• 제목/요약/키워드: 표면물성

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Al 합금에 MO-PACVD법으로 증착시킨 Ti(CN) 코팅 층의 물성에 관한 연구 (Ti(CN) coating on aluminum alloy formed by MO-PACVD)

  • 김태형;김선규
    • 한국표면공학회지
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    • 제33권1호
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    • pp.38-47
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    • 2000
  • A Ti(CN) layer was formed on aluminum alloy by using diethylamino titanium, hydrogen and nitrogen with the pulsed DC PACVD process. Effect of process parameters such as precursor evaporation temperature, duty ratio, frequency, voltage, $H_2$/$N_2$gas ratio on the properties of Ti(CN) layer were investigated. The layer thus obtained had high hardness and low friction coefficient. Detailed results on the hardness, surface morphology, XRD, WDS analysis, wear test and scratch test of this layer are presented.

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DC 스퍼터법과 비대칭 바이폴라 펄스 DC 스퍼터법으로 증착된 TiN 코팅막의 물성 비교연구 (A Comparative Study of TiN Coatings Deposited by DC and Pulsed DC Asymmetric Bipolar Sputtering)

  • 전성용
    • 한국표면공학회지
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    • 제44권5호
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    • pp.179-184
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    • 2011
  • This work investigated the effect of duty cycle and pulse frequency on the microstructures and properties of titanium nitride thin films deposited by asymmetric bipolar pulsed DC sputtering system. Oscilloscope traces of the I-V waveforms indicate high power and high current density outputs during the asymmetric bipolar pulsed mode. The grain size decreases with decreasing duty cycle. The duty cycle has a strong influence not only on the microstructural properties but also on the mechanical properties of titanium nitride films. Comparing with the continuous DC sputtering, the titanium nitride films prepared by pulsed DC asymmetric bipolar process exhibit better properties.

박막트랜지스터 소자 응용을 위한 비정질 ITZO 박막의 전기적 및 광학적 특성 분석 (Electrical and optical properties of amorphous ITZO thin films examined for thin film transistor application)

  • 조광민;김세윤;이준형;김정주;허영우
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2014년도 추계학술대회 논문집
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    • pp.252-253
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    • 2014
  • 비정질 ITZO 박막은 ITZO(In:Sn:Zn= 8:1:1, 6:2:2, 4:3:3, 2:4:4) 타겟을 이용하여 상온에서 RF 마그네트론 스퍼터링 법으로 제조 되었다. ITZO 박막의 물성을 알아보기 위하여 조성별, 산소 분압별 및 열처리에 따른 박막의 구조적, 전기적, 광학적 특성을 분석하였다. 박막 실험 결과를 바탕으로 ITZO(4:3:3) 박막을 채널 층으로 이용하여 성공적으로 박막 트랜지스터를 제작 하였다.

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직교류 내 원관 표면에서의 서리층 성장 특성 (Characteristic of Frost Growth on a Cold Cylinder Surface in Cross Flow)

  • 양동근;김민수;이관수
    • 설비공학논문집
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    • 제18권2호
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    • pp.122-128
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    • 2006
  • In this paper, frosting experiments were conducted with variations of frosting parameters in order to obtain the correlations of frost properties. As a result, the local thickness, density, and surface temperature of the frost layer were presented. The dimensionless correlations for the frost thickness, frost density, frost surface temperature and heat transfer coefficient were derived as functions of dimensionless frosting parameters by using a dimensional analysis.

전기도금법에 의해 생성된 Ni-B 합금도금층의 물성에 미치는 B 함량의 영향 (Influence of B Content on Properties of Ni-B Electrodeposit)

  • 이규환;장도일;권식철
    • 한국표면공학회지
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    • 제37권4호
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    • pp.208-214
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    • 2004
  • The influence of the boron content on the various properties of Ni-B alloy films produced by electrodeposition was investigated. The considerable reduction in grain size was observed with increasing boron content. The internal stress was tensile and increased linearly with increasing boron content. Hardness increased up to $750H_{v}$ at 2 at% boron and then kept the value to 11 at% boron for as-plated Ni-B coatings. The hardness of Ni-B films increased up to $1,250H_{v}$ due to the intermetallic$ Ni_3$B precipitation by the heat treatment, and maximum hardness of each coating increases with boron content. Wear resistance decreased with increasing the boron content because of high friction coefficient and brittle fracture of film which has higher content of boron.

탄화규소 나노섬유의 고온 대기 및 SO2 가스분위기에서의 부식물성 (Characterization of Air and SO2 Gas Corrosion of Silicon Carbide Nanofibers)

  • 김민정;이동복
    • 한국표면공학회지
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    • 제43권1호
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    • pp.36-40
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    • 2010
  • The SiO vapor that was generated from a mixture of Si and $SiO_2$ was reacted at $1350^{\circ}C$ for 2 h under vacuum with carbon nanofibers to produce SiC nanofibers having an average diameter of 100~200 nm. In order to understand the gas corrosion behavior, SiC nanofibers were exposed to air up to $1000^{\circ}C$. SiC oxidized to amorphous $SiO_2$, but its oxidation resistance was inferior unlike bulk SiC, because of high surface area of nanofibers. When SiC nanofibers were exposed to Ar-1% $SO_2$ atmosphere, SiC oxidized to amorphous $SiO_2$, without forming $SiS_2$, owing to the thermodynamic stability of $SiO_2$.

DC 스퍼터법과 비대칭 바이폴라 펄스 DC 스퍼터법으로 제작된 CrN 코팅막의 물성 비교연구 (A Comparative Study of CrN Coatings Deposited by DC and Asymmetric Bipolar Pulsed DC Sputtering)

  • 전성용;백지원
    • 한국표면공학회지
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    • 제47권2호
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    • pp.86-92
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    • 2014
  • The purpose of this comparative study was to investigate the properties of chromium nitride coatings deposited by asymmetric bipolar pulsed DC sputtering and DC sputtering system. Oscilloscope traces of the I-V waveforms indicate high power and high current density outputs during the asymmetric bipolar pulsed mode. The grain size decreases with decreasing duty cycle. The duty cycle has a strong influence not only on the microstructural properties but also on the mechanical properties of chromium nitride coatings. Comparing with the continuous DC sputtering, the chromium nitride coatings prepared by pulsed DC asymmetric bipolar process also exhibit better surface roughness.

음극진공아크에 의해 제조된 금속질화물 박막의 두께 분포 (Thickness Distributions of Metal Nitride Films Manufactured by Cathodic Vacuum Arc Deposition)

  • 권오진;김미선;이정석
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2016년도 추계학술대회 논문집
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    • pp.103.2-103.2
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    • 2016
  • 금속질화물 박막은 대표적인 고경도, 고내열성 박막이다. 박막의 두께는 기계적물성과 밀접한 상관관계가 있으며, 두께의 관리와 제어는 매우 중요하다. 3조 2배열의 증발원을 이용하여 Cathodic vacuum arc deposition(CVAD)법으로써 금속질화물 박막을 제조하였으며, 평균 두께 $4.38{\mu}m$, 표준편차 ${\pm}11.5%$ 박막들을 제조할 수 있었다. 증발원과 증발원 사이의 중첩이 되는 지점에 장착된 시편보다 각각의 증발원에서 평행한 위치에 장착된 시편에 코팅된 박막이 두꺼웠다.

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수소주입에 따른 자동차용 복합조직강판의 지연파괴 거동 (Hydrogen Delayed Fracture of Automotive Multi-Phase Sheet Steels by Hydrogen Charging Condition)

  • 박재우;강계명
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2013년도 춘계학술대회 논문집
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    • pp.87-87
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    • 2013
  • 복합조직강의 미세조직제어를 통한 자동차용 고강도 강판재의 개발이 주요 연구과제로 있다. 하지만 고강도화에 따라 수소에 의한 지연파괴의 문제점이 있어, 이를 규명하고 해결하기 위한 많은 연구가 함께 이루어지고 있다. 본 연구에서는 연구, 개발되고 있는 복합조직강 중 DP강과 TRIP강의 수소취성에 미치는 미세조직의 영향을 분석하고, 수소주입조건에 따른 수소취성 및 지연파괴 거동에 대하여 조사하고자 하였다. 이를 위해 음극전기분해법을 이용, 주입수소량을 달리하여 주입수소가 복합조직강의 지연파괴에 미치는 영향을 분석하였다. Hydrogen determinator를 통해 시편 내 수소량을 측정하였고, 소형펀치시험에 의한 기계적물성 변화를 조사하였다. 또한 파단부위의 넓이와 깊이를 비교측정하였고, 파단면을 SEM으로 관찰하여 수소지연파괴 거동을 평가하고자 하였다.

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이온주입에 의한 PET(polyethylene teraphthalate)의 표면결합상태 변화와 표면전기전도도 특성 (Electrical Properties of PET(polyethylene teraphthalate) by Ion Implantation)

  • 이재형;길재근
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제53권7호
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    • pp.382-386
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    • 2004
  • A study has been made of surface modification of organic materials by ion implantation to increase the surface electrical properties. The substrate used were PET(polyethylene teraphtalate). N$^{+}$, Ar$^{+}$ implantation was peformed at energies of 40 keV and 50 keV with fluences from $5{\times}10^{15}$, $1{\times}10^{16}$,$7{\times}10^{16}$, $1{\times}10^{17}$/ ions/$cm^2$. UV/Vis, FT-IR and XPS spectroscopy measured for surface structure changes. Surface resistance decrease of implanted polymers was affected by ion implantation energy, ion species and ion dose rate. Surface conductivity of PET increased $2{\times}10^{9}$/∼$2{\times}10^{10}$/$\Omega$/sq by ion implantation. Result of various spectroscopy analysis, the cause of increasing PET surface conductivity was expected to breaking C=O bonds. It was formation carbon network structure by promote cross-linking and create C-C, C=C bonds.