• Title/Summary/Keyword: 표준RMS

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The study on the Removal of Metallic Impurities with using UV/ozone and HF cleaning (금속불순물 제거를 위한 UV/ozone과 HF 세정연구)

  • Lee, Won-Jun;Jeon, Hyeong-Tak
    • Korean Journal of Materials Research
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    • v.6 no.11
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    • pp.1127-1135
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    • 1996
  • 반도체 소자가 고집적화 됨에 따라 단위공정의 수가 증가하게 되었고 동시에 실리콘 기판의 오염에 대한 문제가 증가하였다. 실리콘 기판의 주 오염물로는 유기물, 파티클, 금속분순물 등이 있으며 특히, Cu와 Fe과 같은 금속불순물은 이온주입 공정, reactive ion etching, photoresist ashing과 같은 실 공정 중에 1011-1013atoms/㎤정도로 오염이 되고 있다. 그러나 금속불순물 중 Cu와 같은 전기음성도가 실리콘 보다 큰 오염물질은 일반적인 습석세정방법으로는 제거하기 힘들다. 따라서 본 연구에서는 Cu와 Fe과 같은 금속불순물을 제거할 목적을 건식과 습식 세정방법을 혼합한 UV/ozone과 HF세정을 제안하여 실시하였다. CuCI2와 FeCI2 표준용액으로 실리콘 기판을 인위적 오염한 후 split 1(HF-only), split 2 (UV/ozone+HF), split 3 (UV/ozone + HF 2번 반복), split 4(UV/ozone-HF 3번 반복)를 실시하였고 TXRF(Total Reflection X-Ray Fluorescence)와 AFM(Atomic Force Microscope)으로 금속불순물 제거량과 표면거칠기를 각각 측정하였다. 또한 contact angle 측정으로 세정에 따른 표면상태도 측정하였다. TXRF 측정결과 split 4가 가장 적은 양의 금속불순물 잔류량을 보였으며 AFM 분석을 통한 표면거칠기도 가장 작은 RMS 값을 나타내었다. Contact angle 측정 결과 UV/ozone 처리는 친수성 표면을 형성하였고 HF처리는 소수성 표면을 형성하였다.

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Preliminary assessment of groundwater artificial recharge effect using vertical wells based on a numerical model (수치모델을 활용한 수직정의 지하수 인공함양 효과 예비 평가)

  • Choi, Myoung-Rak;Hwang, Chan-Ik;Kim, Gyoo-Bum
    • Proceedings of the Korea Water Resources Association Conference
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    • 2020.06a
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    • pp.290-290
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    • 2020
  • 연구지역인 충청남도 홍성군 갈산면 신곡마을은 상시 가뭄지역으로서 농번기 물부족을 겪고 있으며, 물 확보의 수단으로서 지하수 인공함양이 고려되고 있다. 본 연구에서는 수치모델을 이용하여 수직정 방식의 지하수 인공함양시 주입 효과를 예비 평가하였다. 모델 지역은 가로 세로 2,450 × 2,350 m로서 10 × 10 m 간격의 격자로 구성하였으며, 현장에서 실시된 지하수위 조사 및 9공의 시추조사, 1개공의 양수시험 결과로부터 수리전도도, 지층분포 등을 구성하였다. 정류모델결과, 실측 및 예측 지하수위의 표준오차(Standard error of the estimate)는 0.53 m, 표준화제곱근오차(Normalized RMS)는 6.79%, 상관계수는 0.99%로 나타났다. 수직정을 통한 주입 효과를 평가하기 위하여, 주입량을 5 ㎥/d, 10 ㎥/d, 15 ㎥/d, 20㎥/d, 주입기간을 1일, 3일, 7일, 우물의 개수를 1개, 3개, 5개일 때 등 다양한 조건하에서의 부정류 모델을 수행하였다. 이로부터 주입의 효과인 지하수위 상승량 및 상승 범위 등을 토대로 물 부족 기간의 인공함양 시나리오(주입정의 위치, 갯수, 심도, 기간 등)를 예비적으로 제시하였으며, 추후 정밀 모델 및 실제 현장 주입 시험 등을 토대로 인공함양 설계를 추진할 예정이다.

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The changes of electrocardiography and signal-averaged electrocardiography after surgical repair of Tetralogy of Fallot (활로씨 4징의 교정 수술 후 심전도와 신호 평준화 심전도의 변화)

  • Seo, Hye-Eun;Lim, Hae-Ri;Kim, Yeo-Hyang;Hyun, Myung-Chul;Lee, Sang-Bum
    • Clinical and Experimental Pediatrics
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    • v.50 no.5
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    • pp.462-468
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    • 2007
  • Purpose : The purpose of this study was to analyze the changes of the late potential of Signal- averaged electrocardiography (SAECG) and Electrocardiography (ECG) parameters during follow up of those who had taken surgical repair of Tetralogy of Fallot (TOF). Methods : Nine patients who had taken surgical repair of TOF since 1985 checked SAECG and standard 12 leads ECG twice in 1999 and 2005 in Kyungpook national university hospital. We evaluated changes of QRS duration, QT interval and JT interval, QRS dispersion, QT dispersion and JT dispersion of standard 12 leads ECG and Filtered QRS (f-QRS), High frequency low amplitude potential (HFLA), Root mean square in terminal 40 ms (RMS) and Mean voltage in terminal 40 ms (MV) of SAECG between in 1999 and 2005. Results : There were significant decrease of JT dispersion ($101.11{\pm}50.11$ vs $71.11{\pm}22.61ms$, P< 0.05) and significant increase of HFLA ($24.67{\pm}13.19$ vs $32.89{\pm}14.21ms$, P<0.05). But there were no significant changes in other parameters. Conclusion : In repaired TOF patients, we evaluated ECG and SAECG to detect possible late complications such as tricuspid regurgitation, right ventricular enlargement, ventricualar arrythmia and sudden death. And there were significant changes of ECG and SAECG in some parameters (JT dispersion, HFLA). But to see the relationships between the changes of these parameters and the long term prognosis, we need to check more patients and longer follow-up.

Development of simultaneous detection method for living modified cotton varieties MON757, MON88702, COT67B, and GHB811 (유전자변형 면화 MON757, MON88702, COT67B, GHB811의 동시검출법 개발)

  • Il Ryong Kim;Min-A Seol;A-Mi Yoon;Jung Ro Lee;Wonkyun Choi
    • Korean Journal of Environmental Biology
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    • v.39 no.4
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    • pp.415-422
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    • 2021
  • Cotton is an important fiber crop, and its seeds are used as feed for dairy cattle. Crop biotechnology has been used to improve agronomic traits and quality in the agricultural industry. The frequent unintentional release of LM cotton into the environment in South Korea is attributed to the increased application of living modified (LM) cotton in food, feed, and processing industries. To identify and monitor the LM cotton, a method for detecting the approved LM cotton in South Korea is required. In this study, we developed a method for the simultaneous detection of four LM cotton varieties, MON757, MON88702, COT67B, and GHB811. The genetic information of each LM event was obtained from the European Commission-Joint Research Centre and Animal and Plant Quarantine Agency. We designed event-specific primers to develop a multiplex PCR method for LM cotton and confirmed the specific amplification. Using specificity assay, random reference material(RM) mixture analysis and limit of detection(LOD), we verified the accuracy and specificity of the multiplex PCR method. Our results demonstrate that the method enabled the detection of each event and validation of the specificity using other LM RMs. The efficiency of multiplex PCR was further verified using a random RM mixture. Based on the LOD, the method identified 25 ng of template DNA in a single reaction. In summary, we developed a multiplex PCR method for simultaneous detection of four LM cotton varieties, for possible application in LM volunteer analysis.

Estimation on the Distribution Function for Coastal Air Temperature Data in Korean Coasts (한반도 연안 기온자료의 분포함수 추정)

  • Jeong, Shin Taek;Cho, Hongyeon;Ko, Dong Hui;Hwang, Jae Dong
    • Journal of Korean Society of Coastal and Ocean Engineers
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    • v.26 no.5
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    • pp.278-284
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    • 2014
  • Water temperature due to climate change can be estimated using the air temperature because the air and water temperatures are closely related and the water temperatures have been widely used as the indicators of the environmental and ecological changes. It is highly necessary to estimate the frequency distribution of the air and water temperatures, for the climate change derives the change of the coastal water temperatures. In this study, the distribution function of the air temperatures is estimated by using the long-term coastal air temperature data sets in Korea. The candidate distribution function is the bi-modal distribution function used in the previous studies, such as Cho et al.(2003) on tidal elevation data and Jeong et al.(2013) on the coastal water temperature data. The parameters of the function are optimally estimated based on the least square method. It shows that the optimal parameters are highly correlated to the basic statistical informations, such as mean, standard deviation, and skewness coefficient. The RMS error of the parameter estimation using statistical information ranges is about 5 %. In addition, the bimodal distribution fits good to the overall frequency pattern of the air temperature. However, it can be regarded as the limitations that the distribution shows some mismatch with the rapid decreasing pattern in the high-temperature region and the some small peaks.

Estimation of Probability Distribution Functions for Water Temperature Data in Korean Coasts (한반도 연안 수온자료의 확률분포함수 추정)

  • Jeong, Shin Taek;Cho, Hongyeon;Ko, Dong Hui;Oh, Nam Sun;Son, Kyeong-Pyo
    • Journal of Korean Society of Coastal and Ocean Engineers
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    • v.25 no.1
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    • pp.11-19
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    • 2013
  • As the temperature data show a distribution pattern with a number of peaks, assumption of normal distribution will result in a serious bias in the analysis. In this study, the Gaussian Mixture Distribution (GMD), a type of bimodal distribution, is presumed as a frequency distribution for the water temperature, in order to estimate the optimal parameter and to carry out the relation analysis between the optimal parameter and the basic statistical information such as mean and variance on the data. By the way, an estimation formulae to compute the frequency distribution of the data is developed by computing the parameters of GMD (i.e. ${\alpha}_1$, ${\mu}_1$, ${\sigma}_1$, ${\alpha}_2$, ${\mu}_2$, ${\sigma}_2$) by means of the major characteristic values, such as mean, standard deviation and skewness of the data. The formulae shows an excellent coincidence with the result from the observation data, in the RMS limit accuracy of 5%.

Application of Smartphone Camera Calibration for Close-Range Digital Photogrammetry (근접수치사진측량을 위한 스마트폰 카메라 검보정)

  • Yun, MyungHyun;Yu, Yeon;Choi, Chuluong;Park, Jinwoo
    • Korean Journal of Remote Sensing
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    • v.30 no.1
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    • pp.149-160
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    • 2014
  • Recently studies on application development and utilization using sensors and devices embedded in smartphones have flourished at home and abroad. This study aimed to analyze the accuracy of the images of smartphone to determine three-dimension position of close objects prior to the development of photogrammetric system applying smartphone and evaluate the feasibility to use. First of all, camera calibration was conducted on autofocus and infinite focus. Regarding camera calibration distortion model with balance system and unbalance system was used for the decision of lens distortion coefficient, the results of calibration on 16 types of projects showed that all cases were in RMS error by less than 1 mm from bundle adjustment. Also in terms of autofocus and infinite focus on S and S2 model, the pattern of distorted curve was almost the same, so it could be judged that change in distortion pattern according to focus mode is very little. The result comparison according to autofocus and infinite focus and the result comparison according to a software used for multi-image processing showed that all cases were in standard deviation less than ${\pm}3$ mm. It is judged that there is little result difference between focus mode and determination of three-dimension position by distortion model. Lastly the checkpoint performance by total station was fixed as most probable value and the checkpoint performance determined by each project was fixed as observed value to calculate statistics on residual of individual methods. The result showed that all projects had relatively large errors in the direction of Y, the direction of object distance compared to the direction of X and Z. Like above, in terms of accuracy for determination of three-dimension position for a close object, the feasibility to use smartphone camera would be enough.

Statistical Characteristics of the Non-tidal Components Data in Korean Coasts (한반도 연안 비조석 성분자료의 통계적 특성)

  • Cho, Hong-Yeon;Jeong, Shin-Taek;Yoon, Jong-Tae;Kim, Chang-Il
    • Journal of Korean Society of Coastal and Ocean Engineers
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    • v.18 no.2
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    • pp.112-123
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    • 2006
  • Double-peak normal distribution function was suggested as the probability density function of the non-tidal components (NTC) data in Korean coastal zone. Frequency distribution analysis of the NTC data was carried out using hourly tidal elevation data of the ten tidal gauging stations, i.e., Incheon, Gunsan, Mokpo, Jeju, Yeosu, Masan, Gadeokdo, Busan, Pohang, and Sokcho which were served through the Internet Homepage by the National Ocean Research Institute. NTC data is defined as the difference between the measured tidal elevation data and the astronomical tidal elevation data using 64 tidal constituents information. Based on the RMS error and R2 value comparison analysis, it was found that this suggested function as the probability density function of the NTC data was found to be more appropriate than the normal distribution function. The parameters of the double-peak function were estimated optimally using Levenberg-Marquardt method which was modified from the Newton method. The standard deviation and skewness coefficient were highly correlated with the non-tidal constants of the tidal gauging stations except Mokpo, Jeju and Sokcho stations.

Fabrication of FBAR (SMR) using Reflector (반사층을 이용한 FBAR(SMR)의 제조)

  • Lee, Jae-Bin;Kwak, Sang-Hyon;Kim, Hyeong-Joon;Park, Hee-Dae;Kim, Young-Sik
    • Korean Journal of Materials Research
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    • v.9 no.12
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    • pp.1263-1269
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    • 1999
  • An FBAR(Solidly Mounted Resonator) was fabricated using reflector layers which prohibit the penetration of bulk acoustic wave into substrate. The SMR consisted of top and bottom electrodes(Al films), a piezoelectric layer (ZnO film), reflector layers(W/$Si_2$ films) and Si substrate. The electrodes were deposited by dc sputtering. The piezoelectric layer and the reflector layers were deposited by rf magnetron sputtering. The control of crystallinity, microstructures and electric properties of each layer was essential for attaining the optimum FBAR characteristics. Under the best deposition conditions for FBAR devices, the ZnO films had highly c-axis preferred orientation(${\sigma}=2.17^{\circ}$), resistivity of $10^4\;{\omega}cm$, and surface roughness of 10.6 ${\AA}$. On the other hand, the surface roughness of W and $Si_2$ films was 16 ${\AA}$ and 33 ${\AA}$, respectively, and the resistivity of Al film was $5.1{\times}10^{-6}\;{\Omega}cm$. The SMR devices were fabricated by the conventional semiconductor processes. In the resonance conditions of the SMR, the series resonance frequency (fs) and the parallel resonance frequency(fp) were 1.244 GHz and 1.251 GHz, respectively and the quality factor(Q) was 1200.

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Evaluation of confidence for measurement of VOCs in indoor air (실내공기질 VOCs 측정의 신뢰도 평가를 위한 연구)

  • Kim, Myoung Ock;Kim, Young Lan;Hong, Suk Young;Heo, Gwi Suk;Lim, Hyun Woo;Choe, Seoung Hun;Lee, Won Suk;Han, Jin Seok;Kim, Kum Hee
    • Analytical Science and Technology
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    • v.26 no.3
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    • pp.165-173
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    • 2013
  • To establishment of PT Program for Indoor air quality field that manufacture of confidential development PTMs (proficiency testing materials) and examined of proficiency testing evaluation included sampling process whether or not that is valid. Confirmation of homogeneity and stability of PTMs prepared. PTMs were confirmed to be homogeneous enough to be used as proficiency testing materials since withinbottle homogeneities of the RMs were lower than 0.3 times of targeted standard deviation of proficiency testing. The result of this study showed that the Robust RSD of proficiency testing for VOCs (volatile organic compounds) appeared 23~43% in concentration of 50~320 ${\mu}g/m^3$ for Method A(Distribution by adsorption in Tenax-tube of VOCs), but less 13~42% in concentration of 200~1200 ${\mu}g/m^3$, 16~31% in concentration of 100~450 ${\mu}g/m^3$ for Method B (distribution by VOCs of gas phase in 10L Tedalr bag), C (directly sampling of cylinder with high pressure) respectively. The result of this study showed that method C with sampling is most adequate to the proficiency testing for VOCs in indoor air.