• Title/Summary/Keyword: 표면층제거법

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Fabrication of patterned substrate by wet process for biochip (습식 공정법에 의한 바이오칩 용 패터닝 기판 제조)

  • Kim, Jin-Ho;Lee, Min;Hwang, Jong-Hee;Lim, Tae-Young;Kim, Sae-Hoon
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.19 no.6
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    • pp.288-292
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    • 2009
  • Hydrophobic/hydrophilic patterned substrates were fabricated on a glass substrate by a liquid phase deposition (LPD) method. Hydrophobic surface was obtained by modifying ZnO thin films with a rough surface using a fluoroalkyltrimethoxysilane (FAS) and hydrophilic surface was prepared by decomposing FAS on an exposed to UV light. The hexagonal ZnO rods were perpendicularly grown by LPD method on glass substrates with a ZnO seed layer. The diameter and thickness of hexagonal ZnO rods were increased as a function of increases of immersion time. The surface morphology, thickness, crystal structure, transmittance and contact angle of prepared ZnO thin films were measured by field emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD), UV-visible spectrophotometer (UV-vis) and contact angle measurement. Hydrophilic ZnO thin films with a contact angle of $20^{\circ}{\sim}30^{\circ}$ were changed to a hydrophobic surface with a contact angle of $145^{\circ}{\sim}161^{\circ}$ by a FAS surface treatment. Prepared hydrophobic surface was pattered by an irradiation of UV light using shadow mask with $300\;{\mu}m$ or 3 mm dot size. Finally, the hydrophobic surface exposed to UV light was changed to a hydrophilic surface.

Contaminant Mechanism and Management of Tracksite of Pterosaurs, Birds, and Dinosaurs in Chungmugong-dong, Jinju, Korea (천연기념물 진주 충무공동 익룡·새·공룡발자국 화석산지의 오염물 형성 메커니즘과 관리방안)

  • Myoungju Choie;Sangho Won;Tea Jong Lee;Seong-Joo Lee;Dal-Yong Kong;Myeong Seong Lee
    • Economic and Environmental Geology
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    • v.56 no.6
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    • pp.715-728
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    • 2023
  • Tracksite of pterosaurs, birds, and dinosaurs in Chungmugong-dong in Jinju was designated as a natural monument in 2011 and is known as the world's largest in terms of the number and density of pterosaur footprints. This site has been managed by installing protection buildings to conserve in 2018. About 17% of the footprints of pterosaur, theropod, and ornithopod in this site under management in the 2nd protection building are of great academic value, but observation of footprints has difficulties due to continuous physical and chemical damage. In particular, the accumulation of milk-white contaminants is formed by the gypsum and air pollutant complex. Gypsum remains evaporated with a plate or columnar shape in the process of water circulation around the 2nd protection building, and the dust is from through the inflow of the gallery windows. The aqueous solution of gypsum, consisting of calcium from the lower bed and sulfur from grass growth, is catchmented into the groundwater from the area behind the protection building. Pollen and a few minerals other constituents of contaminants, go through the gallery window, which makes it difficult to expel dust. To conserve the fossil-bearing beds from two contaminants of different origins, controlling the water and atmospheric circulation of the 2nd protection building and removing the contaminants continuously is necessary. When cleaning contaminants, the steam cleaning method is sufficiently effective for powder-shaped milk-white contaminants. The fossil-bearing bed consists of dark gray shale with high laser absorption power; the laser cleaning method accompanies physical loss to fossils and sedimentary structures; therefore, avoiding it as much as possible is desirable.

On the Measurement of Residual Stresses in Aluminum Alloy Parts Fabricated by Precision Metal Mold Casting (정밀금형 알루미늄 합금 주물에서의 잔류응력 측정에 관한 연구)

  • Kim, Chae-Hwan;Mun, Su-Dong;Gang, Sin-Il
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.23 no.11 s.170
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    • pp.2087-2095
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    • 1999
  • One of the main causes of unwanted dimensional changes in precision metal mold casting parts is excessive and irregular residual stresses induced by temperature gradients and plastic deformation in the solidifying shell. Residual stresses can also cause stress cracking, and lower the fatigue life and fracture strength of the casting parts. In the present study, aluminum alloy casting system with metal mold equipped with electrical heating elements and water cooling units was designed and the casting specimens were produced to quantify the effects of different cooling conditions on the development of residual stresses. The layer removal method was used to measure the biaxial residual stresses in casting specimens produced from the experiments. The experimental results agreed with Tien-Richmond's theoretical model for thermal stress development for the solidifying metal plate.

합성 그래핀을 이용한 김서림 방지 필름 제작

  • Lee, Byeong-Ju;Jeong, Gu-Hwan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.357-357
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    • 2011
  • 그래핀은 육각형 구조로 이어진 탄소원자가 단일층을 형성한 현존하는 가장 얇은 나노물질로서, 면상에서의 우수한 전기적 열적 전도도와 화학적 안정성 등으로 많은 주목을 받고 있다. 이러한 그래핀의 우수한 특성들은 뛰어난 기계적 특성 및 높은 광 투과성과 맞물려 향후 플렉서블 투명전도막 등으로의 응용이 기대되고 있는 상태이다. 이러한 그래핀을 얻는 방법에는 물리 화학적 박리법, 산화규소의 흑연화, 열화학기상증착법(CVD) 등 많은 방법들이 존재하는데, 이중 CVD방법이 대면적으로 두께 균일도가 높은 그래핀을 얻는데 가장 적합한 방법으로 알려져 있다. 본 연구에서는 CVD방법을 이용하여 합성한 그래핀을 투명글래스 위에 전사하는 공정을 통하여 김서림방지(antifogging) 필름을 제작하였고, 그 면 발열특성에 대하여 조사하였다. 메탄가스를 원료가스로 합성한 그래핀 투명막은 가시광 영역에서 80% 이상의 투광도와 500~600 ${\Omega}/sq$ 정도의 면저항을 나타내었다. 또한 금 나노입자 또는 플라즈마 도핑 등의 후처리 공정을 통하여 면 발열특성의 향상을 도모하였으나 합성상태의 그래핀을 이용하는 것이 가장 우수한 면발열특성을 나타낸 것으로 확인하였다. 본 연구결과는 겨울철 자동차 유리표면의 성에 제거 등의 응용에 유용할 것으로 기대된다.

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Effects of Wet Chemical Treatment and Thermal Cycle Conditions on the Interfacial Adhesion Energy of Cu/SiNx thin Film Interfaces (습식표면처리 및 열 사이클에 따른 Cu/SiNx 계면접착에너지 평가 및 분석)

  • Jeong, Minsu;Kim, Jeong-Kyu;Kang, Hee-Oh;Hwang, Wook-Jung;Park, Young-Bae
    • Journal of the Microelectronics and Packaging Society
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    • v.21 no.1
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    • pp.45-50
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    • 2014
  • Effects of wet chemical treatment and thermal cycle conditions on the quantitative interfacial adhesion energy of $Cu/SiN_x$ thin film interfaces were evaluated by 4-point bending test method. The test samples were cleaned by chemical treatment after Cu chemical-mechanical polishing (CMP). The thermal cycle test between Cu and $SiN_x$ capping layer was experimented at the temperature, -45 to $175^{\circ}C$ for 250 cycles. The measured interfacial adhesion energy increased from 10.57 to $14.87J/m^2$ after surface chemical treatment. After 250 thermal cycles, the interfacial adhesion energy decreased to $5.64J/m^2$ and $7.34J/m^2$ for without chemical treatment and with chemical treatment, respectively. The delaminated interfaces were confirmed as $Cu/SiN_x$ interface by using the scanning electron microscope and energy dispersive spectroscopy. From X-ray photoelectron spectroscopy analysis results, the relative Cu oxide amounts between $SiN_x$ and Cu decreased by chemical treatment and increased after thermal cycle. The thermal stress due to the mismatch of thermal expansion coefficient during thermal cycle seemed to weaken the $Cu/SiN_x$ interface adhesion, which led to increased CuO amounts at Cu film surface.

Characterization of Reverse Osmosis Membrane Surface Modified by Silane-epoxy Using UV (UV를 적용한 역삼투막의 실란-에폭시 표면 개질 및 특성 평가)

  • Park, Hee Min;Yang, Won Yong;Lee, Yong Taek
    • Membrane Journal
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    • v.28 no.3
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    • pp.169-179
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    • 2018
  • The purposes of this paper were to improve both fouling and chlorine resistance by increasing the hydrophilicity of the reverse osmosis membrane. In order to improve chlorine resistance, the surface of RO membrane was activated by ultraviolet irradiation, and then it was modified by the sol-gel method using Octyltriethoxysilane (OcTES) such as the silane coupling agent to low sensitivity to chlorine, thereby the polyamide active layer was protected and chlorine resistance was improved. In addition, polyglycerol polyglycidyl ether (PGPE) and sorbitol polyglycidyl ether (SPE) coating with different number of epoxides, ring opening reaction of epoxide improved the anti-fouling resistance. The surface modification condition was optimized by FT-IR, XPS, and contact angle analysis. As a result, the permeability reduction rate of the silane-epoxy modified membrane after the fouling test was decreased about 1.5 times as compared with that of the commercial membrane. And the salt rejection was maintained over 90% at $20,000ppm{\times}hr$ even after chlorine resistance test.

Preparation and Performance of Composite Membrane Prepared by Layer-by-Layer Coating Method (Layer-by-Layer 코팅법을 적용한 복합막 제조와 투과성능 평가)

  • Jeon, Yi Seul;Rhim, Ji Won
    • Membrane Journal
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    • v.25 no.6
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    • pp.538-546
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    • 2015
  • In this study, composite membrane is prepared by Layer-by-Layer method using hydrophobic polymer as a coating material on the polysulfone support. The existence of coating layer on the surface and cross section was confirmed by the scanning electronic microscopy. The flux and rejection of the resulting membranes were characterized using 100 ppm NaCl feed solution. PVSA, PEI, PAA, PSSA, PSSA_MA were used as a coating polymer in this study. The composite membrane prepared by using 8,000 ppm PAA solution (Ion strength = 0.35, Coating time = 3 min) and 10,000 ppm PEI solution (Coating time = 4 min). As a result, PAA-PEI composite membrane showed flux of 101 LMH and salt rejection of 66.7%. The composite membrane showed the comparable performance as good as NE 4040-70 (Flux = 30 LMH, Rejection = 40~70%) model produced by Toray Chemical co.

Analysis of Ar Plasma Effects for Copper Nitride Passivation Formation via Design of Experiment (실험계획법을 통한 구리 질화물 패시베이션 형성을 위한 아르곤 플라즈마 영향 분석)

  • Park, Hae-Sung;Kim, Sarah Eunkyung
    • Journal of the Microelectronics and Packaging Society
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    • v.26 no.3
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    • pp.51-57
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    • 2019
  • To protect the Cu surface from oxidation in air, a two-step plasma process using Ar and $N_2$ gases was studied to form a copper nitride passivation as an anti-oxidant layer. The Ar plasma removes contaminants on the Cu surface and it activates the surface to facilitate the reaction of copper and nitrogen atoms in the next $N_2$ plasma process. This study investigated the effect of Ar plasma on the formation of copper nitride passivation on Cu surface during the two-step plasma process through the full factorial design of experiment (DOE) method. According to XPS analysis, when using low RF power and pressure in the Ar plasma process, the peak area of copper oxides decreased while the peak area of copper nitrides increased. The main effect of copper nitride formation in Ar plasma process was RF power, and there was little interaction between plasma process parameters.

A Method for Application of Ammonium-based Pretreatment Solution in Preparation of Copper Flakes Coated by Electroless Ag Plating (구리 플레이크의 무전해 은도금에서 암모늄계 구리 전처리 용액의 적용법)

  • Kim, Ji Hwan;Lee, Jong-Hyun
    • Journal of the Microelectronics and Packaging Society
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    • v.22 no.4
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    • pp.57-63
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    • 2015
  • In order to prepare a low-cost conductive filler material possessing improved anti-oxidation property, Ag-coated Cu flakes were fabricated and the effects of an applying method of ammonium-based pretreatment solution on the Cu flakes were analyzed. The pretreatment solution was used to remove the surface oxide layer on Cu flake. During a single-stage pretreatment process, hole-shaped defects were formed on the flake surface during the pretreatment after 2 min, and the number and size increased in proportion to the pretreatment time. In the case that Ag plating solution was injected in the pretreatment solution after the pretreatment for 2 min, the defects were also formed during Ag plating. In contrast, the defects tremendous decreased in the case that the pretreatment solution was removed after the first pretreatment for 2 min and the Ag plating proceeded after the second pretratment using a low concentration pretreatment solution. As the final result, the 15 wt% Ag-coated Cu flake sample which was fabricated using the single-stage pretreatment oxidized at $166^{\circ}C$, but the sample fabricated by the double-stage pretreatment oxidized at $224^{\circ}C$, indicating definitely improved anti-oxidation property.

Sorption of Arsenite Using Nanosized Mackinawite (FeS)-Coated Silica Sand (나노 크기 매킨나와이트로 코팅된 규사를 이용한 아비산염의 흡착)

  • Lee, Seungyeol;Kang, Jung Chun;Park, Minji;Yang, Kyounghee;Jeong, Hoon Young
    • Journal of the Mineralogical Society of Korea
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    • v.25 no.4
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    • pp.185-195
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    • 2012
  • Due to the high reduction and sorption capacity as well as the large specific surface area, nanosized mackinawite (FeS) is useful in reductively transforming chlorinated organic pollutants and sequestering toxic metals and metalloids. Due to the dynamic nature in its colloid stability, however, nanosized FeS may be washed out with the groundwater flow or result in aquifer clogging via particle aggregation. Thus, these nanoparticles should be modified such as to be built into permeable reactive barriers. This study employed coating methods in efforts to facilitate the installation of permeable reactive barriers of nanosized mackinawite. In applying the methods, nanosized mackinawite was coated on non-treated silica sand (NTS) and chemically treated silica sand (CTS). For both silica sands, the maximum coating of mackinawite occurred around pH 5.4, the condition of which was governed by (1) the solubility of mackinawite and (2) the surface charge of both silica and mackinawite. Under this pH condition, the maximum coating by NTS and CTS were found to be 0.101 mmol FeS/g and 0.043 mmol FeS/g respectively, with such elevated coatings by NTS likely linked with impurities (e.g., iron oxides) on its surface. Arsenite sorption experiments were performed under anoxic conditions using uncoated silica sands and those coated with mackinawite at the optimal pH to compare their reactivity. At pH 7, the relative sorption efficiency between uncoated NTS and coated NTS changed with the initial concentration of arsenite. At the lower initial concentration, uncoated NTS showed the higher sorption efficiency, whereas at the higher concentration, coated NTS exhibited the higher sorption efficiency. This could be attributed to different sorption mechanisms as a function of arsenite concentration: the surface complexation of arsenite with the iron oxide impurity on silica sand at the low concentration and the precipitation as arsenic sulfides by reaction with mackinawite coating at the high concentration. Compared to coated NTS, coated CTS showed the lower arsenite removal at pH 7 due to its relatively lower mackinawite coating. Taken together, our results indicate that NTS is a more effective material than CTS for the coating of nanosized mackinawite.