensate for the distance between the object and the lens. The detailed design mechanism and 3D data were presented. The optics design and detailed performance of the lens were analyzed by using MTF and spot diagram calculation.

A Study on a Planar Folded RFID Reader Antenna by Minimizing Hand Effects For UHF Band Application (Hand effect를 최소화한 평판 격자형 UHF대역 RFID 리더 안테나에 관한 연구)

  • Park, Joung-Geun;Lee, Jong-Chul
    • The Journal of The Korea Institute of Intelligent Transport Systems
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    • v.11 no.4
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    • pp.80-85
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    • 2012
  • In this paper, a new planar folded UHF band RFID reader antenna is suggested. For the antenna suggested in this paper, 4 PIFA (Planar Inverted F Antenna) micro-strip structures are adopted. The size is $50mm{\times}50mm{\times}6.2mm$. The gain of the antenna is 1.1 dBi, the VSWR is 1.2:1, and the efficiency is 63.3 %. The radiation pattern is designed as upper direction. Identification distance for the RFID tags is improved by minimizing hand effects with properly integrating 4 PIFAs.

Effect of Abrasive on the Machinability in Powder Blasting (Powder Blasting 시 분사재에 따른 가공특성)

  • 김광현;최영현;박동삼
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.520-523
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    • 2002
  • The o]d technique of sandblasting which has been used for paint or scale removing, deburring, and glass decorating has recently been developed into a powder blasting technique for brittle materials, capable of producing micro structures larger than $100\mu\textrm{m}$. In this study, we investigated the effect of the size of abrasive and the stand-off distance on the machinability of SUS 304. The varying parameters were the impact angle $90^{\circ}$, scanning times of nozzle 10 and the different nozzle height between 70mm and 140mm. The diameter of dot pattern were 0.2mm. The powder were alumina sharp particles, WA #600, #800 and #2000. The blasting pressure of powder at 0.3 Mpa.

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FE analysis of Extrusion Process and Estimation of welding strength for Micro Multi Cell Tube with Serration (세레이션형 미세 멀티셀 튜브 압출 및 접합강도 평가)

  • Lee Jung Min;Kim Byung Min;Jo Hyung Ho;Kang Chung Gil
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.9 s.174
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    • pp.49-59
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    • 2005
  • This paper describes a development of the extrusion process and estimation of the weldability for multi cell tubes used to cooling system of automobiles. A study on extrusion process is performed through the 3D FE simulation in non-steady state and extrusion experimentation. Also, nano-indentation test is employed to estimate the weldability of tubes. Especially, An evaluation of the weldability using the nano-indentation is accomplished as compared with nano-hardness in welded part and in the others. Finally, the pattern of the mandrel defection is investigated according to shapes of the porthole and/or chamber.

Growth and characterization of $Al_{2}O_{3}-based\;Y_{3}Al_5O_{12},\;ZrO_{2}$ binary and ternary eutectic fibers

  • Lee, J.H.;Yoshikawa, A.;Kaiden, H.;Fukuda, T.;Yoon, D.H.;Waku, Y.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.11 no.4
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    • pp.170-175
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    • 2001
  • It was possible to grow the $Al_{2}O_{3}$ based $Y_{3}A_{5}O_{12}(YAG),ZrO_{2}$ binary and ternary eutectic fibers using micro-pulling down method with a growing rate of 0.1~15 mm/min. While $Al_{2}O_{3}/ZrO_{2}$ showed cellular-lamellar structure, $Al_{2}O_{3}$/YAG and $Al_{2}O_{3}$/YAG/$ZrO_{2}$ternary eutectic fibers showed homogeneous Chinese script lamellar structures. The microstructures of $Al_{2}O_{3}/ZrO_{2}$ binary eutectic fibers changed with solidification rate from lamellar pattern to cellular structure. The interlamellar spacing agreed with the inverse-square-root dependance on pulling rate according to $\lambda$=$kv_p\;{-1/2}$. $Al_{2}O_{3}/ZrO_{2}$ binary eutectic fibers recorded the highest tensile strength of about 1560MPa at room temperature. $Al_2O_3/YAG/ZrO_2$ternary eutectic fiber showed excellent thermal stability to $1200^{\circ}C$ without significant decrease. The maximum strength of ternary eutectic fibers recorded were 1100MPa at $25^{\circ}C$ and 970MPa at $1200^{\circ}C$, respectively.

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