• Title/Summary/Keyword: 화학기상증 착법

Search Result 1, Processing Time 0.014 seconds

Controlling the Properties of Graphene using CVD Method: Pristine and N-doped Graphene (화학기상증착법을 이용한 그래핀의 물성 조절: 그래핀과 질소-도핑된 그래핀)

  • Park, Sang Jun;Lee, Imbok;Bae, Dong Jae;Nam, Jungtae;Park, Byung Jun;Han, Young Hee;Kim, Keun Soo
    • KEPCO Journal on Electric Power and Energy
    • /
    • v.1 no.1
    • /
    • pp.169-174
    • /
    • 2015
  • In this research, pristine graphene was synthesized using methane ($CH_4$) gas, and N-doped graphene was synthesized using pyridine ($C_5H_5N$) liquid source by chemical vapor deposition (CVD) method. Basic optical properties of both pristine and N-doped graphene were investigated by Raman spectroscopy and XPS (X-ray photoemission spectroscopy), and electrical transport characteristics were estimated by current-voltage response of graphene channel as a function of gate voltages. Results for CVD grown pristine graphene from methane gas show that G-peak, 2D-peak and C1s-peak in Raman spectra and XPS. Charge neutral point (CNP; Dirac-point) appeared at about +4 V gate bias in electrical characterization. In the case of pyridine based CVD grown N-doped graphene, D-peak, G-peak, weak 2D-peak were observed in Raman spectra and C1s-peak and slight N1s-peak in XPS. CNP appeared at -96 V gate bias in electrical characterization. These result show successful control of the property of graphene artificially synthesized by CVD method.