• Title/Summary/Keyword: 폐 아이티오 타겟

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Preparation of Nano-Sized ITO Powder from Waste ITO Target by Spray Pyrolysis Process (폐(廢) ITO 타겟으로부터 분무열분해(噴霧熱分解) 공정(工程)에 의한 ITO 나노 분말(粉末) 제조(製造))

  • Yu, Jae-Keun;Kang, Seong-Gu;Sohn, Jin-Gun
    • Resources Recycling
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    • v.16 no.1 s.75
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    • pp.28-36
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    • 2007
  • Nano-sized ITO powders with the average particle size below 50 nm were synthesized from complex acid solution dissolved the ITO target into hydrochloric acid by a spray pyrolysis process, and the influences of reaction factors as reaction temperature and concentration of raw material solution were investigated. As the reaction temperature increases from 800 to $1000^{\circ}C$, the average particle size of the ITO powder increases from 40 nm to 100 nm, the microstructure gradually becomes solid, individual particles independently appear with the shape of polygon, the particle size distribution becomes increasingly irregular, the XRD peak intensity gradually increases and the specific surface area decreases. As the concentration of the raw material solution increases from 50g/l to 400g/l, the average particle size of ITO powder gradually increases, yet the particle size distribution appears more irregular. When the concentration is at 50 g/l, the average particle size of ITO powder is below 30 nm and the particle size distribution appears comparatively uniform. Nevertheless, when the concentration reaches 400 g/l, which is close to e saturated concentration, the particle size distribution appears extremely irregular, and the particles with the size ranging from 20 nm to 100 nm coexist. Along with the concentration rise, the XRD peak intensity gradually increases, yet the specific surface area decreases.