• Journal of the Korean Vacuum Society
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• v.10 no.1
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• pp.119-126
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• 2001

Hydrogenated amorphous carbon (a-C:H) films were deposited by ECR-PECVD (electron cyclotron resonance-plasma enhanced chemical vapor deposition) method with deposition conditions such as ECR plasma source power, gas composition of methane and hydrogen, deposition time and substrate bias voltage. The hydrogen content in the films has been measured by ERDA (elastic recoil detection analysis) using 2.5 MeV $He^{++}$ ion beam. From the results of AES (Auger electron spectroscopy), RBS (Rutherford backscattering spectrometry) and ERDA, the composition elements of deposited film were confirmed the carbon atom and the hydrogen atom. It was observed by FTIR (Fourier transform infrared) that the hydrogen contents in the film varied according to the deposition conditions. In deposition condition of substrate bias voltage, the hydrogen contents were decreased remarkably because the amount of dehydrogenation in films was increased as the substrate bias voltage increased. In the rest deposition conditions, the hydrogen contents in the film were measured in the range 45~55%.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.45 no.11
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• pp.932-938
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• 2017

Particle-in-cell method which blends Eulerian grids and Lagrangian particle is utilized to solve simplified hall-effect thruster. Since this study individually tracks not only neutrons and ions but also electrons, message passing interface(mpi) scheme is adopted for parallel computer cluster. Helical movement of an electron cloud in constant magnetic field is validated comparing with an exact solution. A plasma in radial magnetic field and axial electric field in a reaction cylinder is established. Electrons do double helix movement and are well anchored in a cylinder. Ionization of neutrons by impact with high-speed electrons generates ion particles. They are accelerated by axial electric field, which forms a plume of a plasma-effect thruster.

• Proceedings of the Korea Concrete Institute Conference
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• 2008.11a
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• pp.49-52
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• 2008

The plain and simple shape water front structure were designed and installed for wave protection and wave resistance. But the installation of these plain and simple structure cause deficiency of environmental affinity. Also the resonance phenomena from the reflective wave and shipwave of the harbor incident wave caused high tide and wave, consequently maintaining the tranquility of inside harbor, give difficulty for mooring the ship and loading-unloading, increase the possibility of ship collision at the quray wall and landing place To solve these problems, we develop the environmentally friendly wave dissipation block. And installation efficiency, stability of the blocks through experiment of C.E Block Joint.

• Journal of the Korean earth science society
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• v.34 no.1
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• pp.51-58
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• 2013

An appropriate determination of time step is one of the important problems in atmospheric modeling. In this study, we investigate the sensitivity of numerical solutions to time step in a nonlinear atmospheric model. For this purpose, a simple nondimensional dynamical model is employed, and numerical experiments are performed with various time steps and nonlinearity factors. Results show that numerical solutions are not sensitive to time step when the nonlinearity factor is not influentially large and truncation error is negligible. On the other hand, when the nonlinearity factor is large (i.e., in a highly nonlinear regime), numerical solutions are found to be sensitive to time step. In this situation, smaller time step increases the intensity of the spatial filter, which makes small-scale phenomena weaken. This conflicts with the fact that smaller time step generally results in more accurate numerical solutions owing to reduced truncation error. This conflict is inevitable because the spatial filter is necessary to stabilize the numerical solutions of the nonlinear model.

• Journal of Navigation and Port Research
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• v.33 no.8
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• pp.505-511
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• 2009

Vessels on anchoring are frequently dragged due to the increased area of wind pressure by enlargement of ship's size and sudden gust of winds in recent years. In the view point of the ship's navigators, the proper measurements corresponding to the dragging of anchor should be taken into account concerned about the time for the occurring of dragging by the external forces such as wind and wave, the pattern and speed of dragging and the possibility of collisions with any other vessels or obstacles. In this paper, it was examined the actual dragging anchor in T.S. HANBADA due to the wind and waves. From this case, it was found the critical external forces by which she was begun to dragged comparing the force by the wind, frictional resistance, drifting force and ship motion moment with the holding power. Also, through the analysis of the dragging pattern, it was known the alteration range of heading angle, swinging width and dragging speed etc.

• Journal of the Korean Vacuum Society
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• v.9 no.4
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• pp.382-388
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• 2000

Hydrogenated amorphous carbon (a-C:H) films were fabricated by electron cyclotron resonance plasma-enhanced chemical vapor deposition. The bonding structure of carbon and hydrogen in the a-C:H films has been investigated by varying the deposition conditions such as ECR power, gas composition of methane and hydrogen, deposition time, and negative DC self bias voltage. The bonding characteristics of the a-C:H thin film were analyzed using FTIR spectroscopy. The IR absorption peaks of the film were observed in the range of $2800\sim3000 \textrm{cm}^{-1}$. The atomic bonding structure of a-C:H film consisted of $sp^3$ and $sp^2$ bonding, most of which is composed of $sp^3$ bonding. The structure of the a-C:H films changed from $CH_3$ bonding to $CH_2$ or CH bonding as deposition time increased. We also found that the amount of dehydrogenation in a-C:H films was increased as the bias voltage increased.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.35-35
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• 2011

반도체 공정 및 디스플레이 공정에서 발생하는 오염입자는 공정 불량을 일으키는 가장 큰 원인 중의 하나이며, 수십 나노에서 수 백 나노의 크기를 갖는다. 최근 디스플레이 및 반도체 산업이 발전함에 따라 회로의 선폭이 점차 감소하고 있으며 오염입자의 임계 직경(critical diameter) 또한 작아지고 있다. 현재 반도체 및 디스플레이 산업에서 사용되는 측정방법은 레이저를 이용하여 공정 후 표면에 남아있는 오염입자를 측정하는 ex-situ 방법이 주를 이루고 있다. Ex-situ 방법을 이용한 오염입자의 제어는 웨이퍼 전체를 측정할 수 없을 뿐만 아니라 실시간 측정이 불가능하기 때문에 공정 모니터링 장비로 사용이 어려우며 오염입자와 공정 간의 상관관계 파악에도 많은 제약이 따르게 된다. 이에 따라 저압에서 in-situ 방법을 이용한 실시간 오염입자 측정 기술 개발이 요구되고 있다. 본 연구에서는 저압 환경에서 실시간으로 입자를 모니터링 할 수 있는 장비를 입자의 광 산란 원리를 이용하여 개발하였으며, 산란 신호를 입자크기로 변환하는 신호 분석 알고리즘 연구를 수행하였다. 빛이 입자와 충돌하게 되면 산란 및 흡수 현상이 발생하게 되는데 이 때 발생하는 산란 및 흡수량과 입자 크기와의 연관성이 Gustav Mie에 의해서 밝혀졌으며, 현재까지 광을 이용한 입자 크기 분석 장치의 기본 원리로 사용되고 있다. 하지만, Mie 이론은 단일입자가 일정한 강도를 가진 광을 통과할 경우인 이상적인 조건에서 적용이 가능하고 실제 조건에서는 광이 가우시안 분포를 가지며 광 집속에 의해서 광 강도가 위치에 따라 변하기 때문에 이러한 조건을 가지는 광을 입자가 통과할 때 발생하는 산란량은 단순히 Mie 이론에 의해서 계산하는 것이 불가능 하다. 본 연구에서는 이러한 현상을 입자 측정의 불확정성 이라고 규정하고 입자가 특정한 위치를 통과할 확률을 이용하여 신호를 분석하는 알고리즘을 개발 및 연구를 수행하였다.

• Water for future
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• v.27 no.3
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• pp.115-121
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• 1994

Cohesie sediment movement in estuarine systems is strongly affected by the phenomena of aggregation and flocculation. Aggregation is the process where primary particles are clustered together in tightly-packed formations; flocculation is the process where aggregates and single particles are bonded together to form large particle groups of very low specific density. The size, shape and strength of the flocculants control the rate of deposition and the processes of pollutant exchange between suspended sediments and ambient water. In estuarine waters, suspended sediments above the lutocline form the mobile suspension zone while below the lutocline they form the stationary suspension zone. Suspended particles in the mobile zone are generally in a dispersed state and the controlling forces are the Brownian motion and the turbulent flow fluctuations. In the stationary suspension zone, the driving force is the gravity. This paper discusses the settling and particle flocculation characteristics under quiescient flow conditions. Particles are entering the study domain randomly. Particles in the mobile suspension zone are simulated by using the Smoluchowski's model. Flocs created in the mobil suspension zone are moving into the stationary suspension zone where viscosity and drag effects are important. Utilizing the concepts of the maximum Feret's diameter and the Minkowski's sausage logic, the fractal dimension of the flocs within the stationary suspension is estimated and then compared with results obtained by other studies.

• Transactions of the Korean Society of Mechanical Engineers
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• v.11 no.3
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• pp.501-508
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• 1987

Experimental studies of particle (TiO$\_$2/) deposition from the laminar hot gas particle flow (about 1565K) onto the cold wall surface (about 1215K-1530K) were carried out by the 'real time' laser light reflectivity method (LLRM) and the photographs of scanning electron microscope(SEM). The LLRM was used for the measurement of thermophoretic deposition rates of small particles (d$\_$p/<3.mu.m), and the photographs of SEM were used for determining what factors control the collection of particles having diameters ranging from 0.2 to 30 microns. Two phenomena are primarily responsible for transport of the particles across the laminar boundary layers and deposition: (1) particle thermophoresis (i.e. particles migration down a temperature gradient), and (2) particle inertial impaction, the former effect being especially larger factor of the particle deposition in its size over the range of 0.2 to 1 microns. And also, this study indicates that thermophoresis can be important for particles as large as 15 microns. Beyond d$\_$p/=16.mu.m, this effect diminishes and the inertial impaction is taken into account as a dominant mechanism of particle deposition. The results of present experiments found to be in close agreement with existing theories.

• The Transactions of the Korean Institute of Power Electronics
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• v.13 no.4
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• pp.278-286
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• 2008

This paper investigates the fault generation type and the cause of output interruptionsin bulky with $30^{\sim}500[KVA]$ double conversion UPS, and proposes the fault detection method to improve the reliability of power supply used in the critical load in industry. Identifies its existing way of detecting a quality of inverter output it to bypass when exceeds its expectation. Under a UPS managing system, when an inner (Power device, Controller, CPU) fault occurs it disrupts the power supply and these occurrences has been verified by the results of experiments and application results. To overcome these problems, the proposed method constructs independently a fault-detection, a bypass-control device and a triple power supply apart from the conventional UPS operation. Also the detection point is changed to the preceding of a circuit breaker, a reference of fault detection is modified to avoid any clash and the breaking equipment is attached to intercept a spread of accident. As a result of applications of these developed systems to 242 UPS which was installed purposefully to the communication power supply, the service errors has not occurred in the UPS for two years since 2006.