• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.195.1-195.1
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• 2013

Cu는 금속 박막재료로서 높은 전기전도성을 지니고 있을 뿐만 아니라 Ag, Al, Pt 등 보다 비용이 저렴하여, 높은 전기전도성을 필요로 하는 박막 재료로써 폭넓게 사용되고 있다. 그러나, 낮은 기계적 특성을 지니고 있어서 interconnect와 같은 작은 단면적의 배선재료로 사용될 경우, 높은 전류밀도에 따른 electromigration 현상에 의하여 hillock 또는 void의 형성 등 박막재료의 변형이 생기게 되어서 전자소자의 수명이 단축된다는 단점이 있다. TiN은 금속재료 못지않은 높은 전기 전도성을 지니고 있을 뿐만 아니라, 금속재료에 비하여 높은 기계적 특성과 녹는점을 지니고 있어 다양한 분야로 사용되고 있다. 본 연구에서는 Cu와 TiN composite 박막을 soda-lime glass위에 증착하여 낮은 비저항 뿐만 아니라 Cu와 비교하여 기계적 특성이 향상된 박막을 제작하고자 하였다. Cu와 TiN composite 박막 증착을 위하여 DC reactive magnetron co-sputtering 장비를 사용하였으며, Cu와 Ti 타겟 power, Ar:N2 유량비(Flow rate)을 변화시켜 Cu와 Ti의 조성비 및 TiN의 결정성을 조절하였고, 이를 통하여 박막의 TiN 조성에 따른 낮은 비저항 값과 순수한 Cu 박막과 비교하여 높은 기계적 특성을 지닌 Cu-TiN 박막을 증착하였다. Cu-TiN composite 박막의 구조 및 조성은 SEM (Scanning Electron Microscope), EDS (Energy Dispersive Spectrometer), XPS (X-ray Photoelectron Spectroscopy)장비를 사용하여 분석하였으며, 전기전도도는 4-point probe를 사용하여 측정하였고, Knoop hardness 측정방법을 사용하여 박막의 기계적 특성을 측정하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.321.1-321.1
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• 2013

높은 광흡수 계수를 갖는 Cu(In,Ga)Se2(CIGS) 화합물 박막 소재는 고효율 태양전지 양산을 위해 가장 전도유망한 재료이나 상대적으로 매장량이 적은 In 및 Ga을 사용한다는 소재적 한계가 있다. Cu2ZnSnSe4(CZTSe) 혹은 Cu2ZnSnS4(CZTS)와 같은 Cu-Zn-Sn-Se계 화합물 반도체는 CIGS 내 희소원소인 In과 Ga이 범용원소인 Zn 및 Sn으로 대체된 소재로써 미래형 저가 태양전지 개발을 위해 활발히 연구되고 있는데, 그 화합물 조합에 따라 0.8eV부터 1.5eV까지의 에너지 밴드갭을 갖는 것으로 알려져 있다. 본 연구에서는 열분해법으로 CZTS 나노 입자를 합성하였다. 용매로 Oleylamine을 사용하였는데, $260{\sim}340^{\circ}C$의 온도 범위에서 5시간 30분 동안 CZTS 나노입자를 합성하였고, $300^{\circ}C$에서 5시간 30분~9시간까지 합성하였다. 헥산을 이용하여 원심분리기와 초음파세척기로 용매인 Oleylamine을 제거하였고, 진공오븐에서 건조된 CZTS 분말의 FE-SEM (Field Emission Scanning Electron Microscope), XRD (X-Ray Diffraction), EDS (Energy Dispersive Spectroscopy) 분석 등을 통해 합성온도에 따른 구조적, 화학적 조성 변화를 조사하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.140.2-140.2
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• 2013

Strong metal-support interaction effect is an important issue in determining the catalytic activity for heterogeneous catalysis. In this work, we report the catalytic activity of $Au/TiO_2$, $Au/Al_2O_3$, and $Au/Al_2O_3-CeO_2$ nanocatalysts under CO oxidation fabricated by arc plasma deposition (APD), which is a facile dry process with no organic materials involved. These catalytic materials were characterized by transmission electron microscopy (TEM), energy-dispersive X-ray spectroscopy (EDS) and $N_2$-physisorption. Catalytic activity of the materials has measured by CO oxidation using oxygen, as a model reaction, in a micro-flow reactor at atmospheric pressure. Using APD, the catalyst nanoparticles were well dispersed on metal oxide powder with an average particle size (3~10 nm). As for catalytic reactivity, the result shows $Au/Al_2O_3-CeO_2$ nanocatalyst has the highest catalytic activity among three samples in CO oxidation, and $Au/TiO_2$, and $Au/Al_2O_3$ in sequence. We discuss the effects of structure and metal-oxide interactions of the catalysts on catalytic activity.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.12
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• pp.1419-1424
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• 2011

Nanoimprint lithography is a next generation lithography technology, which enables to fabricate nano to micron-scale patterns through simple and low cost process. Nanoimprint lithography has been applied in various industry fields such as light emitting diodes, solar cells and display. Functional patterns, including anti-reflection moth-eye pattern, photonic crystal pattern, fabricated by nanoimprint lithography are used to improve overall efficiency of devices in that fields. For these reasons, in this study, sub-micron-scaled functional patterns were directly fabricated on Si and glass substrates by thermal imprinting process using ZnO nano-particles dispersion resin. Through the thermal imprinting process, arrays of sub-micron-scaled pillar and hole patterns were successfully fabricated on the Si and glass substrates. And then, the topography, components and optical property of the imprinted ZnO nano-particles/resin patterns are characterized by Scanning Electron Microscope, Energy-dispersive X-ray spectroscopy and UV-vis spectrometer, respectively.

• Korean Journal of Metals and Materials
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• v.49 no.8
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• pp.664-670
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• 2011

3-ply Mg/Al/STS clad-metal was fabricated by the roll bonding process. An interfacial reaction layer was formed at the Mg/Al interface at and above $300^{\circ}C$ whereas no interfacial reaction layer was observed up to $400^{\circ}C$. The effect of the interfacial reaction layer on the mechanical and fracture properties in clad metals after heat treatments were investigated The chemical compositions were analyzed at the Mg/Al interface by an Energy dispersive X-ray analysis (EDX). A tension test was performed to examine the interfacial cracking properties. The Mg layer fractured first, causing a sudden drop of the stress and Al/STS layer continued to deform until the final fracture. Periodic cracks and crack propagation was observed at the reaction layer between Mg and Al.

• Korean Journal of Chemical Engineering
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• v.35 no.12
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• pp.2452-2463
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• 2018

Surface treatment of sol-gel bioglass is required to increase its biomedical applications. In this study, a dielectric barrier discharge (DBD) plasma treatment in atmospheric pressure was performed on the surface of [$SiO_2-CaO-P_2O_5-B_2O_3$] sol-gel derived glass. The obtained bioglass was treated by plasma using discharge current 12 mA with an exposure period for 30 min. The type of discharge can be characterized by measuring the discharge current and applied potential waveform and the power dissipation. Apatite formation on the surface of the DBD-treated and untreated samples after soaking in simulated body fluid (SBF) at $37^{\circ}C$ is characterized by Fourier transform infrared spectroscopy (FTIR), X-Ray diffraction (XRD), inductively coupled plasma (ICP-OES) and scanning electron microscopy coupled with energy dispersive spectroscopy (SEM/EDS). We observed a marked increase in the amount of apatite deposited on the surface of the treated plasma samples than those of the untreated ones, indicating that DBD plasma treatment is an efficient method and capable of modifying the surface of glass beside effectively transforming it into highly bioactive materials.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.32 no.6
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• pp.448-453
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• 2019

This work reports the electrical characteristics of and temperature distribution in chalcogenide phase change memory (PCM) devices that have a self-aligned structure. GST (Ge-Sb-Te) chalcogenide alloy films were formed in a self-aligned manner by interdiffusion between sputter-deposited Ge and $Sb_2Te_3$ films during thermal annealing. A transmission electron microscopy-energy dispersive X-ray spectroscopy (TEM-EDS) analysis demonstrated that the local composition of the GST alloy differed significantly and that a $Ge_2Sb_2Te_5$ intermediate layer was formed near the $Ge/Sb_2Te_3$ interface. The programming current and threshold switching voltage of the PCM device were much smaller than those of a control device; this implies that a phase transition occurred only in the $Ge_2Sb_2Te_5$ intermediate layer and not in the entire thickness of the GST alloy. It was confirmed by computer simulation, that the localized phase transition and heat loss suppression of the GST alloy promoted a temperature rise in the PCM device.

• Advances in nano research
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• v.4 no.2
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• pp.129-143
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• 2016

The present work reports a facile, rapid and an eco-friendly method for the synthesis of silver nanoparticles using Luffa acutangula (L. acutangula) leaves extract and their antibacterial and cytotoxic effects. The synthesized silver nanoparticles (AgNPs) were characterized by UV-Visible spectroscopy (UV-Vis), Fourier transform infrared spectroscopy (FT-IR) and X-ray diffraction analysis (XRD). Additionally the topography, morphology and the elemental composition of the particles were determined by Scanning Electron Microscopy (SEM) and Energy dispersive spectrophotometric (EDS) technique and the measured particle sizes from SEM micrographs are in the range of 12.5 to 24.5nm. The in-vitro antimicrobial activity of the synthesized nanoparticles was high against gram positive Staphylococcus aureus and moderate against gram negative Escherichia coli and Pseudomonas aeruginosa strains. Further, the cytotoxic effects of synthesized AgNPs were evaluated against Human Breast Cancer (MCF 7) cell line.

• Advances in concrete construction
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• v.5 no.6
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• pp.563-573
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• 2017

Transparency, excellent toughness, thermal stability and a very good dimensional stability make Polycarbonate (PC) one of the most widely used engineering thermoplastics. Polycarbonate market include electronics, automotive, construction, optical media and packaging. One alternative for reducing the environmental pollution caused by polycarbonate from electronic waste (e-waste), is to use it in cement concretes. In this work, physical and chemical characterization of recycled polycarbonate from electronic waste was made, through the analysis by Fourier transform infrared spectroscopy (FTIR), X-ray diffraction (XRD), energy dispersive spectroscopy (EDS) and scanning electron microscope (SEM). Then cement concrete was made with Portland cement, sand, gravel, water, and this recycled polycarbonate. Specimens without polycarbonate were produced for comparison purposes. The effect of the particle sizes and concentrations of recycled polycarbonate within the concrete, on the compressive strength and density was studied. Results show that compressive strength values and equilibrium density of concrete depend on the polycarbonate particle sizes and its concentrations; particularly the highest compressive strength values were 20% higher than that for concrete without polycarbonate particles. Moreover, morphological, structural and crystallinity characteristics of recycled polycarbonate, are suitable for to be mixed into concrete.

• Computers and Concrete
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• v.24 no.1
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• pp.1-6
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• 2019

Within the scope of this study, the foam solution was prepared by properly mixing sulfonate based foam agent with water. Furthermore, this solution was mixed with the mixture of fine sand, cement, and water to produce foamed concrete. The mixture ratios which are the percentage of foam solution used in foam concrete were chosen as 0, 20, 40 and 60% by vol. After these groups reached 28 days of strength, they were heated to 20, 100, 400 and $700^{\circ}C$ respectively. Afterward, high-temperature effects on the foamed concrete were obtained by employing physical and mechanical properties tests. Additionally, SEM (scanning electron microscope) and EDX (energy-dispersive X-ray spectroscopy) tests were employed to analyze the microstructure, and ${\mu}-CT$ (micro computed tomography) images were used to reconstruct 3-D models of the heat-treated specimens. Then, these models are analyzed to examine the void structures and the changes in these structures due to the high temperatures. The study has shown that the void structures reduce the high-temperature effects and the foam solution could be mixed with concrete up to 40 % by vol. where the high strength of foamed concrete is non-mandatory.