• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.449-449
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• 2013

최근 반도체 소자의 집적회로는 점점 복잡해지고 있는 반면, 소자의 크기는 작아지고 있으며 그로 인해 패드의 크기가 작아지고 패드사이의 간격 또한 협소해지고 있다. 따라서 웨이퍼 단계에서 제조된 집적회로의 불량여부를 판단하기위한 검사 장비인 프로브카드(Probe Card)의 높은 집적도가 요구되고 있다. 하지만 기존의 MEMS 공법으로 제작되는 프로브 빔은 복잡한 제조 공정과 높은 생산비용, 낮은 집적도의 문제점을 가지고 있다. 본 연구에서는 이러한 문제점을 해결하기 위하여 간단한 제조 공정과 낮은 생산비용, 높은 집적도를 가지는 프로브 빔을 개발하기 위하여 절연절단 방식으로 BeCu (Beryllium-Copper) 프로브 빔을 제작하였다. 낮은 소비 전력으로 우수한 프로브 빔 어레이를 제작하기 위해서 가장 고려해야할 대상은 프로브 빔의 재료와 구조(형상)이다. 절연전단 방식으로 프로브 빔을 형성할 때 요구되는 Fusing current는 프로브 빔의 구조(형상)에 크게 영향을 받는다. 낮은 Fusing current는 소비 전력을 줄여주고, 절연절단으로 형성되는 프로브 빔의 단면(끝)을 날카롭게 하여 프로브 빔과 집적회로의 패드 간의 접촉 저항을 감소시킨다. 프로브 빔의 제작은 BeCu 박판을 빔 형태로 식각하여 제작하였으며, 실리콘 비아 홀(Via hole) 구조의 기판위에 정렬하여 soldering 공정을 통해 실리콘 기판과 BeCu 박판을 접합시켰다. 접합된 프로브 빔의 끝부분을 들어 올린 상태로 전류를 인가하여 stress free 상태로 만들어 내부 응력을 제거하였으며, BeCu 박판에 fusing current를 인가하여 BeCu 박판 프레임으로부터 제거를 하였다. 제작된 프로브 빔의 길이는 1.7 mm, 폭은 $50{\mu}m$, 두께는 $15{\mu}m$, 절단부의 단면적은 1$50{\mu}m^2$로 제작되었다. 그리고 프로브 빔의 절단부의 길이는 $50{\mu}m$ 부터 $90{\mu}m$까지 $10{\mu}m$ 증가시켜 제작되었다. 이후에 절연절단 공정에 요구되는 Fusing current를 측정하였고, 절연절단 후의 절단면의 형상을 SEM (Scanning Electron Microscope)장비를 통하여 확인하였다. 절단부의 길이가 $50{\mu}m$일 때 5.98A의 fusing current를 얻었으며, 절연절단 후 절단부 상태 또한 가장 우수했다. 본 연구에서 제안된 프로브 빔 제작 방법은 프로브카드 및 테스트 소켓(Test socket) 생산에 응용이 가능하리라 기대한다.

• Journal of the Korean Society for Nondestructive Testing
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• v.25 no.2
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• pp.74-80
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• 2005

A new dimension measuring method for the measurement of diameter of an object has been developed using laser triangulation. The 3D data of an object was calculated from the 2 dimensional image information obtained by the laser stripe using the laser triangulation. The system that use existing theory can measure the diameter of hole not only in a normal plane but also ill an incline plane. However, in the existing theory, since the lens with fixed feral length was used, the area of measurement was fixed. The simplest way to solve this problem is to change distance between a CCD camera and object. Other way is to use a zoom lens having variable focal length. In this paper, the zoom lens with variable focal length was used. Therefore, we ran experiment with magnification that is optimized according to size of object using zoom lens with variable focal length.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.2
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• pp.41-47
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• 1999

In this paper, we report 3D-simulations of a plasma etching process by employing cell-removal algorithm takes into account the mask shadow effect os well as spillover errors. The developed simulator haas an input interface to take not only an analytic form but a Monte Carlo distribution of the ions. The graphic user interface(GUI) was also built into the simulator for UNIX environment. To demonstrate the capability of 3D-SURFILER(SURface proFILER), we have simulated for a typical contact hole structure with 36,000($30{\times}40{\times}30$) cells, which takes about 20 minutes with 10 Mbytes memory on sun ultra sparc 1. as an exemplary case, we calculated the etch profile during the reactive ion etching(RIE) of a contact hole wherein the aspect ratio is 1.57. Furthermore, we also simulated the dependence of a damage parameter and the evolution of topography as a function of the chamber pressure and the incident ion flux.

• Journal of the Korean Society for Nondestructive Testing
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• v.29 no.2
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• pp.108-113
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• 2009

MFL(magnetic flux leakage) inspection is a general method of non-destructive evaluation(NDE) of underground gas pipelines. Pipelines are magnetized by permanent magnets when MFL PIG(pipeline inspection gauge) gets through them. If defects or corrosions exist in pipelines, effective thickness is changed and thus variation of leakage flux occurs. The leakage flux signals detected by hall-sensors are analyzed to characterize defect's geometries such as length, width, depth, and so on. This paper presents several methods for estimating defect's length using MFL signals and their performances are compared for real defects carved in KOGAS pipeline simulation facility. It is found that 80% and 90% of minimum values for axial and peak values for radial signals respectively show the best performance in the point of length estimation error.

• International Journal of Highway Engineering
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• v.14 no.1
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• pp.25-34
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• 2012

The rapid economic development induced the massive road constructions, becoming bigger and high-speed of the vehicles. However, it brings lots of social problems, such as air pollutions, traffic noise and vibration. Special concrete block for the base course of asphalt pavement is needed to decrease traffic noise such as tire's explosive and vehicles sound, applying Helmholtz Resonators theory to asphalt pavement. If it is applied to the area where it happens considerable noise such as a junction, the street of a housing complex and a residential street, it is one of alternative methods to solve the social requirements of noise problems. This research examines couple of laboratory tests for the sound absorption effect of the concrete block and the base concrete block for quiet pavement. The specimens, which is fixed hall-size, space, depth as the condition of this research, are analysed of noise reduction effect using different noise levels of vehicles. Judging from the analysis of test results with vehicle noise volume, measurement distance, a form and size of the hall using the base concrete block, the use of special concrete base and quiet asphalt surface showed a good alternative solution for decreasing traffic noise level, from 4dB to 9dB.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.25 no.2
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• pp.163-173
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• 2012

This study covers the nonlinear analysis of anchor head for high strength prestressing strand and presents necessary process in improving the performance of anchor head. The surface of wedge for strand is contacted to the surface of the wedge hole on anchor head when it is fitted into the wedge hole, and the contact condition changes according to the level of load applied through the wedge. In order to analyze detailed behavior, nonlinear material model and contact element were used in analysis. It was found from the analysis that the behavior of anchor head is affected by the interaction with the wedge contacted so that the wedge in FE model should have the same figure as the actual object. Circular array of wedge hole presents better stress distribution than layer array even though the small difference in maximum deformation. Increment of thickness of anchor head and distance of wedge hole also improve the performance of anchor head.

• Journal of Korean Ophthalmic Optics Society
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• v.13 no.4
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• pp.75-81
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• 2008

Purpose: To develop a solar concentrator having the reflecting surface with the 2m class diameter. Methods: In order to make the reflecting surface for the solar concentrator, the shape of the reflecting surface sector is required. So, first, we induced the formula that can produce this shape. After that, using Delphi 6.0 language, we developed a program which uses this formula and produces the shape and the numerical data of the reflecting surface sector with the input variables such as the external diameter of the reflecting mirror, the reflecting mirror's radius of curvature at the paraxial range, the number of reflecting mirror sector, the size of the center hole of the reflecting mirror, and the interval of the output data. Results: This program, which was developed to produce the shape and the numerical data of the reflecting surface sector, enables us to see the shape of sector on the monitor and to save the numerical data files for the shape of sector. As a result, the user of this program can easily access the numerical data of the reflecting surface sector. Conclusions: Developing the program which produce the reflecting surface sector used to make the reflecting surface of the solar concentrator, we could succeed in making the prototype products by applying it to the development of the real solar concentrator with the diameter of the 2m class.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.2
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• pp.67-75
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• 2019

The diaphragm used for CFT columns has a small amount of steel to be used, but has a disadvantage that welding is difficult and openings are required because the steel tube and four sides must be welded. The improved diaphragm to be examined in this study was cut into four corners by cutting the center hole for concrete filling. In the improved diaphragm, the width of the center hole is the same as that of the previous diaphragm, but the width of the diaphragm contacting the steel tube is reduced, thereby reducing the welding length by about 70% compared to the previous diaphragm. The in-plane strain of each specimen was analyzed when the same load was applied to the interior diaphragm through a simple tensile test. Using the general FEM program(ANSYS 19.2), the analysis was performed under the same conditions as the actual simple tensile test, and the load transfer between the improved diaphragm and the previous diaphragm was compared. When the width of the diaphragm is equal to or smaller than the flange width, stress is concentrated from the end of the diaphragm, and when the flange width is larger, stress is concentrated at the center.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.46 no.9
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• pp.712-722
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• 2018

This paper conducts parametric studies on flapping wing design, one of the most important design parameters of insect-mimicking aerial vehicles. Experimental study on wing shape was done through comparison and analysis of thrust, pitching moment, power consumption, and thrust-to-power ratio. A two-axis balance and hall sensor measure force and moment, and flapping frequency, respectively. Wing configuration is biplane configuration which can develop clap and fling effect. A reference wing shape is a simplified dragonfly's wing and studies on aspect ratio and wing area were implemented. As a result, thrust, pitching moment, and power consumption tend to increase as aspect ratio and area increase. Also, it is found that the flapping mechanism was not normally operated when the main wing has an aspect ratio or area more than each certain value. Finally, the wing shape is determined by comparing thrust-to-power ratio of all wings satisfying the required minimum thrust. However, the stability is not secured due to moment generated by disaccord between thrust line and center of gravity. To cope with this, aerodynamic dampers are used at the top and bottom of the fuselage; then, indoor flight test was attempted for indirect performance verification of the parametric study of the main wing.

• Journal of the Korea institute for structural maintenance and inspection
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• v.23 no.7
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• pp.33-39
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• 2019

In this study, an experimental study was carried out with variables of the shape of the ground soil-binder in order to find out whether the shear wave velocity and the ground grade were improved by the ground improvement. In this study, the shear wave velocity was measured using the crosshole method with variables of the shape of the ground soil-binder. In addition, the prediction formula of the shear wave velocity for suitability of N-Values for the domestic soil conditions are proposed using the result value of this study and the existing results of shear wave velocity. As a result, the shear wave velocity of the ground has increased. In addition, the prediction formula proposed in this study reasonably issued the existing experimental results regardless of the stratum conditions.