• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.05a
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• pp.150-155
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• 2006

PZT는 높은 분해능을 구현할 수 있는 구동기이지만 그 구동 범위가 협소하다는 단점이 있다. 최근에는 이러한 단점을 극복하기 위한 여러가지 메커니즘들이 제안되고 있다. 본 논문에서는 PZT를 이용하여 넓은 범위의 높은 분해능을 갖는 회전형 스테이지를 개발하였다. 개발되어진 회전형 스테이지는 빔 형태의 예압구조를 이용하였으며 일정한 마찰력을 구현하기 위하여 알루미나와 오닉스를 사용하였다. 대 변위와 미소변위를 동시에 구동하기 위하여 Dual mode control을 적용하였다. 또한 레이지 간섭계를 이용하여 구동기의 최대속도와 분해능을 측정하였으며 Sinsweep를 이용하여 구동기의 주파수 응답을 구하였다.

• Journal of the Korean Society for Nondestructive Testing
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• v.35 no.3
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• pp.200-205
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• 2015

An ultra-precise infrared microscope consisting of a high-resolution infrared objective lens and infrared sensors is utilized successfully to obtain location information on the plane and depth of local heat sources causing defects in a semiconductor device. In this study, multi-layer semiconductor chips are analyzed for the positional information of heat sources by using a lock-in infrared microscope. Optimal conditions such as focal position, integration time, current and lock-in frequency for measuring the accurate depth of the heat sources are studied by lock-in thermography. The location indicated by the results of the depth estimate, according to the change in distance between the infrared objective lens and the specimen is analyzed under these optimal conditions.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.257-257
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• 2010

디스플레이 산업의 발달로 화상 영상폰, 디지털 카메라, MP4, PMP, 네비게이션, LCD TV등의 가전 제품의 수요증가에 따라 이에 장착되는 LCD 패널의 생산력 향상과 원가 절감을 위한 검사 기술이 요구되고 있다. LCD 검사를 위한 Probe unit은 미세전기기계시스템(MEMS) 공정을 이용하여 제작된다. LCD 검사용 Probe unit는 LCD 가장자리 부분에 전기적 신호(영상신호, 등 기신호, 색상신호)가 인가되도록 하는 수 십 내지 수 백개의 접속 단자가 고밀도로 배치되는데, 이러한 LCD는 제품에 장착되기 전에 시험신호를 인가하여 화면의 불량여부를 검사하기 위한 점등용 부품으로 50 um 이하의 Pin간 거리를 유지하면서 정확한 Pin Alignment를 요구하는 초정밀 부품이다. 본 연구에서는 반도체용 Si wafer에 마스크 공정 및 slit etching 공정을 적용하여 목표인 30 um pitch의 Probe unit을 개발하기 위해 Deep Si Etching(DRIE) 장비를 이용하여 식각 공정에 따른 특성을 평가하였다. 마스크 공정은 500 um 두께의 양면 연마된 반도체용 Si wafer를 이용하였으며, thick PR을 사용하여 마스킹하여 식각공정을 수행하였다. Si 깊은 식각은 $SF_6$ 가스와 Passivation용으로 $C_4F_8$ 가스를 교대로 사용하여 수직방향으로 깊은 식각이 이루어지는 원리이다. SEM 측정 결과 30 um pitch의 공정 목표에 도달하였으며, 식각공정 결과 식각율 6.2 um/min, profile angle $89.1^{\circ}$로 측정되었다. 또한 상부 에칭공정과 이면 에칭공정에서 폭과 wall의 간격이 동일하였으며, 완전히 관통된 양면식각이 이루어졌음을 확인하였다. 또한 실제 사용되는 probe unit의 조립에 적합한 slit 공정을 위한 에칭특성을 조사하였다.

• Journal of IKEEE
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• v.18 no.4
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• pp.544-551
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• 2014

This paper suggests an algorithm to measure low-level radiation by radiation measuring devices, and the other algorithm to improve reaction speed of the device to better respond to dramatic changes in radiation amount. The former algorithm to improve the accuracy of measuring low-level radiation takes advantage of a dual window radiation measurement method which is based on accumulated average of pulses gathered by a radiation measuring sensor. The latter algorithm is to enhance reaction speed of a measuring device to more sensitively react to dramatic changes in radiation amount by adopting a dual window radiation measurement method which analyzes data patterns newly put into for six seconds. To verify the suggested algorithms, a hardware-which consists of sensor and high-voltage generator, controller, charger and power supply circuit, wireless communication part, and display part-was used. Tests conducted on the dual window radiation measurement method as used in the suggested algorithm have proved that accuracy improves to measure low-level radiation of 5uSv/h, and linearity also gets better. Other tests were conducted to see whether the suggested algorithm enhances the reaction speed of a radiation measuring device so that the device responds better to dramatically changing radiation amount. The experimental results have shown meaningful changes in numbers after six seconds. Therefore, the conclusions are made that the algorithm enhances the reaction speed of the device.

• Journal of Korea Water Resources Association
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• v.53 no.12
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• pp.1049-1057
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• 2020

This study aimed to develop a flow measurement method using drone in flood season. Measuring flow in all branches is difficult to conduct annually due to budget and labor limitation, safety and river works. Especially when heavy rain like storm comes, changes in stage-discharge relationship should be reviewed; however, it is usually impeded by the aforementioned issues. To solve the problem, it developed a simple measuring method with a minimum of labor and time. A numeric map and numeric orthophoto coordinate of South Korea are mostly based on Transverse Mercator Projection (TM) in accordance with rectangular coordinate system and use World Geodetic Reference System 1980 (GRS80) oval figure for conversion. Applying a concept of aerial photogrammetry, it located four visible Ground Control Points (GCP) near the river at Uijeongbu-si (Singok Bridge) and Yeongdong-gun (Youngdong 2nd Bridge) station and measured the coordinates using VRS DGPS. Hovering at a same level, drones took orthophoto of water surface at an interval of 3 seconds. It defined the pictures with GRS80 TM coordinate system, a rectangular coordinate system and then conducted an orthometric correction using GCP coordinates. According to X and Y coordinate analysis, it estimated the distance between the floating positions at 3 seconds-intervals and calculated the flow through the flow area according to the flow path. This study attested applicability of the flow measurement method using drone in flood season by applying the rectangular coordinate system based on the concept of aerial photogrammetry.

• Journal of Astronomy and Space Sciences
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• v.24 no.4
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• pp.275-284
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• 2007

For the application to the numerical weather prediction (NWP) in active service, it is necessary to ensure that the GPS precipitable water vapor (PWV) data has less than one hour latency and three millimeter accuracy. The comparison and the verification between the daily products from GPS measurement by using the IGS final ephemeris and the conventional meteorological observation has been done in domestic researches. In case of using IGS final ephemeris, GPS measurements can be only post processed in daily basis in three weeks after the observation. Thus this method cannot be applied to any near real-time data processing. In this paper, a GPS data processing method to produce the PWV output with three mm accuracy and one hour latency for the data assimilation in NWP has been planned. For our new data processing strategy, IGS ultra-rapid ephemeris and the sliding window technique are applied. And the results from the new strategy has been verified. The GPS measurements during the first 10 days of January, April, July and October were processed. The results from the observations at Sokcho, where the GPS and radiosonde were collocated, were compared. As the results, a data processing strategy with 0.8 mm of mean bias and 1.7 mm of standard deviation in three minutes forty-three seconds has been established.

• Progress in Medical Physics
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• v.19 no.4
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• pp.256-262
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• 2008

To evaluate the metabolic changes in normal adult brains due to alterations SENSE and NEX (number of excitation) by multi voxel MR Spectroscopy at 3.0 Tesla. The study group was composed of normal volunteers (5 men and 8 women) with a mean ($\pm$ standard deviation) age of 41 (${\pm}11.65$). Their ages ranged from 28 to 61 years. MR Spectroscopy was performed with a 3.0T Achieva Release Version 2.0 (Philips Medical System-Netherlands). The 8 channel head coil was employed for MRS acquisition. The 13 volunteers underwent multi voxel spectroscopy (MVS) and single voxel spectroscopy (SVS) on the thalamus area with normally gray matter. Spectral parameters were as follows: 15 mm of thickness; 230 mm of FOV (field of view); 2000 msecs of repetition time (TR); 288 msecs of echo time (TE); $110{\times}110$ mm of VOI (view of interest); $15{\times}15{\times}15$ mm of voxel size. Multi voxel spectral parameters were made using specially in alteration of SENSE factor (1~3) and 1~2 of NEX. All MRS data were processed by the jMRUI 3.0 Version. There was no significant difference in NAA/Cr and Cho/Cr ratio between MVS and SVS likewise the previous results by Ross and coworkers in 1994. In addition, despite the alterations of SENSE factor and NEX in MVS, the metabolite ratios were not changed (F-value : 1.37, D.F : 3, P-value : 0.262). However, line-width of NAA peak in MVS was 3 times bigger than that in SVS. In the present study, we demonstrated that the alterations of SENSE factor and NEX were not critically affective to the result of metabolic ratios in the normal brain tissue.