• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.655-656
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• 2006

We will provide the ultra-precise material processing technique with a femtosecond pulse laser system.

• Laser Solutions
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• v.14 no.2
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• pp.13-16
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• 2011

We fabricated the Fresnel zone plate using femtosecond laser lithography-assisted micro-machining, which is a combined process of nonlinear lithography and wet etching. We investigated the focusing properties by launching a 632.8nm wavelength He-Ne laser beam into the zone plate. The spot size of the primary focal point was $27{\mu}m$ and the intensity of focal point was 0.565W/$cm^2$.

• Proceedings of the KWS Conference
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• 2004.05a
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• pp.97-99
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• 2004

NSOM(Near-field Scanning Optical Microscope)과 레이저를 이용한 가공 시스템은 근접장 효자를 이용하여 광원의 회절한계보다 작은 나노크기 수준의 점이나 선등의 패턴을 제작하기 위한 공정에 응용되고 있다. (중략)

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.254-254
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• 2003

• Laser Solutions
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• v.14 no.3
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• pp.17-20
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• 2011

We fabricated a multi-layer diffraction grating inside fused silica glass by using a femtosecond laser direct writing method. The femtosecond laser with a wavelength of 515 nm, a pulse width of 250 fs, a repetition rate of 100 kHz, and an average output power of 6 W was used. Two layer diffraction grating with a grating period of $6{\mu}m$ was successfully fabricated with the layer gap of 0.5, 1, 2, 3, and $5{\mu}m$, respectively. Also, we investigated the diffraction pattern by illuminating a He-Ne laser beam. Finally, we demonstrated the diffraction grating with a grating period of $3{\mu}m$ by adjusting the gap of each layer with a grating period of $6{\mu}m$. Femtosecond laser direct writing technology of multi-layer has a potential to fabricate the diffraction grating with a grating period of below $1.5{\mu}m$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.155-155
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• 2004

최근 집중 육성산업으로 분류되어 연구 및 투자가 되고 있는 반도체, 정보통신, 바이오산업, 디스플레이 등에서 초정밀화와 저비용, 대량생산을 하기 위해서 기존의 공정을 대체할 수 있는 새로운 나노공정기술의 요구가 급증하고 있다 최근에는 극초단파 특성으로 인하여 극미세 형상을 가공할 수 있는 펨토초 레이저(femto second laser)를 나노공정에 적용하는 다양한 연구가 진행되고 있다. 특히, 기존의 쾌속조형공정을 응용하여 다른 공정으로는 제작이 불가능한 나노 스케일에서 3차원 자유곡면을 가지는 구조물을 제작할 수 있는 공정개발에 대하여 다양한 연구가 진행되고 있다.(중략)

• Proceedings of the Optical Society of Korea Conference
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• 2005.07a
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• pp.216-217
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• 2005

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2018.05a
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• pp.638-640
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• 2018

In this paper, FBG sensor is fabricated using 800nm femtosecond laser. The sensor was irradiated with a cumulative dose of 100 kGy gamma ray, and the effect of radiation on the FBG coating material was evaluated.

• Laser Solutions
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• v.17 no.4
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• pp.7-13
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• 2014

In this work, the application of laser induced breakdown spectroscopy (LIBS) for the composition analysis of thin $Cu(In,Ga)Se_2$ (CIGS) solar cell films ($1-2{\mu}m$ thickness) is reported. For the ablation of CIGS films, femtosecond (fs) laser (wavelength = 343nm, pulse width = 500fs) and nanosecond (ns) laser (wavelength = 266nm, pulse width = 5ns) were used under atmospheric environment. The emission spectra were detected with an intensified charge coupled device (ICCD) spectrometer and multichannel CCD spectrometer for fs-LIBS and ns-LIBS, respectively. The calibration curves for fs-LIBS and ns-LIBS intensity ratios of Ga/Cu, In/Cu, and Ga/In were generated with respect to the concentration ratios measured by inductively coupled plasma optical emission spectrometry (ICP-OES).

• 기계와재료
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• v.17 no.2 s.64
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• pp.50-58
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• 2005