• Journal of Yeungnam Medical Science
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• 제18권1호
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• pp.123-137
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• 2001

6개의 건조두개골상의 중요한 방사선학적 계측점에 금속구를 위치시킨 후 3-D CT와 정모 및 측모 두부 방사선사진을 촬영하고 이를 바탕으로 만든 각각의 3차원 영상과 3차원 두부 방사선사진상의 각 계측점들이 3차원적으로 어느 정도의 정확성을 가지고 재현되는지를 알아보았다. 그리고 두 방법에 있어서의 계측점간의 거리계측을 실계측과 비교분석 함으로써 악안면부에서의 재현성과 정확성을 알아본 결과 다음과 같은 결과를 얻었다. 3-D CT와 3차원 두부 방사선사진상의 계측점들은 반복 계측시 각각 X축 방향으로 0.23 mm와 0.30 mm, Y축 방향으로 0.27 mm와 0.25 mm, 그리고 Z축 방향으로 0.27 mm와 0.31 mm의 표준편차를 보였다. 두 방법에서 모든 계측점이 0.5 mm 이하의 표준편차를 보였으며, 대부분의 계측점이 1 mm 이하의 범위를 보인 바, 두 방법 모두 통일한 건조두개골상의 계측점의 3차원적 위치 편차가 거의 없었다. 모든 계측항목에서 실측치와 3-D CT간의 차이는 평균 0.33 mm였으며, 실측치와 3차원 두부 방사선사진간의 차이는 평균 1.13 mm로 상대적으로 높게 나타났다. 가장 큰 차이를 보인 항목은 RGo과 LGo간으로 2.03 mm의 차이를 보였다. 그러나 두 방법 모두 모든 항목에서 실측치와 통계적으로 매우 높은 상관관계를 보였다(${\gamma}=0.976{\sim}1.000$, p<0.01).

• 한국가시화정보학회:학술대회논문집
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• 한국가시화정보학회 2004년도 Proceedings of 2004 Korea-Japan Joint Seminar on Particle Image Velocimetry
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• pp.1-13
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• 2004

A scanning stereo-PIV system was developed to measure the three-dimensional distribution of three-component velocity in a turbulent round jet. A laser light beam produced by a high repetition rate YLF pulse laser was expanded vertically by a cylindrical lens to form a laser light sheet. The light sheet is scanned in a direction normal to the sheet by a flat mirror mounted on an optical scanner, which is controlled by a programmable scanner controller. Two high-speed mega-pixel resolution C-MOS cameras captured the particle images illuminated by the light sheet, and stereoscopic PIV method was adopted to acquire the 3D-3C-velocity distribution of turbulent round jet in an octagonal tank filled with water. The jet Reynolds number was set at Re=1000 and the streamwise location of the measurement was fixed at approximately x = 40D. Time evolution of three-dimensional vortical structure, which is identified by vorticity, is visualized. It revealed that the existence of a group of hairpin-like vortex structures was quite evident around the rim of the shear layer of the jet. Turbulence statistics shows good agreement with the previous data, and divergence of a filtered (unfiltered) velocity vector field was $7\%\;(22\%)$ of root-me an-squared vorticity value.

• 한국정밀공학회지
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• 제26권8호
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• pp.72-78
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• 2009

We developed a line standards measurement system using an optical microscope and measured two kinds of line standards. It consists of three main parts: an optical microscope module including a CCD camera, a stage system with a linear encoder, and a measurement program for a microscopic image processing. The magnification of microscope part was calibrated using one-dimensional gratings and the angular motion of stage was measured to estimate the Abbe error. The threshold level in line width measurement was determined by comparing with certified values of a line width reference specimen, and its validity was proved through the measurement of another line width specimen. The expanded uncertainty (k=2) was about 100 nm in the measurements of $1{\mu}m{\sim}10{\mu}m$ line width. In the comparison results of line spacing measurement, two kinds of values were coincide within the expanded uncertainty, which were obtained by the one-dimensional measuring machine in KRISS and the line standards measurement system. The expanded uncertainty (k=2) in the line spacing measurement was estimated as $\sqrt{(0.098{\mu}m)^2+(1.8{\times}10^{-4}{\times}L)^2}$. Therefore, it will be applied effectively to the calibration of line standards, such as line width and line spacing, with the expanded uncertainty of several hundreds nanometer.

• 반도체디스플레이기술학회지
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• 제7권1호
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• pp.11-16
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• 2008

Confocal scanning microscopy is a widely used technique for three dimensional measurements because it is characterized by high resolution, high SNR and depth discrimination. Generally an image is generated by moving one optical probe that satisfies the confocal condition on the specimen. Measurement speed is limited by movement speed of the optical probe; scanning speed. To improve measurement speed we increase the number of optical probes. Specimen region to scan is divided by optical probes. Multi-point information each optical probe points to can be obtained simultaneously. Therefore image acquisition speed is increased in proportion to the number of optical probes. And multiple optical probes from red, green and blue laser sources can be used for color imaging and image quality, i.e., contrast, is improved by adding color information by this way. To conclude, this technique contributes to the improvement of measurement speed and image quality.

• 반도체디스플레이기술학회지
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• 제21권1호
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• pp.108-113
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• 2022

The deep-learning-based measurement method with the through-focus scanning optical microscopy (TSOM) estimated the size of the object using the classification. However, the measurement performance of the method depends on the number of subdivided classes, and it is practically difficult to prepare data at regular intervals for training each class. We propose an approach to measure the size of an object in the TSOM image using the deep-learning regression model instead of using classification. We attempted our proposed method to estimate the top critical dimension (TCD) of through silicon via (TSV) holes with 2461 TSOM images and the results were compared with the existing method. As a result of our experiment, the average measurement error of our method was within 30 nm (1σ) which is 1/13.5 of the sampling distance of the applied microscope. Measurement errors decreased by 31% compared to the classification result. This result proves that the proposed method is more effective and practical than the classification method.

• Communications for Statistical Applications and Methods
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• 제26권1호
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• pp.47-55
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• 2019

It is important to identify informative variables in high dimensional data analysis; however, it becomes a challenging task when covariates are contaminated by measurement error due to the bias induced by measurement error. In this article, we present a two-step approach for variable selection in the presence of measurement error. In the first step, we directly select important variables from the contaminated covariates as if there is no measurement error. We then apply, in the following step, orthogonal regression to obtain the unbiased estimates of regression coefficients identified in the previous step. In addition, we propose a modification of the two-step approach to further enhance the variable selection performance. Various simulation studies demonstrate the promising performance of the proposed method.

• 한국습지학회지
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• 제24권1호
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• pp.52-58
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• 2022

최근 낙동강 하구의 통합물관리를 위한 다양한 노력과 연구가 진행되고 있다. 그러한 연구 중 하나로 3차원 고정식 초음파 유속계를 이용한 수문별 개도 방류량의 측정이 수행되고 있으나, 개도별 방류량 산정식 도출을 위한 실측 성과를 활용한 수리학적 및 통계적 처리 절차와 기법에 대한 연구는 기초적인 수준에 머물고 있다. 이에 본 연구에서는 3차원 고정식 초음파 유속계 측정자료를 이용한 자료 처리 기법을 개발하여 측정 데이터 기반의 유량계수 산정하고 이를 이용하여 방류량 산정식 개발 적용성을 검토하였다.

• Maxillofacial Plastic and Reconstructive Surgery
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• 제34권1호
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• pp.17-25
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• 2012

Purpose: Recently, a three dimensional approach to hard and soft tissues of the maxillofacial area has been widely used. This study was to evaluate the reproducibility and accuracy of a stereocamera compared to actual measurement methods using a digital caliper and digitizer. Methods: The stereoscopies of 7 head dummies with different sizes and shapes were obtained using a Di3D system (Dimensional Imaging, Glasgow, UK) after marking reference points on facial areas. From the obtained stereoscopy, 10 measurements representing the width, height and depth of each of the facial sections of the dummy were measured twice using a three dimensional reverse engineering software program (RapidForm$^{TM}$ 2006, Inus, Seoul, Korea). The x, y, and z coordinates of each of the three dimensional measurements were obtained and distances between two points were calculated. All procedures were repeated twice. The actual measurement method was performed twice, directly on dummies, using a digital caliper and values were compared with the previously determined values. Results: The results were as follows. In the ANOVA analysis, there were no significant statistical differences among the three measurement methods. In the Bonferroni analysis, with adjustments applied for multiple comparisons, there was no difference between actual measurement methods using a digitizer and a digital caliper. However, there was some difference between using a stereocamera and actual measurement methods using a digitizer and a digital caliper in values of $Ex_{Rt}-Ex_{Lt}$, $En_{Rt}-En_{Lt}$, $Ala_{Rt}-Ala_{Lt}$, $Ch_{Rt}-Ch_{Lt}$, G-Pg', $Ala_{Rt}$-Prn, $Ala_{Rt}$-Prn. The mean value for technical error in measurement (TEM) in Di3D (0.98 mm) was slightly higher than for a digital caliper (0.17 mm) and a digitizer (0.30 mm). In an intraclass correlation coefficient (ICC) there were no significant differences among the three measurement methods, but the Di3D system with the stereocamera showed relatively lower reproducibility compared to actual measurement methods using a digitizer and a digital caliper. Conclusion: These results indicate that some complementary measures may be needed to improve accuracy and reproducibility in the Di3D system with stereocamera.

• Applied Microscopy
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• 제52권
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• pp.1.1-1.8
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• 2022

As semiconductor device architecture develops, from planar field-effect transistors (FET) to FinFET and gate-all-around (GAA), there is an increased need to measure 3D structure sidewalls precisely. Here, we present a 3-Dimensional Atomic Force Microscope (3D-AFM), a powerful 3D metrology tool to measure the sidewall roughness (SWR) of vertical and undercut structures. First, we measured three different dies repeatedly to calculate reproducibility in die level. Reproducible results were derived with a relative standard deviation under 2%. Second, we measured 13 different dies, including the center and edge of the wafer, to analyze SWR distribution in wafer level and reliable results were measured. All analysis was performed using a novel algorithm, including auto fattening, sidewall detection, and SWR calculation. In addition, SWR automatic analysis software was implemented to reduce analysis time and to provide standard analysis. The results suggest that our 3D-AFM, based on the tilted Z scanner, will enable an advanced methodology for automated 3D measurement and analysis.

• 한국지리정보학회지
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• 제27권1호
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• pp.1-11
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• 2024

현재 측정되는 많은 데이터가 지표를 기반으로 측정되지만, 측정지점의 높이값이 기초자료로 활용되지 않기 때문에, 3차원 지리정보시스템에 활용하고자 할 때 어려움이 발생한다. 지표면에 많은 양을 표시하기 위해서는 지형정보를 이용하여 지표면에 점을 그리거나, 지표면의 각 측정지점의 높이값을 추출하여 다각형을 생성하는 방법이 다양하게 사용될 수 있다. 본 연구에서는 다양한 형태의 데이터 표현 방법 중 지표면에 표현되는 시계열 측정 데이터의 시각화 성능을 향상시키기 위한 데이터 구축 및 표시 방법을 시도하고, 그 절차와 장단점을 살펴본다.