• Journal of the Optical Society of Korea
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• v.18 no.5
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• pp.531-537
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• 2014

Through-silicon vias (TSVs) are fine, deep holes fabricated for connecting vertically stacked wafers during three-dimensional packaging of semiconductors. Measurement of the TSV geometry is very important because TSVs that are not manufactured as designed can cause many problems, and measuring the critical dimension (CD) of TSVs becomes more and more important, along with depth measurement. Applying white-light scanning interferometry to TSV measurement, especially the bottom CD measurement, is difficult due to the attenuation of light around the edge of the bottom of the hole when using a low numerical aperture. In this paper we propose and demonstrate four bottom CD measurement methods for TSVs: the cross section method, profile analysis method, tomographic image analysis method, and the two-dimensional Gaussian fitting method. To verify and demonstrate these methods, a practical TSV sample with a high aspect ratio of 11.2 is prepared and tested. The results from the proposed measurement methods using white-light scanning interferometry are compared to results from scanning electron microscope (SEM) measurements. The accuracy is highest for the cross section method, with an error of 3.5%, while a relative repeatability of 3.2% is achieved by the two-dimensional Gaussian fitting method.

• Journal of the Korean Geosynthetics Society
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• v.16 no.1
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• pp.63-72
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• 2017

This study estimates the degree of influence of factors influencing ground surface settlement during tunnel excavation using Shield tunneling trough 3D FE-analyses. Numerical analysis was carried out by considering face pressure, skinplate pressure, excavation length, soil model, element size and soil material properties. Also, Actually constructed shield TBM comparative analysis was conducted by compared with Volume loss model, Pressure model and field measurement data. Skinplate pressure and soil model were the most influential factors, and the analysis results were similar to field measurements when the appropriate skinplate pressure was applied according to the passing stratum.

• Economic and Environmental Geology
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• v.33 no.1
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• pp.41-50
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• 2000

Geo-radar survey which has the advantage of high-resolution and relatively fast survey has been widely used for engineering and environmental problems. Three-dimensional effects have to be considered in the interpretation of geo-radar for high-resolution. However, there exists a trouble on the analysis of the three dimensional effects. To solve this problem an efficient three dimension numerical modeling algorithm is needed. Numerical radar modeling in three dimensional case requires large memory and long calculating time. In this paper, a finite difference method time domain solution to Maxwell's equations for simulating electromagnetic wave propagation in three dimensional media was developed to make economic algorithm which requires smaller memory and shorter calculating time. And in using boundary condition Liao absorption boundary. The numerical result of cross-hole radar survey for tunnel is compared with real data. The two results are well matched. To prove application to three dimensional analysis, the results with variation of tunnel's incident angle to survey cross-section and the result when the tunnel is parallel to the cross-section were examined. This algorithm is useful in various geo-radar survey and can give basic data to develop dat processing and inversion program.

• 한국전산유체공학회:학술대회논문집
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• 2010.05a
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• pp.315-319
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• 2010

The near wake of square section cylinders with different corner radii is studied by numerical method to investigate the influence of corner radius. Eight models, R/D=0, 0.05, 0.1, 0.15, 0.2, 0.3, 0.4, 0.5 (R is the corner radius and D is the characteristic dimension of the body) at Re=500 were studied. The numerical results of St, CD and CL at R/D=0 and R/D=0.5 were compared with experiments to prove the feasibility and also investigate the trend of flow phenomena by the various radius corners. Results indicate that, as R/D ratio is increased, the Strouha lnumber is increased, the minimum pressure point on the cylinder surface moved own stream. The calculated results shows that between R/D=0.15 to R/D=0.3 have CD and CL.

• Geomechanics and Engineering
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• v.23 no.3
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• pp.217-225
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• 2020

In this paper, the thermoelastic interactions in a two-dimension porous body are studied. This problem is solved by using the Green and Lindsay (GL) generalized thermoelasticity model under fractional time derivative. The derived approaches are estimated. with numeral results which are applied to the porous mediums in simplifying geometrical. The bounding plane surface of the present half-space continuum is subjected to a pulse heat flux. We use the Laplace-Fourier transforms methods with the eigenvalues approach to solve the problem. The numerical solutions for the field functions are obtained numerically using the numerical Laplace inversion technique. The effects of the fractional parameter and the thermal relaxation times on the temperature field, the displacement field, the change in volume fraction field of voids distribution and the stress fields have been calculated and displayed graphically and the obtained results are discussed.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.4
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• pp.225-234
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• 2009

The present study has been preformed to investigate the effect of obstacles around a cooling tower with air-guide to prevent recirculation. The external region as well as the cooling tower are included in the computational domain to analyze the flow phenomena around a cooling tower accurately. Three-dimensional analysis is performed using the finite volume method with non-orthogonal and unstructured grid system. The standard turbulence model is used to consider the turbulence effect. In order to investigate the recirculation phenomena, flow and temperature fields are calculated with the distance between cooling tower and obstacle, the allocated geometrical type and the air-guide. The moisture fraction rates decrease with increment of the distance between cooling tower and obstacle. The effect of air-guide to reduce the mean recirculation rate is obviously observed.

• Proceedings of the KSME Conference
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• 2008.11b
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• pp.2401-2405
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• 2008

In the present study, a three-dimensional least square/level set based two-phase flow code was developed for the simulation of three-dimensional sloshing problems using finite element discretization. The present method can be utilized for the analysis of a free surface flow problem in a complex geometry due to the feature of FEM. Since the finite element method is employed for the spatial discretization of governing equations, an unstructured mesh can be naturally adopted for the level set simulation of a free surface flow without an additional load for the code development except that solution methods of the hyperbolic type redistancing and advection equations of the level set function should be devised in order to give a bounded solution on the unstructured mesh. From the numerical experiments of the present study, it is shown that the proposed method is both robust and accurate for the simulation of three-dimensional sloshing problems.

• Journal of the Korean Society for Railway
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• v.15 no.1
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• pp.1-8
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• 2012

Wheelset dynamic analysis is a key element to determine the degree of accuracy of railway vehicle dynamics. In this study, a three-dimensional wheelset dynamic analysis is presented in such a way that the precise wheel-rail contact analysis in three-dimension is implemented into the dynamic equations of a wheelset. A numerical procedure that can be used for the analysis of a wheelset dynamics when the wheel-rail two point contact occurs in a cornering maneuver is developed. Numerical solutions of the constraint equations and the dynamics equations of a wheelset are achieved by using Runge-Kutta method. The proposed wheelset dynamic analysis is validated by comparison against results obtained from VI-RAIL analysis.

• Tunnel and Underground Space
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• v.23 no.1
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• pp.54-65
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• 2013

The LCM (Linear Cutting Machine) test is one of the most powerful and reliable methods for designing the disc cutter and for predicting the TBM (Tunnel Boring Machine) performance. It has an advantage to predict the actual load on disc cutter from the laboratory test on the real-size large rock samples, however, it also has a disadvantage to transport and/or prepare the large rock samples and to need an extra cost for experiment. In order to overcome this problem, lots of numerical studies have been performed. In this study, the PFC3D (Particle Flow Code in 3 Dimension) has been adopted for numerical analysis on optimum cutter spacing and failure aspects of Busan Tuff. The optimum cutting condition with s/p ratio of 16 and minimum specific energy of $14MJ/m^3$ was derived from numerical analyses. The cutter spacing for Busan Tuff had the good agreements with those of LCM test and numerical analysis by finite element method.

• Communications for Statistical Applications and Methods
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• v.23 no.3
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• pp.259-268
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• 2016

High-dimensional survival data with large numbers of predictors has become more common. The analysis of such data can be facilitated if the dimensions of predictors are adequately reduced. Recent studies show that a method called sliced inverse regression (SIR) is an effective dimension reduction tool in high-dimensional survival regression. However, it faces incapability in implementation due to a double categorization procedure. This problem can be overcome in the right-censoring type by transforming the observed survival time and censoring status into a single variable. This provides more flexibility in the categorization, so the applicability of SIR can be enhanced. Numerical studies show that the proposed transforming approach is equally good to (or even better) than the usual SIR application in both balanced and highly-unbalanced censoring status. The real data example also confirms its practical usefulness, so the proposed approach should be an effective and valuable addition to usual statistical practitioners.