• 한국전기전자재료학회논문지
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• 제25권1호
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• pp.6-14
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• 2012

For integrated complementary metal oxide semiconductor (CMOS) circuits, the lateral spread for two-dimensional (2-D) impurity distributions are very important for the analyzing the devices. The measured two-dimensional SEM data obtained using the chemical etching-method matched very well with the results of the Gauss model for boron implanted samples. But the profiles in boron implanted silicon were deviated from the Gauss model. The profiles in boron implanted silicon were shown a little bit steep profile in the deep region due to backscattering effect on the near surface from the bombardments of light boron ions. From the simulated 3-D data obtained using an analytical model, the 1-D and 2-D data were compared with the experimental data and could be verified the justification from the experimental data. The data of 3-D model were also shown good agreements with the experimental and the simulated data. It can be used in the 3-D chip design and the analysis of microelectro-mecanical system (MEMS) and special devices.

• International Journal of Ocean System Engineering
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• 제2권4호
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• pp.223-232
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• 2012

For the accurate estimation of the position and orientation of a UUV (unmanned underwater vehicle), a low-cost AHRS (attitude heading reference system) was developed using a low-cost IMU (inertial measurement unit) sensor which provides information on the 3D acceleration, 3D turning rate and 3D earth-magnetic field data in the object coordinate system. The main hardware system is composed of an IMU sensor (ADIS16405) and TMS320F28335, which is coded with an extended kalman filter algorithm with a 50-Hz sampling frequency. Through an experimental gimbal device, good estimation performance for the pitch, roll, and yaw angles of the developed AHRS was verified by comparing to those of a commercial AHRS called the MTi system. The experimental results are here presented and analyzed.

• 한국정밀공학회지
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• 제23권11호
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• pp.116-125
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• 2006

MEMS and LIGA technologies have been used for fabricating microstructures, but their shape is not 3D because of difficulty for preparation of many masks. To fabricate 3D microstructures, microstereolithography technology based on Digital Micromirror Device($DMD^{TM}$) was introduced. It has no need of masks and is capable of fabricating high aspect ratio microstructures. In this technology, STL file is the standard format as the same of conventional rapid prototyping system, and 3D parts are fabricated by layer-by-layer according to 2D section sliced from STL file. The UV light source is illuminated to DMD which makes bitmap images of 2D section, and they are transferred and focused on resin surface. In this paper, we addressed optical design of microstereolithography system in consideration of light path according to DMD operation and image-forming on the resin surface using optical design program. To verify the performance of implemented microstereolithography system, 3D microstructures with complexity and high aspect ratio were fabricated.

• Bulletin of the Korean Chemical Society
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• 제35권3호
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• pp.908-912
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• 2014

Microgratings whose diffracted field at a fixed angle generate IR spectra of $SF_6$ or $NH_3$ were fabricated by MEMS techniques for the purpose of IR correlation spectroscopy. Each micrograting was composed of 1441 reflecting lines in the area of $19.2{\times}19.2mm^2$. The depth profile of the line elements was determined with a gradient searching method that was described in our previous publication (J. Mod. Opt. 2013, 60, 324-330), and was discretized into 16 levels between 0 and $6.90{\mu}m$. The diffraction field from a given depth profile was calculated with Fraunhofer equation. The fabricated microgratings showed errors in the depth and the width within acceptable ranges. As the result, the diffracted IR spectrum of each micrograting matched well with its target reference spectrum within spectral resolution of our optical setup.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2007년도 춘계학술대회
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• pp.179-182
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• 2007

Polycrystaline (poly) 3C-SiC thin film on n-type and p-type Si were deposited by APCVD using HMDS, $H_2$, and Ar gas at $1180^{\circ}C$ for 3 hour. And then the schottky diode with Au/poly 3C-Sic/Si(n-type) structure was fabricated. Its threshold voltage ($V_d$), breakdown voltage, thickness of depletion layer, and doping concentration ($N_D$) value were measured as 0.84 V, over 140 V, 61nm, and $2.7{\times}10^{19}\;cm^3$, respectively. The p-n junction diode fabricated by poly 3C-SiC was obtained like characteristics of single 3C-SiC p-n junction diode. Therefore, its poly 3C-SiC thin films are suitable MEMS applications in conjuction with Si fabrication technology.

• 전자공학회논문지 IE
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• 제49권1호
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• pp.12-17
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• 2012

유비쿼터스 기술의 발전과 더불어 다양한 응용 분야가 대두되고 있으며 특히 건설 현장 분야는 유비쿼터스 기술 및 시스템을 도입 하였을 때 많은 기대효과를 얻을 수 있는 분야이다. 건설 현장에는 항상 많은 위험요소가 존재 하며 특히 추락 사고가 높은 발생 비율을 차지하고 있다. 이러한 사고를 방지하기 위해서 안전교육 및 안전장비 착용 등 다양한 노력을 기울이고 있다. 본 연구에서는 무선 회로 (TOA, RSSI)를 구성하여 작업자의 안전정보 및 위치정보를 실시간으로 모니터링 할 수 있는 시스템을 설계하고 제작하여 측정하였다. 산업용 장비에서 많이 사용되는 ATmega128 MCU를 사용하였으며, 무선 회로를 위해서는 나노트론사의 NanoPan 5357 모듈과 TI사의 CC2500 칩셋을 사용하였다. 또한, 주변환경 정보를 취득하기 위해서 3축가속도 및 압력 MEMS센서를 적용하였다. 이를 통해 작업자의 이동여부 및 고도정보를 판단할 수 있도록 시스템을 개발하였다. 응용소프트웨어는 NI사의 Labview 소프트웨어를 이용하여 개발을 진행하였다. 작업자가 위험지역에서 안전장비(안전고리)를 착용하지 않을 경우 서버 관리자와 작업자에게 경고 알람을 울리도록 시스템을 개발하였다.

• 한국ITS학회 논문지
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• 제3권2호
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• pp.85-93
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• 2004

In this paper, microstrip stepped-impedance hairpin resonator (SIR) lowpass filter f.PF) by surface rnicromachining on GaAs substrate is sugsested. This filter has the advantages of compact side, easy fabrication, and sharp cutoff frequency response. The new SIR LPF shows the 3 dB passband of dc to 33 GHz, the insertion loss of 0.82 dB, and the return loss of better than 17 dB up to 25.57 GHz. This filter is useful for many microwave system applications.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.551-552
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• 2006

The miniature fuel cells have emerged as a promising power source for applications such as cellular phones, small digital devices, and autonomous sensors to embedded monitors or to micro-electro mechanical system (MEMS) devices. Several chemicals run candidate at a fuel in those systems, such as hydrogen. methanol, ethanol, acetic acid, and di-methyl ether (DME). Among them, hydrogen shows most efficient fuel performance. However, there are some difficulties in practical application for portable power sources. Therefore, more recently, there have been many efforts for development of micro-reformer to operate highly efficient micro fuel cells with liquid fuels such as methanol, ethanol, and DME In our experiments, we have integrated a micro-fuel processor system using low temperature co-fired ceramics (LTCC) materials. Our integrated micro-fuel processor system is containing embedded heaters, cavities, and 3D structures of micro- channels within LTCC layers for embedding catalysts (cf. Figs. 1 and 2). In the micro-channels of LTCC, we have loaded $CuO/ZnO/Al_2O_3$ catalysts using several different coating methods such as powder packing or spraying, dipping, and washing of catalyst slurry.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2005년도 ICCAS
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• pp.1115-1117
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• 2005

This paper describes the three dimension model and simulation results of a thermal actuator based on polyMUMPs process, known as thermal multimorph actuator. The device has potential application in micro-transducers such as atomic force microscope (AFM) tip and scanning tunneling microscope (STM) tip. This device made of a multi-layer materials stack together with consisted of polysilicon, $SiO_2$ and gold. A mask layout design, three dimension model and simulation results are reported and discussed.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2013년도 추계학술대회 논문집
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• pp.763-764
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• 2013

A three-dimensional image capturing device and its signal processing algorithm and apparatus are presented. Three dimensional information is one of emerging differentiators that provides consumers with more realistic and immersive experiences in user interface, game, 3D-virtual reality, and 3D display. It has the depth information of a scene together with conventional color image so that full-information of real life that human eyes experience can be captured, recorded and reproduced. 20 Mega-Hertz-switching high speed image shutter device for 3D image capturing and its application to system prototype are presented[1,2]. For 3D image capturing, the system utilizes Time-of-Flight (TOF) principle by means of 20MHz high-speed micro-optical image modulator, so called 'optical resonator'. The high speed image modulation is obtained using the electro-optic operation of the multi-layer stacked structure having diffractive mirrors and optical resonance cavity which maximizes the magnitude of optical modulation[3,4]. The optical resonator is specially designed and fabricated realizing low resistance-capacitance cell structures having small RC-time constant. The optical shutter is positioned in front of a standard high resolution CMOS image sensor and modulates the IR image reflected from the object to capture a depth image (Figure 1). Suggested novel optical resonator enables capturing of a full HD depth image with depth accuracy of mm-scale, which is the largest depth image resolution among the-state-of-the-arts, which have been limited up to VGA. The 3D camera prototype realizes color/depth concurrent sensing optical architecture to capture 14Mp color and full HD depth images, simultaneously (Figure 2,3). The resulting high definition color/depth image and its capturing device have crucial impact on 3D business eco-system in IT industry especially as 3D image sensing means in the fields of 3D camera, gesture recognition, user interface, and 3D display. This paper presents MEMS-based optical resonator design, fabrication, 3D camera system prototype and signal processing algorithms.