• Korean Journal of Optics and Photonics
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• v.34 no.2
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• pp.53-60
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• 2023

We designed a catadioptric objective lens with a 0.6 numerical aperture (NA) for semiconductor inspection at 193 nm. The objective lens meets major requirements such as a spatial resolution of 200 nm and a field of view (FOV) of 0.15 mm or more. We selected a wavelength of 266 nm for autofocus based on the availability of the light source. First, we built the objective lenses of three lens groups: a focusing lens group, a field-lens group, and an NA conversion group. In particular, the NA conversion group is a group of catadioptric lenses that convert the numerical aperture of the beam focused by the prior groups to the required value, i.e., 0.6. The last design comprises 11 optical elements with root-mean-squared (RMS) wavefront aberrations less than λ/80 over the entire field of view. We also achieved the athermalization of the objective lens with focus-shift alone satisfying the performance of RMS wavefront aberration below λ/30 at a temperature range of 20 ± 1.2 ℃.

• Proceedings of the Korean Institute of Industrial Safety Conference
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• 2000.06a
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• pp.254-259
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• 2000

현재 막대한 기초투자비와 대규모의 고가장비들로 이루어진 가스시설물 및 관련 산업분야는 풍부한 경험과 깊이 있는 공학적 지식을 바탕으로 코드, 가이드라인, 체크리스트, 표준규격 등의 관리체계를 통해 사업장내에서 상당한 수준의 안전을 보증하고 있다. 하지만 여전히 관련된 사고의 개연성은 상존하고 있으며 인명 및 재산피해를 수반한 사고도 지속적으로 발생하고 있다. (중략)

• The Journal of Korean Institute of Communications and Information Sciences
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• v.26 no.6A
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• pp.1099-1106
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• 2001

본 논문에서는 IEEE 802.11a 표준안으로 확정된 OFDM(Orthogonal Frequency Division Multiplexing) 방식을 적용한 고속 무선 LAN의 최적 시스템을 설계하기 위하여 실내 채널 특성들을 분석하였다. 통계적 채널 모델링 및 JTC(Joint Technical Committee) 모델에서의 실내 및 실외 환경을 선택하여 채널에 따른 고속 무선 LAN 시스템을 모의 실험하였다. 또한 채널에 의한 열화를 보상하기 위하여 무선 LAN 표준안에 따른 긴 훈련 신호를 이용한 채널 등화기법인 LS(Least Square) 방식과 LMMSE(Linear Minimum Mean Square Error) 방식을 비교 분석하였다. LS 기법과 본 논문에서 제시한 LS 방식으로 채널의 지연 확산 rms(root mean square) 값을 추정한 후 LMMSE 기법을 사용한 경우의 차이점을 고찰하였다. 이러한 LMMSE 기법을 채택할 경우 LS 기법에 비해 실외환경과 같은 열악한 채널환경 하에서도 시스템 성능에 상당한 개선효과가 나타남을 확인할 수 있었다.

• Journal of the Korean Society of Radiology
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• v.11 no.7
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• pp.671-677
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• 2017

In this study, scattering factors affecting the quality of medical images were quantitatively analyzed and investigated. MCNPX simulation was conducted by using ANSI phantom, made of tissue equivalent materials, to calculate the scattering ratio occurred by the increase of the object thickness. Then, the result of the simulation was compared with the result of actual radiation measurement. In addition, we evaluated the image quality by the RMS evaluation, RSD and NPS analysis using X-ray images acquired with increasing object thickness. Furthermore, the scattering ratio was analyzed by increasing the thickness of acrylic phantom on chest phantom. The result showed that the scattering ratio was increased to 57.2%, 62.4%, and 66.8% from 48.9%, respectively, when the acrylic phantom thickness was increased by 1 inch from 6.1 inches. The results of MCNPX simulation and the actual measured scattering dose showed similar results. Also, as a result of RMS measurement from acquired x-ray images, the standard deviation decreased as the object thickness increased. However, in the RSD analysis considering the average incident dose, the results were increased from 0.028 to 0.039, 0.051, 0.062 as the acrylic phantom thickness was increased from 6.1 inches to 7.1 inch, 8.1 inch, and 9.1 inch, respectively. It can be seen that the increase of the scattering effect due to the increase of the object thickness reduces the SNR. Also, the NPS results obtained by measuring scattered radiation incident on the detector resulted in the increase of the noise as the object thickness increased.

• Journal of Environmental Health Sciences
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• v.42 no.6
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• pp.450-464
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• 2016

Objectives: This study developed and validated reference materials (RMs) to analyze metal compounds in blood. Methods: We referred to KoNEHS (Korea National Environmental Health Survey) to estimate concentrations of blood metals (cadmium, Cd; lead, Pb; mercury, Hg) and applied analytical methods (inductively coupled plasma - mass spectroscopy, ICP-MS, for Cd and Pb; graphite furnace - atomic absorption spectrometry, GF-AAS, for Cd and Pb; and direct mercury analyzer, DMA, for Hg). Homogeneity and stability tests were carried out. In addition, certified values and uncertainties of RMs were calculated through internal and external experiments. All RMs were developed and assessed in various forms according to element, analytical method, and two types of concentration levels high concentration for occupational exposure and low concentration for environmental exposure. Results: All samples showed acceptable homogeneity, except for low concentration of Cd in the GF-AAS method. Short- and long-term stabilities were satisfied by ANOVA testing. In the inter-laboratory comparison, robust medians were lower than the certified values of all RMs (robust median/reference value; $1.301/1.327{\mu}g/L$ for Cd, ICP-MS, low concentration; $3.152/3.388{\mu}g/L$ for Cd, ICP-MS, high concentration; $1.219/1.301{\mu}g/L$ for Cd, GF-AAS, low concentration; $3.074/3.321{\mu}g/L$ for Cd, GF-AAS, high concentration; $14.473/14.516{\mu}g/L$ for Pb, ICP-MS, low concentration; $50.069/50.114{\mu}g/L$ for Pb, ICP-MS, high concentration; $12.881/14.147{\mu}g/L$ for Pb, GF-AAS, low concentration; $47.015/47.591{\mu}g/L$ for Pb, GF-AAS, high concentration; $4.059/4.218{\mu}g/L$ for Hg, DMA, low concentration; $11.474/11.181{\mu}g/L$ for Hg, DMA, high concentration). Conclusion: This study demonstrates procedures for developing and validating RMs for biomonitoring in the field of the environmental health.

• Radiation Oncology Journal
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• v.26 no.3
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• pp.181-188
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• 2008

Purpose: In order to enhance the efficiency of respiratory gated 4-dimensional radiation therapy for more regular and stable respiratory period and amplitude, a respiration training system was designed, and its efficacy was evaluated. Materials and Methods: The experiment was designed to measure the difference in respiration regularity following the use of a training system. A total of 11 subjects (9 volunteers and 2 patients) were included in the experiments. Three different breathing signals, including free breathing (free-breathing), guided breathing that followed training software (guided-breathing), and free breathing after the guided-breathing (post guided-breathing), were consecutively recorded in each subject. The peak-to-peak (PTP) period of the breathing signal, standard deviation (SD), peak-amplitude and its SD, area of the one cycle of the breathing wave form, and its root mean square (RMS) were measured and computed. Results: The temporal regularity was significantly improved in guided-breathing since the SD of breathing period reduced (free-breathing 0.568 vs guided-breathing 0.344, p=0.0013). The SD of the breathing period representing the post guided-breathing was also reduced, but the difference was not statistically significant (free-breathing 0.568 vs. guided-breathing 0.512, p=ns). Also the SD of measured amplitude was reduced in guided-breathing (free-breathing 1.317 vs. guided-breathing 1.068, p=0.187), although not significant. This indicated that the tidal volume for each breath was kept more even in guided-breathing compared to free-breathing. There was no change in breathing pattern between free-breathing and guided-breathing. The average area of breathing wave form and its RMS in postguided-breathing, however, was reduced by 7% and 5.9%, respectively. Conclusion: The guided-breathing was more stable and regular than the other forms of breathing data. Therefore, the developed respiratory training system was effective in improving the temporal regularity and maintaining a more even tidal volume.

• Journal of the Institute of Convergence Signal Processing
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• v.7 no.3
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• pp.122-129
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• 2006

We propose the Fizeau-type phase shifting interferometer(FPSI) system for the performance test of high-order aspheric lenses. The proposed system is divided into two parts : optical part and signal processing part. Those two parts are operated by a program for hardware control. We also developed an analysis program adopting the phase shifting algorithm to analyze the obtained interferograms. We can confirm that the proposed system is efficient and adequate by direct comparison with the standard criterion in Mark IV interferometric system of Zygo. The peak-to-valley and RMS values of surface errors which are used to characterize high-order aspheric lenses are 0.845 wave and 0.1871 wave, respectively. The measurement errors between the proposed system and Mark IV are less than ${\lambda}/100$ and the repeatability is also calculated at less than ${\lambda}/100$.

• Journal of the Korean Society for Precision Engineering
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• v.7 no.3
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• pp.37-47
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• 1990

In accordance with the high precision of mechanical elements, it has been required to high precision in surface roughness measurement and, therefore, stylus tip radius is manufa- ctured less than 2 .mu. m through ion sputter machining. In this experiment, by suing ion sputter machined stylus pf fine tip, radius and lapping machined stylus, surface roughness of standard specimens, silicon wafer were measured and then Rmax, Ra, RMS value were investi- gatedaccording to the variation of tip radius of stylus. As a result, measuring error due to the variation of stylus tip radius in surface roughness measurement was decreased by using ion sputter machined stylus and also the measuring accuracy was improved. And the measuring variation of Ra, RMS calculated from correlation coefficient lager than 0.9 on the wave of short period and amplitude using ion sputter machined stylus of fine tip radius.

• Journal of the Korean Society of Propulsion Engineers
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• v.24 no.3
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• pp.31-40
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• 2020

The structure and dynamics of multiple shock waves are studied numerically using a finite volume solver for a model with nozzle exit Mach number of 1.75. At first, the shock variation based on images were analyzed using a Matlab program then later to the wall static pressure variation. The amplitude and frequency variation for multiple shock waves are analyzed. The cross-correlation between the shock location suggests that the first and the second shocks are well correlated while the other shocks show a phase lag in the oscillation characteristics. The rms values of pressure fluctuations are maximum at the shock locations while the other parts in the flow exhibit a lower value os standard deviation.

• Journal of Korean Society of Archives and Records Management
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• v.11 no.2
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• pp.189-215
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• 2011

Owing to changing work environment and increasing uncertainty, risk management in records management area is becoming more important to secure work legitimacy and to increase the value of information for future. While risk factors in traditional records management were mainly focused on the preservation function, those in current records management were directly coupled with those of overall work processes which produce, distribute, and utilize records because information technologies make the relationship between works and records closer. This study proposes a set of risk management factors and strategies in records management based on the overall risk management framework of ISO 31000. Moreover, ARMA's works areas and NIST's systems areas were applied to form the risk management processes in records management, and ISO's records management standards were used to suggest the checklists for the processes in both areas, especially with ISO TR 26122 for work processes, and ISO 16175-3 for the context of records.