• Journal of the Institute of Electronics Engineers of Korea SD
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• v.39 no.4
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• pp.41-54
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• 2002

In this study, we have analyzed the effects of the membrane layer and the bragg reflector layers on the resonance characteristics through comparing the characteristics of the membrane type FBAR (Film Bulk Acoustic Wave Resonator) and the one type bragg reflector layers with those of the ideal FBAR with top and bottom electrode contacting air by using equivalent circuit technique. It is assumed that ZnO is used for piezoelectric film, $SiO_2$ are used for membrane layer and low acoustic impedance layer, W are used for the high acoustic reflector layer and Al is used for the electrode. Each layer is considered to have a acoustic propagation loss. ABCD parameters are picked out and input impedance is calculated by converting 1-port equivalent circuit to simplified equivalent circuit that ABCD parameters are picked out possible. From the variation of resonance frequency due to the change of thickness of electrode layers, reflector layers and membrane layer it is confirmed that membrane layer and the reflector layer just under the electrode have the greatest effect on the variation of resonance frequency. From the variation of resonance properties, K and electrical Q with the number of layers, K is not much affected by the number of layers but electrical Q increases with the number of layers when the number of layers is less than seven. The electrical Q is saturated when the number of layers is large than six. The electrical Q is dependent of mechanical Q of reflector layers and membrane layer. Both ladder filter and SCF (Stacked Crystal Filters) show higher insertion loss and out-of-band rejection with the increase of the number of resonators. The insertion loss decreases with the increase of the number of reflector layers but the bandwidth is not much affected by the number of reflector layers. Ladder Filter and SCF with membrane layer show the spurious response due to spurious resonance properties. Ladder filter shows better skirt-selectivity characteristics in bandwidth but SCF shows better characteristics in insertion loss.

• Korean Journal of Soil Science and Fertilizer
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• v.30 no.1
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• pp.3-15
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• 1997

Iron oxide compounds in 8 selected Cheju Island soil samples have been analized by X-ray fluorescence spectrometer(XRF), X-ray diffractometry(XRD), selected chemical techniques, and $M{\ddot{o}}ssbauer$ spectroscopy. The result of this analysis by XRF shows that the rate of quantity of $Fe_2O_3$ in 8 soil samples was from 8.03wt.%(Daejeong paddy soil) to 18.21wt.%(Songag soils). Songag, Heugag and Gueom soils were detected to have lower peaks of intensity of hematite by XRD. In addition, these soils were not detected to have hematite and goethite peaks. Ferrihydrite, which is a short-range-order mineral commonly present in volcanic ash soil, was not detected by XRD due to low concentration and/or poor cristallinity. Ferrihydrite contents estimated from Feo values were 8.8~35.2g/kg for volcanic ash soils and 0.85g/kg for the Daejeong soil. Most of the soil samples represented by the paramagnetic $Fe^{3+}$ doublet obtained from $M{\ddot{o}}ssbauer$ spectra at room temperature and 18K were considered to arise from the presence of ferrihydrite, superparamagnetic goethite, and silicate minerals. Also the paramagnetic $Fe^{2+}$ doublets are attributable to primary minerals such as olivine, illite, chlorite, augite, biotite, and hornblende. Goethite and hematite were identified as the dominant crystalline iron oxides in these soils from $M{\ddot{o}}ssbauer$ spectra obtained at room temperature and 18K. All the soil samples exhibited strong superparamagnetic relaxation. Collapse of the $M{\ddot{o}}ssbauer$ magnetic hyperfine splitting at room temperature was due to the small size(${\sim}180{\AA}$) of the oxide particles and/or Al-subsituted goethite.