• Journal of the Semiconductor & Display Technology
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• v.19 no.3
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• pp.12-18
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• 2020

In semiconductor manufacturing, defect detection is critical to maintain high yield. Currently, computer vision systems used in semiconductor photo lithography still have adopt to digital image processing algorithm, which often occur inspection faults due to sensitivity to external environment. Thus, we intend to handle this problem by means of using Mask R-CNN instead of digital image processing algorithm. Additionally, Mask R-CNN can be trained with image dataset pre-processed by means of the specific designed digital image filter to extract the enhanced feature map of Convolutional Neural Network (CNN). Our approach converged advantage of digital image processing and instance segmentation with deep learning yields more efficient semiconductor photo lithography inspection system than conventional system.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.1760-1762
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• 2000

본 논문은 기존의 $Si_{3}N_4$, SiN 물질 대신 Pt를 사용해 HF 용액속에서 다공질 실리콘과 전극을 동시에 형성하는 기술을 개발하였다. Pt를 실리콘 웨이퍼 위에 직접 증착한 후 습식 에칭과 Lift-off 공정을 사용하여 Pt를 패터닝하였다. 습식 에칭은 에칭용액의 온도를 일정하게 유지하는 것이 중요하며, 증착한 Pt 박막이 BOE 에칭에 견디고, Lift-off 공정이 가능하기 위해서는 기판온도를 l100$^{\circ}C$ 이하로 해야한다. Pt를 사용하면 기존의 mask에서 발생하는 가장자리 부분에서의 전류 집중이 방지되기 때문에 다공질 실리콘이 일정한 깊이로 형성되고, Al대신 오믹 전극으로 사용할 수 있다. 현재 Pt를 mask와 전극으로 이용한 P-I-N UV detector, 광 바이오센서, 습도센서 제작등에 응용 연구가 진행되고 있다.

• Proceedings of the KIEE Conference
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• 1996.11a
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• pp.457-461
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• 1996

An optimum design methodology for the power MOSFET's with a predetermined mask is proposed and verified by comparing with the results of MEDICI simulation and the data of commercially available devices. Optimization is completed by determining a doping concentration and a thickness of the epitaxial layer which satisfy a specific voltage and current rating requirements as well as a minimum on-resistance for the mask set. The commercial HEX-1 mask set with a die area of $40.4{\times}10^{-3}\;cm^2$ and a T0-220 package has the on-resistance of $1.5{\Omega}$ at 200 V/2.5 A rating while the M-1 mask from this study exhibits $0.6{\Omega}$ on-resistance at 200 V/6 A. The 60 % reduction in the on-resistance and 58 % enhancement in the current rating have been obtained by the proposed method.

• Annual Conference on Human and Language Technology
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• 2022.10a
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• pp.3-9
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• 2022

본연구는 한국어 언어모델 트레이닝 단계에서 자주 사용되는 Fill-Mask 태스크와 직업 관련 키워드로 구성되는 각종 성별 유추 템플릿을 이용해 한국어 언어모델에서 발생하는 성별 편향 현상을 정량적으로 검증하고 해석한다. 결과를 봤을 때 현재 직업 키워드에서 드러나는 성별 편향은 각종 한국어 언어모델에서 이미 학습된 상태이며 이를 해소하거나 차단하는 방법을 마련하는 것이 시급한 과제이다.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.18 no.12
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• pp.3055-3062
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• 2014

3D integral imaging technique with an active mask is capable of displaying real 3D images with high resolution in space. In this paper, we present a novel 3D/2D convertible integral imaging display system using an active mask. For the proposed method, the principles of 3D, 2D, and 3D/2D composed operations are explained according to the displayed images through two LCD panels. In 3D mode, the elemental images and the mask images are displayed in two display panels. On the other hand, the light source image and 2D image are displayed in 2D mode. In addition, 3D/2D mode is obtained using the spatial separation for 3D and 2D modes. To show the feasibility of the proposed method, we carry out the preliminary experiments and present the optical results.

• Journal of Mechanical Science and Technology
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• v.20 no.9
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• pp.1361-1370
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• 2006

An electronic beam mis-landing phenomenon on the RGB (red/green/blue) -fluorescent surface has been considered as one of serious problems to be solved in cathode-ray tube (CRT), which is generally caused by mechanical shock and vibration. In this work, structural design concepts on the major parts of the CRT, such as a frame, a shadow mask, and a spring, are studied to improve the mechanical shockproof character of a CRT by FEM-analyses and experimental approaches ; a frame is newly designed to have strength employing the double-corner-beads which reduces considerably the distortion of the frame and the shadow mask : the edge-bead of a shadow-mask is redesigned to maintain the wide curved surface of a shadow-mask after mechanical shock : finally, a spring supporting the frame and the shadow-mask is designed to have enough flexibility along drop-direction. As an example, a conventional type of a 15inch CRT was utilized to demonstrate the feasibility and usefulness of this work. Overall, some favorable information on the structural design of the CRT is achieved, and the mechanical shockproof character of a 15-inch CRT is improved in the degree of 3G $(1G=9.81m/s^2)$ as an average-value.

• Korean Journal of Optics and Photonics
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• v.18 no.5
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• pp.303-308
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• 2007

We report here on the application of a digital holographic microscope as a metrology tool for the inspection and the micro-topography reconstruction of different micro-structures of phase shift photo-mask (PSM). The lithography by phase shift photo-mask uses the interference and the pattern of the PSM is not imaged by general optical microscope. The technique allows us to obtain digitally a high-fidelity surface topography description of the phase shift photo-mask with only one hologram image acquisition, allowing us to have relatively simple and compact set-ups able to give quantitative information of PSM.

• Clean Technology
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• v.4 no.1
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• pp.60-67
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• 1998

As workers' health and welfare are becoming increasingly important, there are needs for protecting workers from being exposed to dust particles in workplace. One of the simplest ways to protect workers is to wear a one-time-use mask of the 3M type. Although conventional masks are convenient to use, they provide low filtration efficiency simply because of air leaks through interface between the face and the mask. In this study, a new type of mask is developed and tested. The air which is filtered first using high efficiency particulate air(HEPA) filter is supplied to the nose area of workers' face. The developed mask was tested for filtration efficiency and for workers' acceptance. Very good results were obtained for both accounts.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.13 no.3
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• pp.1434-1449
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• 2019

Video object segmentation is a significant task in computer vision, but its performance is not very satisfactory. A method of video object segmentation using weakly temporal information is presented in this paper. Motivated by the phenomenon in reality that the motion of the object is a continuous and smooth process and the appearance of the object does not change much between adjacent frames in the video sequences, we use a feed-forward architecture with motion estimation to predict the mask of the current frame. We extend an additional mask channel for the previous frame segmentation result. The mask of the previous frame is treated as the input of the expanded channel after processing, and then we extract the temporal feature of the object and fuse it with other feature maps to generate the final mask. In addition, we introduce multi-mask guidance to improve the stability of the model. Moreover, we enhance segmentation performance by further training with the masks already obtained. Experiments show that our method achieves competitive results on DAVIS-2016 on single object segmentation compared to some state-of-the-art algorithms.

• Journal of Information Processing Systems
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• v.18 no.3
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• pp.411-427
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• 2022

Digging historical and cultural information from seals in ancient books is of great significance. However, ancient Chinese seal samples are scarce and carving methods are diverse, and traditional digital image processing methods based on greyscale have difficulty achieving superior segmentation and recognition performance. Recently, some deep learning algorithms have been proposed to address this problem; however, current neural networks are difficult to train owing to the lack of datasets. To solve the afore-mentioned problems, we proposed an SEL-RefineMask which combines selector of feature pyramid network (SEL-FPN) with RefineMask to segment and recognize seals. We designed an SEL-FPN to intelligently select a specific layer which represents different scales in the FPN and reduces the number of anchor frames. We performed experiments on some instance segmentation networks as the baseline method, and the top-1 segmentation result of 64.93% is 5.73% higher than that of humans. The top-1 result of the SEL-RefineMask network reached 67.96% which surpassed the baseline results. After segmentation, a vision transformer was used to recognize the segmentation output, and the accuracy reached 91%. Furthermore, a dataset of seals in ancient Chinese books (SACB) for segmentation and small seal font (SSF) for recognition were established which are publicly available on the website.