• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.482-482
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• 2013

반도체 소자의 미세화와 더불어 세정공정의 중요성이 차지하는 비중이 점점 커지고, 이에 따라 세정 기술 개발에 대한 요구가 증대되고 있다. 기존 세정 기술은 화학약품 위주의 습식 세정 방식으로 표면 손상, 화학 반응, 부산물, 세정 효율 등 여러 가지 어려움이 있다. 따라서 건식세정 방식이 활발하게 도입되고 있으며 대표적인 것이 에어로졸 세정이다. 에어로졸 세정은 기체상의 작동기체를 이용하여 에어로졸을 형성하고 표면 오염물질과 직접 물리적 충돌을 함으로써 세정한다. 하지만 이 또한 생성되는 에어로졸 내 발생 입자로 인해 패턴 손상이 발생하며 이러한 문제점을 극복하기 위하여 본 연구에서는 가스클러스터 장치를 이용한 세정 특성 평가에 관한 연구를 수행하였다. 가스 클러스터란 작동기체의 분자가 수십에서 수백 개 뭉쳐 있는 형태를 뜻하며 이렇게 형성된 클러스터는 수 nm 크기를 형성하게 된다. 그리고 짧은 시간의 응축에 의해 수십 nm 크기까지 성장하게 된다. 에어로졸 세정과 다르게 클러스터가 성장할 환경과 시간을 형성하지 않음으로써 작은 클러스터를 형성하게 되며 이로 인해 패턴 손상을 최소화 하고 상대적으로 높은 효율로 오염입자를 제거하게 된다. 클러스터 세정 장비를 이용한 표면 처리는 충돌에 의한 제거에 기반한다. 따라서 생성 및 가속되는 클러스터로부터 대상으로 전달되는 운동량의 정도가 세정 특성에 영향을 미치며 이는 생성되는 클러스터의 크기에 종속적이다. 생성 클러스터의 크기 분포는 분사 거리, 유량, 분사 각도, 노즐 냉각 온도 등의 변수에 관한 함수이다. 따라서 본 연구에서는 $CO_2$ 클러스터를 이용한 세정 특성을 평가하기 위하여 이러한 변수에 따라서 오염 입자의 종류, 크기에 따른 PRE (particle removal efficiency)를 평가하고 다양한 선폭의 패턴을 이용하여 손상 실험을 수행하였다. 제거 효율에 사용된 입자는 $CeO_2$와 $SiO_2$이며, 각각 30, 50, 100, 300 nm 크기를 정량적으로 오염시킨 쿠폰 웨이퍼를 제조하여 세정 효율을 평가하였다. 정량적 오염에는 SMPS (scanning mobility particle sizer)를 이용한 크기 분류와 정전기적 입자 부착 시스템이 사용되었다. 또한 패턴 붕괴 평가에는 35~180 nm 선폭을 가지는 Poly-Si 패턴을 이용하였다. 실험 결과 클러스터 형성 조건에 따라 상대적으로 낮은 패턴 붕괴에서 95% 이상의 높은 오염입자 제거효율을 전반적으로 보이는 것을 확인할 수 있었다. 따라서 이론적 계산에 기반하여 세정에 요구되는 클러스터 크기를 가정하고, 이를 통하여 세정에 적용할 경우 높은 기존 세정 방법의 단점을 보완하면서 높은 세정 효율을 가지는 대체 세정 방안으로 이용할 수 있음을 확인하였다.

• Journal of the Economic Geographical Society of Korea
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• v.19 no.4
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• pp.799-811
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• 2016

After the participatory government began, various cluster policies in explicit and tacit forms had been promoted. However, an opinion of coming up with new policy alternative different from the existing one is recently brought up for strengthening the competitiveness of industrial agglomerations. This research attempts to discuss the ways in which both a smart specialization strategy and a triple-helix innovation system approach, as an alternative approach to regional industrial policy, are theoretically associated with the existing cluster policy. Through this discussion, it highlights that post-cluster policy should be not just based on regional specificity, but also facilitated by establishing the consensus space of innovation on the bassis of voluntary cooperation among industry, academy and government. It also stresses that it is necessary to focus on nurturing a new industry by systematic and intensive investment and the diversification of industrial cluster for reinforcing competitiveness of local universities and revitalizing practical cooperation between industry and university.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.12
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• pp.8550-8555
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• 2015

The research goal of this paper is to find the cluster policies for the federal and provincial governments through German Cluster Politics. This paper consists of five chapters. In the first chapter the theoretical background for the Cluster is examined. The next chapter details the research method for the federal and state German Cluster Policy study. The results of this paper show that the federal and state German Governments may co-operate or compete in cluster politics. Additionally, this research falls under EU Political Research under the umbrella of the EU. This cluster policy research also provides implications for the Korean Government in the long term.

• Journal of KIISE:Computer Systems and Theory
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• v.30 no.5_6
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• pp.290-298
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• 2003

Internet-based computer systems have to provide both high-availability and high-performance. Cluster technology has been used to obtain availability and performance simultaneously Generally, high-availability cluster systems tolerate a failure of a cluster node and cost-effectively solve it. In this paper, we study availability and downtime cost of (n,k) cluster systems. By considering performance, we model state transition of (n,k) cluster systems and apply software rejuvenation technique to improve availability of the system. We find that software rejuvenation can be used to improve availability of (n,k) cluster systems.

• Asia-Pacific Journal of Business Venturing and Entrepreneurship
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• v.2 no.3
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• pp.103-122
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• 2007

Innovation clusters developed or evolved around a specific region IS the key element of national innovation system and determine national competitiveness. Recognizing the importance of innovation clusters, Korean government has made "Daedeok Special R&D Zone" in 2005. This paper examines the success factors of famous Cluster in advanced countries and China, and proposes the strategy for regional development in Daejeon through boosting Daedeok Innovation Cluster. Although 30.5% of government R&D investment is being concentrated in Daedeok along with 10% of the country's doctorate degree holders, it is lack of increasing revenue by linking corporate R&D with a creative and challenging entrepreneur spirit. The core of the innovation cluster is the integration and mutual networking of the main participants. This paper suggests strategies for developing as a world class innovation cluster, global networking and clustering, venture ecosystem formation, commercialization the knowledge by interacting with market. It also explains the necessity of regional integration for cluster to cluster linkages in the East Asia Region.

• The Journal of the Korea Contents Association
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• v.10 no.7
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• pp.49-54
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• 2010

In these days, Internet environment are very quickly development as well On-line service have been using a online for the mission critical business around the world. As the amount of information to be processed by computers has recently been increased there has been cluster computing systems developed by connecting workstations server using high speed networks for high availability. As a result, this study on a cluster based DBMS and common solution of DBMS venders has been studying with a wide range, as well as It is not good study a management skill for the cluster-based DBMS efficiently and optimization. accordingly, This study find out optimization managements skill and theory of he High availability solution on cluster-based DBMS.

• Journal of KIISE:Computer Systems and Theory
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• v.29 no.2
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• pp.57-64
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• 2002

We implemented two fast PC clusters using fast PCs and high speed network. First. we built the first generation of 16 PC cluster and have used it for real-time operation at Cheju Regional Meteorological Office. Next, we built the second generation of 16PC with dual CUs cluster which was efficiently improved based on performance analysis of the first generation of cluster. In this research we also analyzed performance of two different clusters, which have different CPUs and communication devices using the parallel model MM5 which has been used for the real-time weather forecasting.

• Journal of the Korea Convergence Society
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• v.8 no.7
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• pp.39-46
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• 2017

Dongguan City of Guangdong province, one of the core areas of the Pearl River Delta, has also pursued economic development through the geographical advantage close to Hong Kong. In the early 1980s, small and medium-sized multinational corporations related to home appliances industry from Hong Kong invested to the Dongguan area and set up a production factory. In the mid-1990s, as Taiwanese PC manufacturers invested, local industrial clusters have developed in Dongguan with core of the IT, PC components and electronic industries. The case of the IT industrial cluster in Dongguan is a typical example of the development of Chinese manufacturing industry after the reform of China. This paper focused on the coupling strategy case of Dongguan City industrial cluster in Guangdong province, and theoretically compared the endogenous growth factor analysis(NMID) of regional industrial development with the regional differentiation of industry based on external linkage with global production network(GPN).

• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.11
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• pp.5015-5024
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• 2012

This research focused on the strategy formulation for the Innopolis as a Global Innovation Cluster. The study was performed based on both theoretical study and qualitative study approaches. Particularly, scenario planning as a foresight method was used for the strategy formulation. The major determinants for the success of the Innopolis can be summarized as follows; the enhancement of the host institution for the development of the innovation cluster, the relational capability of the Innopolis among daedeok, gwangju, daegu and the alignment and cooperation of the International Science & Business Belt. In terms of the needs of times, this study regarding the strategy for the formation of the Innopolis as the global innovation cluster is anticipated to be a good reference for policy makers and researchers in coming years.

• Journal of KIISE:Computer Systems and Theory
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• v.29 no.1
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• pp.35-41
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• 2002

It is extremely important to minimize network access time in constructing a high-performance PC cluster system For an SCI based PC cluster it is possilbe to reduce the network access time by maintaining network cache in each cluster node, This paper presents a CC-NUMA card that utilizes network cache for SCI based PC clustering The CC-NUMA card is directly plugged into the PCI solot of each node, and contains shared memory network cache, and interconnection modules. The network cache is maintained for the shared memory on the PCI bus of cluster nodes. The coherency mechanism between the network cache and the shared memory is based on the IEEE SCI standard. A CC-NUMA prototype card is developed to evaluate the performance of the system. According to the experiments. the cluster system with the CC-NUMA card showed considerable improvements compared with an SCI based clustser without network cache.