• Title/Summary/Keyword: 최소묘사길이

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전자선 직접묘사에 의한 Deep Submicron NMOSFET 제작 및 특성

  • Lee, Jin-Ho;Kim, Cheon-Soo;Lee, Heyung-Sub;Jeon, Young-Jin;Kim, Dae-Yong
    • ETRI Journal
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    • v.14 no.1
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    • pp.52-65
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    • 1992
  • 전자선 직접묘사 (E-beam direct writing lithography) 방법을 이용하여 $0.2\mum$$0.3\mum$ 의 게이트길이를 가지는 NMOS 트랜지스터를 제작하였다. 게이트만 전자선 직접묘사 방법으로 정의하고 나머지는 optical stepper를 이용하는 Mix & Match 방식을 사용하였다. 게이트산화막의 두께는 최소 6nm까지 성장시켰으며, 트랜지스터구조로서는 lightly-doped drain(LDD) 구조를 채택하였다. 짧은 채널효과 및 punch through를 줄이기 위한 방안으로 채널에 깊이 붕소이온을 주입하는 방법과 well을 고농도로 도핑하는 방법 및 소스와 드레인에 $p^-$halo를 이온주입하는 enhanced lightly-doped drain(ELDD) 방법을 적용하였으며, 제작후 성능을 각각 비교하였다. 제작된 $0.2\mum$의 게이트길이를 가지는 소자에서는 문턱전압과 subthreshold기울기는 각각 0.69V 및 88mV/dec. 이었으며, Vds=3.3V에서 측정한 포화 transconductance와 포화 드레인전류는 각각 200mS/mm, 0.6mA/$\mum$이었다. $0.3\mum$소자에서는 문턱전압과 subthreshold 기울기는 각각 0.72V 및 82mV/dec. 이었으며, Vds=3.3V에서 측정한 포화 transconductance는 184mS/mm이었다. 이러한 결과는 전원전압이 3.3V일 때 실제 ULSI에 적용가능함을 알 수 있다.

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Target Length Estimation of Target by Scattering Center Number Estimation Methods (산란점 수 추정방법에 따른 표적의 길이 추정)

  • Lee, Jae-In;Yoo, Jong-Won;Kim, Nammoon;Jung, Kwangyong;Seo, Dong-Wook
    • Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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    • v.38 no.6
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    • pp.543-551
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    • 2020
  • In this paper, we introduce a method to improve the accuracy of the length estimation of targets using a radar. The HRRP (High Resolution Range Profile) obtained from a received radar signal represents the one-dimensional scattering characteristics of a target, and peaks of the HRRP means the scattering centers that strongly scatter electromagnetic waves. By using the extracted scattering centers, the downrange length of the target, which is the length in the RLOS (Radar Line of Sight), can be estimated, and the real length of the target should be estimated considering the angle between the target and the RLOS. In order to improve the accuracy of the length estimation, parametric estimation methods, which extract scattering centers more exactly than the method using the HRRP, can be used. The parametric estimation method is applied after the number of scattering centers is determined, and is thus greatly affected by the accuracy of the number of scattering centers. In this paper, in order to improve the accuracy of target length estimation, the number of scattering centers is estimated by using AIC (Akaike Information Criteria), MDL (Minimum Descriptive Length), and GLE (Gerschgorin Likelihood Estimators), which are the source number estimation methods based on information theoretic criteria. Using the ESPRIT algorithm as a parameter estimation method, a length estimation simulation was performed for simple target CAD models, and the GLE method represented excellent performance in estimating the number of scattering centers and estimating the target length.

AIC & MDL Algorithm Based on Beamspace, for Efficient Estimation of the Number of Signals (효율적인 신호개수 추정을 위한 빔공간 기반 AIC 및 MDL 알고리즘)

  • Park, Heui-Seon;Hwang, Suk-Seung
    • The Journal of the Korea institute of electronic communication sciences
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    • v.16 no.4
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    • pp.617-624
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    • 2021
  • The accurate estimation of the number of signals included in the received signal is required for the AOA(: Angle-of-Arrival) estimation, the interference suppression, the signal reception, etc. AIC(: Akaike Information Criterion) and MDL(: Minimum Description Length) algorithms, which are known as the typical algorithms to estimate the signal number, estimate the number of signals according to the minimum of each criterion. As the number of antenna elements increased, the estimation performance is enhanced, but the computational complexity is increased because values of criteria for entire antenna elements should be calculated for finding their minimum. In order to improve this problem, in this paper, we propose AIC and MDL algorithms based on the beamspace, which efficiently estimate the number of signals while reducing the computational complexity by reducing the dimension of an array antenna through the beamspace processing. In addition, we provide computer simulation results based on various scenarios for evaluating and analysing the estimation performance of the proposed algorithms.