• Journal of the Semiconductor & Display Technology
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• v.2 no.1
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• pp.25-29
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• 2003

The fluid flow, mass transfer, heat transfer and film thickness variation during the spin coating process are numerically studied. The model is said to be I-dimensional because radial variations in film thickness, concentration and temperature are ignored. The finite difference method is employed to solve the equations that are simplified using the similarity transformation. In early time, the film thinning is due to the radial convective outflow. However that slows during the first seconds of spinning so the film thinning due to evaporation of solvent becomes sole. The time varing film thickness is analyzed according to the wafer spin speed, the various solvent fraction in the coating liquid, and the various solvent vapor fraction in the bulk of the overlying gas during the spin coating is estimated.

• The Journal of Korean Academy of Prosthodontics
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• v.51 no.2
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• pp.82-89
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• 2013

Purpose: The present study is aimed to evaluate the combined effect of recombinant human bone morphogenetic protein 2 (rhBMP-2) and recombinant human vascular endothelial growth factor (rhVEGF) coated onto anodized implants on osseointeration. Materials and methods: Six New Zealand white rabbit were used in this study. Each animal received 4 implants that were either coated with rhBMP-2 and rhVEGF (Study group) or anodized implant (Control group) in both tibia. This was performed using a randomized split-mouth design. A total 24 implants were used. The implant stability quotient (ISQ) value using resonance frequency analyser and removal torque (RTQ) measurement were investigated at 2 and 8 weeks. The t-test was used for statistical analysis (${\alpha}$=.05). Results: Control and study group showed good osseointegration at 8 weeks. The ISQ and RTQ values of study group were significant compared with the control group at 8 weeks (P<.05). However, No statistical significance was observed at 2 weeks (P>.05). Conclusion: It was concluded that rhBMP-2 with rhVEGF coated onto anodized implants can induce better osseointegration at late healing period.

• Journal of Korean Ophthalmic Optics Society
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• v.13 no.1
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• pp.53-58
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• 2008

Purpose: To design and fabricate the small sputter coating system for the Ophthalmic lens. Methods: The design of sputter target was done using macleod program for AR coating and mirror coating of Ophthalmic lens with Si target and then the sputter system was fabricated. Results: The optimum condition of AR coating with Si target was [air|$SiO_2$(81.3)|$Si_3N_4$ (102)|$SiO_2$(19.21)|$Si_3N_4$(15.95)|$SiO_2$(102)|glass], for blue color mirror coating [air|$SiO_2$(56.61)|$Si_3N_4$(135.86)|$SiO_2$(67.64)|$Si_3N_4$(55.4)|$SiO_2$(53.53)|$Si_3N_4$(51.28)|glass], for green color coating [air|$SiO_2$(66.2)|$Si_3N_4$(22.76)|$SiO_2$(56.58)|$Si_3N_4$(140.35)|$SiO_2$(152.35)|$Si_3N_4$(70.16)|$SiO_2$(121.87)|glass], for gold color [air|$SiO_2$(83.59)|$Si_3N_4$(144.86)|$SiO_2$(11.82)|$Si_3N_4$(129.93)|$SiO_2$(90.01)|$Si_3N_4$(88.37)|glass]. Conclusions: In the fabrication of sputtering coating apparatus, Dual cathode with same Ti target were coated at the same time on both sides of Ophthalmic lens to lessen the time of coating on Ophthalmic Lens and save the cost of the lens. The distance of target-substrate of cathode was variable from 12.5 cm to 20 cm. Turbo pump was used to take the whole coating process about 15 min. instead of diffusion pump. The lens holder was made to coat 2 pairs lens every coating and was rotated to get the uniformity of thin film.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.165.2-165.2
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• 2016

빗각 증착이란 입사 증기가 기판에 수직하게 입사하는 일반적인 공정과는 다르게 증기가 기판의 수직선과 $0^{\circ}$이상의 각을 갖는 증착 방법을 의미한다. 본 연구는 공정 압력이 비교적 높은 스퍼터링 공정에서 빗각 증착을 실시하여 코팅층의 구조제어가 가능한지를 확인하였다. 본 연구에서는 조직의 치밀도 향상을 통한 특성 향상을 위해 TiN 박막을 제조함에 있어서 빗각 증착 기술을 응용하여 단층 및 다층 피막을 제조하고 그 특성을 비교하였다. 스퍼터 소스에 장착된 타겟의 크기는 6"이며, 99.5% Ti 타겟을 사용하였고, Ar 가스 분위기에서 기판으로 사용된 Si(100) 위에 코팅하였다. 기판과 타겟 간의 거리는 10 cm이며, 기판은 알코올과 아세톤으로 초음파 세척을 실시한 후 진공챔버에 장착하고 < $2.0{\times}10-5Torr$ 까지 진공배기를 실시하였다. 진공챔버가 기본 압력까지 배기되면 Ar 가스를 주입한 후 RF 파워에 약 300V의 전압을 인가하여 글로우 방전을 발생시키고 약 30분간 청정을 실시하였다. 기판의 청정이 끝난 후 다시 < $2.0{\times}10-5Torr$까지 진공배기를 한 후 Ar 가스를 주입하여 TiN 코팅을 실시하였다. 빗각 증착을 위한 기판의 회전각은 $70^{\circ}$, $80^{\circ}$와 $-70^{\circ}$, $-80^{\circ}$이며, TiN 박막의 총 두께는 약 $3.5{\sim}4{\mu}m$로 유지하였다. 스퍼터링을 이용한 TiN 박막의 빗각 증착 코팅을 실시하였으며, 공정조건에 따라 주상정이 자라는 모습과 기울어진 각도가 다른 구조를 갖는 박막이 제조되는 것을 확인할 수 있었다. 빗각증착을 실시하는 중에 기판 홀더에 약 -100 V의 전압을 인가하면 인가하지 않은 막에 비해 치밀한 박막이 성장한다는 사실을 확인하였다. 박막의 성능향상을 위하여 스퍼터 시스템에서 빗각 증착을 이용한 TiN 박막 형성을 실시하였다. SEM 단면 이미지에서 확인해본 결과 주상정이 자라는 형상이 공정 압력이 5 mTorr에서 2 mTorr로 낮아짐에 따라 상대적으로 치밀하면서 일정한 형태로 성장하는 것을 확인하였다. 본 연구를 통해 스퍼터링을 이용한 빗각 증착의 Structure Engineering 이 가능함을 확인하였으며 박막의 성능을 향상시키는 기술로서 응용 가능할 것으로 보인다.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.266-266
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• 2010

마그네트론 스퍼터링을 이용하여 질소와 탄소를 함유한 티타늄 화합물을 합성하고, 조성 변화에 따른 색상 변화를 통해 티타늄 화합물로 구현할 수 있는 색상에 대해서 알아보았다. 스퍼터 타겟은 4"X1/4" 크기의 고순도(99.99%) 티타늄을 사용하였다. 시편은 알코올과 아세톤에서 각각 5분간 초음파 세척된 SUS304를 사용하여, 진공용기에 시편을 장착하고 압력을 $3{\times}10^{-6}\;Torr$까지 배기한 후, Ar 가스를 주입하여 진공도가 $2{\times}10^{-2}\;Torr$에 이르면 펄스 전원 공급 장치를 이용하여 800 V의 전압으로 1시간 동안 글로우 방전을 시켜 시편 청정을 실시하였다. 시편 청정이 끝나면 다시 $3{\times}10^{-6}\;Torr$까지 진공배기를 실시하고, Ar 가스를 진공용기 내로 공급하여 $1{\sim}3{\times}10^{-3}\;Torr$에서 스퍼터링을 실시하여 완충층으로 티타늄 박막을 코팅하였다. 티타늄 화합물은 티타늄을 스퍼터링 하면서 진공용기 내에 질소와 메탄가스를 적절한 비율로 공급함으로써 코팅하였다. 박막 증착 시 시편 온도는 $200^{\circ}C$, 타겟과의 거리는 12 cm를 유지하였으며, 시편을 회전시켜 코팅하였다. 티타늄 화합물의 두께와 미세구조, 조성 그리고 색상은 투과전자현미경(transmission electron microscope, TEM), 글로우 방전 분광기(glow discharge light spectroscope, GDLS), 및 색차계(spectrophotometer)를 사용하여 각각 분석하였다. TEM 분석결과 TiN의 박막 두께는 약 300 nm로 공극이 존재하지 않는 치밀한 다결정 구조를 나타내었고, TiCN은 약 600 nm로 TiN과 두 배의 두께 차이를 보였다. 이는 탄소의 공급원인 메탄가스의 주입으로 증착률이 증가한 것으로 판단된다. 또한 소량의 질소와 메탄가스의 유량 조절로 화합물의 조성을 변화시킬 수 있었으며, 이러한 조성 변화는 화합물의 색상변화로 나타났다. 따라서 본 연구에서 얻어진 결과를 외관 코팅 분야에 응용한다면 다양한 색상 구현과 외관의 경도, 내마모성, 내식성의 향상 등 많은 장점을 가질 것으로 판단된다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.9
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• pp.92-100
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• 2017

The Helicopter MRA Control Rod System has the important function of controlling the speed, height, and direction of helicoptersby adjusting the main rotor disc. However, the ingress of water into the inner control rod can cause ice damage in the rod during winter operation and also corrosion;these defects need to be rectified. The water flowed into the control rod through the upper side space, and the rod was cracked during icing expansion occurring at low temperature. The corrosion occurred due to the lack of coating process during the manufacturing process. To resolve these problems, the upper rod was sealed to prevent water inflow and a coating process was added to prevent corrosion. These solutions were verified by awaterproof test and a salt fog test. The phenomena, causes and measures were reviewed and the methods of improvement were established and proven. This proposed technology to prevent water infiltration and corrosion will contribute to the safety of rotary wing aircraft.

• Journal of the Microelectronics and Packaging Society
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• v.21 no.4
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• pp.133-137
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• 2014

As a preceding process for preparing several micrometer sized Ag-coated Cu flakes, ball milling of submicrometer-sized Cu particles synthesized through a wet chemical method was performed in order to convert the particles into flakes. To suppress oxidation and aggregation of the particles during ball milling, ethylene glycol and ethyl acetate were used as a medium and a surface modifying agent, respectively. Results obtained with different rotation speeds of a jar indicated that the rotation speed changes a rotating mode, and strikingly alters the final shapes and shape uniformity of Cu particles after milling. The diameter of zirconia ball was also confirmed. Although there was aggregates in the initial submicrometer-sized Cu particles, therefore, well-dispersed Cu flakes with a size of several micrometers were successfully prepared by ball milling through optimization of rotation speed, amount of ethyl acetate, and diameter of zirconia ball.

• Korean journal of food and cookery science
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• v.21 no.1 s.85
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• pp.117-123
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• 2005

Washed rice was coated by spraying aqueous dandelion (Taraxacum officinale) extracts at 20, 30, 40 $^{\circ}$Brix and dried at room temperature. The coating procedure was conducted 5 mL/min for 10min. Property changes in the dandelion coated rice and un-coated cooked rice were observed during 2 days of storage. Increasing the coating concentration was associated with lower color values (L, a value) and moisture contents. Sensory and texture properties generally decreased in the cooked rice coated with dandelion more than the control (non-coated rice). But, D-20(20 $^{\circ}$Brix of the dandelion concentration) resulted in better textural properties and sensory scores for hardness and overall acceptability in cooked rice. Compared to the control, the washed rice coated with 20 $^{\circ}$Brix for 0 and 2 days showed better quality in sensory activities, a lower gel consistency and better textural activities. It was concluded that the optimum coating ration of rice and added dandelion extract for cooking were 20 $^{\circ}$Brix and $5\%$ respectively, in proportion to the total weight of raw rice.

• Journal of the Korean Society for Heat Treatment
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• v.13 no.5
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• pp.355-359
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• 2000

Ion beam assisted deposition system was used to deposit CNx coatings with various thickness on the substrates of high-frequency induction hardened steels. Rolling contact fatigue tests were performed using Polymet RCF-1 machine with a constant supply of lubricant. Rolling contact fatigue life was substantially different in the steels with various thickness of CNx coatings. The optimum thickness of CNx coating was found to be $8.9{\mu}m$, showing the longest fatigue life, mainly caused by higher resistance to initiation of cracks and protective overcoat remaining to the surface failure during rolling contact fatigue. Cracks were initiated in the substrates under the surface of wear track and propagated to the surface, which eventually resulted in the failure. The reduction of fatigue life observed in the specimen with elimination of CNx coating during rolling contact fatigue was explained by the substrates deformation.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.12
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• pp.99-106
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• 2010

Gas turbines operation for power generation increased rapidly since 1990 due to the high efficiency in combined cycle, relatively low construction cost and low emission. But the operation and maintenance cost for gas turbine is high because the expensive superalloy hot gas path parts should be repaired and replaced periodically This study analyzed the initiation and propagation of the crack at the gas turbine blades which are coated with MCrAIY as a bond coat and TBC as a top coat. The sample blades had been serviced at the actual gas turbines for power generation. Total 7 sets of blades were analyzed and they have different EOH(equivalent operation hour). Blades were sectioned and the cracking distribution were measured and analyzed utilizing SEM(scanning electron microscope) and optical microscope. The blades which had 52,000 EOH of operation had cracks at the substrate and the maximum depth was 0.2 mm. Most of the cracks initiated at the boundary layer between TBC and bond coat and propagated down to the bond coat. Once bond coat is cracked, the base metal is exposed to the oxidation condition and undergoes notch effect. Under this environment, the crack branched at the inter-diffusion layer and propagated to the substrate. Critical cracks affecting the blade life were analyzed as those on suction side and platform.