• Title/Summary/Keyword: 표면파속도

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내장형 선형 ICP(Inductively Coupled Plasma) system에서 자장이 플라즈마와 PR 식각특성에 미치는 영향

  • 김경남;이영준;경세진;염근영
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2003.05a
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    • pp.3-3
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    • 2003
  • 고밀도 플라즈마를 생산할 수 있는 대면적용 플라즈마 소스의 개발은 미세전자구조 산업에서부터 FPD 산업에 이르기까지 많은 영역에 걸쳐 필수 불가결한 기술요소가 되어가고 있 다. 이러한 대면적용 고밀도 플라즈마에의 적용을 위하여 새로운 유도결합형 플라즈마 소오스의 개발이 진행되고 있으며, 차세대 반도체 식각 및 세정 공정을 위하여 여러 형태의 안 테나가 연구되어지고 있다. 그러나 TFT -LCD에 적용이 가능하게끔 기존의 ICP 소오스를 직 접적으로 대면적화 하는 데에는 여러 가지 문제점들로 인해 그 한계점이 들어났다. 그 예로 안테나의 길이가 길어짐에 따른 안테나 저항 값이 커지며, 안테나 소스 길이자체가 사용하는 인가전력(13.56MHz)의 반파장에 해당되는 길이가 되었을 경우 생기는 심각한 정상파 효과, 유전물질의 두께 증가 및 그에 따른 재료비의 상승 및 관리상의 어려움들이 바로 그것 이라 할 수 있겠다. 그러므로, 본 연구에서는 차세대 TFT -LCD 대면적 공정에 적용 가능한 고밀도 플라즈마 를 발생시키기 위해서 내장형 유도결합형 선혈 안테나를 사용하였다. 내장형 유도결합형 선 혈 안테나가 가지고 있는 고유의 정전기적 결합효과를 최소화시키기 위해 직사각형모앙의 플라즈마 댐버(830mm*1,020mm)에서 영구자석을 사용하여 multi-cusp 자장효과 및 다양 한 자장의 배열에 따른 플라즈마 특성변화를 살펴보았다. 영구자석을 사용하여 외부자장을 인가하였을 때가, 그럴지 않은 때보다 RF 안테나 코일의 전압을 낮춰주었으며, 영구자석의 배열에 따라 코일의 인덕턴스의 값이 크게 변함을 알 수 있었다. 그리고 최적화된 자장의 배열은 플라즈마의 이온밀도를 증가시켰으며, 플라즈마의 균일도도 10% 이내로 유지됨을 알 수 있었다. 또한 영구자석에 의한 자장의 유무 및 공정압력과 인가전력에 따른 P Photoresist Film의 식각특성에 관해 살펴보았다.증을 위한 실험.측정장비의 구입 및 업계와의 공동활용, 국내.외 최신기술 정보자료의 수집과 신속제공, 국내.외 전문가 초청 활 용, 미래 지향적 목적활용 기초연구사업 수행, 미래기술 동향예측 및 홍보 등을 통해 서 국내 도금기술의 기술자립 및 고도화를 위한 여건마련을 위하여 노력하고 있다.빛 이때의 부식속도(선형분극법), 인위적인 피막 파괴 전,후 의 전위 변화 및 부식속도 측정법에 의한 국부부식 발달 저지능 등을 평가하여 각 실험결과를 비교분석하여 보았다. 수록 민감하여 304 의 IGSCC 와 매우 유사한 거동을 보인다. 본 강연에서는 304 와 600 의 고온 물에서 일어나는 IGSCC 민감도에 미치는 환경, 예민화처리, 합금원소의 영향을 고찰하고 이에 대한 최근의 연구 동향과 방식 방법을 다룬다.다.의 목적과 지식)보다 미학적 경험에 주는 영향이 큰 것으로 나타났으며, 모든 사람들에게 비슷한 미학적 경험을 발생시키는 것 이 밝혀졌다. 다시 말하면 모든 사람들은 그들의 문화적인 국적과 사회적 인 직업의 차이, 목적의 차이, 또한 환경의 의미의 차이에 상관없이 아름다 운 경관(High-beauty landscape)을 주거지나 나들이 장소로서 선호했으며, 아름답다고 평가했다. 반면에, 사람들이 갖고 있는 문화의 차이, 직업의 차 이, 목적의 차이, 그리고 환경의 의미의 차이에 따라 경관의 미학적 평가가 달라진 것으로 나타났다.corner$적 의도에 의한 경관구성의 일면을 확인할수 있지만 엄밀히 생각하여 보면 이러한 예의 경우도 최락의 총체적인 외형은 마찬가지로 $\ulcorner$순응$\lrcorner$의 범위를 벗어나지 않는다. 그렇기 때문에도 $\ulcorner$순응$\lrcorner$$\ulcorner$표현$\lrcorner$

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Subsurface Geological Structure Using Shallow Seismic Reflection Survey (반사법 탄성파 탐사를 이용한 천부 지질 구조)

  • Kim Gyu-Han;Kong Young-Sae;Oh Jinyong;Lee Jung-Mo
    • Geophysics and Geophysical Exploration
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    • v.2 no.1
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    • pp.8-16
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    • 1999
  • In terms of high resolution, seismic reflection survey is by far the most significant geophysical method applied to define subsurface structure. In shallow seismic reflection survey, it is, however, difficult to obtain high resolution image due to both the wave attenuation in the unconsolidated layer and the existence of source-generated surface waves Therefore, when collecting data, it is imperative to select proper equipments and choose optimum field data acquisition parameters for acquiring high S/N data. In this survey, a small size hammer was used as a low energy source and 40-Hz vertical geophones were used as receivers. Trigger signal was obtained from the hammer starter attached in the aluminum plate and thus it was possible to control the source onset time for the vertical stack. During the field work, a modified standard CMP technique was introduced to achieve the many-fold CMP data effectively. Data processing was conducted by the 'Seismic Unix' which is mounted on PC with a Linux operating system. The main distinctions were the emphasis and detail placed on near-surface velocity analysis and the extra care exercised in muting.

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High-Resolution Seismic Reflection Profiling on Land with Hydrophones Employed in the Stream-Water Driven Trench (하천수유입과 하이드로폰을 이용한 육상 고분해능 탄성파반사법탐사)

  • Kim Ji-Soo;Han Su-Hyung;Kim Hak-Soo;Choi Won-Suk;Jung Chang-Ho
    • Geophysics and Geophysical Exploration
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    • v.4 no.4
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    • pp.133-144
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    • 2001
  • An effective seismic reflection technique for mapping the cavities and bedrock surface in carbonate rocks is described. The high resolution seismic reflection images were successfully registered by using the hydrophones employed in the stream-water driven trench, and were effectively focused by applying optimal data processing sequences. The strategy included enhancement of the signal interfered with the large-amplitude scattering noise, through pre- and post stack processing such as time-variant filtering, bad-trace editing, residual statics, velocity analysis, and careful muting after NMO (normal moveout) correction. The major reflections including the bedrock surface were mapped with the desired resolution and were correlated to the seismic crosshole tomographic data. Shallow major reflectors could be identified and analyzed on the AGC (auto gain control)-applied field records. Three subhorizontal layers were identified with their distinct velocities; overburden (<3000 m/s), sediments (3000-4000 m/s), limestone bedrock (>4000 m/s). Taking into account of no diffraction effects in the field records, gravel-rich overburdens and sediments are considered to be well sorted. Based on the images mapped consistently on the whole survey line and seismic velocity increasing with depth, this area probably lacks in sizable cavities (if any, no air-filled cavities).

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Internal Waves and Surface Mixing Observed by CTD and Echo Sounder in the mid-eastern Yellow Sea (황해 중동부해역에서 CTD와 음향탐지기로 관측한 내부파와 표층 혼합)

  • Lee, Sang-Ho;Choi, Byoung-Ju;Jeong, Woo Jin
    • The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
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    • v.18 no.1
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    • pp.1-12
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    • 2013
  • Acoustic backscatter profiles were measured by Eco-sounder along an east-west section in the mid-eastern Yellow Sea and at an anchoring station in the low salinity region off the Keum River estuary in September 2012, with observing physical water property structure by CTD. Tidal front was established around the sand ridge developed in 50 m depth region. Internal waves measured by Eco-sounder during low tide period in the eastern side of the sand ridge were nonlinear depression waves with wave height of 15 m and mean wavelength of 500 m. These waves were interpreted into tidal internal waves that were produced by tidal current flowing over the sand ridge to the southeast. When weakly non-linear soliton model was applied, propagation speed and period of these internal depression wave were 50 m/s and 16~18 min. Red tides by Dinoflagelates Cochlodinium were observed in the sea surface where strong acoustic scattering layer was raised up to 7 m. Hourly CTD profiles taken at the anchoring station off the Keum River estuary showed the halocline depth change by tidal current and land-sea breeze. When tidal current flowed strongly to the northeast during flood period and land-breeze of 7 m/s blew to the west, the halocline was temporally raised up as much as 2 m and acoustic profile images showed a complex structure in the surface layer within 5-m depth: in tens of seconds the declined acoustic structure of strong and weak scattering signals alternatively appeared with entrainment and intrusion shape. These acoustic profile structures in the surface mixed layer were observed for the first time in the coastal sea of the mid-eastern Yellow Sea. The acoustic profile images and turbidity data suggest that relatively transparent low-layer water be intruded or entrained into the turbid upper-layer water by vertical shear between flood current and land breeze-induced surface current.

Variation of the Physical-microstructural Properties of Sandstone and Shale Caused by CO2 Reaction in High Pressure Condition (고압 이산화탄소 반응에 의한 사암과 셰일의 물리적-미세구조적 변화)

  • Park, Jihwan;Son, Jin;Park, Hyeong-Dong
    • Tunnel and Underground Space
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    • v.26 no.4
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    • pp.293-303
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    • 2016
  • Underground $CO_2$ storage technology is one of the most effective methods to reduce atmospheric $CO_2$. In this study, $CO_2$ storage condition was simulated in the laboratory. Sandstone and shale specimens were saturated in 1M NaCl and were reacted at $45^{\circ}C$, 10 atm for 4 weeks. The physical and microstructural properties of rock specimens were measured. Variations on physical properties of shale specimens were bigger than those of sandstone specimens, such as volume, density, elastic wave velocity, Poisson's ratio and Young's modulus. Microstructure were analyzed using X-ray computed tomography. Total number of pores were decreased, and average volume, average area and average equivalent diameter of each pore were changed after $CO_2$ reaction. Swelling and leakage of clay mineral caused by $CO_2$-mineral reaction were the reason of changes. The results of this study can be applied to predict the physical and microstructural changes in underground $CO_2$ storage condition.

Effect of Groove Shape of Blade Tip on Tip Surface Heat Transfer Coefficient Distributions of a Turbine Cascade (블레이드 팁의 Groove 형상이 터빈 캐스케이드 팁 열전달 계수분포에 미치는 영향에 대한 실험적 연구)

  • Nho, Young-Cheol;Jo, Yong-Hwa;Lee, Yong-Jin;Kim, Hark-Bong;Kwak, Jae-Su
    • Journal of the Korean Society of Propulsion Engineers
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    • v.14 no.6
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    • pp.60-68
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    • 2010
  • In this study, the conventional plane tip, double squealer tip, and various groove tip blades were tested in a linear cascade in order to measure the effect of the tip shapes on tip surface heat transfer coefficient distributions. Detailed heat transfer coefficient distributions were measured using a hue-detection based transient liquid crystals technique. Two tip gap clearances of 1.5% and 2.3% of blade span were investigated and the Reynolds number based on cascade exit velocity and chord length was $2.48{\times}10^5$. Results showed that the overall heat transfer coefficients on the tip surface with various grooved tips were lower than those with plane tip blade. The overall heat transfer coefficient on grooved along suction side tip was lower than that on the squealer tip.

Cross-Sectional Imaging of Elastic Modulus for Railway Trackbed under Ballast for Identification of Potential Settlement (침하가능성 확인을 위한 자갈도상 철도노반의 탄성계수 단층영상화)

  • Joh, Sung-Ho;Hwang, Seon-Keun;Hassanul, Raja;Abd Rahman, Norinah
    • Journal of the Korean Society for Railway
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    • v.14 no.3
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    • pp.256-261
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    • 2011
  • Recently a limited section of trackbed with ballast at KTX railway were reported to have settled down and led to problems such as reduced speed and passenger discomfort. Therefore, an urgent remedy for the settled trackbed is required to recover normal operation of KTX trains. In this paper, a new technique is proposed to visualize the elastic modulus of cross sections at railway trackbeds under ballast for practical identification of potential settlement. The proposed technique is based on ICSW technique, enabling use of impact source and overcoming inherent limitations of CSW method. To verify validity and feasibility of the proposed method, the method was employed to construct cross-sectional images of elastic modulus of two railway trackbeds and compared with other tests such as SASW, PBT, DCP and portable FWD tests.

Muscle Fatigue Analysis by Median Frequency and Wavelet Transform During Lumbar Extension Exercises (요추신전운동 시 중앙주파수와 웨이브렛 변환을 이용한 근피로도 분석)

  • 장근;김영호
    • Journal of Biomedical Engineering Research
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    • v.25 no.5
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    • pp.377-382
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    • 2004
  • In the present study, thirteen healthy volunteers performed lumbar extension exercises at 48$^{\circ}$/s, loaded by 40, 50, 60kg(about 44, 55, 66% of maximum voluntary contraction). During the whole period of exercises, electromyographic(EMG) signal was measured in the erector spinae muscle in order to determine muscle fatigue. Using the wavelet transform, EMG signal was separated by various frequency ranges in the time-frequency domain, and muscle fatigue was analyzed, comparing with the results based on the median frequency(MDF). MDF shifted toward the lower frequency ranges with the muscle fatigue, showing a single characteristic frequency. On the other hand, wavelet transform of EMG signals resulted in increased power amplitude in lower frequency ranges(0-125Hz), and decreased power amplitude in higher frequency ranges(375-468Hz). This study reveals that the muscle fatigue during dynamic movement is explained better by wavelet analysis.

THREE-DIMENSIONAL INFINITE ELEMENTS FOR WAVE FORCE EVALUATION OF OFFSHORE STRUCTURES (해양구조물의 파력산정을 위한 3-차원 무한요소)

  • 박우선;윤정방
    • Computational Structural Engineering
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    • v.4 no.4
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    • pp.135-144
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    • 1991
  • The finite element technique incorporatating infinite elements is applied to analyzing the general three dimensional wave-structure interaction problems within the limits of linear wave theory. The hydrodynamic forces are assumed to be inertially dominated, and viscous effects are neglected. In order to analyze the corresponding boundary value problems efficiently, two types of elements are developed. One is the infinite element for modeling the radiation condition at infinity, and the other is the fictitious bottom boundary element for the case of deep water. To validate those elements, numerical analyses are performed for several floating structures. Comparisons with the results by using other available solution methods show that the present method incorporating the infinite and the fictitious bottom boundary elements gives good results.

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Effect of Groove Shape of Blade Tip on Tip Surface Heat Transfer Coefficient Distributions of a Turbine Cascade (블레이드 팁의 Groove 형상이 터빈 캐스케이드 팁 열전달 계수분포에 미치는 영향에 대한 실험적 연구)

  • Nho, Young-Cheol;Jo, Yong-Hwa;Lee, Youn-Jin;Kim, Hark-Bong;Kwak, Jae-Su
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2010.05a
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    • pp.311-318
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    • 2010
  • In this study, the conventional plane tip, double squealer tip, and various groove tip blades were tested in a linear cascade in order to measure the effect of the tip shapes on tip surface heat transfer coefficient distributions. Detailed heat transfer coefficient distributions were measured using a hue-detection based transient liquid crystals technique. Two tip gap clearances of 1.5% and 2.3% of blade span were investigated and the Reynolds number based on cascade exit velocity and chord length was $2.48{\times}10^5$. Results showed that the overall heat transfer coefficients on the tip surface with various grooved tips were lower than those with plane tip blade. The overall heat transfer coefficient on grooved along suction side tip was lower than that on the squealer tip.

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