Formation and Microstructural Properties of C49 $\textrm{ZrSi}_{2}$ Thin Films on Si(100)Substrates
(Si(100)기판위에서의 C49 $\textrm{ZrSi}_{2}$ 의 형성과 특성 연구)
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- Korean Journal of Materials Research
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- v.7 no.11
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- pp.964-968
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- 1997