• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.363-363
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• 2011

열분해 반응기 내에서 실리콘 필름을 성장시키는 것은 반도체/디스플레이, 태양전지, 신소재 등 다양한 분야에서 중요한 공정이다. 더욱이 반도체 소자 선폭이 줄어들면서 나노입자의 오염 제어가 더불어 중요해지고 있다. 생산 공정 기술의 집적화에 따라 패턴 사이 거리가 작아지고, 이에 불과 수 십 나노미터크기의 오염입자에 의해서 패턴불량이 발생하고 생산수율을 감소시킨다. 일반적으로 반도체 공정 중 발생한 오염입자는 반응기 내의 가스가 물리/화학적 공정에 의해 핵생성(nucleation)이 일어나 핵(nuclei)이 생성되고, 이 때 표면반응 및 응집(coagulation)에 의해 성장하게 된다. 이에 본 연구에서는 열분해 반응기 내에서 사일렌(SiH4) 가스를 열분해하여 발생되는 실리콘 오염입자의 핵생성과 성장 모델을 정립하고, 생성된 오염입자의 거동과 전달 현상을 이론적으로 고찰하였다. 열분해 반응기와 같은 기상공정(Gas to particle conversion)에서 오염입자가 생성될 때, 그 성질과 크기 등에 물리/화학적 영향을 주는 요소는 전구체/이송기체의 농도 및 유량, 작동 압력, 작동 온도와 반응기 고유 특성 등이 있다. 수치해석의 정당성과 빠른 계산을 위해 단순화시킨 0D 모델인 Batch 반응기와 1D모델인 plug flow 반응기 등에서 SiH4 가스의 열분해 과정시 생성되는 Si cluster를 상용코드인 CHEMKIN 4.1.1을 이용하여 계산하였으며, 2D모델인 Shear flow 반응기로 확장시켜 Si 오염입자가 생성특성을 연구하였다.

• Optical Science and Technology
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• v.8 no.3
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• pp.10-17
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• 2004

화학 반응은 원자나 분자가 서로 작용하여 결합이 분해되거나 생성되는 동적인 과정이다. 일반적으로 이러한 동적인 과정은 매우 빠른 시간 내에 일어나기 때문에 (보통수 펨토초에서 수 피코초 내에 일어난다) 화학 반응 도중에 나타나는 중간체(transient structure)의 구조 변화나 분자의 움직임을 실시간으로 잡기 위해서는 매우 높은 시간 분해능이 필요하다. 이러한 중간체의 구조 동역학(structural dynamics)은 그 대상이 되는 분자의 화학적/생물적 기능에 매우 중요한 정보를 제공하기 때문에 실시간 분자 동역학 연구는 복잡한 화학적/생물적 시스템의 메커니즘 규명 연구에 필수적이라고 할 수 있다. (중략)

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.299.1-299.1
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• 2013

넓은 표면적을 갖는 탄소나노튜브(CNT)는 기체 분자의 흡착 성능이 기존의 다른 흡착제에 비해 우수한 것으로 알려져 있으나, CNT의 물리/화학적 성질은 튜브의 직경과 기하 구조에 의해 큰 차이를 나타내며 정제가 매우 까다롭다는 단점을 가지고 있다. CNT와 외형적으로 매우 흡사한 질화붕소 나노튜브(BNNT)의 경우, 구조와 직경에 상관없이 열적, 화학적 안정성이 우수하여 $CO_2$를 비롯한 다른 공해 물질들의 제거제나 흡착제로서 응용 가능성이 매우 높다. 본 연구진은, BN-결함을 도입한 BNNT 벽면에서의 $CO_2$ 흡착 반응과 $CO_2$를 에너지 물질인 HCOOH와 $H_2CO_3$로 전환하는 반응에 대한 양자화학 이론 계산 연구를 수행하였다. 그 결과, $CO_2$에 대한 $B_N$-BNNT 흡착 성능이 튜브의 직경에 상관없이 매우 우수하였고, $B_N$-BNNT 벽면상에 흡착된 $CO_2$가 물 분자와 반응할 경우 HCOOH와 $H_2CO_3$로의 전환반응이 효과적으로 진행되었다. 이러한 이론 계산 연구 결과는 BN-BNNT가 $CO_2$ 흡착제 및 에너지 전환 촉매로의 응용 가능성을 훌륭히 제시하고 있다.

• Journal of the Korean Chemical Society
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• v.65 no.4
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• pp.268-278
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• 2021

The purpose of this study is to subdivide responsive teaching types proposed in the previous study in order to observe the change in the responsive teaching types in teacher educational programs, and to identify factors that impede changes in responsive teaching types. To this end, an educational program including introduction of responsive teaching, case analysis of responsive teaching, individual assignments and group discussions on facilitator type educational scenarios is provided for chemistry teachers who participated in a chemistry education course established in a graduate school of education. Based on previous research, when the teacher's teaching method was analyzed as evaluator, transfer, guide and facilitatore, a type that could not be classified was observed. In this study, responsive teaching types were added by adding two types: explorer and interpreter. In addition, through individual assignments and group discussion data, we could observe the factors that hinder teachers' responsive teaching changes. The obstacles that impede the change to responsive teaching were classified into teacher factors, student factors, and environmental factors. Among the obstacles, teacher factors include a belief in teacher-led instruction, a belief in the role of a teacher as a transfer of knowledge, a belief that the curriculum should be followed, a lack of understanding of the teacher about students, and a lack of the teacher's ability to lead student-led expansion. The student factor was distrust of the student's competence. Also, as an environmental factor, there was an educational environment such as multi-students class. Effective teacher education on responsive teaching can be achieved only when the perception related to these obstacles can be removed.

• Journal of Korean Tunnelling and Underground Space Association
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• v.9 no.3
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• pp.299-307
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• 2007

In this study, a new concept for simulating a physical damage of tunnel shotcrete lining due to a long-term chemical deterioration has been proposed. It is known that the damage takes place mainly by internal cracks, reduction of stiffness and strength, which results mainly from volume expansion of the lining and corrosion of cement materials, respectively. This damage mechanism of shotcrete lining appears similar in most kinds of chemical reactions in tunnels. Therefore, the mechanical deterioration mechanism induced by a series of chemical reactions was generalized in this study and mathematically formulated in the framework of thermodynamics. The numerical model was implemented to a 3D finite element code, which can be used to simulate behaviour of tunnel structures undergoing external loads as well as chemical deterioration in time. A number of illustrative examples were given to show a feasibility of the model in tunnel designs.

• Journal of the Korean Electrochemical Society
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• v.13 no.1
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• pp.70-74
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• 2010

The immobilization of proteins on silicon surfaces using electrochemical reaction has been studied. Chemical deposition of nitrobenzendiazonium (NiBD) cations is employed to modify silicon surfaces. Electrochemical reduction of nitro-group to primary amine-group have been conducted on the modified surfaces to activate silicon surfaces for the protein immobilization. Attachment of gold nanoparticles was used to prove the reduction. The current method was applied to selective activation of a silicon nanowire and immobilize proteins on the selected nanowire. It has been demonstrated that the use of chemical and electrochemical reaction NiBD is efficient for the selective immobilization of proteins on silicon nanowire surfaces.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.1 no.1
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• pp.25-39
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• 2003

This study proposed a new electrolytic reduction technology that is based on the integration of simultaneous uranium oxide metallization and Li$_2$O electrowinning. In this electrolytic reduction reaction, electrolytically reduced Li deposits on cathode and simultaneously reacts with uranium oxides to produce uranium metal showing more than 99% conversion. For the verification of process feasibility, the experiments to obtain basic data on the metallization of uranium oxide, investigation of reaction mechanism, the characteristics of closed recycle of Li$_2$O and mass transfer were carried out. This evolutionary electrolytic reduction technology would give benefits over the conventional Li-reduction process improving economic viability such as: avoidance of handling of chemically active Li-LiCl molten salt increase of metallization yield, and simplification of process.

• Proceedings of the Korea Society for Energy Engineering kosee Conference
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• 1998.05a
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• pp.253-258
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• 1998

연료 전지 시스템에서의 스택은 화학 공장의 반응기에 해당한다. 화학 공장에서 반응 생성물의 생산성을 최적화하기 위해 반응기 해석이 매우 중요한 것과 마찬가지로, 연료 전지 스택의 특성을 해석하고 최적 조건으로 설계 및 운전하는 것은 필수적이다. 스택에서 전기를 생산하는 과정에서 중요한 두 가지 운전 변수는 기체의 조성과 온도이며, 이론적인 해석을 위해서는 유체의 이동시에 열전달 및 각 성분별 물질 수지식과 전기 화학 반응식이 사용될 수 있다.(중략)

• Elastomers and Composites
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• v.35 no.4
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• pp.288-295
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• 2000

It has been tried to decrease the crosslink density of vulcanized EPDM (ethylone-propylene-diene terpolymer) rubber through a chemical devulcanization treatment. Phase transfer catalyst, alkali metal (i.e., sodium), and triphenylphosphine have been used as a chemical agent ul the devulcanization treatment. Also it has been estimated the effect of the devulcanization treatment in the case of utilization of 2-butanol as a devulcanization reaction solvent. In the devulcanization treatment using quaternary ammonium salt as a phase transfer catalyst. the devulcanization effect has been studied with the variation of catalyst molecular weight and the choice of bromide or chloride cation. In the devulcanization treatment using sodium, it has been estimated the devulcanization treatment effect depending upon the variation of reaction variables such as amount of sodium used, reaction temperature, pressure of hydrogen gas, which is used as a reaction environment. The $M_c$ value (number average molecular weight between two crosslink points) has been experimentally estimated by the equilibrium swelling method and it is quantitatively related to the crosslink density. The estimation of devulcanization effect for vulcanized EPDM rubber has been carried out by the comparison of the $M_c$ values between the untreated and the treated specimens.

• Journal of the Korean Chemical Society
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• v.25 no.5
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• pp.291-299
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• 1981

A test particle kinetic theory for reaction dynamics in liquids is presented at the repeated ring collision level for the hard sphere model. A kinetic equation for the equilibrium time correlation function of the reactive test particle phase space density is derived and the rate kernel expression for the reversible chemical reaction of the type A +B ${\rightleftharpoons$ C + D in the presence of inert solvent S is obtained by the projection operator method.