Electrical Extraction of One Dimensional MOSFET Doping Profiles by Threshold Voltage Measurement (트랜지스터 문턱전압 측정을 통한 MOSFET 소자의 1 차원 Doping Profile 측정)
-
- Proceedings of the Korean Society of Precision Engineering Conference
- /
- 2010.05a
- /
- pp.535-536
- /
- 2010