• Korean Journal of Optics and Photonics
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• v.14 no.5
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• pp.504-508
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• 2003

We present a new point-diffraction interferometer, which has been devised for the three-dimensional profile measurement of light scattering rough surfaces. The interferometer system has multiple sources of two-point-diffraction and a CCD camera composed of an array of two-dimensional photodetectors. Each diffraction source is an independent two-point-diffraction interferometer made of a pair of single-mode optical fibers, which are housed in a ceramic ferrule to emit two spherical wave fronts by means of diffraction at their free ends. The two spherical wave fronts then interfere with each other and subsequently generate a unique fringe pattern on the test surface. A He-Ne source provides coherent light to the two fibers through a 2${\times}$l optical coupler, and one of the fibers is elongated by use of a piezoelectric tube to produce phase shifting. The xyz coordinates of the target surface are determined by fitting the measured phase data into a global model of multilateration. Measurement has been performed for the warpage inspection of chip scale packages (CSPs) that are tape-mounted on ball grid arrays (BGAs) and backside profile of a silicon wafer in the middle of integrated-circuit fabrication process. When a diagonal profile is measured across the wafer, the maximum discrepancy turns out to be 5.6 ${\mu}{\textrm}{m}$ with a standard deviation of 1.5 ${\mu}{\textrm}{m}$.

• The Journal of the Acoustical Society of Korea
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• v.12 no.2
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• pp.28-36
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• 1993

임의의 형상을 갖는 진동체에 의한 방사 음장해석은 경계요소법에 의하여 이미 많은 해석이 시도되었다. 그러나, 진동체의 형상이 매우 복잡한 경우에는 겉표면의 요소수가 크게 증가할 뿐만 아니라 각 요소에서의 경계조건을 모두 알아내어야 하므로, 저주파에 국한된 해석일지라도 엄청난 시간과 노력이 필요하게 된다. 이러한 어려움을 극복하기 위하여 경계요소법을 사용하되, 복잡한 형상의 진동체를 둘러싸는 가상적인 표면을 매우 간단하게 설정한 후 그 표면상의 경계조건인 음압을 측정한다. 임의의 형상에 대한 파수 영역에서의 감쇠파의여파작업을 위하여 특이값 분리를 사용하였다. 특이값 분리에 의하여 음압분포를 측정위치에서 설정된 일반 좌표계에서의 고유모드로 분해한다. 각 고유모드의 원거리 음장의 기여도에 해당하는 각 특이벡터에 대한 특이값의 크기를 비교하여, 유한개의 고유모드만을 포함시킴으로써 원거리 음장을 예측한다. 몇 개의 예제를 통하여 해석적 방법의 기존의 경계요소법에 의한 결과를 본 연구 방법의 결과와 비교하여 잘 일치함을 확인하였다.

• Korean Journal of Optics and Photonics
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• v.15 no.1
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• pp.56-62
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• 2004

We present a diffraction grating interferometer of large equivalent wavelength specially designed for flatness testing of rough surfaces. Two transmission diffraction gratings are illuminated on the object under test by use of two measurement beams with different angles of incidence, which yields a large equivalent wavelength. This interferometer design minimizes unnecessary diffraction rays and the systematic error caused by the diffraction gratings, and provides a large working distance and easy alignment. To improve the measurement accuracy, phase shifting technique is applied and the equivalent wavelength error caused by defocus is calibrated. Test results obtained from mirror surfaces and machined rough surfaces are discussed.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.04a
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• pp.613-617
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• 2000

This paper descries the effect of the stylus tip size on the measuring error in surface topography measurement. To analyze the distortional effect of an actual surface geometry originating from the finite stylus size, the surface is modeled as a sinusoid and the stylus tip as a circle. the measuring error is defined as the ratio of the standard deviation of a tracing profile and an original profile. It is shown that this measuring error depends on the amplitude and wavelength of an original profile. In this paper, the spectrum analysis is applied to investigate the distortional effect due to the mechanical filtering of the stylus in the frequency domain. and, the cumulative power spectrum is applied to determinate the minimum wavelength limits to be measured with the various stylus tip radius from these results, a new method to select proper stylus tip radius is proposed.

• Journal of the Korean Vacuum Society
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• v.15 no.6
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• pp.612-618
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• 2006

Surface modification of PTFE by ion irradiation was performed to improve its surface properties, In the case where argon was used to irradiate the PTFE films, an increase in the adhesion strength was observed when the ion fluence was over $1\times10^{15}\;ions/cm^2$, but the surface morphology dramatically changed to a needle-shaped one. However, when we used hydrogen ions under $O_2$ environmental gas, the adhesion strength increased at an ion fluence of $5\times10^{16}\;ions/cm^2$ and the surface morphology by the hydrogen irradiation was not needle-shaped. The surface morphology and adhesion strength of the hydrogen modified PTFE was influenced by the oxygen flow rate. It was confirmed by reflectance measurements that the surface properties of the hydrogen ion irradiated PTFE were superior to those of the argon ion irradiated PTFE.

• Proceedings of the Korean Society of Surveying, Geodesy, Photogrammetry, and Cartography Conference
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• 2000.10a
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• pp.40-50
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• 2000

본 연구에서는 Rolleiflex 6006 측정용 카메라로 촬영된 사진과 DCS 420 디지털 카메라로부터 촬영된 화상을 이용, 수치근접사진측량을 실시한 후, 조경석의 표면 거칠기 측정 정확도 향상을 위하여 최소제곱법으로 기준평면 또는 기준곡면을 찾아 사용하는 방법을 연구하였으며, 조경석 표면의 연마 이전과 연마 이후의 표면 거칠기를 측정, 비교하여 연마후의 거칠기 감소크기를 산출하고, 측정 정확도를 알아보기 위하여 거칠기가 거의 없는 평면인 돌과 곡면인 돌의 표면 거칠기를 측정한 결과, 그 거칠기를 기대정확도 이상인 각각 $\pm$0.lmm 및 $\pm$0.2mm의 정확도로 측정할 수 있었다. 또한 측정용 카메라인 경우 렌즈왜곡 보정에 있어서 검정자료를 토대로 기준점을 사용하지 않는 직접보정방법인 Newton-Raphson법을 적용하여 기하학적 정확도가 향상된 수치사진화상을 얻을 수 있었으며, DCS 420 디지털 카메라와 윈도우 운영체계인 Visual basic 6.0을 이용하여, 표면 거칠기 측정시스템을 구축함으로써 연마이전 조경석과 연마이후 조경석에 대한 표면 거칠기 및 형상을 정밀 측정할 수 있는 수치근접사진측량기법을 제시할 수 있었다.

• Journal of KIISE:Software and Applications
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• v.37 no.2
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• pp.110-119
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• 2010

In this paper, we propose an automatic segmentation of the prostate using intensity distribution and gradient information in MR images. First, active shape model using adaptive intensity profile and multi-resolution technique is used to extract the prostate surface. Second, hole elimination using geometric information is performed to prevent the hole from occurring by converging the surface shape to the local optima. Third, the surface shape with large anatomical variation is corrected by using 2D gradient information. In this case, the corrected surface shape is often represented as rugged shape which is generated by the limited number of vertices. Thus, it is reconstructed by using surface modelling and smoothing. To evaluate our method, we performed the visual inspection, accuracy measures and processing time. For accuracy evaluation, the average distance difference and the overlapping volume ratio between automatic segmentation and manual segmentation by two radiologists are calculated. Experimental results show that the average distance difference was 0.3${\pm}$0.21mm and the overlapping volume ratio was 96.31${\pm}$2.71%. The total processing time of twenty patient data was 16 seconds on average.

• Korean Journal of Optics and Photonics
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• v.34 no.3
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• pp.117-123
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• 2023

The size of an optical surface can significantly affect the performance of an optical system, and high spatial frequency errors have a greater impact. Therefore, it is crucial to measure the surface figure error with high frequency. To address this, a new method called rotational prism stitching interferometer (RPSI) is proposed in this study. The RPSI is a type of stitching interferometer that enhances spatial resolution, but it differs from conventional stitching interferometers in that it does not require the movement of either the mirror tested or the interferometer itself to obtain sub-aperture interferograms. Instead, the RPSI uses a beam expander and a rotating Dove prism to select particular sub-apertures from the entire aperture. These sub-apertures are then stitched together to obtain a full-aperture result proportional to the square of the beam expander's magnification. The RPSI's effectiveness was demonstrated by measuring a 40 mm diameter spherical mirror using a three-magnification beam expander and comparing the results with those obtained from a commercial interferometer. The RPSI achieved surface testing results with nine times higher sampling density than the interferometer alone, with a small difference of approximately 1 nm RMS.

• Korean Journal of Optics and Photonics
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• v.3 no.4
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• pp.205-216
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• 1992

Distribution of electric fields of surface plasmons at resonance and off-resonance angles were calculated and compared. As applications of surface plasmon resonance, (1) optical constants of ZnS films overcoated on Ag films were measured as the thickness of ZnS films increased, (2) four surface plasmon resonances distributed spatially due to the different thickness of SiO thin films overcoated on Ag films were observed in a picture frame by employing diverging waves of incidence, and (3) patterns of SiO thin films such as a grating and a character "가" overcoated on Ag films were measured by employing collimated waves of incidence.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1995.10a
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• pp.86-92
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• 1995