• Title/Summary/Keyword: 플라스마

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Design of Simulation Model Considering Electrical Characteristics of Reactor for Remote Plasma Generator (원격 플라스마 발생장치용 리액터의 전기적 특성을 고려한 시뮬레이션 모델 설계)

  • Koo, Keun Wan;Sung, Won-Yong;Chae, Hun-Gyu;Lee, Byoung Kuk
    • Proceedings of the KIPE Conference
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    • 2016.07a
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    • pp.177-178
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    • 2016
  • 본 논문에서는 원격 플라스마 발생 장치용 리액터를 포함한 플라스마 부하의 등가 모델을 제안한다. 모델링을 위해 챔버 안에 존재하는 플라스마 부하의 특성을 고려하여, 플라스마 발생장치용 리액터를 포함한 전압, 전류의 정보를 통해 등가모델의 파라미터를 추출한다. 추출한 파라미터를 기반으로 플라스마 부하에 대한 전기적 등가회로를 구성하고, 플라스마 부하의 변화에 중요한 영향을 주는 플라스마 기체의 압력 정보를 등가 모델에 반영하여 이를 바탕으로 시뮬레이션을 진행해 모델링의 타당성을 검증한다.

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디스플레이 공정용 유도 결합형 플라스마 시스템에서의 전자기적 특성 연구

  • O, Seon-Geun;Lee, Yeong-Jun;Kim, Byeong-Jun;Jeon, Jae-Hong;Seo, Jong-Hyeon;Choe, Hui-Hwan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.257.2-257.2
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    • 2014
  • 디스플레이 공정용 ICP (Inductively Coupled Plasma) 장비의 공정영역별 전자기적 특성을 파악하기위해 9개의 안테나가 적용된 3차원 구조에서 Ar 플라스마를 사용하여 시뮬레이션 하였다. 안테나에 인가된 전류, 공정압력, power등 공정 조건별로 안테나로부터 유도된 전기장과 자기장을 구하고, 이들로부터 poynting's theorem을 적용하여 플라스마의 resistance와 reactance를 계산하였다. 이로부터 공정조건별 플라스마의 전기적 특성을 파악 할 수 있었다.

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Visible Light Spectrum of H2 Plasma Generated a Commercial Electric Power in the Parallel Plate Reactor (상용전원 평행판전극 방전장치에서 수소플라스마의 가시광선스펙트럼)

  • Choi, Woon Sang;Ji, Taek Sang;Kang, Sung Soo
    • Journal of Korean Ophthalmic Optics Society
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    • v.4 no.1
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    • pp.15-20
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    • 1999
  • Visible light spectrum emitted from $H_2$ plasma in the parallel plate reactor using a commercial electric power are investigated by optical emission spectroscopy. Intensity of visible light is measured as a function of $H_2$ pressure and discharging power, and the intensity is compared with plasma density measured with the probe. As a result, the intensity is affected by plasma density and the plasma density is controlled the $H_2$ pressure and the discharging power.

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Detection method of Genetic Variation of Mulberry Dwarf Phytoplasma by PCR-SSCP Analysis (PCR-SSCP 분석법에 의한 뽕나무 오갈병 파이토플라스마의 유전변이 검출기법)

  • Han, Sangseop;Cha, Byeongjin;Seong, Gyoobyoung
    • Journal of Korean Society of Forest Science
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    • v.95 no.6
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    • pp.631-635
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    • 2006
  • Single-strand conformation polymorphism (SSCP) analysis of MD and JWB phytopalsma isolates which amplified PCR products using the R16F2n/R2 phytoplamsa universal primer pair were compared for variations of their nucleotide sequence. The MD and JWB phytoplasmas were clearly distinct each of the band patterns from about 1.2 kb PCR products. To clearly distinct of close SSCP band patterns, the MD and JWB phytoplasma PCR products were mixed and performed to detect their polymorphism. The SSCP band patterns show all of bands of MD and JWB on single lane and easily distinct their each band patterns. The PCR-SSCP analysis was possible to detect of 1.2 kb nucleotide sequence and near close band patterns were easily distinct by mixing two samples.

Surface Modification of Polyurethane Film Using Atmospheric Pressure Plasma (대기압 플라스마에 의한 폴리우레탄 필름의 표면 개질)

  • Yang In-Young;Myung Sung-Woon;Choi Ho-Suk;Kim In-Ho
    • Polymer(Korea)
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    • v.29 no.6
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    • pp.581-587
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    • 2005
  • Commercial polyurethane film (PU) was modified with Ar plasma ionized in dielectric barrier discharge (DBD) plate-type reactor under atmospheric pressure. We measured the change of the contact angle and the surface fee energy with respect to the plasma treatment conditions such as treatment time, RF-power, and Ar gas flow rate. We also optimized the plasma treatment conditions to maximize the surface peroxide concentration. At the plasma treatment time of 70 sec, the power of 120 W and the Ar gas flow rate of 5 liter per minute (LPM), the best wettability and the highest surface fee energy were obtained. The 1,1 diphenyl-2-picrylhydrazyl (DPPH) method confirmed that the surface peroxide concentration was about 2.1 nmol/$\cm^{2}$ at 80 W, 30 sec, 6 LPM.

Detection of "Candidatus Phytoplasma Asteris" Associated with Black Locust Witches' Broom in Korea ("Candidatus phytoplasma asteris" Group에 속하는 아까시나무 빗자루병 검출)

  • Han, Sangsub
    • Journal of Korean Society of Forest Science
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    • v.96 no.6
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    • pp.737-741
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    • 2007
  • Typical phytoplasma witches' broom symptoms were observed in black locust (Robinia pseudoacacia L.) in Korea. The symptoms of the disease were showing abnormally small leaves, shortened intemodes and proliferation of shoots. The phytoplasmas were detected consistently in all the symptomatic samples by the amplification with phytoplasma universal primer pairs P1/P7 and R16F2n/R2, and the expected size was 1.8 kb and 1.2 kb. However, the phytoplasma DNA was not detected in healthy seedling. Based on sequence analysis of amplified region, this phytoplasma has close homologies with aster yellow, mulberry dwarf, maize bushy stunt, ash witches' broom and sumac witches' broom phytoplasmas, more than 99.2% but showed homologies with black locust witches' broom (GeneBank Accession No. AF 244363), and jujube witches' broom, 88.6% and 87.7%, respectively. This phylogetic analysis indicates that the black locust witches' broom phytoplasma founded in korea should be classified in the Candidatus phytoplasma asteris (16Sr I) group and clearly distinct from the black locust witches' broom group 16Sr III (peach X-disease phytoplasma group).

Dry etching of tin oxide thin films using an atmospheric pressure cold plasma (대기압 저온 플라스마에 의한 산화 주석 박막의 식각)

  • 이봉주;히데오미코이누마
    • Journal of the Korean Vacuum Society
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    • v.10 no.4
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    • pp.411-415
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    • 2001
  • Using the plasma that we developed to generate a low-temperature plasma at atmospheric pressure, we have investigated the etching possibility of tin oxide $(SnO_2)$ thin films. Hydrogen and methane radicals generated from the plasma were observed and their intensity was found to be dependent on the cathode material by an analysis with optical emission spectroscopy as well as by the plasma impedance. The etching ability of this plasma was evaluated by an emission intensity as well as by the evaluation of impedance using a plasma I-V curve.

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Study of Characteristics of Corona Discharge Plasma in a Wire-Cylinder Type Reactor (Wire-Cylinder형 반응로에서의 코로나 방전 플라스마의 특성 연구)

  • 박승자;박인호;고욱희
    • Journal of the Korean Vacuum Society
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    • v.13 no.3
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    • pp.132-138
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    • 2004
  • We used the self-consistent one-dimensional model applied to FCT algorithm and FEM method in a wire-cylinder type reactor to study the characteristics of corona discharge plasma in air at the atmospheric pressure. At the pulsed do voltage and do voltage, we studied the changes of the characteristic of plasma by computing electron density profile according to the changes of voltage and the size of reactor. The changes of active radius from this result are compared with the data of Peek's. The numerical simulation results for a corona discharge plasma explain the physical mechanism of the discharge process and could be used to obtain the optimized parameters for designing the plasma reactor for pollution abatement.

Generation of Low Temperature Plasma at Atmospheric Pressure and its Application to Si Etching in Open Air (대기압 비평형 플라스마의 발생 및 규소(Si)식각에의 응용)

  • Lee, Bong-Ju
    • Journal of the Korean Ceramic Society
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    • v.39 no.4
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    • pp.409-412
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    • 2002
  • Under atmospheric pressure, apparently homogeneous and stable plasma can be generated from insulator barrier rf plasma generators each of which has an rf powered cathode and a grounded anode covered with a dielectric insulating material. In order to characterize the generating plasma under atmospheric pressure, some basic characteristic have been evaluated by the Langmuire probe method as well as by optical emission spectroscopy. From the result of plasma characteristics, the generated plasma was verified to be nonequilibrium; T(electron)>T(excitation)>T(gas). High rate Si(100) etching (($1.5{\mu}m$/min) were achieved by using He plasma containing a small amount of $CF_4$.