• Proceedings of the Korean Vacuum Society Conference
• /
• 2016.02a
• /
• pp.300.1-300.1
• /
• 2016

최근 반도체 회로의 미세화로 인해 디자인 공정이 20 nm 이하로 내려갔다. 그 결과 회로간의 간격이 줄었으며 많은 문제가 발생 한다. 첫 번째 문제는 미세하게 여러 박막 층들을 쌓기 때문에 박막 층이 그전 50 nm 공정에 비해선 쉽게 무너질 수 있다. 따라서 하나의 박막 층은 다른 여러 박막들의 하중을 잘 견뎌야 할 것이다. 결과적으로 회로의 미세화에 따라 박막의 기계적 특성이 좋아야 될 것이다. 또 다른 문제는 너무 좁은 회로의 간격으로 인해 다른 회로에 영향을 미치는 크로스토크라는 전기적 문제이다. 크로스토크가 크다는 것은 회로간의 누설 전류가 크다는 것을 의미하며 그만큼 신호 전달 능력이 감소 한다는 것을 뜻한다. 크로스토크의 문제점을 해결하기 위해 회로 사이에 절연 막을 만들어 누설전류를 막아야 한다. 이러한 문제를 바탕으로 본 연구는 Zirconium nitride (ZrN) 박막이 이러한 문제점을 해결 할 수 있는 지연구해 보았다. 박막 제작 시 변화 요인은 질소유량 과 열처리 온도 이며 질소유량 변화는 2 sccm 과 8 sccm 두 경우로 하였다. 또한 열처리는 As-deposited state, $600^{\circ}C$ 와 $800^{\circ}C$로 열처리 하였다. 박막 증착은 RF magnetron sputtering을 이용하였으며 열처리는 질소 분위기에서 furnace를 이용하였다. 기계적 특성분석 결과 질소유량이 2 sccm 인 박막의 hardness는 as-deposited stste에서 18.8 GPa이고 $600^{\circ}C$에선 18.4 GPa로 거의 비슷하고 $800^{\circ}C$ 열처리한 경우는 15.4 GPa 으로 hardness가 감소하는 것을 알 수 있었다. 질소 유량을 8 sccm 흘려주며 증착한 박막의 경우는 as-deposited state, $600^{\circ}C$, $800^{\circ}C$에서의 hardness가 각각 17.5, 16.4, 21.1 GPa 으로 감소하다가 증가하는 경향을 보였다. 또한 zrN 박막의 전기적 특성인 누설 전류 밀도도 측정하였다. 결과적으로 본 연구는 ZrN 박막의 질소 유량 변화와 열처리에 따른 기계적, 전기적 특성변화를 확인 하였다.

• Journal of the Korean Institute of Gas
• /
• v.15 no.4
• /
• pp.21-26
• /
• 2011

Type-3 cylinder liner has a limitation of machining the standard specimen for fracture toughness test because it has approximately 5 mm in thickness as well as a curvature. Hence, it needs to be employed a miniature specimen test technique to evaluate fracture toughness of the cylinder liner. In this study, small punch (SP) test method was employed to evaluate fracture toughness of the cylinder liner. Load-displacement curve result measured from the SP test showed that the liner material was failed during membrane stretching in the general SP load-displacement curve. Additionally, it was shown that liner material was isotropic although the amount of plastic deformation was different depending on the direction due to manufacturing process characteristics. Fracture toughness, $J_{Ic}$, was evaluated using the SP test data. The value of fracture toughness obtained was $13.0kJ/m^2$. This value was similar to that of the same kind of materials. Therefore, the fracture toughness evaluated using the SP test data was reasonable.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.06a
• /
• pp.539-539
• /
• 2008

본 논문에서는 투명전도박막의 균일한 표면특성을 확보하기 위해 광역평탄화 공정을 적용하여 투명전도 박막의 표면 거칠기를 연구하였으며 슬러리의 종류에 따른 박막의 연마특성을 연구하였다. 본 실험에서 사용된 ITO 박막은 RF Sputtering에 의해 제작되었고 하부 기판은 석영 Glass가 사용되었다. 광역평탄화를 위한 CMP 공정은 고분자 물질계열의 패드위에 슬러리입자를 공급하고 웨이퍼 캐리어에 하중을 가하며 웨이퍼의 표면을 연마하는 방법으로 가공물을 탄성패드에 누르면서 상대 운동시켜 가공물과 친화력이 우수한 부식액으로 화학적 제거를 함과 동시에 초미립자로 기계적 제거를 하는 것이다. ITO 박막의 평탄화를 위한 공정조건은 Polisher pressure 300 g/$cm^2$, 슬러리 유속 80 ml/min, 플레이튼속도 60 rpm으로 하였다. 위의 조건에 따라 공정을 진행 후 연마특성을 측정하였으며 이때 사용된 슬러리는 산화막에 사용되는 실리카슬러리와 금속연마용 슬러리인 EPL을 사용하였다. 연마율은 실리카 슬러리가 EPL슬러리에 비해 높음을 확인 하였다. CMP 공정에 의해 평탄화를 수행 할 경우 실리카슬러리와 EPL슬러리 모두 CMP전에 비해 돌출된 힐록들이 감소되었음을 알 수 있었다. 비균일도 특성은 모든 슬러리가 양호한 특성을 나타내었다. 평탄화된 박막의 표면과 거칠기 특성은 AFM(XE-200, PSIA Company) 을 이용하여 분석을 하였다.

• Journal of the Korean Society of Propulsion Engineers
• /
• v.17 no.5
• /
• pp.113-120
• /
• 2013

Graphite is commonly used as a solid lubricant leading to low friction coefficient and abrasion. In this study, wear behavior of sealing graphite(HK-6) at elevated temperature was evaluated. Reciprocating wear test was carried out as wear occurred graphite as a seal(HK-6) is positioned between the liner and driving shaft. Variables which are temperature, sliding speed and contact load are set. This study suggest optimized environment conditions through the wear properties of graphite.

• Current Industrial and Technological Trends in Aerospace
• /
• v.9 no.1
• /
• pp.119-129
• /
• 2011

The soft landing of a lunar lander after the entrance of lunar orbit is an essential prerequisite for the accomplishment of the lander's lunar mission. During the landing process of a lunar lander, efficient shock absorption and stability maintenance are indispensible technology to protect payloads. Therefore, the landing gear is a crucial structural component of a lunar lander, it has to absorb the kinetic energy associated with touchdown and support the static load of the landing module in an upright position. In this paper, various landing gears of lunar landers which are being developed as well as which had been successfully landed on the moon surface are investigated. In the end, the Korean lunar lander, which is being designed for preliminary development model, is presented as an example of the lunar lander development.

• Archives of design research
• /
• v.15 no.4
• /
• pp.263-274
• /
• 2002

This study aims to analyze the image of long-span structures. For the intention, it analyzes the relationship between images and physical attributions of elements such as materials, stresses, configurations, compositions and shapes of structures. The image of structures can represent following 5 factors; friendly-unfriendly, strong-weak, dynamic-calm, superior-inferior, and regular-irregular. The friendly-unfriendly in the image of structure mostly determines on a finished material and partly with a structural shape. The strong-weak in the image of structure determines on configuration of the structural members. The dynamic-calm in the image of structure determines on the structural shape. Hence the structure has dynamic forms when it seems to be open and sharp, namely when it receives the flow of forces in the structural shape, and it has a (-) gauss curved rate or an diagonal appearance. The superior-inferior in the image of structure determines on composition of structural elements. The structure seems to be superior is contributed not simply to support load but positively to create design as a tectonic element. From now on, this study can provide the useful information on the long-span structure design through the more appropriate analysis of the image.

• Korean Chemical Engineering Research
• /
• v.49 no.2
• /
• pp.238-243
• /
• 2011

In this study, we attempted a structural analysis in order to design a balloon type extracorporeal membrane oxygenator that can induce blood flow without using blood pumps for the purpose of complementing the weakness in the existing extracorporeal membrane oxygenator. To analyze the flow characteristic of the blood flow within the virtual model of extracorporeal membrane oxygenator, computational fluid dynamics(CFD) modeling method was used. The operating principle of this system is to make the surface of the extracorporeal membrane oxygenator keep contracting and dilating regularly by applying pressure load using a balloon, and the 'ime Function Value'that changes according to the time was applied by calculating a half cycle of sine waveform and a cycle of sine.waveform Under the assumption that the uni-directional blood flow could be induced if the balloon type extracorporeal membrane oxygenator was designed as per the method described above, we conducted a structural analysis accordingly. We measured and analyzed the velocity and pressure of blood flow at both inlet and outlet of the extracorporeal membrane oxygenator through CFD simulation. As a result of the modeling, it was confirmed that there was a flow in accord with the direction of the blood by the contraction/dilation. With CFD simulation, the characteristics of blood flow can be predicted in advance, so it is judged that this will be able to provide the most optimized design in producing an extracorporeal membrane oxygenator.

• Fire Science and Engineering
• /
• v.31 no.4
• /
• pp.103-110
• /
• 2017

With the common tendency in the accordance with the trend, low-stories built edifices that are Pilotis-oriented structured exponentially and constantly increasing its number of buildings. It inevitably contains its risks of facing conflagrations as most of its part is used as parking lots. In the parking lots, the length of the flame has a heavy-weighted possibility that it would get increased because the heat release rate gets relatively high due to the vehicle insulation. Following on top of that, due to the nature of the Pilotisconsisting of pillars, there is a risk of flame spread to the adjacent building if the same Pilotis-structured buildings are adjacent to each other, if the flame spreads to the surroundings due to the influence of the wind. Because the most of the pilotis-structured-buildings have this entrance that makes the residents be able to enter, if the entrance were plugged the resident get a serious risk of a poisonous gas and a flame. Therefore, if the parking-lots of the pilotis-structured-buildings are adjacent to each other it requires a space to prevent the place from the spread of flame. This research studied how far is appropriate to prevent flame spreading with FDS. As a result, the study found that the distance at least 3.0 m is required.

• The korean journal of orthodontics
• /
• v.31 no.2 s.85
• /
• pp.209-223
• /
• 2001

At intrusion of upper anterior teeth in patient with periodontal defect, the use of three-piece base arch appliance for pure intrusion is required. To investigate the change of the center of resistance and of the distal traction force according to alveolar bone height at intrusion of upper anterior teeth using this appliance, three-dimensional finite element models of upper six anterior teeth, periodontal ligament and alveolar bone were constructed. At intrusion of upper anterior teeth by three-piece base arch appliance, the following conclusions were drawn to the locations of the center of resistance according to the number of teeth, the change of distal traction force for pure intrusion and the correlation to the change of vertical, horizontal location of the center of resistance according to alveolar bone loss. 1. When the axial inclination and alveolar bone height were normal, the anteroposterior locations of center of resistance of upper anterior teeth according to the number of teeth contained were as follows : 1) In 2 anterior teeth group, the center of located in the mesial 1/3 area of lateral incisor bracket. 2) In 4 anterior teeth group. the center of resistance was located in the distal 2/3 of the distance between the bracket of lateral incisor and canine. 3) In 6 anterior teeth group, the center of resistance was located in the central area of first premolar bracket .4) As the number of teeth contained in anterior teeth group increased, the center of resistance shifted to the distal side. 2. When the alveolar bone height was normal, the anteroposterior position of the point of application of the intrusive force was the same position or a bit forward position of the center of resistance at application of distal traction force for pure intrusion. 3. When intrusion force and the point of application of the intrusive force were fixed, the changes of distal traction force for pure intrusion according to alveolar bon loss were as follows :1) Regardless of the alveolar bone loss, the distal traction force of 2, 4 anterior teeth groups were lower than that of 6 anterior teeth group. 2) As the alveolar bone loss increased, the distal traction forces of each teeth group were increased. 4. The correlations of the vertical, horizontal locations of the center of resistance according to maxillary anterior teeth groups and the alveolar bone height were as follows : 1) In 2 anterior teeth group, the horizontal position displacement to the vortical position displacement of the center of resistance according to the alveolar bone loss was the largest. As the number of teeth increased, the horizontal position displacement to the vertical position displacement of the center of resistance according to the alveolar bone loss showed a tendency to decrease. 2) As the alveolar bone loss increased, the horizontal position displacement to the vertical position displacement of the center of resistance regardless of the number of teeth was increased.