• Journal of the Korean Vacuum Society
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• v.17 no.5
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• pp.408-418
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• 2008

The rectangular resonant cavity was designed and characterized as a microwave plasma source for focused ion beam. The optimum cavity was calculated analytically and analyzed in detail by using HFSS(High Frequency Structure Simulator). Since the resonant cavity can be affected by the permittivity of quartz chamber and plasma, the cavity is designed to be changeable in one direction. By observing the microwave input power at which the breakdown begins, the optimum cavity length for breakdown is measured and compared with the calculated one, showing in good agreement with the optimum length reduced by 10cm according to the permittivity change in the presence of quartz chamber. The shape of breakdown power curve as a function of pressure appears to be similar to Paschen-curve. After breakdown, plasma densities increase with microwave power and the reduced effective permittivity in the cavity with plasma results in larger optimum length. However, it is not possible to optimize the cavity condition for high density plasmas with increased input power, because too high input power causes expansion of density cutoff region where microwave cannot penetrate. For more accurate microwave cavity design to generate high density plasma, plasma column inside and outside the density cutoff region needs to be treated as a conductor or dielectric.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.484-484
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• 2009

반도체 소자가 차세대 초미세 공정 기술 도입의 가속화를 통해 고속화 및 고집적화 되어 감에 따라 나노 (nano) 크기의 회로 선폭 미세화를 극복하고자 최적의 CMP (chemical mechanical polishing) 공정이 요구되어지고 있다. 최근, 금속배선공정에서 높은 전도율과 재료의 값이 싸다는 이유로 Cu를 사용하였으나, 디바이스의 구조적 특성을 유지하기 위해 높은 압력으로 인한 새로운 다공성 막(low-k)의 파괴와, 디싱과 에로젼 현상으로 인한 문제점이 발생하게 되었다. 이러한 문제점을 해결 하고자 본 논문에서는 Cu의 ECMP 적용을 위해 LSV (Linear sweep voltammetry)법을 통하여 알칼리 성문인 $NaNO_3$ 전해액과 산성성분인 $HNO_3$ 전해액의 전압 활성화에 의한 active, passive, transient, trans-passive 영역을 I-V 특성 곡선을 통해 알아보았고, 알칼리와 산성 성분의 전해액이 Cu 표면에 미치는 영향을 SEM (Scanning electron microscopy), EDS (Energy Dispersive Spectroscopy), XRD(X-ray Diffraction)를 통하여 전기화학적 특성을 비교 분석하였다.

• Journal of Sensor Science and Technology
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• v.4 no.4
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• pp.75-80
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• 1995

In order to fabricate the piezoelectric thin film of the PZT-PNN ternary compound, the metal alkoxides were used as starting materials. The electrical and crystalline properties of the thin film were evaluated. The X- RD study shows that the crystallization of the film is optimized at $550^{\circ}C$ of sintering temperature. According to the D-E hysterisis curve, the coercive field is 28.8 kV /cm, and the remanent polariztion is $18.3\;{\mu}C/cm^{2}$. The break down voltages of the thin films are $76.0\;{\sim}\;27.0\;MV/m$. When the sintering temperature is raised, the break down voltage is lowered. As a result of measuring the C-V characteristic curve of the ternary compound piezoelectric thin film, the relative dielectric constants are 406 for the composition (50:40:10), 1084 for the composition (50:30:20), 723 for the composition (45:35:20) and 316 for the composition (40:40:20).

• Applied Chemistry for Engineering
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• v.2 no.3
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• pp.253-261
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• 1991

Polyamic acids, precursor polymers of polyimides have been obtained by the solution polycondensation of benzophenone tetracarboxylic dianhydride (BTDA) with 4, 4'-diamino diphenyl methane (MDA) and/or 3, 3'-dimethyl benzidine (OTB). The reaction was carried in two solvent systems such as m-cresol and m-cresol/xylene mixture. The results of TGA analysis showed that the polyimide films had good thermal stability with the initial decomposition temperature ranging from $540^{\circ}$ to $590^{\circ}$. According to DSC analysis of polymers, the glass transition temperature was over $340^{\circ}$. Polyimide film samples, showed good mechanical and electrical properties, had over $16Kg/mm^2$ of tensile strength and about 200 KV/mm of dielectric breakdown voltage. The properties of the copolymer from MAD/OTB were better than those of the homopolymer from MDA. And the polymer synthesized in m-cresol had lower properties than that obtained in m-cresol/xylene.

• Proceedings of the KAIS Fall Conference
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• 2010.11a
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• pp.482-482
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• 2010

하수처리장에서 발생하는 유기성 슬러지는 대부분 해양투기에 의해 처분되고 나머지는 매립, 소각, 퇴비화 등으로 처분된다. 그러나 런던협약 '96 의정서' 발효에 의해 2012년부터 해양투기가 금지되고, 매립장 및 소각장의 신규건설은 님비(NIMBY) 현상에 의해 제한받기 때문에 효과적인 슬러지 처분 및 가용화 방법이 요구되고 있다. 현재 초음파[1]나 열처리[2], 오존[3,4], 미생물 처리[5,6] 등 물리, 화학, 생물학적 처리방안이 연구되고 있으나 이러한 방법들은 에너지 과소비, 2차 오염물질 발생에 따른 처리비용 증가 등의 단점을 가지고 있다. 따라서 본 연구에서는 기존의 연구 방법을 보안하고자 전기분해를 활용하여 슬러지 가용화를 시도함으로써 슬러지 발생을 저감시킬 수 있는 방법을 연구하였다. 본 실험에서는 전기분해를 위해 제작된 불용성 전극은 Titanium에 Iridium을 코팅하여 제작하였고, 최대 20V까지 전압을 고정시키고 시간에 따라 변화되는 전류와 전기전도도, pH 값을 관찰하였다. 실험에 사용된 활성슬러지는 3개월간 합성폐수로 순응화 시킨 후에 시료로 사용하였다. 전기분해에 의해 처리된 활성슬러지의 여액을 분석한 결과 SCOD, TN, TP 농도가 각각 510%, 9%, 106% 증가하였다. 이는 전기분해에 의해 미생물의 세포벽이 파괴되어 세포 내 물질들이 세포 외부로 용출되어 미생물들의 이용이 가능한 상태로 되었음을 알 수 있었다. 이는 국내 하 폐수의 낮은 C/N비 때문에 무산소조에 메탄올 같은 외부 탄소원을 공급하는 대신에 별도의 탄소원 공급 없이 가용화 된 슬러지를 반송시킴으로써 슬러지 저감에 따른 폐기 비용과 운전비용의 절감을 기대할 수 있어, 근본적인 슬러지 발생을 저감시킬 수 있는 해결책이라 할 수 있다.

• Korean Journal of Materials Research
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• v.3 no.4
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• pp.352-360
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• 1993

A nitride layer was df'posited on the thermal oxide layer by LPCVD process. ONO(oxidenitricle oxide) capacitors with various thickness of component layer wore fabricated by wet reoxidation of the nitride with and without anrwalmg treatment and their properties were investigated. As a result of observation on the refrative index and etching behavior of the ONO fIlms, the nitride layer OF 40 A thick ness was not so dense that the bottom oxide during the reoxidation process and the capability of securing the capacitance decreased. The conduction current in the ONO multl-Iayer dielctric film was reduced as the bottom(or top) oxide layer became thicker. However, in the case of oxide with thickness more than 50A, it merely plays a factor of reduction in capacitance, and the effect of barrier for hole injection was not so much increased. Annealing of the nitride laypr bpfore reoxidation did not show a grpat effects on the refractive index and capacitance of the film, however, the annealing process increased the breakdown voltage by 2${\cdot}$V.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.25 no.2
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• pp.131-136
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• 2011

This paper aims to examine the possibility of using an environmentally friendly $N_2$ as an alternative gas to $SF_6$. For this purpose, we have investigated breakdown characteristics of $N_2$ under impulse voltages in a quasi-uniform electric field gap. The 1.2/50[${\mu}s$] lightning impulse voltage, switching impulse voltages and oscillatory impulse voltages were applied at the test gap. The electric field utilization factor ranges from 0.5 to 0.8. The experimental data of $SF_6$ and $N_2$ acquired in the same experimental condition are presented in parallel for comparison. As a result, the breakdown voltages in $SF_6$ and $N_2$ are linearly increased with the gas pressure, also the breakdown voltages in $N_2$ are increased with increasing the gap distance and electric field utilization factor. The positive breakdown voltages are higher than the negative breakdown voltages. The nagative basic lightning impulse withstand level of 150[kV] in $N_2$ of about 0.5[MPa] is nearly equal to that in $SF_6$ of 0.15[MPa]. It is seen from the results obtained in this work that $N_2$ can be used as an eco-friendly alternative gas to $SF_6$ in distribution power equipment.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.59 no.8
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• pp.1416-1422
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• 2010

$SF_6$ is the most commonly used insulating gas in electrical systems. But In these days $SF_6$ mixtures and alternative gas has been studied because of global warming. so although many studies have been carried out about binary gas mixtures with $SF_6$, few studies were presented about breakdown characteristics of $SF_6/N_2$ mixtures. At present study the breakdown characteristics of $SF_6/N_2$ mixtures in Non-uniform field was performed. In this paper, The simulation value are compared with experiment values. Streamer breakdown criterion was used for predicting breakdown voltage. For accurate simulation this simulation apply utilization factor using CST(computer simulation technology) EM $studio^{tm}$ program. AC breakdown experiments in non-uniform field was performed to compare with the breakdown simulation values. The pressure range of gas mixtures was 0.4 MPa to 0.7 MPa. The rod-plane was used and mixture ratio is $SF_6$ 20% : $N_2$ 80%. The gap lengths are 10mm to 70mm. As the pressure increase, this simulation value does not correspond to the experiment value. So this simulation need surface roughness factor. As a result of applying surface roughness factor this simulation decrease a relative error (|experiment value - simulation value| /simulation value).

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1455_1456
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• 2009

$SF_6$ is the most commonly used insulating gas in electrical systems. But In these days $SF_6$ mixtures and alternative gas has been studied because of global warming. so although many studies have been carried out about binary gas mixtures with $SF_6$, few studies were presented about breakdown characteristics of $SF_6/CF_4$ mixtures. At present study the breakdown characteristics of $SF_6/CF_4$ mixtures in quasi-uniform field was performed. This experiments were carried out under AC voltages. The rod-rod electrode was used with 5 mm gap distance. The mixture of $SF_6/CF_4$ containing 20%,50%,70% of $SF_6$ were compared with pure $SF_6$ and $CF_4$ gas and gas pressure ranged from 0.1 to 0.5 MPa. The show that the breakdown voltages of gas were linearly increased according to the pressure in quasi-uniform field. For breakdown vlotage values of $(E/P)_{crit}$ are important. Because If values of (E/P) is a little more than $(E/P)_{crit}$, electrons rapidly increase and streamer discharge gernerates. Through this experiments values of $(E/P)_{crit}$ are found to vary with the ratio of $SF_6/CF_4$ mixture according to the following relationship. $V_b=(E/P)_{crit}{\cdot}p{\cdot}d$

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.31 no.9
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• pp.110-120
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• 2003

As the wooden aircraft in the early times has no way to let lightning flow when lighting flash attaches during flight, the aircraft got damage, or caught fire. Though all metal airplane was developed with an advent of aluminum, a lightning accident still occurred including a fire of a fuel tanks. Eventually, NACA declared problems in 1938, and an artificial lightning test began. III succession, FAA established Airworthiness Requirements for certification. The FAA committed test measures study for the protection of an airplane from lightning to SAE. SAE presented the test current and voltage waveforms that simulating natural lightning, and it is utilized on lightning protection certification of an airplane by public. A lightning effects of an airplane through an analysis of lightning mechanism was made in this technical note. Especially, lightning direct effects on aircraft are analyzed and lightning strike zones are described.