• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.41.4-41
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• 2004

본 발표에서는, 초정밀 연마기의 고성능화와 자동화를 위한 개념설계, 적절한 요소부품의 선택, 그리고 연마공정제어 및 형상오차보정 기술에 대해 설명한다. 초정밀 Polishing 공정이 기존의 개념과는 달리 표면품질의 개선 외에 형상정밀도의 유지 또는 향상 측면에서 기술적 접근이 요구되는 사실에 대해 초점을 맞추었다. 이제 초정밀 연마기는 Nano-meter 수준의 표면 품질과 동시에 형상정밀도 달성의 가능성을 열고 있다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.850-853
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• 2000

최근에 초정밀 제조업 분야에서 볼의 이용에 관한 연구가 급속히 진행되고 있으며, 일부 반도체 분야에서는 BGA(Ball Grid Array)와 같은 용도로 이용되기도 하며, 볼 자체를 반도체 칩으로 응용하려는 시도가 제안되어 있다. 이러한 적용분야들에서 볼의 진구도, 정밀도 및 청정도 등을 만족시킬 수 있는 가공기술이 선결되어야 한다. 본 연구에서는 초정밀 볼의 가공기술 개발을 목적으로 하여 유리 볼을 대상으로 하고 $H_2O$와 CeO$_2$를 혼합한 연마재를 사용하여 부상회전에 의한 비접촉식 연마방법을 제안하고 가공특성을 조사하였다 연구 결과로서, 비 접촉식 볼의 가공에서는 가공에 앞서 $H_2O$와의 전처리 과정을 거침으로 해서 가공속도를 촉진시킬 수 있다는 사실이 확인되었다.

• The Optical Journal
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• s.110
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• pp.73-77
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• 2007

• The Optical Journal
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• s.108
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• pp.69-73
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• 2007

• The Optical Journal
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• s.109
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• pp.68-72
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• 2007

• The Optical Journal
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• s.111
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• pp.73-77
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• 2007

• Journal of the Korean Society for Precision Engineering
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• v.19 no.12
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• pp.134-141
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• 2002

The ER fluid can be one of efficient materials in ultraprecision polishing for optics, ceramics and semiconductors because of electrically controllable apparent viscosity. To finish small 3 dimensional structures such as the aspherical surface in optical elements, the possible arrangement of a tool, workpiece and auxiliary electrode is described. We examined the influence of the addition of a few abrasive particles on the performance of the ER fluid by measuring yield stress, and observed the behavior of abrasive particles in the ER fluid by a CCD camera, which is also theoretically predicted from the electromechanical principles of particles. On the basis of the above results, the steady flow analysis around the rotating micro tool is worked out considering the non-uniform electric field. Finally, Pyrex glass is polished using the mixture of the ER fluid and abrasive particles, and the effect of the electric field strength is evaluated.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.2
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• pp.53-60
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• 1998

In this study, it is experimented to find factors effecting surface roughness using the system of experiments. in the mirror surface finishing system. (1) The film feed and oscillation frequency in $40{\mu}m$ abrasive film, grinding speed in $30{\mu}m$, and machining time in $15{\mu}m$15 are the main factors effecting the surface roughness. (2) Applying the optimal finishing condition to $40{\mu}m$, $30{\mu}m$, $15{\mu}m$ abrasive finishing film in sequence, it is possible to obtian about Ra 10 nm surface roughness on SM45C workpiece. (3) Application of the system of experments to the micro abrasive grain film finishing was very effective method in the extraction of main factor and optimal condition.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.7 no.5
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• pp.134-139
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• 1998

There have been so manu study in the ultra-precision mirror finishing. Already Using system of experiments extract factors effecting surface roughness and find optimal machining conditions in 40${\mu}{\textrm}{m}$, 30${\mu}{\textrm}{m}$, 15${\mu}{\textrm}{m}$ abrasive film. So in this study, Using Abrasive film of 12~3${\mu}{\textrm}{m}$ extract factors effecting surface roughness and results are follows; Factor A(film feed) in 12${\mu}{\textrm}{m}$ and 5${\mu}{\textrm}{m}$ abrasive film, Factor A(film feed) and B(applied force) in 9${\mu}{\textrm}{m}$ abrasive film, Factor C(grinding speed) in 3${\mu}{\textrm}{m}$ abrasive film are main factor effecting surface roughness.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.227-230
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• 2002

New polishing technique for small parts has been tried out using the principle of particle electromechanics. Common fine abrasives such as alumina, diamond, silicon carbide are dielectric materials which are polarized under an electric field, and a non-uniform electric field makes abrasive particles translate along the field line. Using this principle, We make abrasive particles aggregate in the vicinity of the micro tool which is fir the surface finishing of a small part without contact with it. The behavior of particles is optically measured, and the machined depth of glass is examined.