• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회B
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• pp.2511-2514
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• 2008

As the minimum feature size decreases, techniques to avoid contamination and processes to maintain clean wafer surfaces have become very important. The deposition and detachment of nanoparticles from surfaces are major problem to integrated circuit fabrication. Therefore, cleaning technology which reduces nanoparticles is essential to increase yield. Previous megasonic cleaning technology has reached the limits to reduce nanoparticles. Megasonic cleaning is one of the efficiency method to reduce contamination nanoparticle. Two major mechanisms are active in a megasonic cleaning, namely, acoustic streaming and cavitation. Acoustic streaming does not lead to sufficiently strong force to cause damage to the substrates or patterns. Sonoluminescence is a phenomenon of light emission associated with the cavitation of a bubble under ultrasound. We studied a correlation between sonoluminescence and sound pressure distribution for the minimum of pattern damage in megasonic cleaning.

• 반도체디스플레이기술학회지
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• 제13권1호
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• pp.1-6
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• 2014

In this study, to analyze characteristics of acoustic pressure for spot spray type megasonic, FEM analysis was performed for variable parameters based on the structure of commercial one. and 2 models of transmitter were designed and fabricated, and then acoustic pressure distribution(APD) of the transmitter was measured and compared to the commercial. The results of this experiment show that maximum acoustic pressure of model 1 was higher to 1.6 times compared to the commercial, and model 2 was higher to 1.23 times. Through the course of this study, design technology of transmitter has been developed by means of FEM analysis and experiment for characteristics of acoustic pressure. Also, it is expected to be useful in the development of high power spray type megasonic that is necessary with advance in semiconductor technology.

• 한국제4기학회지
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• 제14권2호
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• pp.125-135
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• 2000

한국 서해 경기만 반월조간대 퇴적층(체)의 제 4기 후기 층서가 상부조간대(upper tidal flat)의 퇴적층에서 실시된 심부시추(기반암까지 시추)의 자료에 근거하여 설정되었다 즉, 선캠브리아 변성퇴적암의 기반암위에 선현세 하성-충적층(빙하기의 낮은 해수면 시기)인 Unit II의 층서퇴적단위가 부정합적으로 놓이고 Unit II는 현세 중기-후기(middle-late Holocene)의 상부조간대층(체)인 Unit I에 의하여 부정합적으로 피복된다. 이러한 제 4기 후기 층서는 해양퇴적학으로 분석된 자료에 의하여 설정되었으며, 또한 고기후-고해수면 변동의 고환경적 요건으로 해석되었다.

• 한국제4기학회지
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• 제20권1호
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• pp.1-8
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• 2006

인천 국제공항 고속국도 건설을 위하여 영종북 갯벌에서 많은 시추 조사가 이루어졌다. 이 시추 자료를 분석하여 이 갯벌 퇴적물의 수직 구조를 검토했다. 영종북 갯벌의 퇴적층 두께는 대략 30m이고, 하부로부터 기저 사력층, 하부 점토층, 중부 실트층, 중부 점토층, 상부 실트층이 차례로 퇴적되어 있었다. 황갈색의 반고 화된 산화대는 $-3{\sim}-5m$ 고도에서 중부 점토층 윗면 혹은 중부 점토층 내에서 나타났다. 산화대 윗면을 선현세 갯벌층과 현세 갯벌층 간의 부정합면으로 인정하기에는 퇴적 단면 구조의 해석상 어려운 점이 많았다.

• 한국염색가공학회지
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• 제16권5호
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• pp.42-47
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• 2004

The main objective of this work is to develop melt-blown nonwoven fabric composite materials have electromagnetic shielding characteristics using thin copper film. Melt-blown nonwoven fabric is the matrix phase and thin copper films are the reinforcement of the composite materials. Thin copper films are incorporated as conductive fillers to provide the electromagnetic shielding property of the melt-blown nonwoven fabric. The width and interval of thin copper films in the nonwoven fabric are varied by changing 1, 3, 5 mm for thin copper film's width and 1, 3, 5 mm for thin copper film's interval. The shielding effectiveness(SE) of various melt-blown nonwoven fabrics is measured in the frequency range of 50 MHz to 1.8 GHz. The variations of SE of melt-blown nonwoven fabric with width and interval of thin copper films are described. Suitability of melt-blown nonwoven fabric for electromagnetic shielding applications is discussed. The results indicate that the melt-blown nonwoven fabric composite material using thin copper film can be used for the purpose of electromagnetic shielding.

• 한국항공우주학회지
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• 제37권6호
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• pp.602-608
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• 2009

IEEE(Institute of Electrical and Electronics Engineers)1516 에 규정된 HLA(High Level Architecture) 기반 기술은 상이한 목적으로 개발된 다수의 개별 시뮬레이션들이 결합된 복합 시뮬레이션 네트워크 시스템을 구성하는데 있어서 필수적 요소이다. 본 논문에서는 상용 비행 시뮬레이션을 HLA를 기반으로 구현하는 과정과 구현된 시스템의 동작 과정을 보여줌으로써 확장성 및 상호 운용성을 갖춘 비행 시뮬레이션 모델 구조를 제시하였다. 또한 HLA를 기반으로 구현된 실시간 시뮬레이션 시스템과 상용 비행 시뮬레이션을 비교하여 얻어진 비행 정보 데이터 분석을 통해 완벽한 실시간성을 보장할 수 있는 지에 대한 여부를 판단하였다.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2006년도 하계학술발표대회 논문집
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• pp.369-374
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• 2006

Quantification of infiltration rate is an important issue in HVAC system design. The infiltration in buildings depends on many uncertain parameters that vary with significant magnitude and hence, the results from standard deterministic simulation approach can be unreliable. The authors utilize uncertainty analysis In predicting the airflow rates. The paper presents relevant uncertain parameters such as meteorological data, building parameters (leakage areas of windows, doors, etc.), etc. Uncertainties of the aforementioned parameters are quantified based on available data from literature. Then, the Latin Hypercube Sampling (LHS) method was used for the uncertainty propagation. The LHS is one of the Monte Carlo simulation techniques that is suited for our needs. The CONTAMW was chosen to simulate infiltration phenomena in a residential apartment that is typical of residential buildings in Korea. It will be shown that the uncertainty propagating through this process is not negligible and may significantly influence the prediction of the airflow rates.

• 반도체디스플레이기술학회지
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• 제22권2호
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• pp.17-23
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• 2023

In semiconductor manufacturing processes, a cleaning process is important that can remove sub-micron particles. Conventional wet cleaning methods using chemical have limits in removing nano-particles. Thus, physical forces of a mechanical vibration up to 1 MHz frequency, was tried to aid in detaching them from the substrates. In this article, we developed a 1 MHz quartz megasonic for a bare wafer cleaning using finite element analysis. At first, a 1 MHz megasonic prototype was manufactured. Using the results, a main product which can improve a particle removal performance, was analyzed and designed. The maximum impedance frequency was 992 kHz, which agreed well with the experimental value of 986 kHz (0.6% error). Acoustic pressure distributions were measured, and the result showed that maximum / average was 400.0~432.4%, and standard deviation / average was 46.4~47.3%. Finally, submicron particles were deposited and cleaned for the assessment of the system performance. As a result, the particle removal efficiency (PRE) was proved to be 92% with 11 W power. Reflecting these results, the developed product might be used in the semiconductor cleaning process.

• 한국수소및신에너지학회논문집
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• 제34권3호
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• pp.292-296
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• 2023

Until recently, ships, automobiles, and drones using hydrogen energy are being actively researched. In addition, stations and facilities for hydrogen supply are being developed widely. Among them, a hydrogen pump is necessary for compressing it and transfer to other stations. The liquid hydrogen pump is operated at very high pressure up to 90 MPa. In our research, a reciprocating plunger pump is studied. Especially, a leakage in a liquid hydrogen pump is predicted using a finite element method. As a result, it was found that leak mass flow rates changed from 0.09 to 2.20 kg/h, when the gaps were given from 2 to 6 ㎛. Thus pump efficiencies were calculated from 99.9 to 97.9%, when the gaps changed from 2 to 6 ㎛. These results are useful for the design of the liquid hydrogen pump.

• 지구물리와물리탐사
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• 제8권4호
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• pp.243-250
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• 2005

한국 남해 내 대륙붕에서 취득된 고해상 탄성파 탐사 자료의 분석에 의하면 연구해역 내 대륙붕 퇴적층은 지난 마지막 빙하기 이후 형성된 3개의 층서단위로 구분된다. 퇴적단위 I은 탄성파 단면상에서 반투명 음향상, 층리 음향상, 허모키 음향상 특징을 가진다. 이러한 퇴적단위 I은 후빙기 해침동안 하구역 환경에서 퇴적된 사질니 혹은 니질사 퇴적물로 구성된다. 퇴적단위 II는 역과 패각을 포함하는 사질퇴적물로 구성되며 후빙기 해침동안 연안침식에 의해 형성되었다. 퇴적단위 III은 투명 혹은 반투명 음향상 특징을 가지며, 현세 고해수면 조건하에서 퇴적된 낙동강 및 섬진강 기원의 니질 퇴적물로 구성된다. 본 퇴적단위는 내대륙붕에 제한적으로 분포하며 외해를 향하면서 층후가 감소하는 쐐기 형태로 발달한다.