• Title/Summary/Keyword: 패턴 가공

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Nano-scale Patterning on Diamond substrates using an FIB (FIB를 이용한 다이아몬드 기판 위의 나노급 미세 패턴의 형상 가공)

  • Song, Oh-Sung;Kim, Jong-Ryul
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.7 no.6
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    • pp.1047-1055
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    • 2006
  • We patterned nano-width lines on a super hard bulk diamond substrate by varying the ion beam current and ion beam sources with a dual beam field ion beam (FIB). In addition, we successfully fabricated two-dimensional nano patterns and three-dimensional nano plate modules. We prepared nano lines on a diamond and a silicon substrate at the beam condition of 30 kV, 10 pA $\sim$ 5 nA with $Ga^+$ ion and $H_2O$ assisted ion sources. We measured each of the line-width, line-depth, etched line profiles, etch rate, and aspect ratio, and then compared them. We confirmed that nano patterning was possible on both a bulk diamond and a silicon substrate. The etch rate of $H_2O$ source can be enhanced about two times than that of Ga source. The width of patterns on a diamond was smaller than that on a silicon substrate at the same ion beam power The sub-100 nm patterns on a diamond were made under the charge neutralization mode to prevent charge accumulation. We successfully made a two-dimensional, 240 nm-width text of the 300-lettered Lord's Prayer on a gem diamond with 30 kV-30 pA FIB. The patterned text image was readable with a scanning electron microscope. Moreover, three dimensional nano-thick plate module fabrication was made successfully with an FIB and a platinum deposition, and electron energy loss spectrum (EELS) analysis was easily performed with the prepared nano plate module.

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A Study on an Integrated Light Guide Plate (광학시트를 제거한 복합 도광판 설계 연구)

  • Lee, Yun-Mi;Lee, Jun-Ho;Jeon, Eun-Chae
    • Korean Journal of Optics and Photonics
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    • v.21 no.2
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    • pp.53-60
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    • 2010
  • An integrated light guide plate (LGP) was designed for liquid crystal displays (LCD) without using prism and diffuser sheets. The integrated LGP is textured with micro-patterns on both the top and bottom surfaces. The textures effectively substitute for a single prism-sheet and a diffuser sheet in LCD displays without decreasing the brightness and uniformity. A LCD display with our integrated light guide is simulated to give average luminance of 4560 cd/$m^2$, luminance uniformity of 83% horizontal viewing angle $60^{\circ}$ and vertical viewing angle $56^{\circ}$. Therefore an ultra thin (slim) back light unit can be constructed with fewer optical sheets, which reduces the manufacturing cost and so improves price competitiveness.

A study on the micro pattern replication properties of large area in injection molding (대면적 미세패턴 사출성형에서의 전사 특성 실험)

  • Kim, T.H.;Yoo, Y.E.;Je, T.J.;Kim, C.W.;Park, Y.W.;Choi, D.S.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2007.05a
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    • pp.205-208
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    • 2007
  • We injection molded a thin plate with micro prism patterns on its surface and investigated the fidelity of replication of the micro pattern depending on the process parameter such as mold temperature, injection rate or packing pressure. The size of the $90^{\circ}$ prism pattern is $50{\mu}m$ and the size of the plate is $400mm{\times}400mm$. The thickness is 1mm. The fidelity of the replication turned out quite different according to the process parameters and location of the patterns of the plate. We measured the cavity pressure and temperature in real-time during the molding to analyze the effect of the local melt pressure and temperature on the micro pattern replication.

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Fabrication of High-Quality Diffractive-Lens Mold having Submicron Patterns (서브 미크론의 패턴으로 구성된 고효율 회절 렌즈 몰드 제작)

  • Woo, Do-Kyun;Hane, Kazuhiro;Lee, Sun-Kyu
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.34 no.11
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    • pp.1637-1642
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    • 2010
  • In this paper, we present the fabrication of a high-quality diffractive-lens mold having submicron patterns, which is suitable for an ultra-slim optical system. In order to fabricate high-quality diffractive lens with a variety of submicron patterns, the multi-alignment method was used; high-resolution electron-beam lithography and FAB plasma etching were carried out to obtain the patterns. The most important key technology in the multi-alignment method is to reduce alignment error, lithography error, and etching error. In this paper, these major fabrication errors were minimized, and a high-quality diffractive lens with a diameter of $267\;{\mu}m$ (NA = 0.25), minimum pattern width of 226 nm, and thickness of 819 nm was successfully fabricated.

A Study on the surface characteristics of LGP mold and product depending on different fabrication methods of optical pattern (광학패턴 가공방법에 따른 LGP 금형 및 성형품의 표면특성 연구 : Laser Ablation, Chemical Etching, LiGA-Reflow 방식)

  • Do, Y.S.;Kim, J.S.;Ko, Y.B.;Kim, J.D.;Yoon, K.H.;Hwang, C.J.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2007.05a
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    • pp.213-216
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    • 2007
  • LGP (light guide plate) of LCD-BLU (Liquid Crystal Display - Back Light Unit) is one of the major components which affects the product quality of LCD. In the present study, the optical patterns of LGP(2.2") are manufactured by three different methods, namely, laser ablation, chemical etching and LiGA - reflow, respectively. The pattern surface images and roughness of mold and product were compared to check the optical characteristics. From the results of measurement the optical patterns fabricated by LiGA - reflow method showed the best geometric structure as intended in design and the lowest roughness among those.

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Machining of the Inject Mould for Forming the Dot Pattern of LGP of TFT-LCD (TFT-LCD의 도광판 패턴 사출성형용 금형가공)

  • 박동삼;최영현;하민수
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.1215-1219
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    • 2003
  • Light Guide Panel(LGP) is a key part of backlight unit(BLU) which transforms line-light of lamp to surface-light. Dot pattern is formed on the injected LGP surface by screen printing. This dot pattern is composed of several ten thousands micro dots of diameter 150-180$\mu\textrm{m}$ or so. The dot patterning by screen printing causes low productivity and low performance of TFT-LCD. This research develops the micromachining technology for LGP mould which could form micro dot pattern by injection molding, removing the existing screen printing process.

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Limit Analysis of Plane Strain Drawing (평면 변형 인발의 극한 해석)

  • 김병민;최인근;최재찬;이종수
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.15 no.5
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    • pp.1407-1416
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    • 1991
  • 본 연구에서는 Liu의 수식화를 바탕으로 가공 경화성을 고려하여 수식화를 재 구성하고, 유한요소 프로그램을 개발하여 평면 변형 인발문제를 극한 해석함으로써, 성형에 필요한 한계 하중 및 최적 속도장을 직접적으로 구하였다.수렴되어진 최적 속도장으로 각 요송에서의 변형률 속도, 변형률 및 격자 변형등을 수치적으로 계산함 으로써 가공에 따른 변형 특성도 파악하였다. 한계 하중은 항공기 구조용 소재인 알 루미늄 6061 재료를 이용하여 판재 인발 실험을 행함으로써 얻은 결과치와 비교 검토 하였으며, 유동 특성을 관찰하기 위하여 격자 왜곡(grid distortion) 실험을 하여 얻 은 변형 패턴과 수치 계산에서 구한 격자변형 패턴을 상호 비교하였다.

Development of Ultra-Precision Machining Technology for V-Shape Micropatterns with 32" Large Surface Area (32" 대면적 V-형상 미세 패턴을 위한 초정밀 가공기술 개발)

  • Lee, Sung-Gun;Kim, Hyun-Chul
    • Journal of the Korean Society for Precision Engineering
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    • v.28 no.3
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    • pp.315-322
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    • 2011
  • High-accuracy micropatterns such as V-shaped microgrooves are increasingly in demand for various engineering areas. And the technical trend goes for large surface areas in precision machining technology. So micropatterns with large surface areas are expected to play an increasingly important role in today's manufacturing technology In this study, we focused on developing machining technologies. First, a machine vision system for precise tool setting is developed. Second, an on-machine measurement (OMM) system for large-area measurement is implemented. And also software for tool path generation and simulation is developed. With these technologies we fabricated large-surface micropatterns in an electroless nickel-plated workpiece with single-crystal diamond tools and a 32-in, $675mm{\times}450mm$ mold with tens of V-and pyramid-shaped micropatterns.

Development of Micro Pattern Cutting Simulation Software (미세패턴 가공 시뮬레이션 기술 개발)

  • Lee, Jong-Min;Le, Duy;Kim, Su-Jin;Lee, Seok-Woo;Je, Tae-Jin
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.33 no.3
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    • pp.218-223
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    • 2009
  • The micro pattern machining on the surface of wide mold is not easy to be simulated by conventional software. In this paper, a software is developed for micro pattern cutting simulation. The 3d geometry of v-groove, rectangular groove, pyramid and pillar patterns are visualized by C++ and OpenGL library. The micro cutting force is also simulated for each pattern.

Study on the Rapid Manufacturing for Jewelry Master Patterns (주얼리용 마스터패턴의 쾌속제작에 관한 연구)

  • 주영철;이창훈;송오성;송미희
    • Proceedings of the KAIS Fall Conference
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    • 2002.05a
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    • pp.67-69
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    • 2002
  • 주얼리 제품에서 마스터패턴 제작비는 최종제품의 20% 정도로 전체 주얼리제품 시장에서 매우 큰 비중을 차지한다. 기존 주얼리 제품을 제작하는 일반 공정인 ‘디자인 시안→상세도면 제작→1왁스형 제작→석고 플라스크 제작→은 마스터패턴의 제작→왁스패턴의 대량생산→정밀주조→최종제품’의 복잡한 단계를 ‘CAD 디자인 시안→쾌속조형기 듀라폼 음각몰드 제작→저융점 합금으로 마스터패턴 제작→정밀주조→최종제품’의 공정으로 단순화하면서도 대폭시간을 단축할 수 있는 신공정을 제안하였다. 주요공정인 selective laster sintering (SLS)형 쾌속조형기(rapid prototype: RP)를 이용해서 분해온도가 190℃인 듀라폼 분말로 미리 3D CAD로 설계한 직경 20mm의 구, 링 요소를 각각 상하형의 합체형 몰드와 일체형 몰드로 제작하였다. 제작된 몰드에 융점이 70℃인 Pb-Sn-Bi-Cd 저융점 합금을 주입하여 마스터패턴을 제조하였다. 완성된 마스터패턴은 목표형상에 비해 치수 변형율이 2% 이내로 우수하고 주입공정 및 후가공공정이 용이하여 주얼리용 마스터패턴으로 응용이 가능하였다.