• Title/Summary/Keyword: 펨토초 레이저 가공

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Micromachined Properties of a polyimide by a femtosecond laser (펨토초 레이저에 의한 폴리이마이드 가공 특성)

  • Min, Chul-Ki;Lee, Man-Seop
    • Laser Solutions
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    • v.11 no.2
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    • pp.20-25
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    • 2008
  • Polyimide is one of the useful materials in industry. The surface treatment of polyimide by a femtosecond laser can help accurate and fine fabrication of microstructure. And it can change the transmittance and reflectance of polyimide, too. We put femtosecond laser pulses on polyimide for rectangular or square type surface treaments and observe the change of transmittance and reflectance. Pulsewidth is 172 fs, laser power changes for fabrication are from 5 mW to 20 mW, and transmittance and reflectance are measured under 20m W, 300m W, and 920 mW. Pulse patterning is stable and almost no unwanted surface damage is shown. As power increases, working depth increases but working line width does not increase significantly. As speed changes, they also have same results. It shows the efficiency of a femtosecond laser is good and thermal damage is small for polyimide.

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Color modification inside a transparent glass(BK7) using a femtosecond laser (펨토초 레이저 기반 투명유리(BK7) 내부의 컬러 미세형상 가공)

  • Kim, Hoon-Young;Yoon, Ji-Wook;Choi, Won-Seok;Park, Jung-Kyu;Choi, Ji-Yeon;Kim, Jae-Goo;Whang, Kyoung-Hyun;Cho, Sung-Hak
    • Laser Solutions
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    • v.15 no.3
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    • pp.16-19
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    • 2012
  • We have successfully formed brown colored patterns inside of a transparent borosilicate glass generally known as BK7, laying the focus of near infrared Ti: sapphire femtosecond laser beam in the bulk BK7 glass. It is important to keep the laser power well below the damage threshold of BK7 in forming the color center. According to the low laser power, there was no laser induced mechanical damage such as cracks or threads in the color formed area. From the absorbance spectrum and its gaussian fitting, we found the band gap of BK7, 4.21eV, and three absorption edges.

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Study of ablation depth control of ITO thin film using a beam shaped femtosecond laser (빔 쉐이핑을 이용한 펨토초 레이저 ITO 박막 가공 깊이 제어에 대한 연구)

  • Kim, Hoon-Young;Yoon, Ji-Wook;Choi, Won-Seok;Stolberg, Klaus;Whang, Kyoung-Hyun;Cho, Sung-Hak
    • Laser Solutions
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    • v.17 no.1
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    • pp.1-6
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    • 2014
  • Indium tin oxide (ITO) is an important transparent conducting oxide (TCO). ITO films have been widely used as transparent electrodes in optoelectronic devices such as organic light-emitting devices (OLED) because of their high electrical conductivity and high transmission in the visible wavelength. Finding ways to control ITO micromachining depth is important role in the fabrication and assembly of display field. This study presented the depth control of ITO patterns on glass substrate using a femtosecond laser and slit. In the proposed approach, a gaussian beam was transformed into a quasi-flat top beam by slit. In addition, pattern of square type shaped by slit were fabricated on the surfaces of ITO films using femtosecond laser pulse irradiation, under 1030nm, single pulse. Using femtosecond laser and slit, we selectively controlled forming depth and removed the ITO thin films with thickness 145nm on glass substrates. In particular, we studied the effect of pulse number on the ablation of ITO. Clean removal of the ITO layer was observed when the 6 pulse number at $2.8TW/cm^2$. Furthermore, the morphologies and fabricated depth were characterized using a optical microscope, atomic force microscope (AFM), and energy dispersive X-ray spectroscopy (EDS).

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Die Surface Texturing by Femtosecond Laser for Friction Reduction (펨토초레이저를 이용한 알루미늄 성형다이의 미세가공에 관한 연구)

  • Choi, Hae-Woon;Shin, Hyun-Myung
    • Journal of the Korean Society for Precision Engineering
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    • v.26 no.5
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    • pp.57-63
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    • 2009
  • Interface friction in blanking dies, cold forging and extrusion of aluminum alloys is a major cause of inefficient process. This paper describes an investigation of femtosecond laser texturing for reduction of interface friction on sliding surfaces in forming process. Femtosecond direct writing technology was used to fabricate a laser micro-machined die and to create microgroove patterns with varying size and density on metal forming dies. A systematic approach to find the optimum parameters and computer simulation comparison of friction coefficients are provided to study the relation of friction coefficients and die profiles. In metal forming tests, the effectiveness of various laser-machined patterns for enhancing interface lubrication is determined.

Femtosecond Laser Lithography for Maskless PR Patterning (펨토초 레이저를 이용한 미세 PR 패터닝)

  • Sohn, Ik-Bu;Ko, Myeong-Jin;Kim, Young Seop;Noh, Young-Chul
    • Journal of the Korean Society for Precision Engineering
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    • v.26 no.6
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    • pp.36-40
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    • 2009
  • Development of maskless lithography techniques can provide a potential solution for the photomask cost issue. Furthermore, it could open a market for small scale manufacturing applications. Since femtosecond lasers have been found suitable for processing of a wide range of materials with sub-micrometer resolution, it is attractive to use this technique for maskless lithography. As a femtosecond laser has recently been developed, both of high power and high photon density are easily obtained. The high photon density results in photopolymerization of photoresist whose absorption spectrum is shorter than that of the femtosecond laser. The maskless lithography using the two-photon absorption (TPA) makes micro structures. In this paper, we present a femtosecond laser direct write lithography for submicron PR patterning, which show great potential for future application.