• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.141-142
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• 2006

This paper describes estimation method for 2D position error of planar XY stage from measured profiles of guide-ways. The XY stage usually moves along its guide ways. The motion error of each stage has effect on 2D position errors of XY stages and affected mainly by profiles of guide-ways. To estimate 2D position error and flatness of stages, the profiles of guide-ways were measured and used in motion error estimation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.359-362
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• 2003

The aerostatic stage. which is used in semiconductor process, is demanded higher velocity and more precise accuracy for higher productivity and integrated performance. So, in the case of XY stage, H type structure, which is designed two co-linear axis of guide-way, driving force in one surface, has advantage of velocity and accuracy compared to conventional tacked type XY stage. To analyze characteristics of H type aerostatic stage, H type aerostatic surface XY stage is made, which is driven by linear motor and detected position with precise optical linear scale. And, analyze characteristics of motion error, effect of angular motion on positioning accuracy error and effect of simultaneous control on variation of velocity.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.4
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• pp.76-83
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• 2003

To cope with stringent performance targets requested in many fields spanning the whole range of industry, the driver is necessary to realize large dynamic range as well as nano resolution, manipulate the mover orientation without additional driver, and be suitable for clean environment. As one of those purposes, authors have developed the planar precision stages with the integrated operating principle of levitation and propel. In this paper, we discuss potential of magnetic suspension technology by comparing various features of non-contact planar stages, that is, repulsive type of surface actuator and attractive type of surface actuator.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.11
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• pp.1863-1872
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• 2001

In this Paper, we suggest the precision stage using a novel non-contact planar actuator that utilizes an interaction between an array type of air-core solenoids and permanent magnets. The former with axes arranged in the mutually orthogonal direction is fixed on the stator and the latter with the same polar direction is attached below the stage. The promising magnetic structure has little uncertainty such as hysteresis loss caused by ferromagnetic material, then it is simple to quantify the magnetic phenomenon. And all the magnetic forces are transmitted through narrow air-gap between the coil and the permanent magnet, therefore the structure can be highly compacted. Furthermore, the stage or plate can be perfectly isolated from the stator without any wire connection, leading to diminish the generating possibility of wear particles due to mechanical contact. Then. it is estimated that the proposed operating principle is very suitable for work requiring high accuracy and cleanness. or general-purpose nano stage. The main issues rebated to the plate driving are discussed here.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.19 no.6
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• pp.169-174
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• 2019

Flexure joints are recently used in the ultra-precision mechanism for a telecommunication mirror stage. Flexure joints have several advantages coming from their monolithic characteristics. They can be used to reduce the size of manipulators or to increase the precision of motion. In our research, 6 dof(degree of freedom) mechanism is suggested for micrometer repeatability using a flexure mechanism. To design the 6-dof motion, the 2-dof planar mechanism are designed and assembled to make the 6-dof motion. To achieve a certain performance, it is necessary to define the performance of mechanism that quantifies the characteristics of flexure joints. This paper addresses the analysis and design of the 6-dof parallel manipulator with a flexure joint using a finite element analysis tool. To obtain experimental result, CCD laser displacement sensor is used for the total displacement and the stiffness for the 6-dof flexure mechanism.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.348-352
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• 2002

a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. This thesis represents optimal design on ultra-precision positioning with single plane X-Y stage and development of artificial control system for adequacy of industrial demand. Also, dynamic simulation on global stage is performed by using ADAMS (Automated Dynamic Analysis of Mechanical System) for the purpose of grasping dynamic characteristic on user designed X-Y global stage. The error between displacements from micro stage and from FEM(Finite Element Method) is 3.53% by verifications of stability on micro stage and control performance. As maximum Von-mises stress on hinge of micro stage is 5.981kg/mm$^2$ that is 1.5% of yield stress, stability on hinge is secured. Preparing previous results, optimal design of micro stage can be possible, and reliance of results with FEM can be secured.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.12
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• pp.169-179
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• 1998

Plane mirror type laser interferometers are popularly being used in many modern ultraprecision machines, as they can perform simultaneous measurements of multiple axis positions with nanometer resolution capabilities. One important issue in this application of laser interferometers is to provide a good level of alignment between the reflecting mirrors and the laser beams so that measurement errors due to undesirable coupling effects can be avoided in multiple axis measurements In this investigation, a thorough metrological analysis is given to develop an suitable mathematical model for a precision x-y stage in which the orthogonality misalignment between the reflecting mirrors significantly affects overall x-y mea-surement results. Then a noble calibration method is suggested in which two-dimensional displacement sensors of moire gratings of concentric circles are used to realize the reversal principle of orthogonality evaluation in situ. Finally, actual experimental results are discussed to verify that the suggested method can effectively calibrate the orthogonality error with an uncertainty of 0.2667 arcsec.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.108-108
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• 2003

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1193-1197
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• 2008

Bridge is Most from stay of Gantry structures part. In compliance with oneself weight of the bridge deflecting, this occurs drops the location precision of the work tool. Also accelerative at the time of gives a serious load to Y axial motors which transfer the bridge damages. The motor with high-speed transfer of location control which is accurate makes disrupt. The malleability of the bridge to maintain consequently and necessary to minimize a weight. This paper the structural FEM interpretations of the stone and the aluminum alloy with the material by which will be used in the bridge and static deflected and a candle precise plane X-Y stage optimal design with character the interpretation result.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.21 no.11
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• pp.554-560
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• 2020

In the manufacturing process of flat panel displays, a high-precision planar motion stage is used to position a specimen. Stages of this type typically use frictionless linear motors and air bearings, and laser interferometers. Real-time dynamic correction of the yaw motion error is very important because the inevitable yaw motion error of the stage means a change in the specimen orientation. Gantry control is generally used to compensate for yaw motion errors. Flexure units that allow rotational motion are applied to the stage to apply this method to a stage using an air-bearing guide. This paper proposes a method to improve the constant speed motion performance of a H-type XY stage equipped with air bearing and flexure units. When applying the gantry control to the stage, including the flexure units, the cause of the mutual ripple generated from the linear motors is analyzed, and adaptive learning control is proposed to compensate for the mutual ripple. A simulation was performed to verify the proposed method. The speed ripple was reduced to approximately the 22 % level. The ripple reduction was verified by simulating the stage state where yaw motion error occurs.