• Proceedings of the Materials Research Society of Korea Conference
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• 2010.05a
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• pp.6.1-6.1
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• 2010

원자층 증착 기술 (Atomic Layer Deposition)은 기판 표면에서 한 원자층의 화학적 흡착 및 탈착을 이용한 nano-scale 박막 증착 기술이기 때문에, 표면 반응제어가 우수하며 박막의 물리적 성질의 재현성이 우수하고, 대면적에서도 균일한 두께의 박막 형성이 가능하며 우수한 계단 도포성을 확보 할 수 있다. 최근 ALD에 의한 박막증착 방법 중 플라즈마를 이용한 ALD 증착 방법에 대한 다양한 연구가 진행되고 있다. 플라즈마는 반응성이 좋은 이온과 라디컬을 생성하여 소스간 반응성을 좋게 하여, 소스 선택의 폭을 넓어지게 하고, 박막의 성질을 좋게 하며, 생산성을 높일 수 있는 장점이 있다. 그러나 플라즈마를 사용함으로써 플라즈마 내에 이온들이 가속되서 박막 증착 중에 기판 및 박막에 손상을 입혀 박막 특성을 열화 시킬 가능성이 있다. 따라서 플라즈마 발생 영역을 기판으로부터 멀리 떨어뜨린 원거리 플라즈마 원자층 공정이 개발 되었다. 이 기술은 플라즈마에서 생성된 ion이 기판이나 박막에 닫기 전에 전자와 재결합 되거나 공정 chamber에서 소멸하여 그 영향을 최소하고 반응성이 좋은 라디칼과의 반응만을 유도하여 향상된 막질을 얻을 수 있도록 하였다. 따라서 이 원거리 플라즈마 원자층 증착기술은 나노 테크놀러지 소자 개발하기 위한 나노 박막 기술에 있어서 그 활용이 점점 확대될 것이다. 그 적용으로써 리모트 플라즈마 원자층 증착 방법을 이용한 고유전 물질 개발이 있다. 반도체 소자의 고집적화 및 고속화가 요구됨에 따라 집적회로의 크기를 혁신적으로 축소하여 스위칭 속도(switching speed)를 증가시키고, 전력손실 (power dissipation)을 줄이려는 시도가 이루어지고 있다. 그 중 하나로 고유전율 절연막은 트렌지스터 소자의 스케일링 과정에 수반하여 커지는 게이트 누설 전류를 억제하기 위한 목적으로 도입되었다. 유전율이 크면 동일한 capacitance를 내는데 필요한 물리적인 두께를 늘릴 수 있어 전자의 tunneling을 억제할 수 있고 전력손실을 줄일 수 있기 때문이다. 이와 같은 고유전율 물질이 게이트 산화막으로 사용되기 위해서 높은 유전상수 열역학적 안정성, 낮은 계면 전하밀도, 낮은 EOT, 전극 물질과의 양립성 등의 특성이 요구되는데, 이에 따라 많은 유전물질에 대한 연구가 진행되었다. 기존 gata oxide를 대체하기 위한 가장 유력한 후보 재료로 주목 받고 있는 high-k 물질들로는 Al2O3, HfO2, ZrO2, La2O3 등이 있다. 본 발표에서는 ALD의 종류에 따른 기술을 소개하고 그 응용으로 고유전율 물질 개발 연구 (고유전율 산화물 박막의 증착, 고유전율 산화물의 열적 안정성 평가, Flatband 매카니즘 규명, 전기적 물리적 특성 분석)에 대해서 발표 하고자 한다.

• Journal of Korean Society for Atmospheric Environment
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• v.26 no.4
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• pp.357-366
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• 2010

The purpose of this study is to evaluate a method for the measurement of N,N-Dimethylformamide (DMF) and to apply the method to the ambient air samples. For the determination of DMF together with other general VOCs (e.g., benzene, toluene, and xylenes), adsorption sampling and thermal desorption with GC/MS was used in this study. The sampling and analytical approaches tested in this study showed a good repeatability and linearity with lower detection limits of less than 0.35 ppb. Field measurements were carried out at three industrial sites (Daegu-Seongseo, Siwha and Banwall industrial complexes) and one residential site in Daegu city during a period from October 2006 to November 2008. DMF was detected in 71.8% of the total samples from the Seongseo industrial complex, well known for textile industry. In contrast, DMF was detected in only 20.4% and 12.9% of all the samples from the other two sites in Banwall and Siwha industrial complexes, respectively. This implies that sources of DMF should be strongly associated with textile industry. The mean concentration of DMF also appeared to be the highest in Seongseo site (5.95 ppb), followed by a residential site in Daegu (3.28 ppb), Banwall (0.88 ppb) and Siwha (0.55 ppb). In this study, we demonstrated the environmental significance of DMF in urban ambient air. To our knowledge, the DMF measurement introduced in this paper is the first case of an official report in Korea.

• Applied Chemistry for Engineering
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• v.1 no.2
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• pp.207-214
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• 1990

The catalytic reaction between CO and NO on polycrystalline Pt surface, which is very important in the development of catalyst for automobile exhaust gas control, has been studied using thermal desorption spectrometry(TDS) and steady-state experiment under ultra-high vacuum(UHV) conditions. With the pressures of CO and NO of each $1{\times}10^{-7}Torr$, the $CO_2$ formation rate showed a maximum at 560K. At the reaction temperature of 560K and the NO pressure of $1{\times}10^{-7}Torr$, the production of $CO_2$ was first order in $CO_2$ was first order in CO pressure below $1.35{\times}10^{-7}Torr$ of CO pressure whereas at higher CO pressures the rate became minus 0.3 order in CO. But the efforts of reactant pressure on the reaction was understood in consideration of the surface concentrations of adsorbates. With the results, we proposed a new reaction mechanism for this reaction.

• Applied Chemistry for Engineering
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• v.19 no.5
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• pp.512-518
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• 2008

The present work studied the selective catalytic reduction (SCR) of NO to $N_2$ by $NH_3$ over $V/TiO_2$ focusing on NOx control for the stationary sources. The SCR process depends mainly on the catalyst performance. The reaction characteristics of SCR with $V/TiO_2$ catalysts were closely examined at low and high temperature. In addition, adsorption and desorption characteristics of the reactants on the catalyst surface were investigated with ammonia. Seven different $TiO_2$ supports containing the same loading of vanadia were packed in a fixed bed reactor respectively. The interaction between $TiO_2$ and vanadia would form various non-stoichiometric vanadium oxides, and showed different reaction activities. There were optimum calcination temperatures for each samples, indicating different reactivity. It was finally found from the $NH_3-TPD$ test that the SCR activity was nothing to do with $NH_3$ adsorption amount.

• Journal of Sensor Science and Technology
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• v.7 no.2
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• pp.83-89
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• 1998

$TiO_{2-x}$ thin film humidity sensors have been fabricated by sputtering method and their physical and hygroscopic characteristics have been investigated. The sputtering conditions and sintering conditions affect the sensor's sensitivity toward humidity. AES and SEM micrographs were taken for the analysis of crystal structures, surface morphology caused by adsorbed water vapour. $TiO_{2-x}$ humidity sensors showed negative impedance-humidity characteristics and the sensor which was fabricated by experimental condition 2(rf power of 200W) showed higher sensitivity and linearity than others. Then the slope of the sensor was about $0.794\;K{\Omega}/%RH$ and the response time of $TiO_{2-x}$ humidity sensors was about 2 min. for adsorption and about 3 min. for desorption at the operating temperature of $30^{\circ}C$.

• Korean Chemical Engineering Research
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• v.48 no.6
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• pp.679-683
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• 2010

In this study, calcination temperature dependence of TS-1 catalyst was investigated in the hydroxylation of phenol with hydrogen peroxide during the regeneration of catalyst. Catalyst was regenerated 5 times by calcining at $550^{\circ}C$ and $700^{\circ}C$, respectively. When the catalyst was regenerated at $550^{\circ}C$ after 5th regeneration phenol conversion was decreased from 22.9% to 15.1% and at $700^{\circ}C$ after 5th regeneration phenol conversion was decreased from 22.9% to 18.8%. For formation ratio of catechol/hydroquinone was increased from 1.28 to 1.45 after 5th regeneration at $550^{\circ}C$, and from 1.28 to 1.20 after 5th regeneration at $700^{\circ}C$. The main reasons for deactivation of the catalyst were suggested by analyzing chemical/physical properties with XRD, UV-vis spectra, $N_2$ adsorption/desorption and TGA, and evaluating the catalytic activity such as phenol conversion and product selectivity.

• Journal of the Korean Ceramic Society
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• v.41 no.1
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• pp.36-40
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• 2004

$SnO_2$ thin films were deposited on a $SiO_2$/Si substrate with the flow of Ar and $O_2$ of 25 sccm by RF-magnetron sputtering method. the post-annealing was conducted at $500^{\circ}C$ in atmosphere of dry air and $N_2$ were changed fairly, while those annealed in dry air resembled as-deposited films. This may be attributed to the desorption of adsorbed oxygen and the extraction of lattice oxygen during annealing. Resistivity of films annealed in $N_2$ was increased over 5 times than that of as-deposited films. It can be explained that the increment of resistivity may result from the discontinuous conduction path with change of microstructures after annealing in $N_2$.

• Polymer(Korea)
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• v.24 no.5
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• pp.713-720
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• 2000

A polymer/iodine complex film was prepared using syndiotactic poly(vinyl alcohol) (s-PVA) with number-average degree of polymerization of 900 and syndiotactic diad content of 63.1%. In comparison with atactic-PVA/iodine films, degree of polarization of the s-PVA/iodine film was improved up to over 99% although a lower transmittance was obtained. By soaking in iodine/potassium iodide aqueous solution of a lower iodine concentration and subsequent drawing by 4 times, s-PVA/iodine film of a higher transmittance and degree of polarization was produced. The degree of iodine desorption of the s-PVA/iodine film in water were very low. The crystallinity and the d-spacing and crystal size of (100) plane increased at the early stage of soaking time, however, remained constant or decreased slightly with increasing soaking time. In consequence, s-PVA/iodine complex formation took place mainly inside crystal region at the initial stage of soaking time, whereas it occurred outside crystal region or physical adsorption of iodine dominated after sufficient soaking.

• Journal of the Korean Chemical Society
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• v.20 no.6
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• pp.441-447
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• 1976

The infrared spectra obtained in the region of $4000∼1200 $cm^{-1}$ has been measured for pyridine, tertiary butylamine, and ethylenediamine adsorbed on various cation-exchanged silicates at various degassing temperature. It was possible to distinguish between protonic and aprotonic acid sites of all cation-exchanged silicates which exhibited both Bronsted and Lewis acidity. The sodium form appeared to be the least reactive towards adsorbates. The relative ratio of the band intensities of tertiary butylamine was directly related to the polarizing power of exchanged cations. Ethylenediamine was less easily desorbed from silicate surface than tertiary butylamine due to the additional amino group to react with surface active site, and probably to form ether hydrogen bond with surface oxgen by liberating migrating proton besides the coordination bond with Lewis acid site and the formation of$NH3^+$ species with Bronsted acid site.

• Transactions of the Korean Society of Automotive Engineers
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• v.14 no.3
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• pp.125-132
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• 2006

Transient kinetics of $NH_3$ adsorption/desorption and of SCR(selective catalytic reduction) of NO with $NH_3$ were studied over vanadium based catalysts, such as $V_2O_5/TiO_2$ and $V_2O_5-WO_3/TiO_2$. In the present catalytic reaction process, NO adsorption is neglected while $NH_3$ is strongly chemisorbed on the catalytic surface. Accordingly, it is ruled out the possibility of a reaction between strongly adsorbed $NH_3$ and NO species in line with the hypothesis of an Eley-Rideal mechanism. The present kinetic model assumes; (1) non-activated $NH_3$ adsorption, (2) Temkin-type $NH_3$ coverage dependence of the desorption energy, (3) non-linear dependence of the SCR reaction rate on the $NH_3$ surface coverage. Thus, the surface heterogeneity for adsorption/desorption of $NH_3$ is taken into account in this model. The present study extends the pure chemical kinetic model based on a powdered-phase catalytic system to the chemico-physical one applicable to a realistic monolith reactor.